ATE547712T1 - Mems-beschleunigungsmesser der d'arsonval- bewegung - Google Patents

Mems-beschleunigungsmesser der d'arsonval- bewegung

Info

Publication number
ATE547712T1
ATE547712T1 AT09172012T AT09172012T ATE547712T1 AT E547712 T1 ATE547712 T1 AT E547712T1 AT 09172012 T AT09172012 T AT 09172012T AT 09172012 T AT09172012 T AT 09172012T AT E547712 T1 ATE547712 T1 AT E547712T1
Authority
AT
Austria
Prior art keywords
proof mass
mems accelerometer
torsional
mems
accelerometer
Prior art date
Application number
AT09172012T
Other languages
English (en)
Inventor
Paul Dwyer
Steve Becka
Matt Reddy
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Application granted granted Critical
Publication of ATE547712T1 publication Critical patent/ATE547712T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
AT09172012T 2008-10-08 2009-10-01 Mems-beschleunigungsmesser der d'arsonval- bewegung ATE547712T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/247,937 US8122767B2 (en) 2008-10-08 2008-10-08 D'arsonval movement mems accelerometer

Publications (1)

Publication Number Publication Date
ATE547712T1 true ATE547712T1 (de) 2012-03-15

Family

ID=41567238

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09172012T ATE547712T1 (de) 2008-10-08 2009-10-01 Mems-beschleunigungsmesser der d'arsonval- bewegung

Country Status (4)

Country Link
US (1) US8122767B2 (de)
EP (1) EP2175285B1 (de)
JP (1) JP5635758B2 (de)
AT (1) ATE547712T1 (de)

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DE102007061096A1 (de) * 2007-12-19 2009-06-25 Robert Bosch Gmbh Mikromechanisches Bauelement mit auslenkfähigem Element
US20100180681A1 (en) * 2009-01-22 2010-07-22 Honeywell International Inc. System and method for increased flux density d'arsonval mems accelerometer
US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
US9121865B2 (en) * 2012-12-12 2015-09-01 Raytheon Company Hung mass accelerometer with differential Eddy current sensing
US9784759B2 (en) 2015-11-16 2017-10-10 Raytheon Company Thermally insensitive open-loop hung mass accelerometer with differential Eddy current sensing
JP6606601B2 (ja) 2016-04-18 2019-11-13 株式会社日立製作所 加速度センサ
US10024880B2 (en) 2016-05-21 2018-07-17 Raytheon Company Athermal hung mass accelerometer with reduced sensitivity to longitudinal temperature gradients
US10816568B2 (en) 2017-12-26 2020-10-27 Physical Logic Ltd. Closed loop accelerometer
CN109188023A (zh) * 2018-08-30 2019-01-11 太原理工大学 悬臂式微加速度传感器自悬浮封装结构
CN110231662B (zh) * 2019-06-21 2020-09-08 华中科技大学 一种基于抗磁体悬浮的mems惯性传感器的制备方法
CN111505338B (zh) * 2020-05-03 2021-07-02 华中科技大学 一种磁反馈闭环加速度传感器及其温度补偿方法

Family Cites Families (22)

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US4088027A (en) * 1976-09-29 1978-05-09 Hernandez E Norman Force balance servo accelerometer
US4144765A (en) * 1977-09-21 1979-03-20 Honeywell Inc. Linear accelerometer with torsion hinge suspension
US4498342A (en) * 1983-04-18 1985-02-12 Honeywell Inc. Integrated silicon accelerometer with stress-free rebalancing
US4510802A (en) * 1983-09-02 1985-04-16 Sundstrand Data Control, Inc. Angular rate sensor utilizing two vibrating accelerometers secured to a parallelogram linkage
US5060039A (en) * 1988-01-13 1991-10-22 The Charles Stark Draper Laboratory, Inc. Permanent magnet force rebalance micro accelerometer
GB2222679B (en) * 1988-03-15 1991-10-16 Baroid Technology Inc Accelerometers
US5600067A (en) * 1993-08-18 1997-02-04 Alliedsignal, Inc. Torque wire thermal strain relief
WO1996010185A1 (fr) * 1994-06-27 1996-04-04 Sergei Feodosievich Konovalov Accelerometre a compensation
CA2149933A1 (en) * 1994-06-29 1995-12-30 Robert M. Boysel Micro-mechanical accelerometers with improved detection circuitry
US5731703A (en) * 1995-10-31 1998-03-24 The Charles Stark Draper Laboratory, Inc. Micromechanical d'arsonval magnetometer
US5739431A (en) * 1996-06-13 1998-04-14 Alliedsignal, Inc. Miniature magnetometer-accelerometer
JP2002350459A (ja) * 2001-05-23 2002-12-04 Akashi Corp 振動センサ、及び振動センサの製造方法
US6664786B2 (en) * 2001-07-30 2003-12-16 Rockwell Automation Technologies, Inc. Magnetic field sensor using microelectromechanical system
US6776042B2 (en) * 2002-01-25 2004-08-17 Kinemetrics, Inc. Micro-machined accelerometer
US7346981B2 (en) * 2002-08-07 2008-03-25 Teledyne Licensing, Llc Method for fabricating microelectromechanical system (MEMS) devices
US7146856B2 (en) * 2004-06-07 2006-12-12 Honeywell International, Inc. Dynamically balanced capacitive pick-off accelerometer
US7191654B2 (en) * 2005-08-17 2007-03-20 Honeywell International Inc. Methods and systems for adjusting magnetic return path with minimized reluctance
US7303935B2 (en) * 2005-09-08 2007-12-04 Teledyne Licensing, Llc High temperature microelectromechanical (MEM) devices and fabrication method
US7997136B2 (en) * 2008-10-08 2011-08-16 Honeywell International Inc. MEMS force balance accelerometer
US8065915B2 (en) * 2008-10-08 2011-11-29 Honeywell International Inc. MEMS accelerometer
US9016126B2 (en) * 2009-01-07 2015-04-28 Honeywell International Inc. MEMS accelerometer having a flux concentrator between parallel magnets
US20100180681A1 (en) * 2009-01-22 2010-07-22 Honeywell International Inc. System and method for increased flux density d'arsonval mems accelerometer

Also Published As

Publication number Publication date
US8122767B2 (en) 2012-02-28
US20100083761A1 (en) 2010-04-08
JP5635758B2 (ja) 2014-12-03
JP2010133935A (ja) 2010-06-17
EP2175285B1 (de) 2012-02-29
EP2175285A1 (de) 2010-04-14

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