AU1189597A - Metal-vaporizing methods and vaporizer boat therefor - Google Patents

Metal-vaporizing methods and vaporizer boat therefor

Info

Publication number
AU1189597A
AU1189597A AU11895/97A AU1189597A AU1189597A AU 1189597 A AU1189597 A AU 1189597A AU 11895/97 A AU11895/97 A AU 11895/97A AU 1189597 A AU1189597 A AU 1189597A AU 1189597 A AU1189597 A AU 1189597A
Authority
AU
Australia
Prior art keywords
vaporizer boat
metal
boat
methods
vaporizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU11895/97A
Inventor
Ulrich Goetz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sintec Keramik GmbH
Original Assignee
Sintec Keramik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7779612&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=AU1189597(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Sintec Keramik GmbH filed Critical Sintec Keramik GmbH
Publication of AU1189597A publication Critical patent/AU1189597A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention concerns methods of vaporizing metal by means of a resistance-heated vaporizer boat (5), and such a resistance-heated vaporizer boat (5) for carrying out these methods. According to the invention, a reduced temperature is generated in the edge region (17), i.e. along the longitudinal edge of the vaporizer boat, such that there is only a very slight wetting tendency along this longitudinal edge. Consequently, the melt can be localized such that it cannot overflow over the longitudinal edges of the vaporizer boat, without a cavity (14) necessarily having to be provided in the vaporization surface of the vaporizer boat. As a result, optimum wetting and constantly targeted vaporization of the metal upwards towards the area to be vapour-deposited are attained.
AU11895/97A 1995-12-08 1996-12-05 Metal-vaporizing methods and vaporizer boat therefor Abandoned AU1189597A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19545914 1995-12-08
DE19545914A DE19545914C1 (en) 1995-12-08 1995-12-08 Ceramic boat for use in vaporising metals, esp. aluminium@, in coating processes
PCT/DE1996/002338 WO1997021847A1 (en) 1995-12-08 1996-12-05 Metal-vaporizing methods and vaporizer boat therefor

Publications (1)

Publication Number Publication Date
AU1189597A true AU1189597A (en) 1997-07-03

Family

ID=7779612

Family Applications (1)

Application Number Title Priority Date Filing Date
AU11895/97A Abandoned AU1189597A (en) 1995-12-08 1996-12-05 Metal-vaporizing methods and vaporizer boat therefor

Country Status (5)

Country Link
EP (1) EP0865512B1 (en)
AT (1) ATE179463T1 (en)
AU (1) AU1189597A (en)
DE (2) DE19545914C1 (en)
WO (1) WO1997021847A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19708599C1 (en) * 1997-03-03 1998-04-02 Sintec Keramik Gmbh Resistance heated ceramic evaporator boat
WO2004063419A1 (en) * 2003-01-08 2004-07-29 Sintec Keramik Gmbh & Co. Kg Resistance-heated vaporizer boat
DE102005027382B4 (en) * 2005-06-14 2010-01-28 Leybold Optics Gmbh Evaporator boat for a device for coating substrates
EP2020454B1 (en) * 2007-07-27 2012-09-05 Applied Materials, Inc. Evaporation apparatus with inclined crucible
DE102020102483A1 (en) * 2020-01-31 2021-08-05 Kennametal Inc. Evaporation boat

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2996412A (en) * 1958-10-10 1961-08-15 Continental Can Co Art of depositing metals
US3117887A (en) * 1961-11-13 1964-01-14 Republic Steel Corp Apparatus and procedure for evaporating metal in vacuum metalizing
US4089643A (en) * 1976-03-19 1978-05-16 Gte Sylvania Incorporated Self-resistance-heated evaporation boat

Also Published As

Publication number Publication date
ATE179463T1 (en) 1999-05-15
EP0865512B1 (en) 1999-04-28
DE19545914C1 (en) 1996-11-07
DE59601792D1 (en) 1999-06-02
WO1997021847A1 (en) 1997-06-19
EP0865512A1 (en) 1998-09-23

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