ATE465388T1 - Messabtastsonde zum abtasten einer zu messenden oberfläche - Google Patents

Messabtastsonde zum abtasten einer zu messenden oberfläche

Info

Publication number
ATE465388T1
ATE465388T1 AT07747281T AT07747281T ATE465388T1 AT E465388 T1 ATE465388 T1 AT E465388T1 AT 07747281 T AT07747281 T AT 07747281T AT 07747281 T AT07747281 T AT 07747281T AT E465388 T1 ATE465388 T1 AT E465388T1
Authority
AT
Austria
Prior art keywords
scanning
measured
stylus
measuring
measuring probe
Prior art date
Application number
AT07747281T
Other languages
English (en)
Inventor
Edwin Bos
Gerardus Burger
Original Assignee
Univ Eindhoven Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Eindhoven Tech filed Critical Univ Eindhoven Tech
Application granted granted Critical
Publication of ATE465388T1 publication Critical patent/ATE465388T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
AT07747281T 2006-04-12 2007-04-12 Messabtastsonde zum abtasten einer zu messenden oberfläche ATE465388T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1031573A NL1031573C2 (nl) 2006-04-12 2006-04-12 Meettastelement voor het aftasten van een meetoppervlak.
PCT/NL2007/000099 WO2007117138A1 (en) 2006-04-12 2007-04-12 Measuring scanning probe for scanning a surface to be measured

Publications (1)

Publication Number Publication Date
ATE465388T1 true ATE465388T1 (de) 2010-05-15

Family

ID=36691896

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07747281T ATE465388T1 (de) 2006-04-12 2007-04-12 Messabtastsonde zum abtasten einer zu messenden oberfläche

Country Status (6)

Country Link
US (1) US20090307808A1 (de)
EP (1) EP2018512B1 (de)
AT (1) ATE465388T1 (de)
DE (1) DE602007006000D1 (de)
NL (1) NL1031573C2 (de)
WO (1) WO2007117138A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100115672A1 (en) * 2008-05-13 2010-05-06 Northwestern University Scanning probe epitaxy
DE102009020533C5 (de) * 2009-05-08 2015-12-17 SIOS Meßtechnik GmbH Vorrichtung zur Kraftkomponentenmessung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69201985T2 (de) * 1991-02-25 1995-08-24 Renishaw Metrology Ltd Kontaktprobe.
DE4331069A1 (de) * 1993-09-13 1995-03-16 Zeiss Carl Fa Koordinatenmeßgerät mit einem Taster in Form eines Festkörperschwingers
CN1155803C (zh) * 1997-02-17 2004-06-30 株式会社三丰 无方向性接触信号探测器
JP3130289B2 (ja) * 1998-08-04 2001-01-31 株式会社ミツトヨ タッチ信号プローブ
NL1010894C2 (nl) * 1998-12-24 2000-06-27 Univ Eindhoven Tech Mechanisch tastsysteem voorzien van een in de ophanging geïntegreerd meetsysteem voor gebruik in coördinaten meetmachines, geschikt om met hoge nauwkeurigheid geometrische eigenschappen van werkstukken te bepalen.
JP3650555B2 (ja) * 1999-09-27 2005-05-18 株式会社ミツトヨ タッチセンサ
JP3819250B2 (ja) * 2000-05-15 2006-09-06 株式会社ミツトヨ 加振型接触検出センサ
JP3961258B2 (ja) * 2001-10-10 2007-08-22 株式会社ミツトヨ タッチセンサ、および微細形状測定装置用プローブ

Also Published As

Publication number Publication date
NL1031573C2 (nl) 2007-10-16
US20090307808A1 (en) 2009-12-10
EP2018512A1 (de) 2009-01-28
DE602007006000D1 (de) 2010-06-02
EP2018512B1 (de) 2010-04-21
WO2007117138A1 (en) 2007-10-18

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Legal Events

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