ATE515706T1 - Mems-beschleunigungssensor mit magnetischem kraftausgleich - Google Patents

Mems-beschleunigungssensor mit magnetischem kraftausgleich

Info

Publication number
ATE515706T1
ATE515706T1 AT10163017T AT10163017T ATE515706T1 AT E515706 T1 ATE515706 T1 AT E515706T1 AT 10163017 T AT10163017 T AT 10163017T AT 10163017 T AT10163017 T AT 10163017T AT E515706 T1 ATE515706 T1 AT E515706T1
Authority
AT
Austria
Prior art keywords
device layer
magnetically conductive
posts
attached
mems
Prior art date
Application number
AT10163017T
Other languages
English (en)
Inventor
Paul W Dwyer
Ryan Roehnelt
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Application granted granted Critical
Publication of ATE515706T1 publication Critical patent/ATE515706T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
AT10163017T 2009-05-26 2010-05-17 Mems-beschleunigungssensor mit magnetischem kraftausgleich ATE515706T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/471,785 US8166818B2 (en) 2009-03-26 2009-05-26 Using pole pieces to guide magnetic flux through a MEMS device and method of making

Publications (1)

Publication Number Publication Date
ATE515706T1 true ATE515706T1 (de) 2011-07-15

Family

ID=42358412

Family Applications (1)

Application Number Title Priority Date Filing Date
AT10163017T ATE515706T1 (de) 2009-05-26 2010-05-17 Mems-beschleunigungssensor mit magnetischem kraftausgleich

Country Status (4)

Country Link
US (1) US8166818B2 (de)
EP (1) EP2259077B1 (de)
JP (1) JP5694684B2 (de)
AT (1) ATE515706T1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9088841B2 (en) 2011-01-04 2015-07-21 Stmicroelectronics S.R.L. Signal processor and method for compensating loudspeaker aging phenomena
US20130287508A1 (en) 2012-04-25 2013-10-31 Milwaukee Electric Tool Corporation Magnetic drill press
US9505607B2 (en) * 2015-03-27 2016-11-29 Intel Corporation Methods of forming sensor integrated packages and structures formed thereby
WO2017136318A1 (en) 2016-02-01 2017-08-10 Milwaukee Electric Tool Corporation Holding force detection for magnetic drill press

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5060039A (en) * 1988-01-13 1991-10-22 The Charles Stark Draper Laboratory, Inc. Permanent magnet force rebalance micro accelerometer
US5067351A (en) * 1989-10-25 1991-11-26 Applied Technology Associates, Inc. Magnetohydrodynamic angular rate sensor for measuring large angular rates
US5241861A (en) 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5557044A (en) 1994-01-21 1996-09-17 Alliedsignal, Inc. Low stress magnet interface
DE4443419C1 (de) * 1994-12-06 1996-03-07 Siemens Ag Beschleunigungssensor
DE19947277A1 (de) * 1999-09-30 2001-04-05 Heidenhain Gmbh Dr Johannes Positionsmeßsystem mit integriertem Beschleunigungssensor
GB0000619D0 (en) * 2000-01-13 2000-03-01 British Aerospace Accelerometer
WO2003031993A1 (de) * 2001-10-08 2003-04-17 Dr.Johannes Heidenhain Gmbh Gekapseltes messgerät
US6910379B2 (en) 2003-10-29 2005-06-28 Honeywell International, Inc. Out-of-plane compensation suspension for an accelerometer
US7480983B2 (en) 2004-05-28 2009-01-27 Hitachi Global Storage Technologies Netherlands B.V. Method for making magnetic write head
US7069784B1 (en) 2004-12-29 2006-07-04 Honeywell International Inc. Pendulous in-plane MEMS accelerometer device
US7720661B2 (en) 2005-02-28 2010-05-18 Honeywell International Inc. Low vibration rectification in a closed-loop, in-plane MEMS device

Also Published As

Publication number Publication date
EP2259077B1 (de) 2011-07-06
JP2010281813A (ja) 2010-12-16
US20100242601A1 (en) 2010-09-30
EP2259077A1 (de) 2010-12-08
US8166818B2 (en) 2012-05-01
JP5694684B2 (ja) 2015-04-01

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Legal Events

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