ATE42004T1 - MICROSCOPE DEVICE FOR INSPECTING WAFERS. - Google Patents

MICROSCOPE DEVICE FOR INSPECTING WAFERS.

Info

Publication number
ATE42004T1
ATE42004T1 AT86101375T AT86101375T ATE42004T1 AT E42004 T1 ATE42004 T1 AT E42004T1 AT 86101375 T AT86101375 T AT 86101375T AT 86101375 T AT86101375 T AT 86101375T AT E42004 T1 ATE42004 T1 AT E42004T1
Authority
AT
Austria
Prior art keywords
microscope device
inspecting wafers
inspecting
wafers
microscope
Prior art date
Application number
AT86101375T
Other languages
German (de)
Inventor
Makoto Yoshinaga
Yoichi Iba
Noriyuki Miyahara
Masami Kawasaki
Terumasa Morita
Takashi Nagano
Original Assignee
Olympus Optical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60018771A external-priority patent/JPH0783043B2/en
Priority claimed from JP60023072A external-priority patent/JP2568488B2/en
Application filed by Olympus Optical Co filed Critical Olympus Optical Co
Priority claimed from EP86101375A external-priority patent/EP0193001B1/en
Application granted granted Critical
Publication of ATE42004T1 publication Critical patent/ATE42004T1/en

Links

AT86101375T 1985-02-04 1986-02-03 MICROSCOPE DEVICE FOR INSPECTING WAFERS. ATE42004T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP60018771A JPH0783043B2 (en) 1985-02-04 1985-02-04 Wafer inspection microscope device
JP60023072A JP2568488B2 (en) 1985-02-08 1985-02-08 microscope
EP86101375A EP0193001B1 (en) 1985-02-04 1986-02-03 Microscope apparatus for examining wafer

Publications (1)

Publication Number Publication Date
ATE42004T1 true ATE42004T1 (en) 1989-04-15

Family

ID=27228828

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86101375T ATE42004T1 (en) 1985-02-04 1986-02-03 MICROSCOPE DEVICE FOR INSPECTING WAFERS.

Country Status (1)

Country Link
AT (1) ATE42004T1 (en)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee