ATE61421T1 - DEVICE FOR THERMAL TREATMENT OF THIN BODY LIKE SILICON DIOXIDE WAFER. - Google Patents

DEVICE FOR THERMAL TREATMENT OF THIN BODY LIKE SILICON DIOXIDE WAFER.

Info

Publication number
ATE61421T1
ATE61421T1 AT87901501T AT87901501T ATE61421T1 AT E61421 T1 ATE61421 T1 AT E61421T1 AT 87901501 T AT87901501 T AT 87901501T AT 87901501 T AT87901501 T AT 87901501T AT E61421 T1 ATE61421 T1 AT E61421T1
Authority
AT
Austria
Prior art keywords
silicon dioxide
thermal treatment
thin body
dioxide wafer
wafer
Prior art date
Application number
AT87901501T
Other languages
German (de)
Inventor
Marcel Augustin Joseph Jannot
Jean-Pierre Patureau
Original Assignee
Bertin & Cie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR8602239A external-priority patent/FR2594529B1/en
Application filed by Bertin & Cie filed Critical Bertin & Cie
Application granted granted Critical
Publication of ATE61421T1 publication Critical patent/ATE61421T1/en

Links

AT87901501T 1986-02-19 1987-02-18 DEVICE FOR THERMAL TREATMENT OF THIN BODY LIKE SILICON DIOXIDE WAFER. ATE61421T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR8602239A FR2594529B1 (en) 1986-02-19 1986-02-19 APPARATUS FOR HEAT TREATMENT OF THIN PARTS, SUCH AS SILICON WAFERS
PCT/FR1987/000043 WO1987005054A1 (en) 1986-02-19 1987-02-18 Apparatus for thermal treatments of thin parts such as silicon wafers
EP87901501A EP0259414B1 (en) 1986-02-19 1987-02-18 Apparatus for thermal treatments of thin parts such as silicon wafers

Publications (1)

Publication Number Publication Date
ATE61421T1 true ATE61421T1 (en) 1991-03-15

Family

ID=27230804

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87901501T ATE61421T1 (en) 1986-02-19 1987-02-18 DEVICE FOR THERMAL TREATMENT OF THIN BODY LIKE SILICON DIOXIDE WAFER.

Country Status (1)

Country Link
AT (1) ATE61421T1 (en)

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties