ATE155922T1 - Ionenneutralisierungsvorrichtung - Google Patents

Ionenneutralisierungsvorrichtung

Info

Publication number
ATE155922T1
ATE155922T1 AT92106796T AT92106796T ATE155922T1 AT E155922 T1 ATE155922 T1 AT E155922T1 AT 92106796 T AT92106796 T AT 92106796T AT 92106796 T AT92106796 T AT 92106796T AT E155922 T1 ATE155922 T1 AT E155922T1
Authority
AT
Austria
Prior art keywords
container
filament
vacuum
disposed
ion
Prior art date
Application number
AT92106796T
Other languages
English (en)
Inventor
Kazutoshi Nagai
Tohru Satake
Hideaki Hayashi
Yoshio Hatada
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of ATE155922T1 publication Critical patent/ATE155922T1/de

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/14—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using charge exchange devices, e.g. for neutralising or changing the sign of the electrical charges of beams

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Physical Vapour Deposition (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Dental Preparations (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
AT92106796T 1991-04-23 1992-04-21 Ionenneutralisierungsvorrichtung ATE155922T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3092322A JPH0715808B2 (ja) 1991-04-23 1991-04-23 イオン中和器

Publications (1)

Publication Number Publication Date
ATE155922T1 true ATE155922T1 (de) 1997-08-15

Family

ID=14051159

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92106796T ATE155922T1 (de) 1991-04-23 1992-04-21 Ionenneutralisierungsvorrichtung

Country Status (5)

Country Link
US (1) US5243189A (de)
EP (1) EP0510581B1 (de)
JP (1) JPH0715808B2 (de)
AT (1) ATE155922T1 (de)
DE (1) DE69221009T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05251408A (ja) * 1992-03-06 1993-09-28 Ebara Corp 半導体ウェーハのエッチング装置
JP3504290B2 (ja) * 1993-04-20 2004-03-08 株式会社荏原製作所 低エネルギー中性粒子線発生方法及び装置
JP3394602B2 (ja) * 1993-07-05 2003-04-07 株式会社荏原製作所 高速原子線を用いた加工方法
US5519213A (en) * 1993-08-20 1996-05-21 Ebara Corporation Fast atom beam source
JP3305553B2 (ja) * 1995-11-17 2002-07-22 株式会社荏原製作所 高速原子線源
JP3123909B2 (ja) * 1995-11-27 2001-01-15 日本電気株式会社 電荷変換装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3657542A (en) * 1970-05-04 1972-04-18 Atomic Energy Commission Production of beams of excited energetic neutral particles
US3790787A (en) * 1972-04-04 1974-02-05 Commissariat Energie Atomique Method and device for producing by charge-transfer a beam of neutral particles or of ions having multiple charges
US4783595A (en) * 1985-03-28 1988-11-08 The Trustees Of The Stevens Institute Of Technology Solid-state source of ions and atoms
JPS6247479A (ja) * 1985-08-27 1987-03-02 Toshiba Corp クリスタルバ−チタンの製造用装置
US4886971A (en) * 1987-03-13 1989-12-12 Mitsubishi Denki Kabushiki Kaisha Ion beam irradiating apparatus including ion neutralizer
JPS6438957A (en) * 1987-08-04 1989-02-09 Mitsubishi Electric Corp Ion beam neutralization device
JP2666143B2 (ja) * 1988-02-18 1997-10-22 日本電信電話株式会社 イオン中和器
US5055672A (en) * 1990-11-20 1991-10-08 Ebara Corporation Fast atom beam source

Also Published As

Publication number Publication date
DE69221009T2 (de) 1998-02-26
JPH04324238A (ja) 1992-11-13
DE69221009D1 (de) 1997-09-04
EP0510581A3 (en) 1993-04-28
EP0510581A2 (de) 1992-10-28
JPH0715808B2 (ja) 1995-02-22
US5243189A (en) 1993-09-07
EP0510581B1 (de) 1997-07-23

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties