ATE29602T1 - DECOATING AGENT AND PROCESS FOR DECOATING A PHOTORESIST COATING. - Google Patents

DECOATING AGENT AND PROCESS FOR DECOATING A PHOTORESIST COATING.

Info

Publication number
ATE29602T1
ATE29602T1 AT82108781T AT82108781T ATE29602T1 AT E29602 T1 ATE29602 T1 AT E29602T1 AT 82108781 T AT82108781 T AT 82108781T AT 82108781 T AT82108781 T AT 82108781T AT E29602 T1 ATE29602 T1 AT E29602T1
Authority
AT
Austria
Prior art keywords
decoating
agent
photoresist coating
photoresist
coating
Prior art date
Application number
AT82108781T
Other languages
German (de)
Inventor
Irl Eugene Ward Jr
Lisa Gail Hallquist
Thomas Joseph Hurley
Original Assignee
Baker Chem Co J T
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/408,052 external-priority patent/US4428871A/en
Application filed by Baker Chem Co J T filed Critical Baker Chem Co J T
Application granted granted Critical
Publication of ATE29602T1 publication Critical patent/ATE29602T1/en

Links

AT82108781T 1981-09-23 1982-09-22 DECOATING AGENT AND PROCESS FOR DECOATING A PHOTORESIST COATING. ATE29602T1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US30478981A 1981-09-23 1981-09-23
US06/408,052 US4428871A (en) 1981-09-23 1982-08-17 Stripping compositions and methods of stripping resists
EP82108781A EP0075329B1 (en) 1981-09-23 1982-09-22 Stripping compositions and method of stripping resists

Publications (1)

Publication Number Publication Date
ATE29602T1 true ATE29602T1 (en) 1987-09-15

Family

ID=27225700

Family Applications (1)

Application Number Title Priority Date Filing Date
AT82108781T ATE29602T1 (en) 1981-09-23 1982-09-22 DECOATING AGENT AND PROCESS FOR DECOATING A PHOTORESIST COATING.

Country Status (1)

Country Link
AT (1) ATE29602T1 (en)

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
EEFA Change of the company name
EEFA Change of the company name
EELA Cancelled due to lapse of time