ATE503259T1 - Elektrostatisches stellglied - Google Patents
Elektrostatisches stellgliedInfo
- Publication number
- ATE503259T1 ATE503259T1 AT05804329T AT05804329T ATE503259T1 AT E503259 T1 ATE503259 T1 AT E503259T1 AT 05804329 T AT05804329 T AT 05804329T AT 05804329 T AT05804329 T AT 05804329T AT E503259 T1 ATE503259 T1 AT E503259T1
- Authority
- AT
- Austria
- Prior art keywords
- electrode
- static
- movable electrode
- movable
- actuator
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0045—Electrostatic relays; Electro-adhesion relays making use of micromechanics with s-shaped movable electrode, positioned and connected between two driving fixed electrodes, e.g. movable electrodes moving laterally when driving voltage being applied
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Valve Device For Special Equipments (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CH2005/000702 WO2007059634A1 (en) | 2005-11-28 | 2005-11-28 | Electrostatic actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE503259T1 true ATE503259T1 (de) | 2011-04-15 |
Family
ID=36698848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05804329T ATE503259T1 (de) | 2005-11-28 | 2005-11-28 | Elektrostatisches stellglied |
Country Status (5)
Country | Link |
---|---|
US (1) | US20080223700A1 (de) |
EP (1) | EP1955342B1 (de) |
AT (1) | ATE503259T1 (de) |
DE (1) | DE602005027131D1 (de) |
WO (1) | WO2007059634A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108807095B (zh) * | 2017-05-04 | 2024-03-19 | 周思雨 | 一种微型断路器及其突跳组件 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002058089A1 (en) * | 2001-01-19 | 2002-07-25 | Massachusetts Institute Of Technology | Bistable actuation techniques, mechanisms, and applications |
ATE451712T1 (de) * | 2001-03-29 | 2009-12-15 | Abb Research Ltd | Mikrorelais mit neuem aufbau |
FR2840102B1 (fr) * | 2002-05-23 | 2004-07-16 | Commissariat Energie Atomique | Dispositif d'actionnement electrostatique miniature et installation comprenant de tels dispositifs |
SE0302437D0 (sv) * | 2003-09-09 | 2003-09-09 | Joachim Oberhammer | Film actuator based RF MEMS switching circuits |
-
2005
- 2005-11-28 WO PCT/CH2005/000702 patent/WO2007059634A1/en active Application Filing
- 2005-11-28 EP EP05804329A patent/EP1955342B1/de not_active Not-in-force
- 2005-11-28 AT AT05804329T patent/ATE503259T1/de not_active IP Right Cessation
- 2005-11-28 DE DE602005027131T patent/DE602005027131D1/de active Active
-
2008
- 2008-05-28 US US12/128,150 patent/US20080223700A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
DE602005027131D1 (de) | 2011-05-05 |
EP1955342A1 (de) | 2008-08-13 |
EP1955342B1 (de) | 2011-03-23 |
US20080223700A1 (en) | 2008-09-18 |
WO2007059634A1 (en) | 2007-05-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW200707849A (en) | Electrical interconnect system utilizing nonconductive elastomeric elements and continuous conductive elements | |
FR2857153B1 (fr) | Micro-commutateur bistable a faible consommation. | |
AU2002331725A1 (en) | Diaphragm activated micro-electromechanical switch | |
ATE355530T1 (de) | Mikromechanisches bauelement | |
TW200627526A (en) | Microswitching element | |
DE60314510D1 (de) | Mikromechanischer schalter, herstellungsverfahren und anwendung des mikromechanischen schalters | |
ATE549750T1 (de) | Piezoelektrischer aktuator | |
TW200711545A (en) | A method of manufacturing a MEMS element | |
EA201391657A1 (ru) | Стеклянный лист с элементом для электрического соединения | |
TW200644018A (en) | Slide operating type switch | |
ATE480008T1 (de) | Halbleitervorrichtung mit einem eine ansteuereinheit enthaltenden gehäuse | |
TW200618014A (en) | Liquid metal switch employing electrowetting for actuation and architectures for implementing same | |
WO2009122077A3 (fr) | Dispositif de protection d'un systeme electronique | |
WO2006027251A8 (de) | Lastabschalter | |
SE0002834D0 (sv) | Electrochromic device based on nanochrystalline materials | |
TW200639894A (en) | Liquid metal switch employing an electrically isolated control element | |
WO2008021227A3 (en) | High profile contacts for microelectromechanical systems | |
DE602004016569D1 (de) | Elektronische einrichtung | |
ATE386341T1 (de) | Elektromechanischer wandler mit mindestens einem piezoelektrischen element | |
DE60123052D1 (de) | Elektro-adhäsions-vorrichtung | |
ATE503259T1 (de) | Elektrostatisches stellglied | |
ATE298458T1 (de) | Schaltelement des folientyps | |
EA201200093A1 (ru) | Топливный элемент | |
ATE527208T1 (de) | Mikrosystem mit verformbarer brücke | |
TW200802425A (en) | Varistor and light-emitting apparatus |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |