ATE77415T1 - CHEMICAL VAPOR DEPOSITION OF METALLIC COMPOUND COATINGS USING METALLIC SUBHALOGENIDES. - Google Patents

CHEMICAL VAPOR DEPOSITION OF METALLIC COMPOUND COATINGS USING METALLIC SUBHALOGENIDES.

Info

Publication number
ATE77415T1
ATE77415T1 AT84101936T AT84101936T ATE77415T1 AT E77415 T1 ATE77415 T1 AT E77415T1 AT 84101936 T AT84101936 T AT 84101936T AT 84101936 T AT84101936 T AT 84101936T AT E77415 T1 ATE77415 T1 AT E77415T1
Authority
AT
Austria
Prior art keywords
metallic
subhalogenides
vapor deposition
chemical vapor
compound coatings
Prior art date
Application number
AT84101936T
Other languages
German (de)
Inventor
Mohammed Javid Hakim
Original Assignee
Liburdi Engineering
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Liburdi Engineering filed Critical Liburdi Engineering
Priority claimed from EP19840101936 external-priority patent/EP0117542B1/en
Application granted granted Critical
Publication of ATE77415T1 publication Critical patent/ATE77415T1/en

Links

AT84101936T 1983-02-25 1984-02-23 CHEMICAL VAPOR DEPOSITION OF METALLIC COMPOUND COATINGS USING METALLIC SUBHALOGENIDES. ATE77415T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US46985783A 1983-02-25 1983-02-25
US57722584A 1984-02-06 1984-02-06
EP19840101936 EP0117542B1 (en) 1983-02-25 1984-02-23 Chemical vapor deposition of metal compound coatings utilizing metal sub-halides

Publications (1)

Publication Number Publication Date
ATE77415T1 true ATE77415T1 (en) 1992-07-15

Family

ID=27226793

Family Applications (1)

Application Number Title Priority Date Filing Date
AT84101936T ATE77415T1 (en) 1983-02-25 1984-02-23 CHEMICAL VAPOR DEPOSITION OF METALLIC COMPOUND COATINGS USING METALLIC SUBHALOGENIDES.

Country Status (1)

Country Link
AT (1) ATE77415T1 (en)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee