ATE60436T1 - Kapazitiver streufeldsensor und verfahren. - Google Patents

Kapazitiver streufeldsensor und verfahren.

Info

Publication number
ATE60436T1
ATE60436T1 AT86306192T AT86306192T ATE60436T1 AT E60436 T1 ATE60436 T1 AT E60436T1 AT 86306192 T AT86306192 T AT 86306192T AT 86306192 T AT86306192 T AT 86306192T AT E60436 T1 ATE60436 T1 AT E60436T1
Authority
AT
Austria
Prior art keywords
probe
plate element
hole
capacitive
distance
Prior art date
Application number
AT86306192T
Other languages
English (en)
Inventor
Joseph L Garbini
Laurence J Albrecht
Jens E Jorgensen
Georg F Mauer
Original Assignee
Washington Res Found
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Washington Res Found filed Critical Washington Res Found
Application granted granted Critical
Publication of ATE60436T1 publication Critical patent/ATE60436T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/12—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
AT86306192T 1985-08-09 1986-08-11 Kapazitiver streufeldsensor und verfahren. ATE60436T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/764,164 US4814691A (en) 1985-08-09 1985-08-09 Fringe field capacitive sensor for measuring profile of a surface
EP86306192A EP0221638B1 (de) 1985-08-09 1986-08-11 Kapazitiver Streufeldsensor und Verfahren

Publications (1)

Publication Number Publication Date
ATE60436T1 true ATE60436T1 (de) 1991-02-15

Family

ID=25069862

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86306192T ATE60436T1 (de) 1985-08-09 1986-08-11 Kapazitiver streufeldsensor und verfahren.

Country Status (5)

Country Link
US (1) US4814691A (de)
EP (1) EP0221638B1 (de)
AT (1) ATE60436T1 (de)
CA (1) CA1279988C (de)
DE (1) DE3677137D1 (de)

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JP2690908B2 (ja) * 1987-09-25 1997-12-17 株式会社日立製作所 表面計測装置
US4996492A (en) * 1989-03-07 1991-02-26 The Boeing Company Probe for inspecting countersunk holes in conductive bodies
US5021740A (en) * 1989-03-07 1991-06-04 The Boeing Company Method and apparatus for measuring the distance between a body and a capacitance probe
EP0425823A1 (de) * 1989-09-29 1991-05-08 Antivision Systems Corp. Elektrostatische Abbildungsvorrichtung
US5281921A (en) * 1990-04-24 1994-01-25 Novak James L Non-contact capacitance based image sensing method and system
US5189377A (en) * 1990-09-04 1993-02-23 Extrude Hone Corporation Method and apparatus for co-ordinate measuring using a capacitance probe
GB9021447D0 (en) 1990-10-03 1990-11-14 Renishaw Plc Capacitance probes
GB9021448D0 (en) * 1990-10-03 1990-11-14 Renishaw Plc Capacitance sensing probe
AU8866991A (en) * 1990-11-16 1992-06-11 Moonstone Designs Limited Device for determining the presence and/or characteristics of an object or a substance
US5272443A (en) * 1992-04-22 1993-12-21 Aluminum Company Of America Chatter and profile measuring using capacitor sensors
US5365166A (en) * 1993-02-08 1994-11-15 Westinghouse Electric Corporation System and method for testing electrical generators
DE4304451C2 (de) * 1993-02-13 1995-12-14 Seichter Gmbh Meßsystem zur Erfassung von Unebenheiten auf der Oberfläche eines Meßobjektes
US5517190A (en) * 1994-02-03 1996-05-14 Gunn; Colin N. Physical measurement from changes in reactance
US5646538A (en) * 1995-06-13 1997-07-08 Measurement Systems, Inc. Method and apparatus for fastener hole inspection with a capacitive probe
EP0790479B1 (de) 1996-02-14 2002-01-16 STMicroelectronics S.r.l. Kapazitiver Abstandssensor, insbesondere zur Erfassung von Fingerabdrücken
US6114862A (en) * 1996-02-14 2000-09-05 Stmicroelectronics, Inc. Capacitive distance sensor
US6320394B1 (en) 1996-02-14 2001-11-20 Stmicroelectronics S.R.L. Capacitive distance sensor
US6483931B2 (en) * 1997-09-11 2002-11-19 Stmicroelectronics, Inc. Electrostatic discharge protection of a capacitve type fingerprint sensing array
US6028773A (en) * 1997-11-14 2000-02-22 Stmicroelectronics, Inc. Packaging for silicon sensors
US6191593B1 (en) 1997-12-17 2001-02-20 Stmicroelectronics, Inc. Method for the non-invasive sensing of physical matter on the detection surface of a capacitive sensor
US6091082A (en) * 1998-02-17 2000-07-18 Stmicroelectronics, Inc. Electrostatic discharge protection for integrated circuit sensor passivation
US6181142B1 (en) * 1998-07-21 2001-01-30 Ade Corporation Nonlinear current mirror for loop-gain control
US6397158B1 (en) * 1999-04-29 2002-05-28 Sun Microsystems, Inc. Method for determining capacitance values for quieting noisy power conductors
US6512381B2 (en) 1999-12-30 2003-01-28 Stmicroelectronics, Inc. Enhanced fingerprint detection
US7239227B1 (en) 1999-12-30 2007-07-03 Upek, Inc. Command interface using fingerprint sensor input system
US6618505B2 (en) 2000-03-09 2003-09-09 The Boeing Company Method, apparatus and computer program product for determining shim shape
US20030098774A1 (en) * 2000-03-21 2003-05-29 Chornenky Todd E. Security apparatus
US6943665B2 (en) * 2000-03-21 2005-09-13 T. Eric Chornenky Human machine interface
US7137300B2 (en) * 2003-03-19 2006-11-21 California Institute Of Technology Parylene capacitive accelerometer utilizing electrical fringing field sensing and method of making
US8115497B2 (en) * 2007-11-13 2012-02-14 Authentec, Inc. Pixel sensing circuit with common mode cancellation
RU2504730C1 (ru) * 2012-07-19 2014-01-20 Федеральное Государственное Унитарное Предприятие "Государственный научно-производственный ракетно-космический центр "ЦСКБ-Прогресс" (ФГУП "ГНПРКЦ "ЦСКБ-Прогресс") Способ контроля целостности токопроводящего покрытия на диэлектрическом материале
US20170266744A1 (en) * 2015-10-30 2017-09-21 Mitsubishi Electric Corporation Wire electric discharge machine, control method of control device of wire electric discharge machine, and positioning method
US9817439B2 (en) 2016-02-29 2017-11-14 JumpStartCSR, Inc. System, method and device for designing, manufacturing, and monitoring custom human-interfacing devices
WO2017195001A1 (en) * 2016-05-13 2017-11-16 Arcelormittal Method for obtaining a height of a material stacked in a coke oven
EP3335872A1 (de) 2016-12-16 2018-06-20 Amcor Flexibles Winterbourne Limited Polymerffolien und daraus hergestellte verpackungen
WO2020012440A1 (en) * 2018-07-12 2020-01-16 Scuola Superiore Di Studi Universitari E Di Perfezionamento Sant'anna Sensitive system for increased proximity detection
US11480428B2 (en) * 2019-01-09 2022-10-25 The Boeing Company Methods and systems to test a size or characteristic of a hole

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US2802178A (en) * 1954-09-22 1957-08-06 Gen Electric Motion detecting device
US3400331A (en) * 1965-01-18 1968-09-03 Pratt & Whitney Inc Gaging device including a probe having a plurality of concentric and coextensive electrodes
US3504279A (en) * 1967-09-27 1970-03-31 Reliance Electric & Eng Co Noncontact interrupted surface inspection apparatus providing an electrical analog of the surface profile
US3805150A (en) * 1970-08-17 1974-04-16 Ade Corp Environment immune high precision capacitive gauging system
US3842194A (en) * 1971-03-22 1974-10-15 Rca Corp Information records and recording/playback systems therefor
GB1436698A (en) * 1972-02-11 1976-05-19 Bakelite Xylonite Ltd Apparatus for thickness measurement
US3771051A (en) * 1972-06-14 1973-11-06 Ade Corp Apparatus and method for indicating surface roughness
FR2202586A5 (de) * 1972-10-06 1974-05-03 Commissariat Energie Atomique
GB1483187A (en) * 1973-10-22 1977-08-17 Ici Ltd Method of and apparatus for assessing the flatness of anodes
US4103226A (en) * 1976-09-15 1978-07-25 Westinghouse Electric Corp. Apparatus for gauging the texture of a conducting surface
US4112355A (en) * 1976-10-22 1978-09-05 Lockheed Corporation Quality and fit measuring apparatus for fasteners and their holes
US4168465A (en) * 1977-12-15 1979-09-18 The United States Of America As Represented By The Secretary Of The Air Force Tapered hole capacitive probe
GB2015165B (en) * 1978-02-09 1983-01-12 Koa Oil Co Ltd Detecting capacitively corrosion of pipes
US4152641A (en) * 1978-02-27 1979-05-01 Rca Corporation Method and apparatus for the determination of signal pickup qualities of a stylus of a capacitive disc video player
DD136897B1 (de) * 1978-06-20 1981-03-25 Elektromat Veb Kapazitiver messfuehler
US4296371A (en) * 1980-03-17 1981-10-20 Rca Corporation System for measuring stylus shoe length
US4352060A (en) * 1980-07-01 1982-09-28 Viak Ab Apparatus for measuring the interior dimensions of a cast iron mold
GB2100441A (en) * 1981-06-12 1982-12-22 Automatic Systems Lab Ltd Method for determining dimensions and/or form of surfaces
US4481616A (en) * 1981-09-30 1984-11-06 Rca Corporation Scanning capacitance microscope
US4422035A (en) * 1981-12-11 1983-12-20 Extrude Hone Corporation Capacitance measurement probe

Also Published As

Publication number Publication date
CA1279988C (en) 1991-02-12
EP0221638A1 (de) 1987-05-13
DE3677137D1 (de) 1991-02-28
US4814691A (en) 1989-03-21
EP0221638B1 (de) 1991-01-23

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties