AU165469B2 - Method of making thin metal layers by cathodic sputtering - Google Patents

Method of making thin metal layers by cathodic sputtering

Info

Publication number
AU165469B2
AU165469B2 AU23083/53A AU2308353A AU165469B2 AU 165469 B2 AU165469 B2 AU 165469B2 AU 23083/53 A AU23083/53 A AU 23083/53A AU 2308353 A AU2308353 A AU 2308353A AU 165469 B2 AU165469 B2 AU 165469B2
Authority
AU
Australia
Prior art keywords
metal layers
thin metal
making thin
cathodic sputtering
cathodic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU23083/53A
Other versions
AU2308353A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia Services Ltd
Original Assignee
Standard Telephone and Cables Pty Ltd
Filing date
Publication date
Application filed by Standard Telephone and Cables Pty Ltd filed Critical Standard Telephone and Cables Pty Ltd
Application granted granted Critical
Publication of AU165469B2 publication Critical patent/AU165469B2/en
Publication of AU2308353A publication Critical patent/AU2308353A/en
Expired legal-status Critical Current

Links

AU23083/53A 1953-11-18 Method of making thin metal layers by cathodic sputtering Expired AU165469B2 (en)

Publications (2)

Publication Number Publication Date
AU165469B2 true AU165469B2 (en) 1954-01-21
AU2308353A AU2308353A (en) 1954-01-21

Family

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