ATE166972T1 - Steuersystem für abtastsonde - Google Patents
Steuersystem für abtastsondeInfo
- Publication number
- ATE166972T1 ATE166972T1 AT92101379T AT92101379T ATE166972T1 AT E166972 T1 ATE166972 T1 AT E166972T1 AT 92101379 T AT92101379 T AT 92101379T AT 92101379 T AT92101379 T AT 92101379T AT E166972 T1 ATE166972 T1 AT E166972T1
- Authority
- AT
- Austria
- Prior art keywords
- probe
- control system
- predetermined direction
- physical phenomenon
- scanning probe
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/02—Coarse scanning or positioning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
- G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
- G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/85—Scanning probe control process
- Y10S977/851—Particular movement or positioning of scanning tip
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Vehicle Body Suspensions (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02934991A JP3169227B2 (ja) | 1991-01-29 | 1991-01-29 | 探針移動装置 |
JP2935091A JPH04252904A (ja) | 1991-01-29 | 1991-01-29 | 探針移動装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE166972T1 true ATE166972T1 (de) | 1998-06-15 |
Family
ID=26367539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT92101379T ATE166972T1 (de) | 1991-01-29 | 1992-01-28 | Steuersystem für abtastsonde |
Country Status (5)
Country | Link |
---|---|
US (1) | US5414690A (de) |
EP (1) | EP0497288B1 (de) |
AT (1) | ATE166972T1 (de) |
CA (1) | CA2059990C (de) |
DE (1) | DE69225724T2 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3053986B2 (ja) * | 1993-01-21 | 2000-06-19 | キヤノン株式会社 | 記録再生装置 |
US5751683A (en) * | 1995-07-24 | 1998-05-12 | General Nanotechnology, L.L.C. | Nanometer scale data storage device and associated positioning system |
US6337479B1 (en) * | 1994-07-28 | 2002-01-08 | Victor B. Kley | Object inspection and/or modification system and method |
US6339217B1 (en) * | 1995-07-28 | 2002-01-15 | General Nanotechnology Llc | Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
US6353219B1 (en) | 1994-07-28 | 2002-03-05 | Victor B. Kley | Object inspection and/or modification system and method |
US6520005B2 (en) | 1994-12-22 | 2003-02-18 | Kla-Tencor Corporation | System for sensing a sample |
US5948972A (en) * | 1994-12-22 | 1999-09-07 | Kla-Tencor Corporation | Dual stage instrument for scanning a specimen |
US5614712A (en) * | 1995-03-24 | 1997-03-25 | Quesant Instrument Corporation | Method of engaging the scanning probe of a scanning probe microscope with a sample surface |
US5874668A (en) | 1995-10-24 | 1999-02-23 | Arch Development Corporation | Atomic force microscope for biological specimens |
EP1012584A4 (de) * | 1997-01-21 | 2006-10-04 | Rave L L C | Vorrichtung zur kontrollie und/oder veränderung von gegenständen. |
US5773824A (en) * | 1997-04-23 | 1998-06-30 | International Business Machines Corporation | Method for improving measurement accuracy using active lateral scanning control of a probe |
US5801381A (en) * | 1997-05-21 | 1998-09-01 | International Business Machines Corporation | Method for protecting a probe tip using active lateral scanning control |
US5902928A (en) * | 1997-06-02 | 1999-05-11 | International Business Machines Corporation | Controlling engagement of a scanning microscope probe with a segmented piezoelectric actuator |
