ATE155922T1 - Ionenneutralisierungsvorrichtung - Google Patents
IonenneutralisierungsvorrichtungInfo
- Publication number
- ATE155922T1 ATE155922T1 AT92106796T AT92106796T ATE155922T1 AT E155922 T1 ATE155922 T1 AT E155922T1 AT 92106796 T AT92106796 T AT 92106796T AT 92106796 T AT92106796 T AT 92106796T AT E155922 T1 ATE155922 T1 AT E155922T1
- Authority
- AT
- Austria
- Prior art keywords
- container
- filament
- vacuum
- disposed
- ion
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/14—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using charge exchange devices, e.g. for neutralising or changing the sign of the electrical charges of beams
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Electron Sources, Ion Sources (AREA)
- Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
- Physical Vapour Deposition (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Dental Preparations (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3092322A JPH0715808B2 (ja) | 1991-04-23 | 1991-04-23 | イオン中和器 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE155922T1 true ATE155922T1 (de) | 1997-08-15 |
Family
ID=14051159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT92106796T ATE155922T1 (de) | 1991-04-23 | 1992-04-21 | Ionenneutralisierungsvorrichtung |
Country Status (5)
Country | Link |
---|---|
US (1) | US5243189A (de) |
EP (1) | EP0510581B1 (de) |
JP (1) | JPH0715808B2 (de) |
AT (1) | ATE155922T1 (de) |
DE (1) | DE69221009T2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05251408A (ja) * | 1992-03-06 | 1993-09-28 | Ebara Corp | 半導体ウェーハのエッチング装置 |
JP3504290B2 (ja) * | 1993-04-20 | 2004-03-08 | 株式会社荏原製作所 | 低エネルギー中性粒子線発生方法及び装置 |
JP3394602B2 (ja) * | 1993-07-05 | 2003-04-07 | 株式会社荏原製作所 | 高速原子線を用いた加工方法 |
US5519213A (en) * | 1993-08-20 | 1996-05-21 | Ebara Corporation | Fast atom beam source |
JP3305553B2 (ja) * | 1995-11-17 | 2002-07-22 | 株式会社荏原製作所 | 高速原子線源 |
JP3123909B2 (ja) * | 1995-11-27 | 2001-01-15 | 日本電気株式会社 | 電荷変換装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3657542A (en) * | 1970-05-04 | 1972-04-18 | Atomic Energy Commission | Production of beams of excited energetic neutral particles |
US3790787A (en) * | 1972-04-04 | 1974-02-05 | Commissariat Energie Atomique | Method and device for producing by charge-transfer a beam of neutral particles or of ions having multiple charges |
US4783595A (en) * | 1985-03-28 | 1988-11-08 | The Trustees Of The Stevens Institute Of Technology | Solid-state source of ions and atoms |
JPS6247479A (ja) * | 1985-08-27 | 1987-03-02 | Toshiba Corp | クリスタルバ−チタンの製造用装置 |
US4886971A (en) * | 1987-03-13 | 1989-12-12 | Mitsubishi Denki Kabushiki Kaisha | Ion beam irradiating apparatus including ion neutralizer |
JPS6438957A (en) * | 1987-08-04 | 1989-02-09 | Mitsubishi Electric Corp | Ion beam neutralization device |
JP2666143B2 (ja) * | 1988-02-18 | 1997-10-22 | 日本電信電話株式会社 | イオン中和器 |
US5055672A (en) * | 1990-11-20 | 1991-10-08 | Ebara Corporation | Fast atom beam source |
-
1991
- 1991-04-23 JP JP3092322A patent/JPH0715808B2/ja not_active Expired - Fee Related
-
1992
- 1992-04-21 AT AT92106796T patent/ATE155922T1/de not_active IP Right Cessation
- 1992-04-21 DE DE69221009T patent/DE69221009T2/de not_active Expired - Fee Related
- 1992-04-21 EP EP92106796A patent/EP0510581B1/de not_active Expired - Lifetime
- 1992-04-22 US US07/871,984 patent/US5243189A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69221009T2 (de) | 1998-02-26 |
JPH04324238A (ja) | 1992-11-13 |
DE69221009D1 (de) | 1997-09-04 |
EP0510581A3 (en) | 1993-04-28 |
EP0510581A2 (de) | 1992-10-28 |
JPH0715808B2 (ja) | 1995-02-22 |
US5243189A (en) | 1993-09-07 |
EP0510581B1 (de) | 1997-07-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |