ATE370261T1 - POROUS GETTER DEVICES WITH REDUCED PARTICLE LOSS AND METHOD FOR THE PRODUCTION THEREOF - Google Patents
POROUS GETTER DEVICES WITH REDUCED PARTICLE LOSS AND METHOD FOR THE PRODUCTION THEREOFInfo
- Publication number
- ATE370261T1 ATE370261T1 AT01976619T AT01976619T ATE370261T1 AT E370261 T1 ATE370261 T1 AT E370261T1 AT 01976619 T AT01976619 T AT 01976619T AT 01976619 T AT01976619 T AT 01976619T AT E370261 T1 ATE370261 T1 AT E370261T1
- Authority
- AT
- Austria
- Prior art keywords
- deposition
- getter
- production
- particle loss
- porous getter
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/183—Composition or manufacture of getters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/11—Making porous workpieces or articles
- B22F3/1146—After-treatment maintaining the porosity
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/045—Alloys based on refractory metals
- C22C1/0458—Alloys based on titanium, zirconium or hafnium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12021—All metal or with adjacent metals having metal particles having composition or density gradient or differential porosity
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12479—Porous [e.g., foamed, spongy, cracked, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
- Y10T428/24298—Noncircular aperture [e.g., slit, diamond, rectangular, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
- Physical Vapour Deposition (AREA)
- Powder Metallurgy (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Catalysts (AREA)
Abstract
A method for reducing the loss of particles from the surface of porous getter bodies is taught herein. The method consists in producing on the surface of the porous getter a thin layer of a metal or metal alloy with a deposition technique selected among the deposition of materials from arc generated plasma, ionic beam deposition and cathodic deposition. The deposition technique allows for granular or columnar surface of the covering material but still allowing access to the surface of the getter material, resulting in a reduced getter particle loss.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT2000MI002099A IT1318937B1 (en) | 2000-09-27 | 2000-09-27 | METHOD FOR THE PRODUCTION OF POROUS GETTER DEVICES WITH REDUCED LOSS OF PARTICLES AND DEVICES SO PRODUCED |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE370261T1 true ATE370261T1 (en) | 2007-09-15 |
Family
ID=11445869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01976619T ATE370261T1 (en) | 2000-09-27 | 2001-09-25 | POROUS GETTER DEVICES WITH REDUCED PARTICLE LOSS AND METHOD FOR THE PRODUCTION THEREOF |
Country Status (13)
Country | Link |
---|---|
US (3) | US6620297B2 (en) |
EP (1) | EP1322795B1 (en) |
JP (1) | JP2004509757A (en) |
KR (1) | KR100784584B1 (en) |
CN (1) | CN1318642C (en) |
AT (1) | ATE370261T1 (en) |
AU (1) | AU2001295881A1 (en) |
DE (1) | DE60130001T2 (en) |
HK (1) | HK1073337A1 (en) |
IT (1) | IT1318937B1 (en) |
RU (1) | RU2253695C2 (en) |
TW (1) | TWI278523B (en) |
WO (1) | WO2002027058A1 (en) |
Families Citing this family (38)
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US6475725B1 (en) * | 1997-06-20 | 2002-11-05 | Baxter Aktiengesellschaft | Recombinant cell clones having increased stability and methods of making and using the same |
IT1312248B1 (en) * | 1999-04-12 | 2002-04-09 | Getters Spa | METHOD TO INCREASE THE PRODUCTIVITY OF THIN DISTRICT DISPOSAL PROCESSES ON A SUBSTRATE AND GETTER DEVICES FOR |
WO2002006344A2 (en) * | 2000-06-08 | 2002-01-24 | Baylor College Of Medicine | Rtvp based compositions and methods for the treatment of prostate cancer |
IT1318937B1 (en) * | 2000-09-27 | 2003-09-19 | Getters Spa | METHOD FOR THE PRODUCTION OF POROUS GETTER DEVICES WITH REDUCED LOSS OF PARTICLES AND DEVICES SO PRODUCED |
JP4024151B2 (en) | 2001-05-01 | 2007-12-19 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Discharge lamp |
US20050187153A1 (en) * | 2001-06-08 | 2005-08-25 | Baylor College Of Medicine | RTVP based compositions and methods for the treatment of prostate cancer, autoimmunity and infectious disease |
JP3740479B2 (en) * | 2002-07-23 | 2006-02-01 | キヤノン株式会社 | Image display device and manufacturing method thereof |
US6911065B2 (en) * | 2002-12-26 | 2005-06-28 | Matheson Tri-Gas, Inc. | Method and system for supplying high purity fluid |
JP2004265776A (en) * | 2003-03-03 | 2004-09-24 | Hitachi Ltd | Organic el display |
US7135141B2 (en) * | 2003-03-31 | 2006-11-14 | Hitachi Metals, Ltd. | Method of manufacturing a sintered body |
ITMI20031178A1 (en) * | 2003-06-11 | 2004-12-12 | Getters Spa | MULTILAYER NON-EVAPORABLE GETTER DEPOSITS OBTAINED FOR |
US7871660B2 (en) * | 2003-11-14 | 2011-01-18 | Saes Getters, S.P.A. | Preparation of getter surfaces using caustic chemicals |
US7824685B2 (en) * | 2004-01-26 | 2010-11-02 | Baylor College Of Medicine | RTVP based compositions and methods for the treatment of prostate cancer |
KR20070033354A (en) * | 2004-06-18 | 2007-03-26 | 가부시끼가이샤 도시바 | An image display apparatus and a manufacturing method of an image display apparatus |
KR100641301B1 (en) * | 2004-09-15 | 2006-11-02 | 주식회사 세종소재 | Combination getter and hydrargyrum supplement material |
ITMI20042271A1 (en) * | 2004-11-23 | 2005-02-23 | Getters Spa | NON EVAPORABLE GETTER ALLOYS BY HYDROGEN ABSORPTION |
US20060240276A1 (en) * | 2005-04-20 | 2006-10-26 | Technic, Inc. | Underlayer for reducing surface oxidation of plated deposits |
EP1821328A1 (en) | 2006-02-10 | 2007-08-22 | Nanoshell Materials Research & Development GmbH | Metallic dendritic gas sorbents and method for producing the same |
WO2007149546A2 (en) * | 2006-06-21 | 2007-12-27 | Proteus Biomedical, Inc. | Implantable medical devices comprising cathodic arc produced structures |
FR2903678B1 (en) * | 2006-07-13 | 2008-10-24 | Commissariat Energie Atomique | ENCAPSULATED MICROCOMPONENT EQUIPPED WITH AT LEAST ONE GETTER |
EP2126155B1 (en) | 2006-12-15 | 2019-03-13 | BAE Systems PLC | Improvements relating to thin film getter devices |
ITMI20090410A1 (en) * | 2009-03-18 | 2010-09-19 | Getters Spa | NON EVAPORABLE GETTER ALLOYS PARTICULARLY SUITABLE FOR HYDROGEN ABSORPTION |
DE102009029495A1 (en) * | 2009-09-16 | 2011-03-24 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Transmitter for a multi-sensor system, in particular as field device for process automation technology and method for operating the transmitter |
CN102534489A (en) * | 2010-12-30 | 2012-07-04 | 鸿富锦精密工业(深圳)有限公司 | Film coating part and manufacturing method thereof |
RU2474912C1 (en) * | 2011-08-23 | 2013-02-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "МИЭТ" (МИЭТ) | Method to produce gas-absorbing structure |
RU2513563C2 (en) * | 2012-08-17 | 2014-04-20 | Федеральное государственное унитарное предприятие "Научно-производственное предприятие "Исток" (ФГУП "НПП "Исток") | Sintered non-evaporating getter |
RU2523718C2 (en) * | 2012-11-20 | 2014-07-20 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "МИЭТ" (МИЭТ) | Nanocomposite gettering structure and method of its preparation |
JP5731085B2 (en) * | 2013-02-05 | 2015-06-10 | キヤノンアネルバ株式会社 | Deposition equipment |
FR3003647B1 (en) * | 2013-03-25 | 2015-12-25 | IFP Energies Nouvelles | METHOD AND SYSTEM FOR ANALYZING A GASEOUS FLUID COMPRISING AT LEAST ONE RARE GAS USING A GETTERIZATION SUBSTRATE |
RU2532788C1 (en) * | 2013-06-20 | 2014-11-10 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский технологический университет "МИСиС" | Method for obtaining volumetric and porous structures of hydrogen bearing alloys capable of sustaining multiple hydration-dehydration cycles without destruction |
US9764946B2 (en) | 2013-10-24 | 2017-09-19 | Analog Devices, Inc. | MEMs device with outgassing shield |
ITMI20131921A1 (en) * | 2013-11-20 | 2015-05-21 | Getters Spa | NON EVAPORABLE GETTER ALLOYS PARTICULARLY SUITABLE FOR THE ABSORPTION OF HYDROGEN AND CARBON MONOXIDE |
EP3012020B1 (en) | 2014-10-24 | 2020-03-04 | Samsung Electronics Co., Ltd. | Gas-adsorbing material and use of a vacuum insulation material including the same |
US10801097B2 (en) * | 2015-12-23 | 2020-10-13 | Praxair S.T. Technology, Inc. | Thermal spray coatings onto non-smooth surfaces |
CN106591790B (en) * | 2016-12-28 | 2019-12-13 | 杭州大立微电子有限公司 | Target material preparation method and getter film forming method |
CN111465741A (en) * | 2017-11-17 | 2020-07-28 | 洛科威国际有限公司 | Suspension system |
CN110820031A (en) * | 2019-11-19 | 2020-02-21 | 有研工程技术研究院有限公司 | Preparation method of miniature getter |
CN111001545A (en) * | 2019-11-25 | 2020-04-14 | 烟台艾睿光电科技有限公司 | Method for preventing getter from falling particles and getter and reinforced coating assembly |
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US2491284A (en) * | 1946-12-13 | 1949-12-13 | Bell Telephone Labor Inc | Electrode for electron discharge devices and method of making the same |
DE1064646B (en) * | 1955-06-07 | 1959-09-03 | Ernesto Gabbrielli | Process for making getters |
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IT963874B (en) * | 1972-08-10 | 1974-01-21 | Getters Spa | IMPROVED GETTER DEVICE CONTAINING NON-EVAPORABLE MATERIAL |
US4428856A (en) | 1982-09-30 | 1984-01-31 | Boyarina Maya F | Non-evaporable getter |
IT1173866B (en) | 1984-03-16 | 1987-06-24 | Getters Spa | PERFECT METHOD FOR MANUFACTURING NON-VARIABLE PORTABLE GETTER DEVICES AND GETTER DEVICES SO PRODUCED |
US5456740A (en) * | 1994-06-22 | 1995-10-10 | Millipore Corporation | High-efficiency metal membrane getter element and process for making |
US5908579A (en) | 1994-12-02 | 1999-06-01 | Saes Getters, S.P.A. | Process for producing high-porosity non-evaporable getter materials and materials thus obtained |
IT1283484B1 (en) | 1996-07-23 | 1998-04-21 | Getters Spa | METHOD FOR THE PRODUCTION OF THIN SUPPORTED LAYERS OF NON-EVAPORABLE GETTER MATERIAL AND GETTER DEVICES THUS PRODUCED |
