ATE53371T1 - ULTRACLEAN EPITXIAL SILICON AND PROCESS OF PRODUCTION. - Google Patents

ULTRACLEAN EPITXIAL SILICON AND PROCESS OF PRODUCTION.

Info

Publication number
ATE53371T1
ATE53371T1 AT83902591T AT83902591T ATE53371T1 AT E53371 T1 ATE53371 T1 AT E53371T1 AT 83902591 T AT83902591 T AT 83902591T AT 83902591 T AT83902591 T AT 83902591T AT E53371 T1 ATE53371 T1 AT E53371T1
Authority
AT
Austria
Prior art keywords
epitxial
ultraclean
silicon
production
ultraclean epitxial
Prior art date
Application number
AT83902591T
Other languages
German (de)
Inventor
John C Schumacher
Original Assignee
Schumacher Co J C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schumacher Co J C filed Critical Schumacher Co J C
Priority claimed from EP19830902591 external-priority patent/EP0114876B1/en
Application granted granted Critical
Publication of ATE53371T1 publication Critical patent/ATE53371T1/en

Links

AT83902591T 1982-07-12 1983-07-11 ULTRACLEAN EPITXIAL SILICON AND PROCESS OF PRODUCTION. ATE53371T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US39744582A 1982-07-12 1982-07-12
EP19830902591 EP0114876B1 (en) 1982-07-12 1983-07-11 Ultra-pure epitaxial silicon and process for its manufacture
PCT/US1983/001043 WO1984000353A1 (en) 1982-07-12 1983-07-11 Ultra-pure epitaxial silicon

Publications (1)

Publication Number Publication Date
ATE53371T1 true ATE53371T1 (en) 1990-06-15

Family

ID=26091244

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83902591T ATE53371T1 (en) 1982-07-12 1983-07-11 ULTRACLEAN EPITXIAL SILICON AND PROCESS OF PRODUCTION.

Country Status (1)

Country Link
AT (1) ATE53371T1 (en)

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Legal Events

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