CN103192386A - Image-vision-based automatic calibration method of clean robot - Google Patents
Image-vision-based automatic calibration method of clean robot Download PDFInfo
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- CN103192386A CN103192386A CN2012100037172A CN201210003717A CN103192386A CN 103192386 A CN103192386 A CN 103192386A CN 2012100037172 A CN2012100037172 A CN 2012100037172A CN 201210003717 A CN201210003717 A CN 201210003717A CN 103192386 A CN103192386 A CN 103192386A
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Abstract
The invention discloses an image-vision-based automatic calibration method of a clean robot. The automatic calibration method comprises the following steps: a, placing a robot to be calibrated below a camera to enable an original point of a robot body coordinate system to be radiated by laser; b, acquiring the position of an optical center of the laser transmitted by a laser transmitter; c, acquiring a position transformational matrix T between the original point of the optical center of the laser and the robot body coordinate system; d, operating the mechanical arm of the robot, and acquiring the position of a farthest end point of a tray; e, calculating deviation between each practical moment and a design value; and f, converting the deviation into the robot body coordinate system through the position transformational matrix T, and recording the converted deviation data into a robot motion control module. When the automatic calibration method is used, the measurement precision can be 0.2 mm, and the accurate calibration of the mechanical arm is realized; and in addition, the automation degree is high, the measurement and the calibration are completely accomplished by a computer and are finally stored in the robot motion control module.
Description
Technical field
The invention belongs to semiconductor automation manufacture field, relate generally to a kind of clean robot automation's scaling method based on image vision.
Background technology
Integrated circuit (IC) is the core of electronics and information industry, is one of the topmost new and high technology of development of promoting the IT development for national economic and social development.In great special plan has been listed integrated circuit manufacturing equipment ten five " 863 " in the works by country, realizes the local penetration of China's integrated circuit manufacturing equipment and the great-leap-forward development of IC equipment industry.Clean robot is the important component part of IC manufacturing equipment, can realize the automation transmission of wafer, wafer is very easily broken, this requires mechanical arm to realize the location of degree of precision together with the wafer pallet, but the reason owing to manufacturing process, rigging error, there is gap between the length of mechanical arm and initial position and the setting value, makes that the wafer pallet on the mechanical arm can not well overlap with wafer at the wafer position place, bring some potential harm.
In existing technology, patent name is CN 200910105902, employing is provided with coordinate system and demarcates the scaling board in hole, at manipulator sensing device is set, under the situation in fixing relevant joint, make robot movement, sensing device is correspondingly made circular motion, actual brachium, each the joint arm angle direction of each joint arm of coordinate Calculation manipulator by being positioned at the demarcation hole on the circular path.Adopt the inventive method can accurately measure actual brachium, each joint arm angle direction of each joint arm of manipulator, can correct the error in manipulator processing, the installation process like this, improve mechanical hand-guided positional precision, be conducive to the accurate location of manipulator.This kind method need be installed sensing element at mechanical arm, for clean robot, sensing element is installed is destroyed its clean environment, sensing element makes the mechanical characteristic of mechanical arm and the kinematic parameter of SERVO CONTROL motor change as load in addition, has error to making to demarcate.
Summary of the invention
Main purpose of the present invention is to provide a kind of clean robot automation's scaling method based on image vision, and it can overcome existing defective, can realize full-automatic non-contact type demarcation mechanical arm.
For achieving the above object, the present invention adopts following technical scheme:
A kind of clean robot automation's scaling method based on image vision, with generating laser and camera, be fixedly arranged on the fixed platform, the laser of described generating laser emission is vertical with described fixed platform, described camera is clapped the picture of penetrating, and is transferred in the image processing module and handles; This scaling method may further comprise the steps:
A. robot to be calibrated is positioned over the below of camera, the initial point of robot body coordinate system is shone by laser;
B. by image module the image of camera collection is handled, obtained the position of the laser photocentre that described generating laser launches;
C. with the position of the laser photocentre origin of coordinates as calibrated and calculated, obtain the evolution matrix T between described laser photocentre initial point and the robot body coordinate origin;
D. the mechanical arm of robot is operated, simultaneously, clapped the motion process of penetrating mechanical arm by camera, then the image that camera collects is handled, obtain the position of pallet most distal point;
E. calculate the deviation between each moment reality and the design load;
F. by transformation matrix T these deviations are transformed in the robot body coordinate system, the deviation data after the conversion is recorded in robot motion's control module.
The above-mentioned clean robot automation's scaling method based on image vision, in step b, the photocentre position of generating laser is to utilize luminous point and luminance difference on every side to extract the edge of luminous point, adopts least square fitting to obtain again.
The above-mentioned clean robot automation's scaling method based on image vision, in steps d, the mechanical arm of robot is carried out the operation of three kinds of modes: first kind, mechanical arm moves rearwards to the Home point by the reference position; Second kind, mechanical arm moves forward to longest distance by the Home point; The third, mechanical arm carries out left rotation and right rotation in the position of longest distance.
The above-mentioned clean robot automation's scaling method based on image vision in step e, is that location parameter according to the parameter of mechanical arm design and Electric Machine Control calculates in the motion each deviation of mechanical arm physical location and design attitude constantly.
Preferably, in steps d, the mechanical arm moving image that above-mentioned image processing module is taken according to camera carries out edge extracting, calculate the most distal point of end of mechanical arm and the characteristic point of above-mentioned end, every width of cloth image shines upon to find the most distal point of above-mentioned end to the individual features point, and the positional information of most distal point is noted.
After adopting technique scheme, by the deviation data after the conversion being recorded in the register of robot motion's control module, in the mechanical arm of the clean robot of working control, with the compensation of these parameters as motion, to realize accurately controlling the position of mechanical arm.The present invention after the use, can make certainty of measurement reach 0.2mm, can realize the accurate demarcation of mechanical arm; In addition, automaticity height: measure and demarcate and finished by computer entirely, be stored at last in robot motion's control module.
Description of drawings
Fig. 1 is the structural representation of caliberating device of the present invention.
Fig. 2 is the FB(flow block) of scaling method of the present invention.
The specific embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the present invention, and be not used in restriction the present invention.
With reference to shown in Figure 1, the invention discloses a kind of clean robot automation's scaling method based on image vision, this caliberating device comprises: generating laser 1, camera 2 and image processing module 3, wherein:
Generating laser 1 and camera 2 are fixedly installed on the fixed platform 4.Its distance is between the two fixed, and the laser beam of generating laser 1 is just in time perpendicular to fixed platform 4.
After camera 2 is taken pictures, handled by processing module 3.
As shown in Figure 2, this scaling method may further comprise the steps:
A. robot to be calibrated is positioned over the below of camera, the initial point of robot body coordinate system is shone by laser;
At this moment, camera 2 is gathered the image of the laser of generating laser 1 simultaneously.
B. by image module the image of camera collection is handled, obtained the position of the laser photocentre that described generating laser launches;
In this step, the photocentre position of generating laser 1 is to utilize luminous point and luminance difference on every side to extract the edge of luminous point, adopts least square fitting to obtain again.
C. with the position of the laser photocentre origin of coordinates as calibrated and calculated, obtain the evolution matrix T between described laser photocentre initial point and the robot body coordinate origin;
If
If the origin of coordinates of calibrated and calculated is (x
1, y
1), the robot body coordinate origin is (x
2, y
2), then
D. the mechanical arm of robot is operated, simultaneously, clapped the motion process of penetrating mechanical arm by camera, then the image that camera collects is handled, obtain the position of pallet most distal point.
In this step, the mechanical arm of robot is carried out the operation of three kinds of modes: first kind, mechanical arm moves rearwards to the Home point by the reference position; Second kind, mechanical arm moves forward to longest distance by the Home point; The third, mechanical arm carries out left rotation and right rotation in the position of longest distance.
In the third above-mentioned motion, the size of the anglec of rotation of mechanical arm 5 is by the clean robot decision of different mechanical arm types.In addition, in these three kinds of mode motion processes, the real-time photographic images of camera.
Simultaneously, mechanical arm 5 moving images that image processing module 3 is taken according to camera carry out edge extracting, calculate the characteristic point of the end of the most distal point of end of mechanical arm 5 and mechanical arm 5, the most distal point that every width of cloth image shines upon to find the end of mechanical arm 5 to the individual features point, and the positional information of most distal point noted.
E. calculate the deviation between each moment reality and the design load;
In this step, be that location parameter according to the parameter of mechanical arm design and Electric Machine Control calculates in the motion each deviation of mechanical arm physical location and design attitude constantly.
F. by transformation matrix T these deviations are transformed in the robot body coordinate system, the deviation data after the conversion is recorded in robot motion's control module.
In practical operation, these deviation datas are to be recorded in the register of robot motion's control module, and in the clean robot mechanical arm arm 5 of control, these parameters are as motion compensation, to realize accurately controlling the position of mechanical arm 5.After the use, can make certainty of measurement reach 0.2mm, can realize the accurate demarcation of mechanical arm; In addition, the present invention is stored in robot motion's control module at last owing to measure and demarcate and finished by computer entirely, therefore, and its automaticity height.
The above; only for the preferable specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (5)
1. clean robot automation's scaling method based on image vision, it is characterized in that: with generating laser and camera, be fixedly arranged on the fixed platform, the laser of described generating laser emission is vertical with described fixed platform, described camera is clapped the picture of penetrating, and is transferred in the image processing module and handles; This scaling method may further comprise the steps:
A. robot to be calibrated is positioned over the below of camera, the initial point of robot body coordinate system is shone by laser;
B. by image module the image of camera collection is handled, obtained the position of the laser photocentre that described generating laser launches;
C. with the position of the laser photocentre origin of coordinates as calibrated and calculated, obtain the evolution matrix T between described laser photocentre initial point and the robot body coordinate origin;
D. the mechanical arm of robot is operated, simultaneously, clapped the motion process of penetrating mechanical arm by camera, then the image that camera collects is handled, obtain the position of pallet most distal point;
E. calculate the deviation between each moment reality and the design load;
F. by transformation matrix T these deviations are transformed in the robot body coordinate system, the deviation data after the conversion is recorded in robot motion's control module.
2. the clean robot automation's scaling method based on image vision according to claim 1, it is characterized in that: in step b, the photocentre position of generating laser is to utilize luminous point and luminance difference on every side to extract the edge of luminous point, adopts least square fitting to obtain again.
3. the clean robot automation's scaling method based on image vision according to claim 1 and 2, it is characterized in that: in steps d, the mechanical arm of robot is carried out the operation of three kinds of modes: first kind, mechanical arm moves rearwards to the Home point by the reference position; Second kind, mechanical arm moves forward to longest distance by the Home point; The third, mechanical arm carries out left rotation and right rotation in the position of longest distance.
4. the clean robot automation's scaling method based on image vision according to claim 3, it is characterized in that: in step e, be that location parameter according to the parameter of mechanical arm design and Electric Machine Control calculates in the motion each deviation of mechanical arm physical location and design attitude constantly.
5. the clean robot automation's scaling method based on image vision according to claim 3, it is characterized in that: in steps d, the mechanical arm moving image that described image processing module is taken according to camera carries out edge extracting, calculate the most distal point of end of mechanical arm and the characteristic point of described end, every width of cloth image shines upon to find the most distal point of described end to the individual features point, and the positional information of most distal point is noted.
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| CN103878773A (en) * | 2014-02-25 | 2014-06-25 | 西安航天精密机电研究所 | Debugging method based on full-automatic battery-changing robot |
| CN104058260A (en) * | 2013-09-27 | 2014-09-24 | 沈阳工业大学 | Robot automatic stacking method based on visual processing |
| CN105014667A (en) * | 2015-08-06 | 2015-11-04 | 浙江大学 | Camera and robot relative pose calibration method based on pixel space optimization |
| CN105934313A (en) * | 2014-01-26 | 2016-09-07 | Abb瑞士股份有限公司 | Method, apparatus and robot system for moving objects to target position |
| CN106064379A (en) * | 2016-07-21 | 2016-11-02 | 深圳众为兴技术股份有限公司 | A kind of robot calculates the method for actual brachium automatically |
| CN107309884A (en) * | 2016-04-27 | 2017-11-03 | 上海福赛特机器人有限公司 | Robot calibration system and method |
| WO2019089995A1 (en) * | 2016-11-01 | 2019-05-09 | Brachium Labs Llc | Vision guided robot path programming |
| CN111354041A (en) * | 2018-12-20 | 2020-06-30 | 核动力运行研究所 | System positioning method based on image recognition |
| CN112440269A (en) * | 2019-09-03 | 2021-03-05 | 中达电子(江苏)有限公司 | Robot arm length correction method and system |
| CN114174006A (en) * | 2019-07-19 | 2022-03-11 | 西门子（中国）有限公司 | Robot eye calibration method, device, computing equipment, medium and product |
| CN116433780A (en) * | 2023-06-14 | 2023-07-14 | 深圳市恒鑫通智能精密科技有限公司 | Automatic calibration method for laser structured light based on machine vision |
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| CN107309884A (en) * | 2016-04-27 | 2017-11-03 | 上海福赛特机器人有限公司 | Robot calibration system and method |
| CN106064379B (en) * | 2016-07-21 | 2019-04-12 | 深圳众为兴技术股份有限公司 | A kind of method that robot calculates practical brachium automatically |
| CN106064379A (en) * | 2016-07-21 | 2016-11-02 | 深圳众为兴技术股份有限公司 | A kind of robot calculates the method for actual brachium automatically |
| WO2019089995A1 (en) * | 2016-11-01 | 2019-05-09 | Brachium Labs Llc | Vision guided robot path programming |
| US10556347B2 (en) | 2016-11-01 | 2020-02-11 | Brachium, Inc. | Vision guided robot path programming |
| CN111354041A (en) * | 2018-12-20 | 2020-06-30 | 核动力运行研究所 | System positioning method based on image recognition |
| CN114174006A (en) * | 2019-07-19 | 2022-03-11 | 西门子（中国）有限公司 | Robot eye calibration method, device, computing equipment, medium and product |
| CN114174006B (en) * | 2019-07-19 | 2024-03-05 | 西门子（中国）有限公司 | Robot hand-eye calibration method, device, computing equipment, medium and product |
| CN112440269A (en) * | 2019-09-03 | 2021-03-05 | 中达电子(江苏)有限公司 | Robot arm length correction method and system |
| CN112440269B (en) * | 2019-09-03 | 2022-04-05 | 中达电子(江苏)有限公司 | Robot arm length correction method and system |
| CN116433780A (en) * | 2023-06-14 | 2023-07-14 | 深圳市恒鑫通智能精密科技有限公司 | Automatic calibration method for laser structured light based on machine vision |
| CN116433780B (en) * | 2023-06-14 | 2023-08-25 | 深圳市恒鑫通智能精密科技有限公司 | Automatic calibration method for laser structured light based on machine vision |
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