ATE37629T1 - DEVICE FOR PLASMA PROCESSING OF PLATE-SHAPED OBJECTS. - Google Patents

DEVICE FOR PLASMA PROCESSING OF PLATE-SHAPED OBJECTS.

Info

Publication number
ATE37629T1
ATE37629T1 AT84902592T AT84902592T ATE37629T1 AT E37629 T1 ATE37629 T1 AT E37629T1 AT 84902592 T AT84902592 T AT 84902592T AT 84902592 T AT84902592 T AT 84902592T AT E37629 T1 ATE37629 T1 AT E37629T1
Authority
AT
Austria
Prior art keywords
plate
plasma processing
shaped objects
objects
shaped
Prior art date
Application number
AT84902592T
Other languages
German (de)
Inventor
Pierre Parrens
Original Assignee
Nextral
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR8311183A external-priority patent/FR2550044B1/en
Application filed by Nextral filed Critical Nextral
Application granted granted Critical
Publication of ATE37629T1 publication Critical patent/ATE37629T1/en

Links

AT84902592T 1983-07-05 1984-07-05 DEVICE FOR PLASMA PROCESSING OF PLATE-SHAPED OBJECTS. ATE37629T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR8311183A FR2550044B1 (en) 1983-07-05 1983-07-05 APPARATUS FOR PLASMA TREATMENT OF WAFER-LIKE SUBSTRATES
PCT/FR1984/000167 WO1985000466A1 (en) 1983-07-05 1984-07-05 Apparatus for plasma treatment of plate-shaped substrats
EP84902592A EP0148898B1 (en) 1983-07-05 1984-07-05 Apparatus for plasma treatment of plate-shaped substrats

Publications (1)

Publication Number Publication Date
ATE37629T1 true ATE37629T1 (en) 1988-10-15

Family

ID=27227586

Family Applications (1)

Application Number Title Priority Date Filing Date
AT84902592T ATE37629T1 (en) 1983-07-05 1984-07-05 DEVICE FOR PLASMA PROCESSING OF PLATE-SHAPED OBJECTS.

Country Status (1)

Country Link
AT (1) ATE37629T1 (en)

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Legal Events

Date Code Title Description
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