ATE555230T1 - Tröpfchenentfernungsvorrichtung und -verfahren in plasmagenerator - Google Patents

Tröpfchenentfernungsvorrichtung und -verfahren in plasmagenerator

Info

Publication number
ATE555230T1
ATE555230T1 AT06729952T AT06729952T ATE555230T1 AT E555230 T1 ATE555230 T1 AT E555230T1 AT 06729952 T AT06729952 T AT 06729952T AT 06729952 T AT06729952 T AT 06729952T AT E555230 T1 ATE555230 T1 AT E555230T1
Authority
AT
Austria
Prior art keywords
plasma generator
removal apparatus
droplet removal
droplet
plasma
Prior art date
Application number
AT06729952T
Other languages
English (en)
Inventor
Yuichi Shiina
Original Assignee
Ferrotec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005090161A external-priority patent/JP4889957B2/ja
Application filed by Ferrotec Corp filed Critical Ferrotec Corp
Application granted granted Critical
Publication of ATE555230T1 publication Critical patent/ATE555230T1/de

Links

AT06729952T 2005-03-25 2006-03-24 Tröpfchenentfernungsvorrichtung und -verfahren in plasmagenerator ATE555230T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005090161A JP4889957B2 (ja) 2005-03-25 2005-03-25 プラズマ生成装置におけるドロップレット除去装置及びドロップレット除去方法
JP2006006004 2006-03-24

Publications (1)

Publication Number Publication Date
ATE555230T1 true ATE555230T1 (de) 2012-05-15

Family

ID=46060808

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06729952T ATE555230T1 (de) 2005-03-25 2006-03-24 Tröpfchenentfernungsvorrichtung und -verfahren in plasmagenerator

Country Status (1)

Country Link
AT (1) ATE555230T1 (de)

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ATE555230T1 (de) Tröpfchenentfernungsvorrichtung und -verfahren in plasmagenerator