US6787768B1 (en) | 2001-03-08 | 2004-09-07 | General Nanotechnology Llc | Method and apparatus for tool and tip design for nanomachining and measurement |
US6752008B1 (en) | 2001-03-08 | 2004-06-22 | General Nanotechnology Llc | Method and apparatus for scanning in scanning probe microscopy and presenting results |
US6802646B1 (en) * | 2001-04-30 | 2004-10-12 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
US7196328B1 (en) | 2001-03-08 | 2007-03-27 | General Nanotechnology Llc | Nanomachining method and apparatus |
US6923044B1 (en) | 2001-03-08 | 2005-08-02 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
US6518570B1 (en) | 1998-04-03 | 2003-02-11 | Brookhaven Science Associates | Sensing mode atomic force microscope |
WO2000020823A2 (en) * | 1998-10-07 | 2000-04-13 | Massachusetts Institute Of Technology | Atomic force microscope for profiling high aspect ratio samples |
EP1196939A4 (de) * | 1999-07-01 | 2002-09-18 | Gen Nanotechnology Llc | Vorrichtung und verfahren zur untersuchung und/oder veränderungsobjekt |
US6473708B1 (en) * | 1999-12-20 | 2002-10-29 | Bechtel Bwxt Idaho, Llc | Device and method for self-verifying temperature measurement and control |
US6931710B2 (en) * | 2001-01-30 | 2005-08-23 | General Nanotechnology Llc | Manufacturing of micro-objects such as miniature diamond tool tips |
US7253407B1 (en) | 2001-03-08 | 2007-08-07 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
US7053369B1 (en) | 2001-10-19 | 2006-05-30 | Rave Llc | Scan data collection for better overall data accuracy |
US6813937B2 (en) | 2001-11-28 | 2004-11-09 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
JP2005538855A (ja) | 2002-09-09 | 2005-12-22 | ジェネラル ナノテクノロジー エルエルシー | 走査型プローブ顕微鏡の流体送達 |
GB0801900D0 (en) | 2008-02-01 | 2008-03-12 | Imp Innovations Ltd | Scanning probe microscopy |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2556492B2 (ja) * | 1986-12-24 | 1996-11-20 | キヤノン株式会社 | 再生装置及び再生法 |
JP2556491B2 (ja) * | 1986-12-24 | 1996-11-20 | キヤノン株式会社 | 記録装置及び記録法 |
DE3789373T2 (de) * | 1986-12-24 | 1994-06-23 | Canon Kk | Aufnahmegerät und Wiedergabegerät. |
EP0307211A3 (de) * | 1987-09-10 | 1991-05-15 | Seiko Instruments Inc. | Speicher-Lesegerät |
WO1989003510A1 (en) * | 1987-10-09 | 1989-04-20 | Hitachi, Ltd. | Analyzer |
JP2936545B2 (ja) * | 1988-06-24 | 1999-08-23 | 株式会社日立製作所 | 走査プローブ顕微鏡 |
JPH02275302A (ja) * | 1989-04-18 | 1990-11-09 | Canon Inc | 走査型トンネル顕微鏡 |
US5229606A (en) * | 1989-06-05 | 1993-07-20 | Digital Instruments, Inc. | Jumping probe microscope |
US5059793A (en) * | 1989-10-04 | 1991-10-22 | Olympus Optical Co., Ltd. | Scanning tunneling microscope having proper servo control function |
JPH04155633A (ja) * | 1990-10-17 | 1992-05-28 | Canon Inc | 情報読取り及び/又は入力装置 |
-
1992
- 1992-01-24 CA CA002059990A patent/CA2059990C/en not_active Expired - Fee Related
- 1992-01-28 DE DE69225724T patent/DE69225724T2/de not_active Expired - Fee Related
- 1992-01-28 AT AT92101379T patent/ATE166972T1/de active
- 1992-01-28 EP EP92101379A patent/EP0497288B1/de not_active Expired - Lifetime
-
1994
- 1994-10-24 US US08/328,391 patent/US5414690A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2059990C (en) | 1997-11-25 |
EP0497288A2 (de) | 1992-08-05 |
EP0497288A3 (en) | 1993-04-14 |
EP0497288B1 (de) | 1998-06-03 |
US5414690A (en) | 1995-05-09 |
DE69225724D1 (de) | 1998-07-09 |
DE69225724T2 (de) | 1999-01-14 |
CA2059990A1 (en) | 1992-07-30 |
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