ATE473449T1 - Mikroelektronische trägheitsvorrichtung mit flüssigkeitsintegrator - Google Patents

Mikroelektronische trägheitsvorrichtung mit flüssigkeitsintegrator

Info

Publication number
ATE473449T1
ATE473449T1 AT07731286T AT07731286T ATE473449T1 AT E473449 T1 ATE473449 T1 AT E473449T1 AT 07731286 T AT07731286 T AT 07731286T AT 07731286 T AT07731286 T AT 07731286T AT E473449 T1 ATE473449 T1 AT E473449T1
Authority
AT
Austria
Prior art keywords
chamber
microelectronic
mobile
inertial device
weight
Prior art date
Application number
AT07731286T
Other languages
English (en)
Inventor
Charles-Marie Tassetti
Andre Tissot
Jacques Haussy
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE473449T1 publication Critical patent/ATE473449T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/003—Details of instruments used for damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AT07731286T 2006-04-12 2007-04-12 Mikroelektronische trägheitsvorrichtung mit flüssigkeitsintegrator ATE473449T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0603242A FR2899889B1 (fr) 2006-04-12 2006-04-12 Dispositif micro-electronique inertiel a integrateur liquide
PCT/FR2007/000618 WO2007116156A1 (fr) 2006-04-12 2007-04-12 Dispositif micro-electronique inertiel a integrateur liquide

Publications (1)

Publication Number Publication Date
ATE473449T1 true ATE473449T1 (de) 2010-07-15

Family

ID=37496518

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07731286T ATE473449T1 (de) 2006-04-12 2007-04-12 Mikroelektronische trägheitsvorrichtung mit flüssigkeitsintegrator

Country Status (5)

Country Link
EP (1) EP2005198B1 (de)
AT (1) ATE473449T1 (de)
DE (1) DE602007007592D1 (de)
FR (1) FR2899889B1 (de)
WO (1) WO2007116156A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2603490B (en) 2021-02-04 2025-04-23 Cortirio Ltd Near-infrared imaging system for identifying a target feature in an object

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046793A (en) * 1960-04-04 1962-07-31 Gen Precision Inc Hydraulic averaging accelerometer
GB2283098A (en) * 1993-10-20 1995-04-26 Autoliv Dev Accelerometer using inertia mass in a fluid e.g.air
US6453746B1 (en) * 2000-06-07 2002-09-24 Sandia Corporation Microscale acceleration history discriminators
EP1172657B1 (de) * 2000-07-10 2006-08-23 Infineon Technologies SensoNor AS Beschleunigungssensor

Also Published As

Publication number Publication date
EP2005198A1 (de) 2008-12-24
FR2899889B1 (fr) 2008-07-04
FR2899889A1 (fr) 2007-10-19
DE602007007592D1 (de) 2010-08-19
WO2007116156A1 (fr) 2007-10-18
EP2005198B1 (de) 2010-07-07

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties