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Priority claimed from DE19853509515external-prioritypatent/DE3509515C3/de
Application filed by Festo KgfiledCriticalFesto Kg
Priority claimed from PCT/DE1986/000096external-prioritypatent/WO1986005427A1/de
Application grantedgrantedCritical
Publication of ATE61013T1publicationCriticalpatent/ATE61013T1/de