AT336701B - Verfahren zur leitenden beschichtung nichtleitender materialien fur die elektronenmikroskopische praparation - Google Patents

Verfahren zur leitenden beschichtung nichtleitender materialien fur die elektronenmikroskopische praparation

Info

Publication number
AT336701B
AT336701B AT290272A AT290272A AT336701B AT 336701 B AT336701 B AT 336701B AT 290272 A AT290272 A AT 290272A AT 290272 A AT290272 A AT 290272A AT 336701 B AT336701 B AT 336701B
Authority
AT
Austria
Prior art keywords
conductive
electron microscopic
conductive materials
microscopic preparation
conductive coating
Prior art date
Application number
AT290272A
Other languages
English (en)
Other versions
ATA290272A (de
Original Assignee
Grasenick Fritz Dr
Jakopic Erich Dr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Grasenick Fritz Dr, Jakopic Erich Dr filed Critical Grasenick Fritz Dr
Priority to AT290272A priority Critical patent/AT336701B/de
Priority to DD16985673A priority patent/DD108373A1/xx
Priority to GB1638873A priority patent/GB1432446A/en
Priority to DE19732317160 priority patent/DE2317160C3/de
Priority to JP48038318A priority patent/JPS4917671A/ja
Publication of ATA290272A publication Critical patent/ATA290272A/de
Application granted granted Critical
Publication of AT336701B publication Critical patent/AT336701B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Sampling And Sample Adjustment (AREA)
AT290272A 1972-04-05 1972-04-05 Verfahren zur leitenden beschichtung nichtleitender materialien fur die elektronenmikroskopische praparation AT336701B (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT290272A AT336701B (de) 1972-04-05 1972-04-05 Verfahren zur leitenden beschichtung nichtleitender materialien fur die elektronenmikroskopische praparation
DD16985673A DD108373A1 (de) 1972-04-05 1973-03-30
GB1638873A GB1432446A (en) 1972-04-05 1973-04-05 Method of analysing a sample of non-conducting material in an electron-microscope
DE19732317160 DE2317160C3 (de) 1972-04-05 1973-04-05 Verfahren zur leitenden Beschichtung nichtleitender Materialien für die elektronenmikroskopische Präparation
JP48038318A JPS4917671A (de) 1972-04-05 1973-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT290272A AT336701B (de) 1972-04-05 1972-04-05 Verfahren zur leitenden beschichtung nichtleitender materialien fur die elektronenmikroskopische praparation

Publications (2)

Publication Number Publication Date
ATA290272A ATA290272A (de) 1976-09-15
AT336701B true AT336701B (de) 1977-05-25

Family

ID=3542128

Family Applications (1)

Application Number Title Priority Date Filing Date
AT290272A AT336701B (de) 1972-04-05 1972-04-05 Verfahren zur leitenden beschichtung nichtleitender materialien fur die elektronenmikroskopische praparation

Country Status (4)

Country Link
JP (1) JPS4917671A (de)
AT (1) AT336701B (de)
DD (1) DD108373A1 (de)
GB (1) GB1432446A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0019725A1 (de) * 1979-05-18 1980-12-10 International Business Machines Corporation Einen Strahl mit energiereichen Teilchen verwendendes Abscheidungsverfahren

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0019725A1 (de) * 1979-05-18 1980-12-10 International Business Machines Corporation Einen Strahl mit energiereichen Teilchen verwendendes Abscheidungsverfahren

Also Published As

Publication number Publication date
DE2317160B2 (de) 1976-06-16
JPS4917671A (de) 1974-02-16
DD108373A1 (de) 1974-09-12
ATA290272A (de) 1976-09-15
GB1432446A (en) 1976-04-14
DE2317160A1 (de) 1973-10-11

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee
ELJ Ceased due to non-payment of the annual fee