ATE427075T1 - MICRO-MANUFACTURED ELASTOMER VALVE AND PUMP SYSTEMS - Google Patents
MICRO-MANUFACTURED ELASTOMER VALVE AND PUMP SYSTEMSInfo
- Publication number
- ATE427075T1 ATE427075T1 AT01989783T AT01989783T ATE427075T1 AT E427075 T1 ATE427075 T1 AT E427075T1 AT 01989783 T AT01989783 T AT 01989783T AT 01989783 T AT01989783 T AT 01989783T AT E427075 T1 ATE427075 T1 AT E427075T1
- Authority
- AT
- Austria
- Prior art keywords
- elastomeric layer
- elastomeric
- forms
- micro
- pump systems
- Prior art date
Links
Abstract
<P>PROBLEM TO BE SOLVED: To provide a method of fabricating an elastomeric valve structure. <P>SOLUTION: The method of fabricating an elastomeric valve structure comprises: forming a first elastomeric layer 20 on top of a micromachined mold, the micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer 20; forming a second elastomeric layer 22 on top of a micromachined mold, the micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer 22; bonding the bottom surface of the second elastomeric layer 22 onto a top surface of the first elastomeric layer 20 such that a control channel forms in the second recess between the first and second elastomeric layers 20, 22; and positioning the first elastomeric layer 20 on top of a planar substrate such that a flow channel 32 forms in the first recess between the first elastomeric layer 20 and the planar substrate. <P>COPYRIGHT: (C)2009,JPO&INPIT
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/724,784 US7144616B1 (en) | 1999-06-28 | 2000-11-28 | Microfabricated elastomeric valve and pump systems |
US09/826,583 US6899137B2 (en) | 1999-06-28 | 2001-04-06 | Microfabricated elastomeric valve and pump systems |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE427075T1 true ATE427075T1 (en) | 2009-04-15 |
Family
ID=40503982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01989783T ATE427075T1 (en) | 2000-11-28 | 2001-11-28 | MICRO-MANUFACTURED ELASTOMER VALVE AND PUMP SYSTEMS |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2009052744A (en) |
AT (1) | ATE427075T1 (en) |
DE (1) | DE60138218D1 (en) |
-
2001
- 2001-11-28 DE DE60138218T patent/DE60138218D1/en not_active Expired - Lifetime
- 2001-11-28 AT AT01989783T patent/ATE427075T1/en not_active IP Right Cessation
-
2008
- 2008-09-05 JP JP2008229084A patent/JP2009052744A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2009052744A (en) | 2009-03-12 |
DE60138218D1 (en) | 2009-05-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |