ATE542115T1 - PRESSURE SENSOR UNIT WITH TEMPERATURE COMPENSATION - Google Patents

PRESSURE SENSOR UNIT WITH TEMPERATURE COMPENSATION

Info

Publication number
ATE542115T1
ATE542115T1 AT09165795T AT09165795T ATE542115T1 AT E542115 T1 ATE542115 T1 AT E542115T1 AT 09165795 T AT09165795 T AT 09165795T AT 09165795 T AT09165795 T AT 09165795T AT E542115 T1 ATE542115 T1 AT E542115T1
Authority
AT
Austria
Prior art keywords
sensor unit
pressure sensor
temperature compensation
detecting
external force
Prior art date
Application number
AT09165795T
Other languages
German (de)
Inventor
Takeshi Ohsato
Yasuhiko Jinbu
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Application granted granted Critical
Publication of ATE542115T1 publication Critical patent/ATE542115T1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Abstract

A force sensor unit includes: a detection section (1, 1') constituted of a main unit (1) detecting external force and changes in temperature, and a sub unit (1') detecting the changes in temperature, detecting the external force; and an attenuator (4') dampening the external force and imparting the dampened force to the detection section (1, 1').
AT09165795T 2008-07-18 2009-07-17 PRESSURE SENSOR UNIT WITH TEMPERATURE COMPENSATION ATE542115T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008187038A JP5604035B2 (en) 2008-07-18 2008-07-18 Force sensor unit

Publications (1)

Publication Number Publication Date
ATE542115T1 true ATE542115T1 (en) 2012-02-15

Family

ID=41138774

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09165795T ATE542115T1 (en) 2008-07-18 2009-07-17 PRESSURE SENSOR UNIT WITH TEMPERATURE COMPENSATION

Country Status (4)

Country Link
US (1) US8196477B2 (en)
EP (1) EP2146194B1 (en)
JP (1) JP5604035B2 (en)
AT (1) ATE542115T1 (en)

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JP5243704B2 (en) * 2006-08-24 2013-07-24 本田技研工業株式会社 Force sensor
JP5243988B2 (en) * 2009-02-10 2013-07-24 本田技研工業株式会社 Multi-axis force sensor and acceleration sensor
JP5627556B2 (en) * 2011-10-31 2014-11-19 アイシン精機株式会社 Load detection device for vehicle seat
US8757001B2 (en) * 2012-09-27 2014-06-24 Honeywell International Inc. Mechanically coupled force sensor on flexible platform assembly structure
JP6329239B2 (en) 2013-03-12 2018-05-23 ストライカー・コーポレイション Sensor assembly and method for measuring force and torque
JP6188231B2 (en) * 2014-02-26 2017-08-30 アルプス電気株式会社 LOAD DETECTING DEVICE AND ELECTRONIC DEVICE USING THE LOAD DETECTING DEVICE
CN106248272A (en) * 2016-07-27 2016-12-21 同济大学 A kind of take into account the method improving torque sensor range on the premise of sensitivity
CN106124115A (en) * 2016-07-27 2016-11-16 同济大学 A kind of electromagnetic compensation formula three-dimensional moment sensor
US11243125B2 (en) 2017-02-09 2022-02-08 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
US11255737B2 (en) 2017-02-09 2022-02-22 Nextinput, Inc. Integrated digital force sensors and related methods of manufacture
US10634695B2 (en) * 2017-04-26 2020-04-28 Minebea Mitsumi Inc. Force sensor
US11243126B2 (en) 2017-07-27 2022-02-08 Nextinput, Inc. Wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture
WO2019079420A1 (en) 2017-10-17 2019-04-25 Nextinput, Inc. Temperature coefficient of offset compensation for force sensor and strain gauge
US11874185B2 (en) * 2017-11-16 2024-01-16 Nextinput, Inc. Force attenuator for force sensor
JP6919964B2 (en) 2018-01-29 2021-08-18 ミネベアミツミ株式会社 Sensor chip and force sensor device
CN116659713A (en) * 2020-03-26 2023-08-29 精量电子公司 Force detection device
JP2022101140A (en) * 2020-12-24 2022-07-06 ミネベアミツミ株式会社 Distortion-generating body and force sensor device
JP2022142117A (en) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 Sensor chip, and force sensor device
JP2022142118A (en) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 Sensor chip and force sensor device
JP2022142116A (en) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 Strain body and force sensor device
CN115112286A (en) * 2021-03-19 2022-09-27 美蓓亚三美株式会社 Strain body and force sensor device

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JPS6034295A (en) 1983-08-03 1985-02-21 株式会社日立製作所 Sensor for cutaneous sensation
JPS6461628A (en) * 1987-09-02 1989-03-08 Ricoh Kk Force detecting device
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JP3970640B2 (en) 2002-03-05 2007-09-05 本田技研工業株式会社 6-axis force sensor
JP2004239621A (en) * 2003-02-03 2004-08-26 Japan Science & Technology Agency Three-dimensional pressure sensor
JP2005169541A (en) * 2003-12-10 2005-06-30 Hitachi Metals Ltd Semiconductor device and its manufacturing method
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JP4680566B2 (en) * 2004-10-26 2011-05-11 本田技研工業株式会社 Multi-axis force sensor chip and multi-axis force sensor using the same
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JP2008058110A (en) * 2006-08-30 2008-03-13 Honda Motor Co Ltd Chip for force sensor and force sensor

Also Published As

Publication number Publication date
US8196477B2 (en) 2012-06-12
JP5604035B2 (en) 2014-10-08
EP2146194B1 (en) 2012-01-18
US20100011885A1 (en) 2010-01-21
JP2010025735A (en) 2010-02-04
EP2146194A3 (en) 2010-02-17
EP2146194A2 (en) 2010-01-20

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