CA565153A - Production of thin layers by cathode sputtering - Google Patents

Production of thin layers by cathode sputtering

Info

Publication number
CA565153A
CA565153A CA565153A CA565153DA CA565153A CA 565153 A CA565153 A CA 565153A CA 565153 A CA565153 A CA 565153A CA 565153D A CA565153D A CA 565153DA CA 565153 A CA565153 A CA 565153A
Authority
CA
Canada
Prior art keywords
production
thin layers
cathode sputtering
sputtering
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA565153A
Other languages
French (fr)
Inventor
A. Veszi Gabor
Markus Peter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MEGATRON Ltd
Original Assignee
MEGATRON Ltd
Publication date
Application granted granted Critical
Publication of CA565153A publication Critical patent/CA565153A/en
Expired legal-status Critical Current

Links

CA565153A Production of thin layers by cathode sputtering Expired CA565153A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA565153T

Publications (1)

Publication Number Publication Date
CA565153A true CA565153A (en) 1958-10-28

Family

ID=35737654

Family Applications (1)

Application Number Title Priority Date Filing Date
CA565153A Expired CA565153A (en) Production of thin layers by cathode sputtering

Country Status (1)

Country Link
CA (1) CA565153A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3418229A (en) * 1965-06-30 1968-12-24 Weston Instruments Inc Method of forming films of compounds having at least two anions by cathode sputtering
US3420763A (en) * 1966-05-06 1969-01-07 Bell Telephone Labor Inc Cathodic sputtering of films of stoichiometric zinc oxide
US3506556A (en) * 1968-02-28 1970-04-14 Ppg Industries Inc Sputtering of metal oxide films in the presence of hydrogen and oxygen
US3787234A (en) * 1969-07-18 1974-01-22 Us Navy Method of producing a thin film laser

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3418229A (en) * 1965-06-30 1968-12-24 Weston Instruments Inc Method of forming films of compounds having at least two anions by cathode sputtering
US3420763A (en) * 1966-05-06 1969-01-07 Bell Telephone Labor Inc Cathodic sputtering of films of stoichiometric zinc oxide
US3506556A (en) * 1968-02-28 1970-04-14 Ppg Industries Inc Sputtering of metal oxide films in the presence of hydrogen and oxygen
US3787234A (en) * 1969-07-18 1974-01-22 Us Navy Method of producing a thin film laser

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