ATE340356T1 - Pyroelektrischer sensor mit reduzierter parasitärer thermischer kopplung zwischen seinen pixeln - Google Patents

Pyroelektrischer sensor mit reduzierter parasitärer thermischer kopplung zwischen seinen pixeln

Info

Publication number
ATE340356T1
ATE340356T1 AT01962804T AT01962804T ATE340356T1 AT E340356 T1 ATE340356 T1 AT E340356T1 AT 01962804 T AT01962804 T AT 01962804T AT 01962804 T AT01962804 T AT 01962804T AT E340356 T1 ATE340356 T1 AT E340356T1
Authority
AT
Austria
Prior art keywords
pixels
pyroelectric sensor
substrate
electrodes
contact
Prior art date
Application number
AT01962804T
Other languages
English (en)
Inventor
Andreas Seifert
Paul Muralt
Original Assignee
Ecole Polytech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ecole Polytech filed Critical Ecole Polytech
Application granted granted Critical
Publication of ATE340356T1 publication Critical patent/ATE340356T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
AT01962804T 2000-08-04 2001-07-06 Pyroelektrischer sensor mit reduzierter parasitärer thermischer kopplung zwischen seinen pixeln ATE340356T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00116867A EP1178294A1 (de) 2000-08-04 2000-08-04 Pyroelektrischer Sensor mit verminderter parasitärer thermischer Kopplung zwischen seinen Pixeln

Publications (1)

Publication Number Publication Date
ATE340356T1 true ATE340356T1 (de) 2006-10-15

Family

ID=8169453

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01962804T ATE340356T1 (de) 2000-08-04 2001-07-06 Pyroelektrischer sensor mit reduzierter parasitärer thermischer kopplung zwischen seinen pixeln

Country Status (8)

Country Link
US (1) US20030173519A1 (de)
EP (2) EP1178294A1 (de)
JP (1) JP2004506188A (de)
CN (1) CN1446313A (de)
AT (1) ATE340356T1 (de)
AU (1) AU2001283907A1 (de)
DE (1) DE60123257D1 (de)
WO (1) WO2002012848A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007062053B4 (de) * 2007-12-21 2012-01-19 Pyreos Ltd. Verfahren zum Herstellen einer Vorrichtung zur Detektion von Wärmestrahlung
DE102013209541A1 (de) * 2013-05-23 2014-11-27 Siemens Aktiengesellschaft Sensorelementanordnung und Verfahren zum Herstellen einer Sensorelementanordnung
CN105390604B (zh) * 2015-12-11 2017-12-08 上海德凯仪器有限公司 热释电传感器制作工艺
FR3074574B1 (fr) * 2017-12-04 2020-01-03 Commissariat A L'energie Atomique Et Aux Energies Alternatives Capteur de motif thermique a capacite pyroelectrique
CN120008746B (zh) * 2023-11-14 2025-10-17 中国科学院半导体研究所 一种微测辐射热计结构及其制作方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2200246B (en) * 1985-09-12 1989-11-01 Plessey Co Plc Thermal detector array
FR2656689A1 (fr) * 1989-12-29 1991-07-05 Philips Electronique Lab Element detecteur pyroelectrique et dispositifs pour la detection de phenomenes thermiques.
EP0526551B1 (de) * 1990-04-26 1996-12-11 The Commonwealth Of Australia Thermischer infrarotdetektor des bolometertyps mit halbleiterfilm
US5182624A (en) * 1990-08-08 1993-01-26 Minnesota Mining And Manufacturing Company Solid state electromagnetic radiation detector fet array
CA2118597C (en) * 1991-11-04 2001-12-11 Paul W. Kruse, Jr. Thin film pyroelectric imaging array
JPH06120569A (ja) * 1992-10-06 1994-04-28 Tdk Corp 赤外線検出器
EP0827216B1 (de) * 1996-08-30 2007-01-24 Texas Instruments Incorporated Verbesserungen für thermische Bildsysteme
US5949071A (en) * 1997-08-14 1999-09-07 Sandia Corporation Uncooled thin film pyroelectric IR detector with aerogel thermal isolation
US6292140B1 (en) * 1999-11-03 2001-09-18 Hypres, Inc. Antenna for millimeter-wave imaging and bolometer employing the antenna

Also Published As

Publication number Publication date
CN1446313A (zh) 2003-10-01
AU2001283907A1 (en) 2002-02-18
EP1307717A1 (de) 2003-05-07
EP1307717B1 (de) 2006-09-20
JP2004506188A (ja) 2004-02-26
EP1178294A1 (de) 2002-02-06
US20030173519A1 (en) 2003-09-18
DE60123257D1 (de) 2006-11-02
WO2002012848A1 (fr) 2002-02-14

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Legal Events

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