AT297436B - Verfahren zum Aufbringen eines Überzuges mittels Kathodenzerstäubung - Google Patents

Verfahren zum Aufbringen eines Überzuges mittels Kathodenzerstäubung

Info

Publication number
AT297436B
AT297436B AT159369A AT159369A AT297436B AT 297436 B AT297436 B AT 297436B AT 159369 A AT159369 A AT 159369A AT 159369 A AT159369 A AT 159369A AT 297436 B AT297436 B AT 297436B
Authority
AT
Austria
Prior art keywords
coating
applying
cathode sputtering
sputtering
cathode
Prior art date
Application number
AT159369A
Other languages
German (de)
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of AT297436B publication Critical patent/AT297436B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/153—Charge-receiving layers combined with additional photo- or thermo-sensitive, but not photoconductive, layers, e.g. silver-salt layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Laminated Bodies (AREA)
AT159369A 1968-03-25 1969-02-17 Verfahren zum Aufbringen eines Überzuges mittels Kathodenzerstäubung AT297436B (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US71565768A 1968-03-25 1968-03-25
US71578068A 1968-03-25 1968-03-25

Publications (1)

Publication Number Publication Date
AT297436B true AT297436B (de) 1972-03-27

Family

ID=27109392

Family Applications (1)

Application Number Title Priority Date Filing Date
AT159369A AT297436B (de) 1968-03-25 1969-02-17 Verfahren zum Aufbringen eines Überzuges mittels Kathodenzerstäubung

Country Status (9)

Country Link
US (1) US3650737A (nl)
AT (1) AT297436B (nl)
BE (2) BE727123A (nl)
CA (1) CA920860A (nl)
CH (2) CH481464A (nl)
DE (2) DE1907637A1 (nl)
FR (2) FR1602786A (nl)
GB (2) GB1258192A (nl)
NL (1) NL6904536A (nl)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3879199A (en) * 1971-12-03 1975-04-22 Xerox Corp Surface treatment of arsenic-selenium photoconductors
US3886025A (en) * 1972-08-24 1975-05-27 Ibm Ferrite head
US4013539A (en) * 1973-01-12 1977-03-22 Coulter Information Systems, Inc. Thin film deposition apparatus
US3901783A (en) * 1973-02-09 1975-08-26 Int Standard Electric Corp Method of producing selenium charge electrophotographic recording plates
US3893854A (en) * 1973-03-30 1975-07-08 Xerox Corp Photographic articles with gaps for processing fluids
US3901784A (en) * 1973-11-15 1975-08-26 United Aircraft Corp Cylindrical rf sputtering apparatus
JPS5098331A (nl) * 1973-12-25 1975-08-05
US4080281A (en) * 1976-04-09 1978-03-21 Tsunehiko Endo Apparatus for making metal films
US4098956A (en) * 1976-08-11 1978-07-04 The United States Of America As Represented By The Secretary Of The Interior Spectrally selective solar absorbers
US4137142A (en) * 1977-12-27 1979-01-30 Stork Brabant B.V. Method and apparatus for sputtering photoconductive coating on endless flexible belts or cylinders
US4151064A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Apparatus for sputtering cylinders
GB2018446B (en) * 1978-03-03 1983-02-23 Canon Kk Image-forming member for electrophotography
JPS54145537A (en) * 1978-05-04 1979-11-13 Canon Inc Preparation of electrophotographic image forming material
DE3167761D1 (en) * 1980-01-16 1985-01-31 Nat Res Dev Method and apparatus for depositing coatings in a glow discharge
JPS5713777A (en) 1980-06-30 1982-01-23 Shunpei Yamazaki Semiconductor device and manufacture thereof
US5545503A (en) * 1980-06-25 1996-08-13 Semiconductor Energy Laboratory Co., Ltd. Method of making printing member for electrostatic photocopying
US4889783A (en) * 1980-06-25 1989-12-26 Semiconductor Energy Laboratory Co., Ltd. Printing member for electrostatic photocopying
US5144367A (en) * 1980-06-25 1992-09-01 Semiconductor Energy Laboratory Co., Ltd. Printing member for electrostatic photocopying
US5143808A (en) * 1980-06-25 1992-09-01 Semiconductor Energy Laboratory Co., Ltd. Printing member for electrostatic photocopying
US5070364A (en) * 1980-06-25 1991-12-03 Semiconductor Energy Laboratory Co., Ltd. Printing member for electrostatic photocopying
JPS5711351A (en) * 1980-06-25 1982-01-21 Shunpei Yamazaki Electrostatic copying machine
US5103262A (en) * 1980-06-25 1992-04-07 Semiconductor Energy Laboratory Co., Ltd. Printing member for electrostatic photocopying
US6900463B1 (en) 1980-06-30 2005-05-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US5859443A (en) * 1980-06-30 1999-01-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US5262350A (en) * 1980-06-30 1993-11-16 Semiconductor Energy Laboratory Co., Ltd. Forming a non single crystal semiconductor layer by using an electric current
US4394425A (en) * 1980-09-12 1983-07-19 Canon Kabushiki Kaisha Photoconductive member with α-Si(C) barrier layer
US4394426A (en) * 1980-09-25 1983-07-19 Canon Kabushiki Kaisha Photoconductive member with α-Si(N) barrier layer
DE3200376A1 (de) * 1981-01-09 1982-11-04 Canon K.K., Tokyo Fotoleitfaehiges element
US4423131A (en) * 1982-05-03 1983-12-27 Xerox Corporation Photoresponsive devices containing polyvinylsilicate coatings
US5219698A (en) * 1982-09-27 1993-06-15 Canon Kabushiki Kaisha Laser imaging method and apparatus for electrophotography
JPS5957247A (ja) * 1982-09-27 1984-04-02 Canon Inc 電子写真用感光体
CH663455A5 (de) * 1984-04-19 1987-12-15 Balzers Hochvakuum Rohr mit einer innenbeschichtung.
US4588667A (en) * 1984-05-15 1986-05-13 Xerox Corporation Electrophotographic imaging member and process comprising sputtering titanium on substrate
USH557H (en) * 1986-11-07 1988-12-06 The United States Of America As Represented By The Department Of Energy Epitaxial strengthening of crystals
JPH01188862A (ja) * 1988-01-25 1989-07-28 Minolta Camera Co Ltd 電子写真用感光体
US5188876A (en) * 1990-04-12 1993-02-23 Armstrong World Industries, Inc. Surface covering with inorganic wear layer

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2886434A (en) * 1955-06-06 1959-05-12 Horizons Inc Protected photoconductive element and method of making same
US2860048A (en) * 1955-06-13 1958-11-11 Haloid Xerox Inc Xerographic plate
US2879360A (en) * 1956-10-01 1959-03-24 Lane Wells Co Photoconductive device having a silicon dioxide protective layer and method of making same
US2993806A (en) * 1956-12-17 1961-07-25 Gen Tire & Rubber Co Metal coating of plastics
US3251686A (en) * 1960-07-01 1966-05-17 Xerox Corp Xerographic process
BE631700A (nl) * 1962-04-30
US3149761A (en) * 1962-09-18 1964-09-22 Johnson & Son Inc S C Valve actuating assembly for pressurized containers
US3397982A (en) * 1964-12-21 1968-08-20 Xerox Corp Xerographic plate with an inorganic glass binder having an overcoating consisting essentially of aluminum oxide
US3397086A (en) * 1965-03-12 1968-08-13 Gen Electric Photoconductive composition and coated article
US3287243A (en) * 1965-03-29 1966-11-22 Bell Telephone Labor Inc Deposition of insulating films by cathode sputtering in an rf-supported discharge
US3484237A (en) * 1966-06-13 1969-12-16 Ibm Organic photoconductive compositions and their use in electrophotographic processes

Also Published As

Publication number Publication date
DE1907637A1 (de) 1971-01-21
GB1251723A (nl) 1971-10-27
NL6904536A (nl) 1969-09-29
FR1602786A (nl) 1971-01-25
DE1912917A1 (de) 1969-10-16
BE727123A (nl) 1969-07-01
CH483078A (de) 1969-12-15
CH481464A (de) 1969-11-15
CA920860A (en) 1973-02-13
FR1604499A (nl) 1971-11-08
BE728199A (nl) 1969-07-16
DE1912917B2 (de) 1971-06-24
US3650737A (en) 1972-03-21
GB1258192A (nl) 1971-12-22

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee