ATE411528T1 - Winkelgeschwindigkeitssensor mit einem messelement, dessen bewegung auf eine einzige achse beschränkt wird und das flexibel an einer drehantriebsmasse angebracht ist - Google Patents

Winkelgeschwindigkeitssensor mit einem messelement, dessen bewegung auf eine einzige achse beschränkt wird und das flexibel an einer drehantriebsmasse angebracht ist

Info

Publication number
ATE411528T1
ATE411528T1 AT02744347T AT02744347T ATE411528T1 AT E411528 T1 ATE411528 T1 AT E411528T1 AT 02744347 T AT02744347 T AT 02744347T AT 02744347 T AT02744347 T AT 02744347T AT E411528 T1 ATE411528 T1 AT E411528T1
Authority
AT
Austria
Prior art keywords
sense
plate
limited
rotary drive
velocity sensor
Prior art date
Application number
AT02744347T
Other languages
English (en)
Inventor
John Reeds
Ying Hsu
Original Assignee
Microsensors Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25381379&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE411528(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Microsensors Inc filed Critical Microsensors Inc
Application granted granted Critical
Publication of ATE411528T1 publication Critical patent/ATE411528T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
AT02744347T 2001-06-14 2002-06-14 Winkelgeschwindigkeitssensor mit einem messelement, dessen bewegung auf eine einzige achse beschränkt wird und das flexibel an einer drehantriebsmasse angebracht ist ATE411528T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/882,807 US20020189351A1 (en) 2001-06-14 2001-06-14 Angular rate sensor having a sense element constrained to motion about a single axis and flexibly attached to a rotary drive mass

Publications (1)

Publication Number Publication Date
ATE411528T1 true ATE411528T1 (de) 2008-10-15

Family

ID=25381379

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02744347T ATE411528T1 (de) 2001-06-14 2002-06-14 Winkelgeschwindigkeitssensor mit einem messelement, dessen bewegung auf eine einzige achse beschränkt wird und das flexibel an einer drehantriebsmasse angebracht ist

Country Status (6)

Country Link
US (1) US20020189351A1 (de)
EP (1) EP1440321B1 (de)
AT (1) ATE411528T1 (de)
AU (1) AU2002345705A1 (de)
DE (1) DE60229418D1 (de)
WO (1) WO2002103364A2 (de)

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US6513380B2 (en) 2001-06-19 2003-02-04 Microsensors, Inc. MEMS sensor with single central anchor and motion-limiting connection geometry
EP1832841B1 (de) 2006-03-10 2015-12-30 STMicroelectronics Srl Mikroelektromechanische integrierte Sensorstruktur mit Rotationsantriebsbewegung
JP5159062B2 (ja) * 2006-08-09 2013-03-06 キヤノン株式会社 角速度センサ
US8020441B2 (en) * 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US20090265671A1 (en) * 2008-04-21 2009-10-22 Invensense Mobile devices with motion gesture recognition
US7796872B2 (en) * 2007-01-05 2010-09-14 Invensense, Inc. Method and apparatus for producing a sharp image from a handheld device containing a gyroscope
US8047075B2 (en) 2007-06-21 2011-11-01 Invensense, Inc. Vertically integrated 3-axis MEMS accelerometer with electronics
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8042394B2 (en) * 2007-09-11 2011-10-25 Stmicroelectronics S.R.L. High sensitivity microelectromechanical sensor with rotary driving motion
DE102008002748A1 (de) 2008-06-27 2009-12-31 Sensordynamics Ag Mikro-Gyroskop
JP2010054263A (ja) * 2008-08-27 2010-03-11 Pioneer Electronic Corp 回転振動型ジャイロ
IT1391973B1 (it) 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari
ITTO20090489A1 (it) * 2008-11-26 2010-12-27 St Microelectronics Srl Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse
IT1391972B1 (it) * 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche
IT1392741B1 (it) 2008-12-23 2012-03-16 St Microelectronics Rousset Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione
DE102009002066A1 (de) 2009-03-31 2010-10-07 Sensordynamics Ag Verfahren zum Erfassen von Beschleunigungen und Drehraten sowie MEMS-Sensor
IT1394007B1 (it) * 2009-05-11 2012-05-17 St Microelectronics Rousset Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
ITTO20091042A1 (it) 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
US8584522B2 (en) 2010-04-30 2013-11-19 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric x-axis gyroscope
US8539832B2 (en) 2010-10-25 2013-09-24 Rosemount Aerospace Inc. MEMS gyros with quadrature reducing springs
DE102010062095A1 (de) * 2010-11-29 2012-05-31 Robert Bosch Gmbh Drehratensensor und Verahren zum Betrieb eines Drehratensensors
DE102011001496A1 (de) 2011-03-23 2012-09-27 Maxim Integrated Gmbh MEMS-Sensor
WO2012131682A1 (en) * 2011-03-31 2012-10-04 Ramot At Tel-Aviv University Ltd. Compliant structures with time-varying moment of inertia
JP5287939B2 (ja) * 2011-06-28 2013-09-11 株式会社デンソー 角速度センサ
ITTO20110806A1 (it) 2011-09-12 2013-03-13 St Microelectronics Srl Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro
US8448513B2 (en) 2011-10-05 2013-05-28 Freescale Semiconductor, Inc. Rotary disk gyroscope
US9547095B2 (en) 2012-12-19 2017-01-17 Westerngeco L.L.C. MEMS-based rotation sensor for seismic applications and sensor units having same
US9194704B2 (en) * 2013-03-13 2015-11-24 Freescale Semiconductor, Inc. Angular rate sensor having multiple axis sensing capability
US9404747B2 (en) 2013-10-30 2016-08-02 Stmicroelectroncs S.R.L. Microelectromechanical gyroscope with compensation of quadrature error drift
CN105091874A (zh) * 2014-05-23 2015-11-25 北京大学 一种双解耦微机械轮式水平轴陀螺
CN113970324B (zh) * 2020-07-23 2023-09-05 昇佳电子股份有限公司 陀螺仪的结构
CN116147600A (zh) * 2021-10-27 2023-05-23 苏州明皜传感科技股份有限公司 微机电多轴角速度感测器

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US5987986A (en) * 1994-07-29 1999-11-23 Litton Systems, Inc. Navigation grade micromachined rotation sensor system
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro

Also Published As

Publication number Publication date
DE60229418D1 (de) 2008-11-27
AU2002345705A1 (en) 2003-01-02
EP1440321A4 (de) 2006-04-05
EP1440321B1 (de) 2008-10-15
EP1440321A2 (de) 2004-07-28
WO2002103364A2 (en) 2002-12-27
US20020189351A1 (en) 2002-12-19
WO2002103364A3 (en) 2003-10-09

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
REN Ceased due to non-payment of the annual fee