ATE432458T1 - MICRO-MACHINED GYROMETRIC SENSOR FOR DIFFERENTIAL MEASURING THE MOTION OF VIBRATING MASSES - Google Patents

MICRO-MACHINED GYROMETRIC SENSOR FOR DIFFERENTIAL MEASURING THE MOTION OF VIBRATING MASSES

Info

Publication number
ATE432458T1
ATE432458T1 AT06763769T AT06763769T ATE432458T1 AT E432458 T1 ATE432458 T1 AT E432458T1 AT 06763769 T AT06763769 T AT 06763769T AT 06763769 T AT06763769 T AT 06763769T AT E432458 T1 ATE432458 T1 AT E432458T1
Authority
AT
Austria
Prior art keywords
mass
frame
movement
machined
micro
Prior art date
Application number
AT06763769T
Other languages
German (de)
Inventor
Claude Rougeot
Bernard Chaumet
Verrier Bertrand Le
Jerome Willemin
Original Assignee
Thales Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Sa filed Critical Thales Sa
Application granted granted Critical
Publication of ATE432458T1 publication Critical patent/ATE432458T1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Cosmetics (AREA)

Abstract

The invention relates to a microgyroscope, that is to say an inertial micromechanical sensor dedicated to the measurement of angular velocities, which is produced by micromachining techniques, and has a novel arrangement of the modules for measuring the movement of the vibrating masses. The gyroscope comprises two symmetrical moving assemblies (30, 50; 30′, 50′) that are coupled by a coupling structure (20, 20′, 22). Each of the two assemblies comprises a moving mass (30) surrounded by a moving intermediate frame (50). The frame (50) is connected to the coupling structure (20, 20′, 22) and can vibrate in two degrees of freedom in orthogonal directions Ox and Oy of the plane of the wafer. The mass (30) is connected, on one side, to the frame and, on the other side, to fixed anchoring regions (34, 36) via linking means (40-46; 52-58) that allow the vibration movement in the Oy direction to be transmitted to the mass without permitting any movement of the mass in the Ox direction. An excitation structure (70) is associated with the frame in order to excite its vibration along Ox. A movement detection structure (90) is associated with the mass (30) in order to detect its vibration along Oy.
AT06763769T 2005-07-05 2006-06-19 MICRO-MACHINED GYROMETRIC SENSOR FOR DIFFERENTIAL MEASURING THE MOTION OF VIBRATING MASSES ATE432458T1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0507144A FR2888318B1 (en) 2005-07-05 2005-07-05 MICRO-FACTORY GYROMETRIC SENSOR PROVIDING A DIFFERENTIAL MEASUREMENT OF VIBRATING MASS MOVEMENT
PCT/EP2006/063306 WO2007003501A1 (en) 2005-07-05 2006-06-19 Micro-machined gyrometric sensor for differential measurement of the movement of vibrating masses

Publications (1)

Publication Number Publication Date
ATE432458T1 true ATE432458T1 (en) 2009-06-15

Family

ID=36123100

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06763769T ATE432458T1 (en) 2005-07-05 2006-06-19 MICRO-MACHINED GYROMETRIC SENSOR FOR DIFFERENTIAL MEASURING THE MOTION OF VIBRATING MASSES

Country Status (7)

Country Link
US (1) US7707886B2 (en)
EP (1) EP1899681B1 (en)
JP (1) JP2008545128A (en)
AT (1) ATE432458T1 (en)
DE (1) DE602006007001D1 (en)
FR (1) FR2888318B1 (en)
WO (1) WO2007003501A1 (en)

