AT212050B - Process for applying layers to substrates, in particular for preparation using an electron microscope - Google Patents

Process for applying layers to substrates, in particular for preparation using an electron microscope

Info

Publication number
AT212050B
AT212050B AT878359A AT878359A AT212050B AT 212050 B AT212050 B AT 212050B AT 878359 A AT878359 A AT 878359A AT 878359 A AT878359 A AT 878359A AT 212050 B AT212050 B AT 212050B
Authority
AT
Austria
Prior art keywords
substrates
preparation
electron microscope
applying layers
layers
Prior art date
Application number
AT878359A
Other languages
German (de)
Inventor
Fritz Dr Grasenick
Herwig Dr Horn
Erich Ing Jakopic
Otto Dr Reiter
Original Assignee
Fritz Dr Grasenick
Herwig Dr Horn
Erich Ing Jakopic
Otto Dr Reiter
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fritz Dr Grasenick, Herwig Dr Horn, Erich Ing Jakopic, Otto Dr Reiter filed Critical Fritz Dr Grasenick
Priority to AT878359A priority Critical patent/AT212050B/en
Application granted granted Critical
Publication of AT212050B publication Critical patent/AT212050B/en
Priority to DEG31066A priority patent/DE1225317B/en
Priority to DE19601540784 priority patent/DE1540784A1/en
Priority to CH1350360A priority patent/CH391418A/en
Priority to NL258638A priority patent/NL258638A/xx
Priority to FR846134A priority patent/FR1281480A/en
Priority to GB4178660A priority patent/GB973805A/en
Priority to DE19651540785 priority patent/DE1540785A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AT878359A 1959-12-04 1959-12-04 Process for applying layers to substrates, in particular for preparation using an electron microscope AT212050B (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
AT878359A AT212050B (en) 1959-12-04 1959-12-04 Process for applying layers to substrates, in particular for preparation using an electron microscope
DEG31066A DE1225317B (en) 1959-12-04 1960-12-02 Method for applying a layer to a carrier for electron microscopic examination
DE19601540784 DE1540784A1 (en) 1959-12-04 1960-12-02 Process for polishing surfaces using electrically charged particles
CH1350360A CH391418A (en) 1959-12-04 1960-12-02 Process for applying layers to substrates, in particular for preparation using an electron microscope
NL258638A NL258638A (en) 1959-12-04 1960-12-02
FR846134A FR1281480A (en) 1959-12-04 1960-12-05 Process for applying layers to carriers, in particular for electron microscope preparations
GB4178660A GB973805A (en) 1959-12-04 1960-12-05 Improvements in and relating to methods of applying coatings to carriers
DE19651540785 DE1540785A1 (en) 1959-12-04 1965-12-02 Process for etching surfaces using electrically charged particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT878359A AT212050B (en) 1959-12-04 1959-12-04 Process for applying layers to substrates, in particular for preparation using an electron microscope

Publications (1)

Publication Number Publication Date
AT212050B true AT212050B (en) 1960-11-25

Family

ID=3608474

Family Applications (1)

Application Number Title Priority Date Filing Date
AT878359A AT212050B (en) 1959-12-04 1959-12-04 Process for applying layers to substrates, in particular for preparation using an electron microscope

Country Status (5)

Country Link
AT (1) AT212050B (en)
CH (1) CH391418A (en)
DE (1) DE1225317B (en)
GB (1) GB973805A (en)
NL (1) NL258638A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116397186A (en) * 2023-03-31 2023-07-07 四川大学 Application of electromagnetic coupling treatment method in electroplating process

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2455634A1 (en) * 1979-05-04 1980-11-28 Bois Daniel METHOD AND DEVICE FOR VACUUM EVAPORATION DEPOSITION USING A MOLDED ELECTRON BEAM AND A SCREEN
EP0142083A3 (en) * 1983-11-11 1987-04-29 Hoesch Aktiengesellschaft Method and apparatus for the production of metallic coatings
US4822466A (en) * 1987-06-25 1989-04-18 University Of Houston - University Park Chemically bonded diamond films and method for producing same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2108683A (en) * 1934-05-23 1938-02-15 Rca Corp Method of making fluorescent screens
DE891894C (en) * 1942-03-27 1953-10-01 Aeg Method for the investigation of aerosols, such as smoking, in particular metal oxide smoking, dust and the like. Like., in electron microscopes, in particular over microscopes
DE818984C (en) * 1949-10-22 1951-10-29 Siemens & Halske A G Process for the production of luminous screens

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116397186A (en) * 2023-03-31 2023-07-07 四川大学 Application of electromagnetic coupling treatment method in electroplating process

Also Published As

Publication number Publication date
NL258638A (en) 1964-04-27
DE1225317B (en) 1966-09-22
GB973805A (en) 1964-10-28
CH391418A (en) 1965-04-30

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