AU1352201A - Closed-loop ultrasonic conditioning control for polishing pads - Google Patents
Closed-loop ultrasonic conditioning control for polishing padsInfo
- Publication number
- AU1352201A AU1352201A AU13522/01A AU1352201A AU1352201A AU 1352201 A AU1352201 A AU 1352201A AU 13522/01 A AU13522/01 A AU 13522/01A AU 1352201 A AU1352201 A AU 1352201A AU 1352201 A AU1352201 A AU 1352201A
- Authority
- AU
- Australia
- Prior art keywords
- closed
- conditioning control
- polishing pads
- ultrasonic conditioning
- loop ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US43151399A | 1999-11-01 | 1999-11-01 | |
US09431513 | 1999-11-01 | ||
PCT/US2000/029831 WO2001032360A1 (en) | 1999-11-01 | 2000-10-30 | Closed-loop ultrasonic conditioning control for polishing pads |
Publications (1)
Publication Number | Publication Date |
---|---|
AU1352201A true AU1352201A (en) | 2001-05-14 |
Family
ID=23712269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU13522/01A Abandoned AU1352201A (en) | 1999-11-01 | 2000-10-30 | Closed-loop ultrasonic conditioning control for polishing pads |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU1352201A (en) |
TW (1) | TW487615B (en) |
WO (1) | WO2001032360A1 (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6752698B1 (en) | 2001-03-19 | 2004-06-22 | Lam Research Corporation | Method and apparatus for conditioning fixed-abrasive polishing pads |
US6645052B2 (en) | 2001-10-26 | 2003-11-11 | Lam Research Corporation | Method and apparatus for controlling CMP pad surface finish |
DE102004005741A1 (en) * | 2004-02-05 | 2005-09-01 | Infineon Technologies Ag | Polishing cloth refining method, involves rubbing off surface of cloth with tool, compiling refining conditions of cloth using parameters, monitoring conditions and terminating refining of cloth when specified condition is achieved |
US7163435B2 (en) | 2005-01-31 | 2007-01-16 | Tech Semiconductor Singapore Pte. Ltd. | Real time monitoring of CMP pad conditioning process |
WO2006124637A1 (en) * | 2005-05-16 | 2006-11-23 | The Ultran Group, Inc. | Ultraschallanalysator fur chemisch-mechanisches polierkissen |
JP5504901B2 (en) * | 2010-01-13 | 2014-05-28 | 株式会社Sumco | Polishing pad shape correction method |
CN106808359B (en) * | 2016-12-23 | 2019-04-23 | 上海集成电路研发中心有限公司 | A kind of device and detection method of on-line checking grinding pad service life |
JP6970601B2 (en) * | 2017-12-06 | 2021-11-24 | 株式会社荏原製作所 | How to design semiconductor manufacturing equipment |
KR102113067B1 (en) * | 2018-11-29 | 2020-05-21 | 한국생산기술연구원 | Apparatus for determining pad replacement time of cmp apparatus for wafer and control method therefor |
CN111331490A (en) * | 2020-04-16 | 2020-06-26 | 北京特思迪设备制造有限公司 | Polishing disk online grinding machine |
KR102154583B1 (en) | 2020-07-28 | 2020-09-10 | (주)티씨에스 | Method for measuring a cmp pad and bute of fabricating device |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3560826A (en) * | 1967-12-04 | 1971-02-02 | Gray Tech Ind Inc | Grinding wheel control system and apparatus |
US5456627A (en) * | 1993-12-20 | 1995-10-10 | Westech Systems, Inc. | Conditioner for a polishing pad and method therefor |
US5486131A (en) * | 1994-01-04 | 1996-01-23 | Speedfam Corporation | Device for conditioning polishing pads |
US5609718A (en) * | 1995-09-29 | 1997-03-11 | Micron Technology, Inc. | Method and apparatus for measuring a change in the thickness of polishing pads used in chemical-mechanical planarization of semiconductor wafers |
US5823854A (en) * | 1996-05-28 | 1998-10-20 | Industrial Technology Research Institute | Chemical-mechanical polish (CMP) pad conditioner |
US5787595A (en) * | 1996-08-09 | 1998-08-04 | Memc Electric Materials, Inc. | Method and apparatus for controlling flatness of polished semiconductor wafer |
TW434095B (en) * | 1997-08-11 | 2001-05-16 | Tokyo Seimitsu Co Ltd | Wafer polishing apparatus |
-
2000
- 2000-10-30 WO PCT/US2000/029831 patent/WO2001032360A1/en active Application Filing
- 2000-10-30 AU AU13522/01A patent/AU1352201A/en not_active Abandoned
- 2000-10-31 TW TW89122918A patent/TW487615B/en active
Also Published As
Publication number | Publication date |
---|---|
TW487615B (en) | 2002-05-21 |
WO2001032360A1 (en) | 2001-05-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |