ATE307292T1 - BIDIRECTIONAL DYNAMIC MICROPUMP - Google Patents

BIDIRECTIONAL DYNAMIC MICROPUMP

Info

Publication number
ATE307292T1
ATE307292T1 AT97119955T AT97119955T ATE307292T1 AT E307292 T1 ATE307292 T1 AT E307292T1 AT 97119955 T AT97119955 T AT 97119955T AT 97119955 T AT97119955 T AT 97119955T AT E307292 T1 ATE307292 T1 AT E307292T1
Authority
AT
Austria
Prior art keywords
actuator
channels
during
turbulent flow
period
Prior art date
Application number
AT97119955T
Other languages
German (de)
Inventor
Peter Heun
Holger Klingner
Original Assignee
Holger Klingner
Peter Heun
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Holger Klingner, Peter Heun filed Critical Holger Klingner
Application granted granted Critical
Publication of ATE307292T1 publication Critical patent/ATE307292T1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1077—Flow resistance valves, e.g. without moving parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/04—Motor parameters of linear electric motors
    • F04B2203/0409—Linear speed

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
  • Micromachines (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

The channels (7,8) have different cross-sectional shapes or surfaces or different lengths or a combination of these. They have non-linear, undirected flow resistances of varying characteristics and their variable fluid flows are controlled in direction-dependent manner between laminar and turbulent flow with suitable impulses applied to the actuator (3) with unsymmetrical flank steepness. The structure is formed by anisotropic etching in a silicon wafer (1), is closed with a cover and provided with a piezo-actuator (3). The impulse has a flank steepness during at least the lapse of a period, which during this period produces a turbulent flow in one of the channels.
AT97119955T 1996-11-25 1997-11-14 BIDIRECTIONAL DYNAMIC MICROPUMP ATE307292T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19648694A DE19648694C1 (en) 1996-11-25 1996-11-25 Bi-directional dynamic micropump

Publications (1)

Publication Number Publication Date
ATE307292T1 true ATE307292T1 (en) 2005-11-15

Family

ID=7812664

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97119955T ATE307292T1 (en) 1996-11-25 1997-11-14 BIDIRECTIONAL DYNAMIC MICROPUMP

Country Status (3)

Country Link
EP (1) EP0844395B1 (en)
AT (1) ATE307292T1 (en)
DE (2) DE19648694C1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19860227C1 (en) * 1998-12-24 2000-05-25 Daimler Chrysler Ag Micropump for fuel cell has capillary duct formed by hollow fibre bundle between tank and evaporator
JP3629405B2 (en) * 2000-05-16 2005-03-16 コニカミノルタホールディングス株式会社 Micro pump
DE10102152C1 (en) * 2001-01-18 2002-06-20 Roland Zengerle Micro-dosing device applicable in pharmaceutical and biotechnological research, comprises a media reservoir for holding a liquid to be dosed, a nozzle, and a drive unit for the liquid located in the reservoir and the nozzle
DE10212278B4 (en) * 2002-03-20 2007-10-25 Dietrich Dr.-Ing. Roscher Ink pen
JP4378937B2 (en) 2002-06-03 2009-12-09 セイコーエプソン株式会社 pump
DE102008016121B4 (en) 2007-11-29 2010-03-11 Ihp Gmbh - Innovations For High Performance Microelectronics / Leibniz-Institut Für Innovative Mikroelektronik Device and method for measuring the viscosity
DE102011115622A1 (en) * 2010-12-20 2012-06-21 Technische Universität Ilmenau Micropump and apparatus and method for generating a fluid flow
DE102013015453A1 (en) 2012-12-21 2014-07-10 Thomas Magnete Gmbh Electromagnetically driven reciprocating piston pump has electromagnetic drive, where cut-off frequency of electromagnetic drive is increased by provision of electric current in comparison to voltage-controlled drive

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5094594A (en) * 1990-04-23 1992-03-10 Genomyx, Incorporated Piezoelectric pumping device
DE4223019C1 (en) * 1992-07-13 1993-11-18 Fraunhofer Ges Forschung Electromechanical valveless microminiature pump - has membrane actuator for applying oscillation perpendicular to fluid flow and anisotropic structure e.g. mfd by etching of silicon wafer.
SE508435C2 (en) * 1993-02-23 1998-10-05 Erik Stemme Diaphragm pump type pump
DE4422743A1 (en) * 1994-06-29 1996-01-04 Torsten Gerlach Micropump
DE4433894A1 (en) * 1994-09-22 1996-03-28 Fraunhofer Ges Forschung Method and device for controlling a micropump
DE19546570C1 (en) * 1995-12-13 1997-03-27 Inst Mikro Und Informationstec Fluid micropump incorporated in silicon chip

Also Published As

Publication number Publication date
EP0844395A3 (en) 2001-01-10
EP0844395A2 (en) 1998-05-27
DE59712449D1 (en) 2006-03-02
EP0844395B1 (en) 2005-10-19
DE19648694C1 (en) 1998-04-30

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Legal Events

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