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Application filed by Ulrich Dipl Ing Dr TraxlmayrfiledCriticalUlrich Dipl Ing Dr Traxlmayr
Priority to AT0055207UpriorityCriticalpatent/AT9671U3/de
Publication of AT9671U2publicationCriticalpatent/AT9671U2/de
Publication of AT9671U3publicationCriticalpatent/AT9671U3/de
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32192—Microwave generated discharge
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Physics & Mathematics
(AREA)
Engineering & Computer Science
(AREA)
Plasma & Fusion
(AREA)
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Plasma Technology
(AREA)
Drying Of Semiconductors
(AREA)
AT0055207U2007-09-142007-09-14Vorrichtung zur erzeugung von plasma oder radikalen mittels mikrowellen
AT9671U3
(de)