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Priority claimed from JP3865684Aexternal-prioritypatent/JPS60184731A/ja
Priority claimed from JP59038655Aexternal-prioritypatent/JPS60184973A/ja
Application filed by Ebara CorpfiledCriticalEbara Corp
Priority claimed from EP19850301474external-prioritypatent/EP0153882B1/de
Application grantedgrantedCritical
Publication of ATE44081T1publicationCriticalpatent/ATE44081T1/de