ATE520800T1 - Magnetron-sputtervorrichtung - Google Patents

Magnetron-sputtervorrichtung

Info

Publication number
ATE520800T1
ATE520800T1 AT06811440T AT06811440T ATE520800T1 AT E520800 T1 ATE520800 T1 AT E520800T1 AT 06811440 T AT06811440 T AT 06811440T AT 06811440 T AT06811440 T AT 06811440T AT E520800 T1 ATE520800 T1 AT E520800T1
Authority
AT
Austria
Prior art keywords
magnetron sputter
sputter device
magnetron
sputter
Prior art date
Application number
AT06811440T
Other languages
English (en)
Inventor
Tadahiro Ohmi
Tetsuya Goto
Takaaki Matsuoka
Original Assignee
Univ Tohoku
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Tohoku, Tokyo Electron Ltd filed Critical Univ Tohoku
Application granted granted Critical
Publication of ATE520800T1 publication Critical patent/ATE520800T1/de

Links

AT06811440T 2005-10-07 2006-10-06 Magnetron-sputtervorrichtung ATE520800T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005295181 2005-10-07
JP2006020113 2006-10-06

Publications (1)

Publication Number Publication Date
ATE520800T1 true ATE520800T1 (de) 2011-09-15

Family

ID=44584988

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06811440T ATE520800T1 (de) 2005-10-07 2006-10-06 Magnetron-sputtervorrichtung

Country Status (1)

Country Link
AT (1) ATE520800T1 (de)

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Legal Events

Date Code Title Description
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