CN1187684A (en) * | 1997-01-10 | 1998-07-15 | 工程吸气公司 | Evaporable getter device with reduced time of activation |
FR2760089B1 (en) * | 1997-02-26 | 1999-04-30 | Org Europeene De Rech | ARRANGEMENT AND METHOD FOR IMPROVING THE VACUUM IN A VERY HIGH VACUUM SYSTEM |
IT1290451B1 (en) | 1997-04-03 | 1998-12-03 | Getters Spa | NON-EVAPORABLE GETTER ALLOYS |
IT1301948B1 (en) * | 1998-07-28 | 2000-07-20 | Getters Spa | PROCESS FOR THE PRODUCTION OF EVAPORABLE GETTER DEVICES LOSS OF PARTICLES |
JP2002523860A (en) * | 1998-08-21 | 2002-07-30 | メドトロニック・エイヴイイー・インコーポレーテッド | Cathode structure having getter material and diamond film and method of manufacturing the same |
JP3518855B2 (en) * | 1999-02-26 | 2004-04-12 | キヤノン株式会社 | Getter, hermetic container having getter, image forming apparatus, and method of manufacturing getter |
CA2339155C (en) * | 1999-06-02 | 2008-05-27 | Saes Getters S.P.A. | Composite materials capable of hydrogen sorption independently from activating treatments and methods for the production thereof |
IT1318937B1 (en) * | 2000-09-27 | 2003-09-19 | Getters Spa | METHOD FOR THE PRODUCTION OF POROUS GETTER DEVICES WITH REDUCED LOSS OF PARTICLES AND DEVICES SO PRODUCED |
-
2000
- 2000-09-27 IT IT2000MI002099A patent/IT1318937B1/en active
-
2001
- 2001-09-20 TW TW090123227A patent/TWI278523B/en not_active IP Right Cessation
- 2001-09-25 RU RU2003112221/02A patent/RU2253695C2/en active
- 2001-09-25 AU AU2001295881A patent/AU2001295881A1/en not_active Abandoned
- 2001-09-25 EP EP01976619A patent/EP1322795B1/en not_active Expired - Lifetime
- 2001-09-25 WO PCT/IT2001/000488 patent/WO2002027058A1/en active IP Right Grant
- 2001-09-25 CN CNB018164315A patent/CN1318642C/en not_active Expired - Lifetime
- 2001-09-25 JP JP2002530818A patent/JP2004509757A/en active Pending
- 2001-09-25 KR KR1020037004244A patent/KR100784584B1/en active IP Right Grant
- 2001-09-25 AT AT01976619T patent/ATE370261T1/en active
- 2001-09-25 DE DE60130001T patent/DE60130001T2/en not_active Expired - Lifetime
- 2001-09-27 US US09/967,234 patent/US6620297B2/en not_active Expired - Fee Related
-
2003
- 2003-03-14 US US10/389,382 patent/US6783696B2/en not_active Expired - Lifetime
-
2004
- 2004-06-18 US US10/871,353 patent/US7122100B2/en not_active Expired - Fee Related
-
2005
- 2005-07-11 HK HK05105847A patent/HK1073337A1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20020093003A1 (en) | 2002-07-18 |
DE60130001T2 (en) | 2008-05-08 |
HK1073337A1 (en) | 2005-09-30 |
EP1322795A1 (en) | 2003-07-02 |
US7122100B2 (en) | 2006-10-17 |
US20050023134A1 (en) | 2005-02-03 |
RU2253695C2 (en) | 2005-06-10 |
WO2002027058A8 (en) | 2003-04-10 |
KR100784584B1 (en) | 2007-12-10 |
IT1318937B1 (en) | 2003-09-19 |
US20030165707A1 (en) | 2003-09-04 |
KR20030038765A (en) | 2003-05-16 |
ITMI20002099A0 (en) | 2000-09-27 |
CN1596323A (en) | 2005-03-16 |
JP2004509757A (en) | 2004-04-02 |
DE60130001D1 (en) | 2007-09-27 |
TWI278523B (en) | 2007-04-11 |
AU2001295881A1 (en) | 2002-04-08 |
US6783696B2 (en) | 2004-08-31 |
CN1318642C (en) | 2007-05-30 |
US6620297B2 (en) | 2003-09-16 |
WO2002027058A1 (en) | 2002-04-04 |
EP1322795B1 (en) | 2007-08-15 |
ITMI20002099A1 (en) | 2002-03-27 |
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