ATA136499A - Einrichtung zum beleuchten eines objektes mit fokussiertem licht - Google Patents

Einrichtung zum beleuchten eines objektes mit fokussiertem licht

Info

Publication number
ATA136499A
ATA136499A AT136499A AT136499A ATA136499A AT A136499 A ATA136499 A AT A136499A AT 136499 A AT136499 A AT 136499A AT 136499 A AT136499 A AT 136499A AT A136499 A ATA136499 A AT A136499A
Authority
AT
Austria
Prior art keywords
lighting
focused light
focused
light
Prior art date
Application number
AT136499A
Other languages
English (en)
Original Assignee
Leuchs Gerhard Dr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leuchs Gerhard Dr filed Critical Leuchs Gerhard Dr
Priority to AT136499A priority Critical patent/ATA136499A/de
Priority to PCT/EP2000/007672 priority patent/WO2001011408A1/de
Priority to EP00954603A priority patent/EP1163548A1/de
Publication of ATA136499A publication Critical patent/ATA136499A/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10541—Heads for reproducing
    • G11B11/10543—Heads for reproducing using optical beam of radiation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1381—Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1398—Means for shaping the cross-section of the beam, e.g. into circular or elliptical cross-section

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
AT136499A 1999-08-09 1999-08-09 Einrichtung zum beleuchten eines objektes mit fokussiertem licht ATA136499A (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AT136499A ATA136499A (de) 1999-08-09 1999-08-09 Einrichtung zum beleuchten eines objektes mit fokussiertem licht
PCT/EP2000/007672 WO2001011408A1 (de) 1999-08-09 2000-08-08 Einrichtung zum fokussieren von licht auf ein objekt
EP00954603A EP1163548A1 (de) 1999-08-09 2000-08-08 Einrichtung zum fokussieren von licht auf ein objekt

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT136499A ATA136499A (de) 1999-08-09 1999-08-09 Einrichtung zum beleuchten eines objektes mit fokussiertem licht

Publications (1)

Publication Number Publication Date
ATA136499A true ATA136499A (de) 2001-10-15

Family

ID=3512294

Family Applications (1)

Application Number Title Priority Date Filing Date
AT136499A ATA136499A (de) 1999-08-09 1999-08-09 Einrichtung zum beleuchten eines objektes mit fokussiertem licht

Country Status (3)

Country Link
EP (1) EP1163548A1 (de)
AT (1) ATA136499A (de)
WO (1) WO2001011408A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1368975A1 (de) 2001-03-09 2003-12-10 Ayman L.L.C. Universelles kontaktpunktidentifizierungssystem und -verfahren
DE102004014181A1 (de) 2004-03-23 2005-10-06 Carl Zeiss Meditec Ag Material-Bearbeitungsvorrichtung und -verfahren
CN101542618A (zh) * 2006-09-25 2009-09-23 新加坡科技研究局 光学聚焦系统和方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920006309B1 (ko) * 1987-12-29 1992-08-03 마쓰시다 덴기 산교 가부시기가이샤 광학헤드 장치
US5220403A (en) * 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
US5125750A (en) * 1991-03-14 1992-06-30 The Board Of Trustees Of The Leland Stanford Junior University Optical recording system employing a solid immersion lens
JPH05203879A (ja) * 1992-01-27 1993-08-13 Nikon Corp 反射共振型近接場走査型顕微鏡
JP2796005B2 (ja) * 1992-02-10 1998-09-10 三菱電機株式会社 投影露光装置及び偏光子
US5359622A (en) * 1993-03-30 1994-10-25 Trw Inc. Radial polarization laser resonator
KR0166612B1 (ko) * 1993-10-29 1999-02-01 가나이 쓰토무 패턴노광방법 및 그 장치와 그것에 이용되는 마스크와 그것을 이용하여 만들어진 반도체 집적회로
KR0173168B1 (ko) * 1994-02-24 1999-03-20 가네꼬 히사시 웨이퍼상의 레지스트막을 노광하기 위한 노광계와 그에 사용되는 조명계 및 방법
DE19535392A1 (de) * 1995-09-23 1997-03-27 Zeiss Carl Fa Radial polarisationsdrehende optische Anordnung und Mikrolithographie-Projektionsbelichtungsanlage damit
US5796487A (en) * 1996-06-28 1998-08-18 Polaroid Corporation Dark field, photon tunneling imaging systems and methods for optical recording and retrieval
US5859814A (en) * 1996-10-18 1999-01-12 The Board Of Trustees Of The Leland Stanford Junior University Magneto-optic recording system and method

Also Published As

Publication number Publication date
WO2001011408A1 (de) 2001-02-15
EP1163548A1 (de) 2001-12-19

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Legal Events

Date Code Title Description
A1J Withdrawal paragraph 166 lit. 6