CN103192386B - Image-vision-based automatic calibration method of clean robot - Google Patents
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- CN103192386B CN103192386B CN201210003717.2A CN201210003717A CN103192386B CN 103192386 B CN103192386 B CN 103192386B CN 201210003717 A CN201210003717 A CN 201210003717A CN 103192386 B CN103192386 B CN 103192386B
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Abstract
The invention discloses an image-vision-based automatic calibration method of a clean robot. The automatic calibration method comprises the following steps: a, placing a robot to be calibrated below a camera to enable an original point of a robot body coordinate system to be radiated by laser; b, acquiring the position of an optical center of the laser transmitted by a laser transmitter; c, acquiring a position transformational matrix T between the original point of the optical center of the laser and the robot body coordinate system; d, operating the mechanical arm of the robot, and acquiring the position of a farthest end point of a tray; e, calculating deviation between each practical moment and a design value; and f, converting the deviation into the robot body coordinate system through the position transformational matrix T, and recording the converted deviation data into a robot motion control module. When the automatic calibration method is used, the measurement precision can be 0.2 mm, and the accurate calibration of the mechanical arm is realized; and in addition, the automation degree is high, the measurement and the calibration are completely accomplished by a computer and are finally stored in the robot motion control module.
Description
Technical field
The invention belongs to semiconductor automation manufacture field, relate generally to a kind of clean robot automation's scaling method based on image vision.
Background technology
Integrated circuit (IC) is the core of electronics and information industry, is one of the topmost new and high technology of development of promoting the IT development for national economic and social development.In great special plan, ten five " 863 " in the works, has been listed integrated circuit manufacturing equipment by country, realizes the local penetration of China's integrated circuit manufacturing equipment and the great-leap-forward development of IC equipment industry.Clean robot is the important component part of IC manufacturing equipment, can realize the automation transmission of wafer, wafer is very easily broken, this requires mechanical arm together with wafer pallet, to realize the location of degree of precision, but the reason due to manufacturing process, rigging error, between the length of mechanical arm and initial position and setting value, have gap, the wafer pallet on mechanical arm can not well be overlapped with wafer at wafer position place, band is served potential harm.
In existing technology, patent name is CN 200910105902, employing is provided with coordinate system and demarcates the scaling board in hole, sensing device is set on manipulator, the in the situation that of fixing relevant joint, make robot movement, sensing device correspondingly circles, by being positioned at actual brachium, each joint arm angle direction of each joint arm of coordinate calculating machine hand in the demarcation hole on circular path.Adopt actual brachium, each joint arm angle direction that the inventive method can each joint arm of Accurate Determining manipulator, can correct like this error in manipulator processing, installation process, improve the positional precision of manipulator control, be conducive to the accurate location of manipulator.This kind of method need to be installed sensing element on mechanical arm, for clean robot, sensing element is installed is destroyed its clean environment, sensing element changes the mechanical characteristic of mechanical arm and the kinematic parameter of SERVO CONTROL motor as load in addition, to making to demarcate, has error.
Summary of the invention
Main purpose of the present invention is to provide a kind of clean robot automation's scaling method based on image vision, and it can overcome existing defect, can realize Full-automatic non-contact and demarcate mechanical arm.
For achieving the above object, the present invention adopts following technical scheme:
A kind of clean robot automation's scaling method based on image vision, by generating laser and camera, be fixedly arranged in a fixed platform, the laser of described generating laser transmitting is vertical with described fixed platform, described camera is clapped the picture of penetrating, and is transferred in image processing module and processes; This scaling method, comprises the following steps:
A. robot to be calibrated is positioned over to the below of camera, the initial point of robot body coordinate system is arrived by Ear Mucosa Treated by He Ne Laser Irradiation;
B. by image module, the image of collected by camera is processed the position of the laser photocentre that the generating laser described in obtaining is launched;
C. the origin of coordinates using the position of laser photocentre as calibrated and calculated, obtains described laser photocentre initial point and the evolution matrix T between robot body coordinate origin;
The mechanical arm of d.Dui robot operates, and meanwhile, is clapped the motion process penetrate mechanical arm by camera, then to collected by camera to image process, obtain the position of pallet most distal point;
E. calculate the deviation between each moment reality and design load;
F. by transformation matrix T, these deviations are transformed in robot body coordinate system, the deviation data after conversion is recorded in robot motion's control module.
The above-mentioned clean robot automation's scaling method based on image vision, in step b, the photocentre position of generating laser, is to utilize luminous point and luminance difference around to extract the edge of luminous point, then adopts least square fitting to obtain.
The above-mentioned clean robot automation's scaling method based on image vision, in steps d, carries out the operation of three kinds of modes to the mechanical arm of robot: the first, mechanical arm moves rearwards to Home point by reference position; The second, mechanical arm moves forward to longest distance by Home point; The third, mechanical arm carries out left rotation and right rotation in the position of longest distance.
The above-mentioned clean robot automation's scaling method based on image vision, in step e, is to calculate in motion each deviation of mechanical arm physical location and design attitude constantly according to the location parameter of the parameter of mechanical arm design and Electric Machine Control.
Preferably, in steps d, the mechanical arm moving image that above-mentioned image processing module is taken according to camera carries out edge extracting, calculate the most distal point of end and the characteristic point of above-mentioned end of mechanical arm, every width image shines upon to find the most distal point of above-mentioned end to individual features point, and the positional information of most distal point is recorded.
Adopt after technique scheme, by the deviation data after conversion is recorded in the register of robot motion's control module, in the mechanical arm of the clean robot of working control, the compensation using these parameters as motion, to realize the position of accurate control mechanical arm.The present invention, after use, can make certainty of measurement reach 0.2mm, can realize the accurate calibration of mechanical arm; In addition, automaticity is high: measurement and demarcation are completed by computer entirely, are finally stored in robot motion's control module.
Accompanying drawing explanation
Fig. 1 is the structural representation of caliberating device of the present invention.
Fig. 2 is the FB(flow block) of scaling method of the present invention.
The specific embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Shown in figure 1, the invention discloses a kind of clean robot automation's scaling method based on image vision, this caliberating device comprises: generating laser 1, camera 2 and image processing module 3, wherein:
Generating laser 1 and camera 2, be fixedly installed in a fixed platform 4.Its distance is between the two fixed, and the laser beam of generating laser 1 is just in time perpendicular to fixed platform 4.
After camera 2 is taken pictures, by processing module 3, processed.
As shown in Figure 2, this scaling method, comprises the following steps:
A. robot to be calibrated is positioned over to the below of camera, the initial point of robot body coordinate system is arrived by Ear Mucosa Treated by He Ne Laser Irradiation;
Now, camera 2 gathers the image of the laser of generating laser 1 simultaneously.
B. by image module, the image of collected by camera is processed the position of the laser photocentre that the generating laser described in obtaining is launched;
In this step, the photocentre position of generating laser 1, is to utilize luminous point and luminance difference around to extract the edge of luminous point, then adopts least square fitting to obtain.
C. the origin of coordinates using the position of laser photocentre as calibrated and calculated, obtains described laser photocentre initial point and the evolution matrix T between robot body coordinate origin;
If
if the origin of coordinates of calibrated and calculated is (x
1, y
1), robot body coordinate origin is (x
2, y
2),
The mechanical arm of d.Dui robot operates, and meanwhile, is clapped the motion process penetrate mechanical arm by camera, then to collected by camera to image process, obtain the position of pallet most distal point.
In this step, the mechanical arm of robot is carried out to the operation of three kinds of modes: the first, mechanical arm moves rearwards to Home point by reference position; The second, mechanical arm moves forward to longest distance by Home point; The third, mechanical arm carries out left rotation and right rotation in the position of longest distance.
In above-mentioned the third motion, the size of the anglec of rotation of mechanical arm 5, is determined by the clean robot of different mechanical arm types.In addition, in these three kinds of mode motion processes, the real-time photographic images of camera.
Simultaneously, mechanical arm 5 moving images that image processing module 3 is taken according to camera carry out edge extracting, calculate the most distal point of end of mechanical arm 5 and the characteristic point of the end of mechanical arm 5, every width image shines upon to find the most distal point of the end of mechanical arm 5 to individual features point, and the positional information of most distal point is recorded.
E. calculate the deviation between each moment reality and design load;
In this step, be to calculate in motion each deviation of mechanical arm physical location and design attitude constantly according to the location parameter of the parameter of mechanical arm design and Electric Machine Control.
F. by transformation matrix T, these deviations are transformed in robot body coordinate system, the deviation data after conversion is recorded in robot motion's control module.
In practical operation, these deviation datas, are to be recorded in the register of robot motion's control module, and when controlling clean robotic manipulator 5, these parameters are as motion compensation, to realize the position of accurate control mechanical arm 5.After use, can make certainty of measurement reach 0.2mm, can realize the accurate calibration of mechanical arm; In addition, the present invention is completed by computer entirely owing to measuring and demarcating, and is finally stored in robot motion's control module, and therefore, its automaticity is high.
The above; be only the present invention's specific embodiment preferably, but protection scope of the present invention is not limited to this, is anyly familiar with in technical scope that those skilled in the art disclose in the present invention; the variation that can expect easily or replacement, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (5)
1. the clean robot automation's scaling method based on image vision, it is characterized in that: by generating laser and camera, be fixedly arranged in a fixed platform, the laser of described generating laser transmitting is vertical with described fixed platform, described camera is clapped the picture of penetrating, and is transferred in image processing module and processes; This scaling method, comprises the following steps:
A. robot to be calibrated is positioned over to the below of camera, the initial point of robot body coordinate system is arrived by Ear Mucosa Treated by He Ne Laser Irradiation;
B. by image module, the image of collected by camera is processed the position of the laser photocentre that the generating laser described in obtaining is launched;
C. the origin of coordinates using the position of laser photocentre as calibrated and calculated, obtains described laser photocentre initial point and the evolution matrix T between robot body coordinate origin;
The mechanical arm of d.Dui robot operates, and meanwhile, is clapped the motion process penetrate mechanical arm by camera, then to collected by camera to image process, obtain the position of pallet most distal point;
E. calculate the deviation between each moment reality and design load;
F. by transformation matrix T, these deviations are transformed in robot body coordinate system, the deviation data after conversion is recorded in robot motion's control module.
2. the clean robot automation's scaling method based on image vision according to claim 1, it is characterized in that: in step b, the photocentre position of generating laser, is to utilize luminous point and luminance difference around to extract the edge of luminous point, then adopts least square fitting to obtain.
3. the clean robot automation's scaling method based on image vision according to claim 1 and 2, it is characterized in that: in steps d, the mechanical arm of robot is carried out to the operation of three kinds of modes: the first, mechanical arm moves rearwards to Home point by reference position; The second, mechanical arm moves forward to longest distance by Home point; The third, mechanical arm carries out left rotation and right rotation in the position of longest distance.
4. the clean robot automation's scaling method based on image vision according to claim 3, it is characterized in that: in step e, be to calculate in motion each deviation of mechanical arm physical location and design attitude constantly according to the location parameter of the parameter of mechanical arm design and Electric Machine Control.
5. the clean robot automation's scaling method based on image vision according to claim 3, it is characterized in that: in steps d, the mechanical arm moving image that described image processing module is taken according to camera carries out edge extracting, calculate the most distal point of end and the characteristic point of described end of mechanical arm, every width image shines upon to find the most distal point of described end to individual features point, and the positional information of most distal point is recorded.
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| CN104058260B (en) * | 2013-09-27 | 2016-07-20 | 沈阳工业大学 | The robot automatic stacking method that view-based access control model processes |
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| CN103878773B (en) * | 2014-02-25 | 2015-08-12 | 西安航天精密机电研究所 | A kind of adjustment method based on automatically changing electric machine people |
| CN103878774A (en) * | 2014-02-25 | 2014-06-25 | 西安航天精密机电研究所 | Vision calibration method based on robot |
| CN105014667B (en) * | 2015-08-06 | 2017-03-08 | 浙江大学 | A kind of camera based on pixel space optimization and robot relative pose scaling method |
| CN107309884B (en) * | 2016-04-27 | 2023-03-21 | 上海捷勃特机器人有限公司 | Robot calibration system and method |
| CN106064379B (en) * | 2016-07-21 | 2019-04-12 | 深圳众为兴技术股份有限公司 | A kind of method that robot calculates practical brachium automatically |
| US10556347B2 (en) | 2016-11-01 | 2020-02-11 | Brachium, Inc. | Vision guided robot path programming |
| CN111354041A (en) * | 2018-12-20 | 2020-06-30 | 核动力运行研究所 | System positioning method based on image recognition |
| WO2021012122A1 (en) * | 2019-07-19 | 2021-01-28 | 西门子（中国）有限公司 | Robot hand-eye calibration method and apparatus, computing device, medium and product |
| CN112440269B (en) * | 2019-09-03 | 2022-04-05 | 中达电子(江苏)有限公司 | Robot arm length correction method and system |
| CN116433780B (en) * | 2023-06-14 | 2023-08-25 | 深圳市恒鑫通智能精密科技有限公司 | Automatic calibration method for laser structured light based on machine vision |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6101455A (en) * | 1998-05-14 | 2000-08-08 | Davis; Michael S. | Automatic calibration of cameras and structured light sources |
| US6304050B1 (en) * | 1999-07-19 | 2001-10-16 | Steven B. Skaar | Means and method of robot control relative to an arbitrary surface using camera-space manipulation |
| CN1512135A (en) * | 2002-12-30 | 2004-07-14 | 中国科学院沈阳自动化研究所 | Robot straight line track characteristeric measuring method and measurer used thereof |
| CN1782659A (en) * | 2004-12-02 | 2006-06-07 | 中国科学院自动化研究所 | Welding seam tracking sight sensor based on laser structure light |
| CN101961698A (en) * | 2010-08-04 | 2011-02-02 | 中国科学院自动化研究所 | Device and method for measuring poses of embedded type spraying gun in real time |
| CN102294695A (en) * | 2010-06-25 | 2011-12-28 | 鸿富锦精密工业（深圳）有限公司 | Robot calibration method and calibration system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011067889A (en) * | 2009-09-25 | 2011-04-07 | Ihi Corp | Calibration device and calibration method |
-
2012
- 2012-01-06 CN CN201210003717.2A patent/CN103192386B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6101455A (en) * | 1998-05-14 | 2000-08-08 | Davis; Michael S. | Automatic calibration of cameras and structured light sources |
| US6304050B1 (en) * | 1999-07-19 | 2001-10-16 | Steven B. Skaar | Means and method of robot control relative to an arbitrary surface using camera-space manipulation |
| CN1512135A (en) * | 2002-12-30 | 2004-07-14 | 中国科学院沈阳自动化研究所 | Robot straight line track characteristeric measuring method and measurer used thereof |
| CN1782659A (en) * | 2004-12-02 | 2006-06-07 | 中国科学院自动化研究所 | Welding seam tracking sight sensor based on laser structure light |
| CN102294695A (en) * | 2010-06-25 | 2011-12-28 | 鸿富锦精密工业（深圳）有限公司 | Robot calibration method and calibration system |
| CN101961698A (en) * | 2010-08-04 | 2011-02-02 | 中国科学院自动化研究所 | Device and method for measuring poses of embedded type spraying gun in real time |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2011－67889A 2011.04.07 |
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