ATE474325T1 - Zusammenfügen zweier substrate mittels molekularer adhäsion - Google Patents
Zusammenfügen zweier substrate mittels molekularer adhäsionInfo
- Publication number
- ATE474325T1 ATE474325T1 AT05782045T AT05782045T ATE474325T1 AT E474325 T1 ATE474325 T1 AT E474325T1 AT 05782045 T AT05782045 T AT 05782045T AT 05782045 T AT05782045 T AT 05782045T AT E474325 T1 ATE474325 T1 AT E474325T1
- Authority
- AT
- Austria
- Prior art keywords
- substrates
- substrate
- faces
- face
- bonds
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 10
- 230000010070 molecular adhesion Effects 0.000 title 1
- 238000000034 method Methods 0.000 abstract 2
- 238000012876 topography Methods 0.000 abstract 2
- 238000009933 burial Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14634—Assemblies, i.e. Hybrid structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/83801—Soldering or alloying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/83894—Direct bonding, i.e. joining surfaces by means of intermolecular attracting interactions at their interfaces, e.g. covalent bonds, van der Waals forces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01087—Francium [Fr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
- H01L2924/07811—Extrinsic, i.e. with electrical conductive fillers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49126—Assembling bases
Landscapes
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Laminated Bodies (AREA)
- Organic Insulating Materials (AREA)
- Multicomponent Fibers (AREA)
- Combinations Of Printed Boards (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0451374A FR2872627B1 (fr) | 2004-06-30 | 2004-06-30 | Assemblage par adhesion moleculaire de deux substrats |
PCT/FR2005/050522 WO2006008411A1 (fr) | 2004-06-30 | 2005-06-29 | Assemblage par adhesion moleculaire de deux substrats |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE474325T1 true ATE474325T1 (de) | 2010-07-15 |
Family
ID=34947789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05782045T ATE474325T1 (de) | 2004-06-30 | 2005-06-29 | Zusammenfügen zweier substrate mittels molekularer adhäsion |
Country Status (7)
Country | Link |
---|---|
US (1) | US7906362B2 (de) |
EP (1) | EP1774588B1 (de) |
JP (1) | JP5706061B2 (de) |
AT (1) | ATE474325T1 (de) |
DE (1) | DE602005022317D1 (de) |
FR (1) | FR2872627B1 (de) |
WO (1) | WO2006008411A1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2864336B1 (fr) * | 2003-12-23 | 2006-04-28 | Commissariat Energie Atomique | Procede de scellement de deux plaques avec formation d'un contact ohmique entre celles-ci |
US9646869B2 (en) * | 2010-03-02 | 2017-05-09 | Micron Technology, Inc. | Semiconductor devices including a diode structure over a conductive strap and methods of forming such semiconductor devices |
US8507966B2 (en) | 2010-03-02 | 2013-08-13 | Micron Technology, Inc. | Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same |
US9608119B2 (en) | 2010-03-02 | 2017-03-28 | Micron Technology, Inc. | Semiconductor-metal-on-insulator structures, methods of forming such structures, and semiconductor devices including such structures |
FR2961013B1 (fr) | 2010-06-03 | 2013-05-17 | Commissariat Energie Atomique | Procede pour eliminer des impuretes residuelles extrinseques dans un substrat en zno ou en znmgo de type n, et pour realiser un dopage de type p de ce substrat. |
US8952418B2 (en) | 2011-03-01 | 2015-02-10 | Micron Technology, Inc. | Gated bipolar junction transistors |
US8519431B2 (en) | 2011-03-08 | 2013-08-27 | Micron Technology, Inc. | Thyristors |
