ATE369547T1 - Optisches messsystem - Google Patents

Optisches messsystem

Info

Publication number
ATE369547T1
ATE369547T1 AT04806002T AT04806002T ATE369547T1 AT E369547 T1 ATE369547 T1 AT E369547T1 AT 04806002 T AT04806002 T AT 04806002T AT 04806002 T AT04806002 T AT 04806002T AT E369547 T1 ATE369547 T1 AT E369547T1
Authority
AT
Austria
Prior art keywords
slm
measuring system
optical measuring
phase
amplitude distribution
Prior art date
Application number
AT04806002T
Other languages
English (en)
Inventor
Melanie Holmes
Original Assignee
Swan Thomas & Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swan Thomas & Co Ltd filed Critical Swan Thomas & Co Ltd
Application granted granted Critical
Publication of ATE369547T1 publication Critical patent/ATE369547T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46Systems using spatial filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Holo Graphy (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Glass Compositions (AREA)
  • Surgical Instruments (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Gyroscopes (AREA)
AT04806002T 2003-12-12 2004-12-09 Optisches messsystem ATE369547T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0328904.8A GB0328904D0 (en) 2003-12-12 2003-12-12 Scarab

Publications (1)

Publication Number Publication Date
ATE369547T1 true ATE369547T1 (de) 2007-08-15

Family

ID=30130162

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04806002T ATE369547T1 (de) 2003-12-12 2004-12-09 Optisches messsystem

Country Status (7)

Country Link
US (2) US7442909B2 (de)
EP (2) EP1697707B1 (de)
AT (1) ATE369547T1 (de)
DE (1) DE602004008111T2 (de)
ES (1) ES2291973T3 (de)
GB (1) GB0328904D0 (de)
WO (1) WO2005057149A1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0121308D0 (en) 2001-09-03 2001-10-24 Thomas Swan & Company Ltd Optical processing
GB0328904D0 (en) * 2003-12-12 2004-01-14 Swan Thomas & Co Ltd Scarab
US7601967B2 (en) 2005-12-21 2009-10-13 Searete Llc Multi-stage waveform detector
US8207907B2 (en) 2006-02-16 2012-06-26 The Invention Science Fund I Llc Variable metamaterial apparatus
US7649182B2 (en) 2006-10-26 2010-01-19 Searete Llc Variable multi-stage waveform detector
US7391032B1 (en) * 2005-12-21 2008-06-24 Searete Llc Multi-stage waveform detector
US7649180B2 (en) 2005-12-21 2010-01-19 Searete Llc Multi-stage waveform detector
US7427762B2 (en) * 2005-12-21 2008-09-23 Searete Llc Variable multi-stage waveform detector
GB0822247D0 (en) * 2008-12-05 2009-01-14 Qinetiq Ltd Wavefront sensing method and apparatus
JP5103507B2 (ja) * 2010-08-04 2012-12-19 シャープ株式会社 マルチディスプレイシステム
GB2504970A (en) 2012-08-15 2014-02-19 Swan Thomas & Co Ltd Optical device and methods to reduce cross-talk
DE102012024692B3 (de) * 2012-12-18 2014-03-20 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Phasenrausch-Messgerät
EP3129814A4 (de) * 2014-04-11 2017-04-12 Lockheed Martin Corporation System und verfahren zur kontaktfreien messung von optischer energie
US11609427B2 (en) 2015-10-16 2023-03-21 Ostendo Technologies, Inc. Dual-mode augmented/virtual reality (AR/VR) near-eye wearable displays
US11106273B2 (en) 2015-10-30 2021-08-31 Ostendo Technologies, Inc. System and methods for on-body gestural interfaces and projection displays
US10345594B2 (en) 2015-12-18 2019-07-09 Ostendo Technologies, Inc. Systems and methods for augmented near-eye wearable displays
US10578882B2 (en) * 2015-12-28 2020-03-03 Ostendo Technologies, Inc. Non-telecentric emissive micro-pixel array light modulators and methods of fabrication thereof
US10353203B2 (en) 2016-04-05 2019-07-16 Ostendo Technologies, Inc. Augmented/virtual reality near-eye displays with edge imaging lens comprising a plurality of display devices
US10453431B2 (en) 2016-04-28 2019-10-22 Ostendo Technologies, Inc. Integrated near-far light field display systems
US10522106B2 (en) 2016-05-05 2019-12-31 Ostendo Technologies, Inc. Methods and apparatus for active transparency modulation
CN106059677A (zh) * 2016-05-27 2016-10-26 上海菜牛光电科技有限公司 空间光调制器
GB2557231B (en) 2016-11-30 2020-10-07 Jaguar Land Rover Ltd Multi-depth display apparatus
GB2557230B (en) 2016-11-30 2019-09-25 Jaguar Land Rover Ltd Multi-depth augmented reality display
GB2557227B (en) 2016-11-30 2021-07-07 Jaguar Land Rover Ltd Multi-depth display apparatus
GB2557229A (en) 2016-11-30 2018-06-20 Cambridge Entpr Ltd Multi-depth augmented reality display
DE102017215976B4 (de) * 2017-09-11 2025-02-20 Robert Bosch Gmbh Verfahren zur Vermessung eines Laserstrahls
JP7764292B2 (ja) * 2022-03-29 2025-11-05 浜松ホトニクス株式会社 空間光変調装置、加工装置、及び、位置推定方法
CN115482225B (zh) * 2022-09-26 2025-09-05 福建盘盛信息光学有限公司 非干涉、非迭代式复振幅读取方法和装置
CN116643422B (zh) * 2023-05-30 2025-07-25 武汉光迅科技股份有限公司 一种lcos芯片相位校准的装置和方法
CN119439680B (zh) * 2024-12-20 2025-10-17 南京大学 基于三光束非线性全息的高保真结构化光场生成方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3921080A (en) * 1974-01-03 1975-11-18 Itek Corp Analog data processor
US4980922A (en) * 1988-05-31 1990-12-25 Grumman Aerospace Corporation System for output plane calibration of an optical correlator
US5719650A (en) * 1995-05-12 1998-02-17 Massachusetts Institute Of Technology High-fidelity spatial light modulator
GB9820664D0 (en) * 1998-09-23 1998-11-18 Isis Innovation Wavefront sensing device
EP1346252B1 (de) * 2000-12-22 2006-09-27 Riso National Laboratory Verfahren und vorrichtung zur erzeugung einer phasenmodulierten wellenfront elektromagnetischer strahlung
US6611645B2 (en) * 2001-01-18 2003-08-26 Veridian Erim International Signal analyzer using tapped optical fibers
US6674519B2 (en) * 2001-12-21 2004-01-06 Northrop Grumman Corporation Optical phase front measurement unit
JP2003227914A (ja) * 2002-01-31 2003-08-15 Canon Inc Euv光用の波面分割素子及びそれを有する位相測定装置
GB0328904D0 (en) * 2003-12-12 2004-01-14 Swan Thomas & Co Ltd Scarab
JP2007532931A (ja) * 2004-04-19 2007-11-15 アリスト インストルメンツ インコーポレイテッド 薄膜及び限界寸法測定のためのビーム・プロファイル式複合反射率システム及び方法

Also Published As

Publication number Publication date
ES2291973T3 (es) 2008-03-01
EP1850100B1 (de) 2016-02-17
EP1697707A1 (de) 2006-09-06
GB0328904D0 (en) 2004-01-14
WO2005057149A1 (en) 2005-06-23
US20080265150A1 (en) 2008-10-30
EP1697707B1 (de) 2007-08-08
US20070052694A1 (en) 2007-03-08
EP1850100A2 (de) 2007-10-31
DE602004008111T2 (de) 2008-04-30
EP1850100A3 (de) 2009-02-25
DE602004008111D1 (de) 2007-09-20
US7442909B2 (en) 2008-10-28
US7847227B2 (en) 2010-12-07

Similar Documents

Publication Publication Date Title
ATE369547T1 (de) Optisches messsystem
WO2003021352A1 (en) Reticle and optical characteristic measuring method
WO2005010799A3 (en) Optical encoding and reconstruction
WO2004051220A3 (en) Apparatus and methods for removing optical abberations during an optical inspection
TW200707122A (en) Exposure method and apparatus
CA2485030A1 (en) Downhole optical sensor system with reference
DE69813065D1 (de) Röntgenstrahlenquelle mittels laser erzeugtem Plasma, und Vorrichtung für Halbleiterlithographie und Verfahren unter Verwendung derselben
AU2003205981A1 (en) Microscopy imaging apparatus and mehod for generating an image
TW200717186A (en) Exposure apparatus and method
WO2007064578A3 (en) Optical analysis system and optical train
WO2007136681A3 (en) Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system
EP4400811A3 (de) Verfahren und system zur bestimmung von gitterstörungen durch moduliertes licht
TW200720062A (en) Rapid prototyping apparatus and method of rapid prototyping
WO2008045609A3 (en) Interferometer-based real time early fouling detection system and method
WO2007103019A3 (en) Sunlight simulator apparatus
WO2009078223A1 (ja) 空間光変調ユニット、照明光学系、露光装置、およびデバイス製造方法
TW200500822A (en) Lithographic apparatus and device manufacturing method
DE60334246D1 (de) Modulieren von immunantworten
DE60209627D1 (de) Optisches Modulationssystem mit einer hochstabilisierten Vorspannungssteuerung für einen optischen Modulator
DE60234671D1 (de) Verfahren zur Korrektur der Strahlintensität in einem Bildaufzeichnungsgerät mittels eines Mehrkanal-Lichtmodulators
AU2003276599A1 (en) Method and arrangement for optical coherence tomography
GB2432666A (en) Interferometer calibration methods and apparatus
DE60315100D1 (de) Verfahren und Gerät zur Korrektur der Neigungs des Lichtstrahls, der ein optisches Aufzeichnungsmedium abtastet
DE60316901D1 (de) Optisches Übertragungssystem unter Verwendung eines optischen Phasenmodulators
TW200632897A (en) Methods and apparatus to compensate for power output variations over time

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties