ATE443853T1 - Vacuummeter - Google Patents

Vacuummeter

Info

Publication number
ATE443853T1
ATE443853T1 AT03760071T AT03760071T ATE443853T1 AT E443853 T1 ATE443853 T1 AT E443853T1 AT 03760071 T AT03760071 T AT 03760071T AT 03760071 T AT03760071 T AT 03760071T AT E443853 T1 ATE443853 T1 AT E443853T1
Authority
AT
Austria
Prior art keywords
gauge head
filament
orthogonal axes
vacuum meter
gauge
Prior art date
Application number
AT03760071T
Other languages
English (en)
Inventor
Kenneth George Packer
Matthew Key
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE443853T1 publication Critical patent/ATE443853T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Impact Printers (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
AT03760071T 2002-06-13 2003-06-06 Vacuummeter ATE443853T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0213611.7A GB0213611D0 (en) 2002-06-13 2002-06-13 Vacuum Gauge
PCT/GB2003/002452 WO2003106954A2 (en) 2002-06-13 2003-06-06 Vacuum gauge

Publications (1)

Publication Number Publication Date
ATE443853T1 true ATE443853T1 (de) 2009-10-15

Family

ID=9938523

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03760071T ATE443853T1 (de) 2002-06-13 2003-06-06 Vacuummeter

Country Status (7)

Country Link
US (1) US7165458B2 (de)
EP (1) EP1511983B1 (de)
AT (1) ATE443853T1 (de)
AU (1) AU2003250360A1 (de)
DE (1) DE60329387D1 (de)
GB (1) GB0213611D0 (de)
WO (1) WO2003106954A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004035728B4 (de) * 2004-07-23 2020-10-01 BSH Hausgeräte GmbH Absperrventil und Druckmesskopf
US9247598B2 (en) * 2009-01-16 2016-01-26 Mag Instrument, Inc. Portable lighting devices
US9335231B2 (en) * 2014-03-25 2016-05-10 Mks Instruments, Inc. Micro-Pirani vacuum gauges

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB827311A (en) * 1957-01-03 1960-02-03 Mini Of Supply Improvements in or relating to low pressure or vacuum gauges
DE1094341B (de) * 1958-12-13 1960-12-08 Cons Electrodynamics Corp Anordnung zur selbsttaetigen Steuerung der Temperatur eines stromdurchflossenen Widerstandes
US3199356A (en) * 1961-11-06 1965-08-10 Andriulis Vytautas Pressure gauge
SU491858A1 (ru) 1973-01-02 1975-11-15 Ленинградский Ордена Ленина Электротехнический Институт Им.В.И.Ульянова (Ленина) Тепловой вакуумметр
US3915009A (en) * 1973-05-03 1975-10-28 Ruska Instr Corp Precision pressure gauge
JPS561133A (en) 1979-06-20 1981-01-08 Tokyo Electric Co Ltd Suction port body for carpet
JPS564481A (en) 1979-06-22 1981-01-17 Tdk Corp Thermal pen tip and preparation thereof
US4307323A (en) 1980-04-04 1981-12-22 Granville-Phillips Company Vacuum gauge
DE3541178A1 (de) * 1985-11-21 1987-05-27 Leybold Heraeus Gmbh & Co Kg Messkopf fuer ein vakuummeter
JP3069975B2 (ja) 1991-09-06 2000-07-24 アネルバ株式会社 電離真空計
JP4339948B2 (ja) 1999-02-25 2009-10-07 キヤノンアネルバ株式会社 熱陰極電離真空計

Also Published As

Publication number Publication date
WO2003106954A2 (en) 2003-12-24
AU2003250360A8 (en) 2003-12-31
EP1511983B1 (de) 2009-09-23
US7165458B2 (en) 2007-01-23
DE60329387D1 (de) 2009-11-05
WO2003106954A3 (en) 2004-06-03
GB0213611D0 (en) 2002-07-24
AU2003250360A1 (en) 2003-12-31
EP1511983A2 (de) 2005-03-09
US20060086189A1 (en) 2006-04-27

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Legal Events

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