ATE66739T1 - Struktur einer kapazitiven zelle zum messen von differenzdruecken. - Google Patents

Struktur einer kapazitiven zelle zum messen von differenzdruecken.

Info

Publication number
ATE66739T1
ATE66739T1 AT88401092T AT88401092T ATE66739T1 AT E66739 T1 ATE66739 T1 AT E66739T1 AT 88401092 T AT88401092 T AT 88401092T AT 88401092 T AT88401092 T AT 88401092T AT E66739 T1 ATE66739 T1 AT E66739T1
Authority
AT
Austria
Prior art keywords
rim
cavity
inflection zone
center
whose
Prior art date
Application number
AT88401092T
Other languages
English (en)
Inventor
Pierre Maitre
Jean-Pascal Valentin
Original Assignee
Otic Fischer & Porter
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9351073&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE66739(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Otic Fischer & Porter filed Critical Otic Fischer & Porter
Application granted granted Critical
Publication of ATE66739T1 publication Critical patent/ATE66739T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
AT88401092T 1987-05-07 1988-05-05 Struktur einer kapazitiven zelle zum messen von differenzdruecken. ATE66739T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8706751A FR2614986B1 (fr) 1987-05-07 1987-05-07 Structure de cellule capacitive pour la mesure des pressions differentielles
EP88401092A EP0291393B1 (de) 1987-05-07 1988-05-05 Struktur einer kapazitiven Zelle zum Messen von Differenzdrücken

Publications (1)

Publication Number Publication Date
ATE66739T1 true ATE66739T1 (de) 1991-09-15

Family

ID=9351073

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88401092T ATE66739T1 (de) 1987-05-07 1988-05-05 Struktur einer kapazitiven zelle zum messen von differenzdruecken.

Country Status (7)

Country Link
US (1) US4829826A (de)
EP (1) EP0291393B1 (de)
JP (1) JPS63300930A (de)
AT (1) ATE66739T1 (de)
AU (1) AU604889B2 (de)
DE (1) DE3864445D1 (de)
FR (1) FR2614986B1 (de)

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US5044202A (en) * 1989-09-18 1991-09-03 Texas Instruments Incorporated Pressure transducer apparatus
DE3942047A1 (de) * 1989-12-20 1991-07-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandmessung
DE3942020C2 (de) * 1989-12-20 1993-11-04 Vega Grieshaber Gmbh & Co Druckaufnehmer fuer hydrostatische fuellstandsmessung mit einem kapazitiven druckwandler
US5545594A (en) * 1993-10-26 1996-08-13 Yazaki Meter Co., Ltd. Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented
US5381299A (en) * 1994-01-28 1995-01-10 United Technologies Corporation Capacitive pressure sensor having a substrate with a curved mesa
US5438880A (en) * 1994-05-17 1995-08-08 United Technologies Corporation Electrostatic linear airspeed transducer
US6151967A (en) * 1998-03-10 2000-11-28 Horizon Technology Group Wide dynamic range capacitive transducer
US6267009B1 (en) 1998-12-14 2001-07-31 Endress + Hauser Gmbh + Co. Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
EP1010973B1 (de) * 1998-12-14 2001-07-18 Endress + Hauser GmbH + Co. Kapazitive Druck- oder Differenzdruckmesszellen und Verfahren zu deren Herstellung
US6374680B1 (en) 1999-03-24 2002-04-23 Endress + Hauser Gmbh + Co. Capacitive pressure sensor or capacitive differential pressure sensor
DE59903469D1 (de) * 1999-08-07 2003-01-02 Endress Hauser Gmbh Co Kapazitiver keramischer Drucksensor
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
DE10133745A1 (de) * 2001-07-11 2003-01-23 Endress & Hauser Gmbh & Co Kg Drucksensor und Verfahren zu dessen Betrieb
DE10235046A1 (de) * 2002-07-31 2004-02-12 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
FI119785B (fi) * 2004-09-23 2009-03-13 Vti Technologies Oy Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7438705B2 (en) * 2005-07-14 2008-10-21 Boehringer Technologies, L.P. System for treating a wound with suction and method detecting loss of suction
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US7379792B2 (en) 2005-09-29 2008-05-27 Rosemount Inc. Pressure transmitter with acoustic pressure sensor
US7624755B2 (en) * 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
US7415886B2 (en) 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
US7523762B2 (en) * 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
US20080099082A1 (en) * 2006-10-27 2008-05-01 Honeywell International Inc. Gas valve shutoff seal
US7644731B2 (en) * 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
WO2009015151A1 (en) * 2007-07-23 2009-01-29 Board Of Regents, University Of Nevada, Reno Self-sensing dielectric actuator system
US7870791B2 (en) 2008-12-03 2011-01-18 Rosemount Inc. Method and apparatus for pressure measurement using quartz crystal
US7954383B2 (en) 2008-12-03 2011-06-07 Rosemount Inc. Method and apparatus for pressure measurement using fill tube
US8327713B2 (en) 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property
DE102009046228A1 (de) * 2009-10-30 2011-05-19 Endress + Hauser Gmbh + Co. Kg Drucksensor, insbesondere Differenzdrucksensor und ein Verfahren zum Präparieren eines Membranbetts für einen solchen Sensor
DE102010028773A1 (de) * 2010-05-07 2011-11-10 Endress + Hauser Gmbh + Co. Kg Gegenlager mit asphärischem Membranbett, Drucksensor mit einem solchen Gegenlager und Verfahren zu deren Herstellung
US8132464B2 (en) 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8752433B2 (en) 2012-06-19 2014-06-17 Rosemount Inc. Differential pressure transmitter with pressure sensor
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
DE102017125333A1 (de) * 2017-10-27 2019-05-02 Samson Ag Drucksensoranordnung
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
CN114323363B (zh) * 2022-03-15 2022-06-03 季华实验室 一种电容式真空压力传感器
CN116164878B (zh) * 2023-02-01 2024-07-19 上海恒脉陶瓷技术有限公司 一种陶瓷单腔体电容式差压传感器及其制备方法

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US3277720A (en) * 1963-12-03 1966-10-11 United Aircraft Corp Pressure sensor
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
US4458537A (en) * 1981-05-11 1984-07-10 Combustion Engineering, Inc. High accuracy differential pressure capacitive transducer
US4612812A (en) * 1985-08-15 1986-09-23 Rosemount Inc. Stress reducing stop for unstretched pressure sensing diaphragm

Also Published As

Publication number Publication date
FR2614986B1 (fr) 1989-08-18
EP0291393B1 (de) 1991-08-28
DE3864445D1 (de) 1991-10-02
JPS63300930A (ja) 1988-12-08
AU604889B2 (en) 1991-01-03
US4829826A (en) 1989-05-16
AU1602488A (en) 1988-11-10
FR2614986A1 (fr) 1988-11-10
EP0291393A1 (de) 1988-11-17

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