ATA546075A - Verfahren zur herstellung der emitterzone eines planartransistors - Google Patents
Verfahren zur herstellung der emitterzone eines planartransistorsInfo
- Publication number
- ATA546075A ATA546075A AT0546075A AT546075A ATA546075A AT A546075 A ATA546075 A AT A546075A AT 0546075 A AT0546075 A AT 0546075A AT 546075 A AT546075 A AT 546075A AT A546075 A ATA546075 A AT A546075A
- Authority
- AT
- Austria
- Prior art keywords
- producing
- planar transistor
- emitter zone
- emitter
- zone
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8222—Bipolar technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28525—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising semiconducting material
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2439408A DE2439408A1 (de) | 1974-08-16 | 1974-08-16 | Halbleiterbauelement |
Publications (2)
Publication Number | Publication Date |
---|---|
ATA546075A true ATA546075A (de) | 1983-03-15 |
AT372805B AT372805B (de) | 1983-11-25 |
Family
ID=5923395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT0546075A AT372805B (de) | 1974-08-16 | 1975-07-15 | Verfahren zur herstellung der emitterzone eines planartransistors |
Country Status (9)
Country | Link |
---|---|
JP (1) | JPS5164370A (de) |
AT (1) | AT372805B (de) |
BR (1) | BR7505197A (de) |
CA (1) | CA1041673A (de) |
DE (1) | DE2439408A1 (de) |
FR (1) | FR2282166A1 (de) |
GB (1) | GB1494802A (de) |
IT (1) | IT1040480B (de) |
ZA (1) | ZA754328B (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61224448A (ja) * | 1985-03-29 | 1986-10-06 | Toshiba Corp | 半導体装置の製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4855663A (de) * | 1971-11-10 | 1973-08-04 | ||
JPS499186A (de) * | 1972-05-11 | 1974-01-26 |
-
1974
- 1974-08-16 DE DE2439408A patent/DE2439408A1/de not_active Ceased
-
1975
- 1975-06-20 GB GB26264/75A patent/GB1494802A/en not_active Expired
- 1975-07-07 ZA ZA00754328A patent/ZA754328B/xx unknown
- 1975-07-15 AT AT0546075A patent/AT372805B/de not_active IP Right Cessation
- 1975-08-05 IT IT26108/75A patent/IT1040480B/it active
- 1975-08-06 FR FR7524515A patent/FR2282166A1/fr active Granted
- 1975-08-07 CA CA233,056A patent/CA1041673A/en not_active Expired
- 1975-08-14 BR BR7505197*A patent/BR7505197A/pt unknown
- 1975-08-15 JP JP50099451A patent/JPS5164370A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2282166A1 (fr) | 1976-03-12 |
FR2282166B1 (de) | 1980-10-17 |
ZA754328B (en) | 1976-06-30 |
AT372805B (de) | 1983-11-25 |
DE2439408A1 (de) | 1976-02-26 |
IT1040480B (it) | 1979-12-20 |
JPS5164370A (de) | 1976-06-03 |
BR7505197A (pt) | 1976-08-03 |
GB1494802A (en) | 1977-12-14 |
CA1041673A (en) | 1978-10-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |