ATE124828T1 - Mikropositioniersysteme und -verfahren. - Google Patents

Mikropositioniersysteme und -verfahren.

Info

Publication number
ATE124828T1
ATE124828T1 AT88908056T AT88908056T ATE124828T1 AT E124828 T1 ATE124828 T1 AT E124828T1 AT 88908056 T AT88908056 T AT 88908056T AT 88908056 T AT88908056 T AT 88908056T AT E124828 T1 ATE124828 T1 AT E124828T1
Authority
AT
Austria
Prior art keywords
armature
base
movement
components
methods
Prior art date
Application number
AT88908056T
Other languages
English (en)
Inventor
Stephen C Jacobson
John E Wood
Richard H Price
Original Assignee
Sarcos Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sarcos Inc filed Critical Sarcos Inc
Application granted granted Critical
Publication of ATE124828T1 publication Critical patent/ATE124828T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Landscapes

  • Micromachines (AREA)
  • Prostheses (AREA)
  • Control Of Position Or Direction (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
AT88908056T 1987-08-04 1988-08-02 Mikropositioniersysteme und -verfahren. ATE124828T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/081,822 US4789803A (en) 1987-08-04 1987-08-04 Micropositioner systems and methods

Publications (1)

Publication Number Publication Date
ATE124828T1 true ATE124828T1 (de) 1995-07-15

Family

ID=22166621

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88908056T ATE124828T1 (de) 1987-08-04 1988-08-02 Mikropositioniersysteme und -verfahren.

Country Status (7)

Country Link
US (1) US4789803A (de)
EP (1) EP0375731B1 (de)
JP (2) JP3015382B2 (de)
AT (1) ATE124828T1 (de)
AU (1) AU2315188A (de)
DE (1) DE3854128T2 (de)
WO (1) WO1989001259A1 (de)

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US5198740A (en) * 1989-10-04 1993-03-30 University Of Utah Research Foundation Sliding contact mechanical/electrical displacement transducer
CA2026873C (en) * 1989-10-04 1997-06-17 Stephen C. Jacobsen Mechanical/electrical displacement transducer
US5531092A (en) * 1989-12-28 1996-07-02 Okada; Kazuhiro Device for moving a suspended weight body
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US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
US5144184A (en) * 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
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US5235225A (en) * 1990-08-31 1993-08-10 Northwestern University Linear electrostatic actuator with means for concatenation
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5121089A (en) * 1990-11-01 1992-06-09 Hughes Aircraft Company Micro-machined switch and method of fabrication
US5206557A (en) * 1990-11-27 1993-04-27 Mcnc Microelectromechanical transducer and fabrication method
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US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5479061A (en) * 1992-12-31 1995-12-26 University Of North Carolina Pleated sheet microelectromechanical transducer
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5646348A (en) * 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5466980A (en) * 1994-11-29 1995-11-14 International Business Machines Corporation Charged rotor pole micromachine motor
US5925956A (en) * 1995-06-30 1999-07-20 Nikon Corporation Stage construction incorporating magnetically levitated movable stage
DE19533173C1 (de) * 1995-09-08 1997-01-30 Deutsche Forsch Luft Raumfahrt Elektrostatischer Antrieb
US5589721A (en) * 1995-12-11 1996-12-31 Han; Quansheng Display apparatus utilizing magnetic interaction
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US5914801A (en) 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US6039075A (en) 1997-06-12 2000-03-21 Sarco Lc Band controlled valve/actuator
US6294063B1 (en) * 1999-02-12 2001-09-25 Board Of Regents, The University Of Texas System Method and apparatus for programmable fluidic processing
US6592673B2 (en) * 1999-05-27 2003-07-15 Applied Materials, Inc. Apparatus and method for detecting a presence or position of a substrate
GB2354114A (en) * 1999-09-13 2001-03-14 Gareth John Monkman Micro-scale electrostatic gripper
US6275320B1 (en) 1999-09-27 2001-08-14 Jds Uniphase, Inc. MEMS variable optical attenuator
US6373682B1 (en) 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US6456420B1 (en) 2000-07-27 2002-09-24 Mcnc Microelectromechanical elevating structures
US6485273B1 (en) 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6377438B1 (en) 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US7280014B2 (en) 2001-03-13 2007-10-09 Rochester Institute Of Technology Micro-electro-mechanical switch and a method of using and making thereof
WO2002097865A2 (en) 2001-05-31 2002-12-05 Rochester Institute Of Technology Fluidic valves, agitators, and pumps and methods thereof
US6841917B2 (en) * 2001-06-11 2005-01-11 Rochester Institute Of Technology Electrostatic levitation and attraction systems and methods
US7378775B2 (en) 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
US7211923B2 (en) 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
US6856067B2 (en) * 2003-02-21 2005-02-15 Robert Bosch Gmbh Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor
US7217582B2 (en) 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US7287328B2 (en) 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
US8581308B2 (en) 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US7177505B2 (en) * 2004-03-04 2007-02-13 Rosemount Inc. MEMS-based actuator devices using electrets
WO2006085905A1 (en) 2004-05-28 2006-08-17 Board Of Regents, The University Of Texas System Programmable fluidic processors
US7753072B2 (en) 2004-07-23 2010-07-13 Afa Controls Llc Valve assemblies including at least three chambers and related methods
US7337671B2 (en) 2005-06-03 2008-03-04 Georgia Tech Research Corp. Capacitive microaccelerometers and fabrication methods
US7578189B1 (en) 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
WO2008114199A2 (en) * 2007-03-19 2008-09-25 Koninklijke Philips Electronics N.V. An actuator device and a method of manufacturing the same
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
WO2018130295A1 (en) * 2017-01-13 2018-07-19 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Method of actuating a shape changeable member, shape changeable member and actuating system

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US4082990A (en) * 1976-09-29 1978-04-04 The Singer Company Electrostatic pickoff and torquer
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US4585282A (en) * 1983-07-19 1986-04-29 Bosley Robert W Magnetic levitation system
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Also Published As

Publication number Publication date
US4789803A (en) 1988-12-06
JPH10178788A (ja) 1998-06-30
JP3015382B2 (ja) 2000-03-06
EP0375731A1 (de) 1990-07-04
DE3854128T2 (de) 1996-03-28
JP2954557B2 (ja) 1999-09-27
EP0375731A4 (en) 1990-09-26
WO1989001259A1 (en) 1989-02-09
AU2315188A (en) 1989-03-01
EP0375731B1 (de) 1995-07-05
DE3854128D1 (de) 1995-08-10
JPH03503952A (ja) 1991-08-29

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