ATE128757T1 - Berührungsfreie spaltdichtung mit einem ring mit einer mit mikroerhebungen versehenen dichtfläche. - Google Patents

Berührungsfreie spaltdichtung mit einem ring mit einer mit mikroerhebungen versehenen dichtfläche.

Info

Publication number
ATE128757T1
ATE128757T1 AT91111873T AT91111873T ATE128757T1 AT E128757 T1 ATE128757 T1 AT E128757T1 AT 91111873 T AT91111873 T AT 91111873T AT 91111873 T AT91111873 T AT 91111873T AT E128757 T1 ATE128757 T1 AT E128757T1
Authority
AT
Austria
Prior art keywords
ring
loved
micro
sealing surface
microdams
Prior art date
Application number
AT91111873T
Other languages
English (en)
Inventor
Glenn G Pecht
Jon Hamaker
Original Assignee
Crane John Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crane John Inc filed Critical Crane John Inc
Application granted granted Critical
Publication of ATE128757T1 publication Critical patent/ATE128757T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
    • F16J15/3404—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal
    • F16J15/3408—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface
    • F16J15/3412—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member and characterised by parts or details relating to lubrication, cooling or venting of the seal at least one ring having an uneven slipping surface with cavities

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Sealing (AREA)
  • Sealing Material Composition (AREA)
  • Gasket Seals (AREA)
  • Sealing With Elastic Sealing Lips (AREA)
  • Switches With Compound Operations (AREA)
  • Gloves (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Sealing Battery Cases Or Jackets (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
AT91111873T 1990-07-17 1991-07-16 Berührungsfreie spaltdichtung mit einem ring mit einer mit mikroerhebungen versehenen dichtfläche. ATE128757T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/553,397 US5090712A (en) 1990-07-17 1990-07-17 Non-contacting, gap-type seal having a ring with a patterned microdam seal face

Publications (1)

Publication Number Publication Date
ATE128757T1 true ATE128757T1 (de) 1995-10-15

Family

ID=24209250

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91111873T ATE128757T1 (de) 1990-07-17 1991-07-16 Berührungsfreie spaltdichtung mit einem ring mit einer mit mikroerhebungen versehenen dichtfläche.

Country Status (13)

Country Link
US (1) US5090712A (de)
EP (1) EP0469379B1 (de)
JP (1) JPH05231548A (de)
KR (1) KR920002965A (de)
CN (1) CN1025884C (de)
AT (1) ATE128757T1 (de)
AU (1) AU639811B2 (de)
BR (1) BR9103070A (de)
CA (1) CA2046823A1 (de)
DE (1) DE69113557T2 (de)
IE (1) IE62203B1 (de)
MX (1) MX9100237A (de)
ZA (1) ZA915487B (de)

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US5368314A (en) * 1986-10-28 1994-11-29 Pacific Wietz Gmbh & Co. Kg Contactless pressurizing-gas shaft seal
US5492341A (en) * 1990-07-17 1996-02-20 John Crane Inc. Non-contacting, gap-type seal having a ring with a patterned seal face
GB9103217D0 (en) * 1991-02-15 1991-04-03 Crane John Uk Ltd Mechanical face seals
DE4209484A1 (de) * 1991-06-12 1993-10-21 Heinz Konrad Prof Dr I Mueller Gleitringdichtung mit Rückförderwirkung
WO1993010380A1 (en) * 1991-11-12 1993-05-27 Bw/Ip International, Inc. Secondary gas/liquid mechanical seal assembly
US5201531A (en) * 1992-04-02 1993-04-13 John Crane Inc. Face seal with double spiral grooves
US5172918A (en) * 1992-04-28 1992-12-22 John Crane Inc. Secondary seal for gas turbines
US5308229A (en) * 1992-06-03 1994-05-03 Pmc Liquiflo Equipment Company Pump having an internal gas pump
JPH083763Y2 (ja) * 1992-09-03 1996-01-31 日本ピラー工業株式会社 非接触型メカニカルシール
US5501470A (en) * 1992-12-11 1996-03-26 Nippon Pillar Packing Co., Ltd. Non-contacting shaft sealing device with grooved face pattern
US5441283A (en) * 1993-08-03 1995-08-15 John Crane Inc. Non-contacting mechanical face seal
JP3885972B2 (ja) * 1993-09-01 2007-02-28 デュラメタリック コーポレーション 角度をつけた円環状の溝を有する面封止装置
US5498007A (en) * 1994-02-01 1996-03-12 Durametallic Corporation Double gas barrier seal
US5567132A (en) * 1994-12-06 1996-10-22 Endura Pumps International, Inc. Seal for pump having an internal gas pump
US5941532A (en) * 1996-06-20 1999-08-24 Rexnord Corporation Aerospace housing and shaft assembly with noncontacting seal
CN1085311C (zh) * 1997-04-22 2002-05-22 株式会社理研 密封圈
US5934683A (en) * 1997-07-10 1999-08-10 Roy E. Roth Company Rotary seal assembly having grooved seal facing
US6142478A (en) * 1998-02-06 2000-11-07 John Crane Inc. Gas lubricated slow speed seal
US6189896B1 (en) 1999-04-08 2001-02-20 Caterpillar Inc. Controlled leakage rotating seal ring with elements for receiving and holding a lubricant on a face thereof
CN2460801Y (zh) * 2001-01-18 2001-11-21 王玉明 可双向旋转的螺旋槽端面密封装置
US7194803B2 (en) * 2001-07-05 2007-03-27 Flowserve Management Company Seal ring and method of forming micro-topography ring surfaces with a laser
JP4316956B2 (ja) * 2002-10-23 2009-08-19 イーグル工業株式会社 摺動部品
US6969236B2 (en) * 2003-08-29 2005-11-29 Honeywell International, Inc. Fluid-cooled mechanical face seal rotor
US7377518B2 (en) * 2004-05-28 2008-05-27 John Crane Inc. Mechanical seal ring assembly with hydrodynamic pumping mechanism
CN1312702C (zh) * 2005-01-21 2007-04-25 清华大学 用于高温气冷堆直接循环的气体动密封装置
US20060207834A1 (en) * 2005-03-03 2006-09-21 Honeywell International, Inc. Aircraft engine accessory drive air film riding bulkhead seal
CN101469771B (zh) * 2007-12-26 2010-12-29 丹东克隆集团有限责任公司 一种可双向旋转的阶梯圆弧槽机械密封端面
CN101672364B (zh) * 2009-10-15 2013-06-05 浙江工业大学 双列倾斜式方向性微孔端面无泄漏机械密封结构
US8777229B2 (en) * 2010-03-26 2014-07-15 United Technologies Corporation Liftoff carbon seal
CN101893092A (zh) * 2010-06-29 2010-11-24 杨惠霞 可双向旋转的气体润滑非接触式机械密封装置
JP5753001B2 (ja) * 2011-06-06 2015-07-22 イーグル工業株式会社 軸封装置
US10504719B2 (en) * 2012-04-25 2019-12-10 Applied Materials, Inc. Cooled reflective adapter plate for a deposition chamber
US9347566B2 (en) * 2012-10-18 2016-05-24 Eagle Industry Co., Ltd. Sliding component
US11333197B2 (en) 2013-04-15 2022-05-17 Stein Seal Company Circumferential seal assembly with multi-axis stepped grooves
EP2986832B1 (de) 2013-04-15 2017-11-29 Stein Seal Company Umlaufende paralleldichtungsanordnung mit verzweigter strömung
US10948014B2 (en) 2013-04-15 2021-03-16 Stein Seal Company Intershaft seal assembly with multi-axis stepped grooves
US10711839B2 (en) 2013-04-15 2020-07-14 Stein Seal Company Circumferential seal with bifurcated flow along multi-axis stepped grooves
CN106471296B (zh) * 2014-09-20 2018-12-28 伊格尔工业股份有限公司 滑动部件
CN104455456A (zh) * 2014-11-05 2015-03-25 中国航空动力机械研究所 流体动力的密封装置
CN107110370B (zh) * 2014-11-08 2019-09-13 伊格尔工业股份有限公司 滑动部件
US9850079B2 (en) 2015-01-23 2017-12-26 Symbotic, LLC Storage and retrieval system transport vehicle
CN107735606B (zh) * 2015-06-27 2020-09-11 伊格尔工业股份有限公司 滑动部件
US10415707B2 (en) 2016-06-30 2019-09-17 General Electric Company Face seal assembly and an associated method thereof
US10626743B2 (en) 2016-06-30 2020-04-21 General Electric Company Segmented face seal assembly and an associated method thereof
US10465544B2 (en) * 2017-07-24 2019-11-05 United Technologies Corporation Eddy current damper for lift off seal
EP4245967A3 (de) * 2018-07-10 2023-10-11 Stein Seal Company Umfangsdichtung mit gegabeltem fluss entlang mehrachsiger gestufter rillen
EP3821147A4 (de) * 2018-07-10 2022-03-16 Stein Seal Company Dichtungsanordnung zwischen wellen mit mehrachsigen gestuften nuten
CN114505784A (zh) * 2022-03-11 2022-05-17 北京烁科精微电子装备有限公司 一种晶圆固定环及具有其的cmp设备

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Publication number Priority date Publication date Assignee Title
CA660610A (en) * 1963-04-02 Solar Aircraft Company Fluid seal
FR1599308A (de) * 1968-06-08 1970-07-15
US3586340A (en) * 1969-06-13 1971-06-22 Timken Co Wear surface and seal construction
US3572730A (en) * 1969-06-13 1971-03-30 Timken Co Wear surface for facilitating lubrication of elements in engagement therewith
US3638957A (en) * 1970-03-19 1972-02-01 Borg Warner Mechanical seal with lubricating means
US3804424A (en) * 1972-04-24 1974-04-16 Crane Packing Co Gap seal with thermal and pressure distortion compensation
DD107968A1 (de) * 1972-05-23 1974-08-20
US4423879A (en) * 1977-04-12 1984-01-03 Taiho Kogyo Co., Ltd. Mechanical seal
US4212475A (en) * 1979-01-15 1980-07-15 Crane Packing Co. Self aligning spiral groove face seal
DE2928504C2 (de) * 1979-07-14 1982-05-19 Pacific Wietz Gmbh + Co Kg, 4600 Dortmund Dichtungsanordnung für Pumpenwellen u.dgl.
US4290611A (en) * 1980-03-31 1981-09-22 Crane Packing Co. High pressure upstream pumping seal combination
DE3143508A1 (de) * 1980-11-04 1982-08-26 Eagle Industry Co. Ltd., Tokyo Wellendichtung und verfahren zur herstellung einer gleitflaeche derselben
JPS58207580A (ja) * 1982-05-28 1983-12-03 Eagle Ind Co Ltd メカニカルシ−ル
DE3619828A1 (de) * 1986-06-12 1987-12-17 Rothemuehle Brandt Kritzler Axialdruck- bzw. -traglager, insbesondere fuer langsam drehende maschinen
CH677266A5 (de) * 1986-10-28 1991-04-30 Pacific Wietz Gmbh & Co Kg

Also Published As

Publication number Publication date
DE69113557D1 (de) 1995-11-09
US5090712A (en) 1992-02-25
JPH05231548A (ja) 1993-09-07
AU639811B2 (en) 1993-08-05
MX9100237A (es) 1992-02-28
CA2046823A1 (en) 1992-01-18
CN1059195A (zh) 1992-03-04
BR9103070A (pt) 1992-04-28
CN1025884C (zh) 1994-09-07
IE62203B1 (en) 1994-12-28
ZA915487B (en) 1992-04-29
DE69113557T2 (de) 1996-03-07
KR920002965A (ko) 1992-02-28
AU8044791A (en) 1992-01-23
EP0469379B1 (de) 1995-10-04
EP0469379A1 (de) 1992-02-05
IE912476A1 (en) 1992-01-29

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Legal Events

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