ATE34851T1 - ELECTRON RADIATION SENSITIVE RESIST. - Google Patents

ELECTRON RADIATION SENSITIVE RESIST.

Info

Publication number
ATE34851T1
ATE34851T1 AT83102212T AT83102212T ATE34851T1 AT E34851 T1 ATE34851 T1 AT E34851T1 AT 83102212 T AT83102212 T AT 83102212T AT 83102212 T AT83102212 T AT 83102212T AT E34851 T1 ATE34851 T1 AT E34851T1
Authority
AT
Austria
Prior art keywords
radiation sensitive
electron radiation
sensitive resist
resist
electron
Prior art date
Application number
AT83102212T
Other languages
German (de)
Inventor
Donald H Lorenz
Earl P Williams
Original Assignee
Gaf Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/381,287 external-priority patent/US4375398A/en
Application filed by Gaf Corp filed Critical Gaf Corp
Application granted granted Critical
Publication of ATE34851T1 publication Critical patent/ATE34851T1/en

Links

AT83102212T 1982-03-12 1983-03-07 ELECTRON RADIATION SENSITIVE RESIST. ATE34851T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35738182A 1982-03-12 1982-03-12
US06/381,287 US4375398A (en) 1982-03-12 1982-05-24 Electron beam sensitive resist of an anhydride copolymer
EP83102212A EP0088977B1 (en) 1982-03-12 1983-03-07 Electron beam sensitive resist

Publications (1)

Publication Number Publication Date
ATE34851T1 true ATE34851T1 (en) 1988-06-15

Family

ID=27226161

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83102212T ATE34851T1 (en) 1982-03-12 1983-03-07 ELECTRON RADIATION SENSITIVE RESIST.

Country Status (1)

Country Link
AT (1) ATE34851T1 (en)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee