AU1769400A - Gas detection according to the principle of measuring work functions - Google Patents

Gas detection according to the principle of measuring work functions

Info

Publication number
AU1769400A
AU1769400A AU17694/00A AU1769400A AU1769400A AU 1769400 A AU1769400 A AU 1769400A AU 17694/00 A AU17694/00 A AU 17694/00A AU 1769400 A AU1769400 A AU 1769400A AU 1769400 A AU1769400 A AU 1769400A
Authority
AU
Australia
Prior art keywords
principle
gas detection
detection according
work functions
measuring work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU17694/00A
Inventor
Martin Bogner
Theodor Doll
Ignaz Eisele
Maximilian Fleischer
Hans Meixner
Bernhard Ostrick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of AU1769400A publication Critical patent/AU1769400A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
    • G01N27/4143—Air gap between gate and channel, i.e. suspended gate [SG] FETs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0029—General constructional details of gas analysers, e.g. portable test equipment concerning the detector cleaning
AU17694/00A 1998-10-29 1999-10-26 Gas detection according to the principle of measuring work functions Abandoned AU1769400A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19849932A DE19849932A1 (en) 1998-10-29 1998-10-29 Gas detection based on the principle of measuring work functions
DE19849932 1998-10-29
PCT/DE1999/003418 WO2000026656A1 (en) 1998-10-29 1999-10-26 Gas detection according to the principle of measuring work functions

Publications (1)

Publication Number Publication Date
AU1769400A true AU1769400A (en) 2000-05-22

Family

ID=7886082

Family Applications (1)

Application Number Title Priority Date Filing Date
AU17694/00A Abandoned AU1769400A (en) 1998-10-29 1999-10-26 Gas detection according to the principle of measuring work functions

Country Status (3)

Country Link
AU (1) AU1769400A (en)
DE (1) DE19849932A1 (en)
WO (1) WO2000026656A1 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19956303A1 (en) * 1999-11-23 2001-06-07 Siemens Ag Fire detectors with gas sensors
DE19956302C2 (en) * 1999-11-23 2002-10-31 Siemens Ag Fire detectors with gas sensors
DE10036178A1 (en) * 2000-07-25 2002-02-14 Siemens Ag Moisture sensor used as integral component of gas sensor comprises sensitive layer, and field effect transistor using sensitive layer as component of its gate
DE10041263A1 (en) * 2000-08-23 2002-02-21 Martin Liess Determining chemical impurities in gases using gas-sensitive semiconducting layers involves influencing electrical properties of layers in connection with adsorbed or absorbed materials
DE10118366C2 (en) 2001-04-12 2003-02-27 Micronas Gmbh Sensor for measuring an ion concentration or gas concentration
DE10118367C2 (en) 2001-04-12 2003-02-27 Micronas Gmbh Sensor for measuring a gas concentration or ion concentration
DE10161214B4 (en) * 2001-12-13 2004-02-19 Ignaz Prof. Dr. Eisele Gas sensor and method for the detection of hydrogen according to the principle of work function measurement, and a method for producing such a gas sensor
DE10218810B4 (en) 2002-04-26 2007-04-05 Micronas Gmbh Ozone sensor according to the principle of work function measurement
DE10254523B4 (en) 2002-11-22 2004-12-09 Micronas Gmbh Sensor for measuring a gas concentration or ion concentration
DE102004019639A1 (en) * 2004-04-22 2005-11-17 Siemens Ag FET-based gas sensor
FR2872914B1 (en) * 2004-07-07 2006-10-13 Univ Rennes I Etablissement Pu SENSOR FOR DETECTING AND / OR MEASURING A CONCENTRATION OF ELECTRICAL CHARGES CONTAINED IN AN ATMOSPHERE, USES AND METHOD FOR MANUFACTURING SAME
EP1691191B1 (en) * 2005-02-10 2011-12-07 Micronas GmbH Method and device with SGFET, for detecting and/or measuring ligands in an analytes
EP1707952A1 (en) 2005-03-31 2006-10-04 Micronas GmbH Gas sensitive field effect transistor comprising air gap and manufacturing thereof
DE102007029153A1 (en) * 2007-06-25 2009-01-08 Robert Bosch Gmbh Semiconductor gas sensor with additional functionalities of the signal-forming electrode
DE102008048715B4 (en) 2008-09-24 2019-06-27 Siemens Aktiengesellschaft Improvement of the signal quality of field effect transistors having humidity sensors or gas sensors
US9134270B2 (en) * 2010-03-25 2015-09-15 Stichting Imec Nederland Amorphous thin film for sensing
EP2490012A1 (en) * 2011-02-16 2012-08-22 Stichting IMEC Nederland Sensor and method for sensing of at least one analyte comprising using such sensor
DE102011118930A1 (en) * 2011-11-21 2013-05-23 Micronas Gmbh Semiconductor gas sensor
DE102014226816A1 (en) 2014-12-22 2016-06-23 Robert Bosch Gmbh Semiconductor-based gas sensor arrangement for detecting a gas and corresponding production method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4333875C2 (en) * 1993-10-05 1995-08-17 Zenko Dipl Ing Gergintschew Semiconductor gas sensor based on a capacitive controlled field effect transistor (CCFET)
DE4442396A1 (en) * 1994-11-29 1996-05-30 Martin Hausner Semiconductor gas sensor for air pollution monitoring

Also Published As

Publication number Publication date
WO2000026656A1 (en) 2000-05-11
DE19849932A1 (en) 2000-05-11

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase