ATE522923T1 - Befestigungsanordnung - Google Patents

Befestigungsanordnung

Info

Publication number
ATE522923T1
ATE522923T1 AT08168038T AT08168038T ATE522923T1 AT E522923 T1 ATE522923 T1 AT E522923T1 AT 08168038 T AT08168038 T AT 08168038T AT 08168038 T AT08168038 T AT 08168038T AT E522923 T1 ATE522923 T1 AT E522923T1
Authority
AT
Austria
Prior art keywords
quadrupole
electrodes
supports
substrate
fastening arrangement
Prior art date
Application number
AT08168038T
Other languages
English (en)
Inventor
Richard Syms
Andrew Holmes
Shane Martin O'prey
Original Assignee
Microsaic Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microsaic Systems Ltd filed Critical Microsaic Systems Ltd
Application granted granted Critical
Publication of ATE522923T1 publication Critical patent/ATE522923T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0045—Packages or encapsulation for reducing stress inside of the package structure
    • B81B7/0048—Packages or encapsulation for reducing stress inside of the package structure between the MEMS die and the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/062—Ion guides
    • H01J49/063—Multipole ion guides, e.g. quadrupoles, hexapoles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/068—Mounting, supporting, spacing, or insulating electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Non-Reversible Transmitting Devices (AREA)
AT08168038T 2007-11-02 2008-10-31 Befestigungsanordnung ATE522923T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0721531A GB2454241B (en) 2007-11-02 2007-11-02 A mounting arrangement

Publications (1)

Publication Number Publication Date
ATE522923T1 true ATE522923T1 (de) 2011-09-15

Family

ID=38834726

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08168038T ATE522923T1 (de) 2007-11-02 2008-10-31 Befestigungsanordnung

Country Status (4)

Country Link
US (1) US8618502B2 (de)
EP (1) EP2063452B1 (de)
AT (1) ATE522923T1 (de)
GB (1) GB2454241B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008030988A2 (en) * 2006-09-06 2008-03-13 The Regents Of The University Of California Selectively targeted antimicrobial peptides and the use thereof
GB2479191B (en) * 2010-04-01 2014-03-19 Microsaic Systems Plc Microengineered multipole ion guide
JP6624482B2 (ja) * 2014-07-29 2019-12-25 俊 保坂 超小型加速器および超小型質量分析装置
GB201907139D0 (en) 2019-05-21 2019-07-03 Thermo Fisher Scient Bremen Gmbh Improved electrode arrangement
EP4120290A1 (de) * 2021-07-12 2023-01-18 Infineon Technologies Austria AG Mikrogefertigte vorrichtung zur steuerung von eingefangenen ionen und verfahren zur herstellung derselben durch mikrofertigung

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB701809A (en) 1951-04-25 1954-01-06 Churchill Henry Winston S Improvements relating to apparatus for dispensing pastes, liquids and other substances
JPS574130B2 (de) * 1973-12-27 1982-01-25
GB9506972D0 (en) * 1995-04-04 1995-05-24 Univ Liverpool Improvements in and relating to quadrupole mass
US6177668B1 (en) 1996-06-06 2001-01-23 Mds Inc. Axial ejection in a multipole mass spectrometer
JPH10107405A (ja) * 1996-09-30 1998-04-24 Nec Corp 電気部品の配線基板への実装構造
FR2762713A1 (fr) * 1997-04-25 1998-10-30 Commissariat Energie Atomique Microdispositif pour generer un champ multipolaire, en particulier pour filtrer ou devier ou focaliser des particules chargees
US6686998B2 (en) * 2001-11-30 2004-02-03 Wisconsin Alumni Research Foundation Method and apparatus for glow discharges with liquid microelectrodes
GB2384908B (en) * 2002-02-05 2005-05-04 Microsaic Systems Ltd Mass spectrometry
GB2391694B (en) * 2002-08-01 2006-03-01 Microsaic Systems Ltd Monolithic micro-engineered mass spectrometer
EP1602119A4 (de) * 2003-03-03 2010-05-12 Univ Brigham Young Neuartige elektroionisationsquelle zur orthogonalbeschleunigungs-time-of-flight-massenspektrometrie
GB2409927B (en) * 2004-01-09 2006-09-27 Microsaic Systems Ltd Micro-engineered electron multipliers
GB2410371B (en) * 2004-01-22 2007-04-04 Microsaic Systems Ltd Microengineered broadband electrical switches
GB2426486A (en) * 2005-05-27 2006-11-29 Microsaic Systems Ltd Self-aligning micro-contact print engine
GB0514843D0 (en) * 2005-07-20 2005-08-24 Microsaic Systems Ltd Microengineered nanospray electrode system
EP1865533B1 (de) * 2006-06-08 2014-09-17 Microsaic Systems PLC Mikromechanische Vakuumschnittstelle für ein Ionisierungssystem
GB2446184B (en) * 2007-01-31 2011-07-27 Microsaic Systems Ltd High performance micro-fabricated quadrupole lens
GB2451239B (en) * 2007-07-23 2009-07-08 Microsaic Systems Ltd Microengineered electrode assembly

Also Published As

Publication number Publication date
GB2454241A (en) 2009-05-06
EP2063452A2 (de) 2009-05-27
US20090127481A1 (en) 2009-05-21
GB2454241B (en) 2009-12-23
EP2063452B1 (de) 2011-08-31
GB0721531D0 (en) 2007-12-12
US8618502B2 (en) 2013-12-31
EP2063452A3 (de) 2010-08-25

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties