ATE427282T1 - Mikromechanische komponente mit aktiven elementen und verfahren zur herstellung einer komponente dieser art - Google Patents

Mikromechanische komponente mit aktiven elementen und verfahren zur herstellung einer komponente dieser art

Info

Publication number
ATE427282T1
ATE427282T1 AT06709056T AT06709056T ATE427282T1 AT E427282 T1 ATE427282 T1 AT E427282T1 AT 06709056 T AT06709056 T AT 06709056T AT 06709056 T AT06709056 T AT 06709056T AT E427282 T1 ATE427282 T1 AT E427282T1
Authority
AT
Austria
Prior art keywords
component
producing
type
active elements
area
Prior art date
Application number
AT06709056T
Other languages
English (en)
Inventor
Helene Joisten
Robert Cuchet
Marcel Audoin
Gerard Barrois
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE427282T1 publication Critical patent/ATE427282T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054—For holding or placing an element in a given position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/032—Gluing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Magnetic Variables (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Hall/Mr Elements (AREA)
  • Battery Electrode And Active Subsutance (AREA)
AT06709056T 2005-01-11 2006-01-10 Mikromechanische komponente mit aktiven elementen und verfahren zur herstellung einer komponente dieser art ATE427282T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0500274A FR2880731B1 (fr) 2005-01-11 2005-01-11 Composant, notamment avec des elements actifs, et procede de realisation d'un tel composant

Publications (1)

Publication Number Publication Date
ATE427282T1 true ATE427282T1 (de) 2009-04-15

Family

ID=34953653

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06709056T ATE427282T1 (de) 2005-01-11 2006-01-10 Mikromechanische komponente mit aktiven elementen und verfahren zur herstellung einer komponente dieser art

Country Status (6)

Country Link
US (1) US20080050561A1 (de)
EP (1) EP1890958B1 (de)
AT (1) ATE427282T1 (de)
DE (1) DE602006006054D1 (de)
FR (1) FR2880731B1 (de)
WO (1) WO2006075081A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2903812B1 (fr) * 2006-07-13 2008-10-31 Commissariat Energie Atomique Circuit integre reparti sur au moins deux plans non paralleles et son procede de realisation
DE102008013116B4 (de) * 2007-04-02 2013-04-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Erzeugung einer mikromechanischen Struktur
DE102008012826B4 (de) * 2007-04-02 2012-11-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Erzeugung einer dreidimensionalen mikromechanischen Struktur aus zweidimensionalen Elementen und mikromechanisches Bauelement
DE102008001038B4 (de) * 2008-04-08 2016-08-11 Robert Bosch Gmbh Mikromechanisches Bauelement mit Schrägstruktur und entsprechendes Herstellungsverfahren
US8053265B2 (en) * 2009-02-06 2011-11-08 Honeywell International Inc. Mitigation of high stress areas in vertically offset structures
JP5663900B2 (ja) 2010-03-05 2015-02-04 セイコーエプソン株式会社 分光センサー装置及び電子機器
JP5589515B2 (ja) 2010-04-05 2014-09-17 セイコーエプソン株式会社 傾斜構造体の製造方法
FR2959350B1 (fr) * 2010-04-26 2012-08-31 Commissariat Energie Atomique Procede de fabrication d?un dispositif microelectronique et dispositif microelectronique ainsi fabrique
JP5910679B2 (ja) * 2014-07-29 2016-04-27 セイコーエプソン株式会社 分光フィルター及び分光センサー
DE102022211730A1 (de) 2022-11-07 2024-05-08 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen eines Magnetsensors

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5446307A (en) * 1994-11-04 1995-08-29 The United States Of America As Represented By The Secretary Of The Army Microelectronic 3D bipolar magnetotransistor magnetometer
US5629918A (en) * 1995-01-20 1997-05-13 The Regents Of The University Of California Electromagnetically actuated micromachined flap
FR2763745B1 (fr) * 1997-05-23 1999-08-27 Sextant Avionique Procede de fabrication d'un micro-capteur en silicium usine
JP4308417B2 (ja) * 2000-10-30 2009-08-05 日本発條株式会社 ディスクドライブ用サスペンション
US20030082917A1 (en) * 2001-10-26 2003-05-01 Hopkins Dean A. Method of fabricating vertical actuation comb drives
EP1424583A3 (de) * 2002-11-26 2004-06-09 LG Electronics Inc. Optischer Empfänger und optischer Sender mit variablem optischem Dämpfungsglied, Herstellungsverfahren für ein variables optisches Dämpfungsglied

Also Published As

Publication number Publication date
US20080050561A1 (en) 2008-02-28
FR2880731B1 (fr) 2007-04-27
EP1890958B1 (de) 2009-04-01
DE602006006054D1 (de) 2009-05-14
FR2880731A1 (fr) 2006-07-14
WO2006075081A1 (fr) 2006-07-20
EP1890958A1 (de) 2008-02-27

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