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FI122397B (en) * 2008-04-16 2011-12-30 Vti Technologies Oy A vibrating micromechanical angular velocity sensor
US20100095768A1 (en) * 2008-10-20 2010-04-22 Custom Sensors & Technologies, Inc. Micromachined torsional gyroscope with anti-phase linear sense transduction
FI20095201A0 (en) * 2009-03-02 2009-03-02 Vti Technologies Oy Oscillating micromechanical angular velocity sensor
GB201020722D0 (en) * 2010-12-07 2011-01-19 Atlantic Inertial Systems Ltd Accelerometer
EP2573516B1 (en) 2011-09-21 2013-11-20 Tronics Microsystems S.A. A micro-electromechanical gyro device
RU2490593C1 (en) * 2012-03-14 2013-08-20 Федеральное государственное бюджетное образовательное учреждение высшего професионального образования "Национальный исследовательский Томский политехнический университет" Integral micromechanical gyro
JP6191151B2 (en) * 2012-05-29 2017-09-06 株式会社デンソー Physical quantity sensor
FR2992418B1 (en) * 2012-06-22 2014-08-01 Thales Sa VIBRANT ELEMENT SENSOR IN A CAVITY WITH INTEGRAL DETECTION OF ANOMALIES
US10024879B2 (en) * 2013-04-14 2018-07-17 Purdue Research Foundation Performance improvement of MEMS devices
FI126071B (en) * 2014-01-28 2016-06-15 Murata Manufacturing Co Improved gyroscope design and gyroscope
CN105242782B (en) * 2015-09-25 2019-03-29 联想(北京)有限公司 Electronic equipment and information processing method
WO2017061638A1 (en) * 2015-10-06 2017-04-13 주식회사 스탠딩에그 Mems device, mems package comprising same and user terminal
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
RU173867U1 (en) * 2016-12-15 2017-09-15 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") LL-type vibratory gyroscope
US11226245B2 (en) * 2017-03-31 2022-01-18 Technische Universitaet Wien Force sensor
RU179133U1 (en) * 2017-12-27 2018-04-28 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") LL-type vibratory gyroscope
JP7225817B2 (en) * 2019-01-17 2023-02-21 セイコーエプソン株式会社 Angular rate sensors, inertial measurement devices, electronics and moving objects

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DE19530007C2 (en) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Yaw rate sensor
JP3659160B2 (en) * 2000-02-18 2005-06-15 株式会社デンソー Angular velocity sensor
JP3603746B2 (en) * 2000-05-02 2004-12-22 株式会社村田製作所 Vibrator
DE10108196A1 (en) * 2001-02-21 2002-10-24 Bosch Gmbh Robert Yaw rate sensor
DE10108197A1 (en) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Yaw rate sensor
JP2002323323A (en) * 2001-04-25 2002-11-08 Mitsubishi Electric Corp Angular speed sensor
JP2003247829A (en) * 2002-02-21 2003-09-05 Kinseki Ltd Angular velocity sensor
FR2846740B1 (en) * 2002-11-05 2005-02-04 Thales Sa MICRO-FACTORY GYROMETRIC SENSOR, DETECTION IN PLATE PLATE
FR2859527B1 (en) * 2003-09-09 2005-11-18 Thales Sa MICRO-FACTORY GYROMETER WITH DOUBLE DIAPASON AND DETECTION IN PLATE PLATE
FR2859528B1 (en) * 2003-09-09 2006-01-06 Thales Sa MICRO-FACTORY GYROMETER WITH DOUBLE DIAPASON AND DETECTION IN PLATE PLATE
US7036372B2 (en) * 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
JP4433747B2 (en) * 2003-09-29 2010-03-17 株式会社村田製作所 Angular velocity detector

Also Published As

Publication number Publication date
FR2888318B1 (en) 2007-09-14
JP2008545128A (en) 2008-12-11
DE602006007001D1 (en) 2009-07-09
US7707886B2 (en) 2010-05-04
EP1899681B1 (en) 2009-05-27
EP1899681A1 (en) 2008-03-19
FR2888318A1 (en) 2007-01-12
WO2007003501A1 (en) 2007-01-11
US20080210005A1 (en) 2008-09-04

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