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Priority claimed from JP57053819Aexternal-prioritypatent/JPS58172089A/ja
Priority claimed from JP57116790Aexternal-prioritypatent/JPS598493A/ja
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority claimed from EP83103231Aexternal-prioritypatent/EP0091103B1/de
Application grantedgrantedCritical
Publication of ATE47640T1publicationCriticalpatent/ATE47640T1/de