JP2016174016A (ja) * | 2015-03-16 | 2016-09-29 | 株式会社東芝 | 半導体装置および半導体装置の製造方法 |
WO2017037527A1 (en) * | 2015-08-31 | 2017-03-09 | G-Ray Switzerland Sa | Photon counting cone-beam ct apparatus with monolithic cmos integrated pixel detectors |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2681472B1 (fr) | 1991-09-18 | 1993-10-29 | Commissariat Energie Atomique | Procede de fabrication de films minces de materiau semiconducteur. |
US5880010A (en) * | 1994-07-12 | 1999-03-09 | Sun Microsystems, Inc. | Ultrathin electronics |
US6097096A (en) * | 1997-07-11 | 2000-08-01 | Advanced Micro Devices | Metal attachment method and structure for attaching substrates at low temperatures |
US6274892B1 (en) * | 1998-03-09 | 2001-08-14 | Intersil Americas Inc. | Devices formable by low temperature direct bonding |
FR2783969B1 (fr) * | 1998-09-28 | 2002-01-18 | Commissariat Energie Atomique | Dispositif hybride et procede de realisation de composants electriquement actifs par assemblage |
JP3432770B2 (ja) * | 1998-09-29 | 2003-08-04 | シャープ株式会社 | 二次元画像検出器の製造方法 |
JP3532788B2 (ja) * | 1999-04-13 | 2004-05-31 | 唯知 須賀 | 半導体装置及びその製造方法 |
FR2798224B1 (fr) * | 1999-09-08 | 2003-08-29 | Commissariat Energie Atomique | Realisation d'un collage electriquement conducteur entre deux elements semi-conducteurs. |
US6500694B1 (en) * | 2000-03-22 | 2002-12-31 | Ziptronix, Inc. | Three dimensional device integration method and integrated device |
US6902987B1 (en) * | 2000-02-16 | 2005-06-07 | Ziptronix, Inc. | Method for low temperature bonding and bonded structure |
FR2810448B1 (fr) * | 2000-06-16 | 2003-09-19 | Soitec Silicon On Insulator | Procede de fabrication de substrats et substrats obtenus par ce procede |
FR2816445B1 (fr) | 2000-11-06 | 2003-07-25 | Commissariat Energie Atomique | Procede de fabrication d'une structure empilee comprenant une couche mince adherant a un substrat cible |
DE10124038A1 (de) * | 2001-05-16 | 2002-11-21 | Atmel Germany Gmbh | Verfahren zur Herstellung vergrabener Bereiche |
FR2830125B1 (fr) * | 2001-09-24 | 2006-11-17 | Commissariat Energie Atomique | Procede de realisation d'une prise de contact en face arriere d'un composant a substrats empiles et composant equipe d'une telle prise de contact |
US6809358B2 (en) * | 2002-02-05 | 2004-10-26 | E-Phocus, Inc. | Photoconductor on active pixel image sensor |
US7436038B2 (en) * | 2002-02-05 | 2008-10-14 | E-Phocus, Inc | Visible/near infrared image sensor array |
US6809008B1 (en) * | 2003-08-28 | 2004-10-26 | Motorola, Inc. | Integrated photosensor for CMOS imagers |
JP5054509B2 (ja) * | 2004-02-25 | 2012-10-24 | ソワテク | 光検出装置 |
-
2004
- 2004-06-30 FR FR0451374A patent/FR2872627B1/fr not_active Expired - Fee Related
-
2005
- 2005-06-29 WO PCT/FR2005/050522 patent/WO2006008411A1/fr active Application Filing
- 2005-06-29 AT AT05782045T patent/ATE474325T1/de not_active IP Right Cessation
- 2005-06-29 US US11/630,283 patent/US7906362B2/en not_active Expired - Fee Related
- 2005-06-29 JP JP2007518666A patent/JP5706061B2/ja not_active Expired - Fee Related
- 2005-06-29 DE DE602005022317T patent/DE602005022317D1/de active Active
- 2005-06-29 EP EP05782045A patent/EP1774588B1/de not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
FR2872627B1 (fr) | 2006-08-18 |
US7906362B2 (en) | 2011-03-15 |
EP1774588B1 (de) | 2010-07-14 |
US20080296712A1 (en) | 2008-12-04 |
DE602005022317D1 (de) | 2010-08-26 |
EP1774588A1 (de) | 2007-04-18 |
FR2872627A1 (fr) | 2006-01-06 |
JP2008504707A (ja) | 2008-02-14 |
JP5706061B2 (ja) | 2015-04-22 |
WO2006008411A1 (fr) | 2006-01-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |