WO2022137363A1 - Component mounting apparatus and component mounting method - Google Patents

Component mounting apparatus and component mounting method Download PDF

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Publication number
WO2022137363A1
WO2022137363A1 PCT/JP2020/048044 JP2020048044W WO2022137363A1 WO 2022137363 A1 WO2022137363 A1 WO 2022137363A1 JP 2020048044 W JP2020048044 W JP 2020048044W WO 2022137363 A1 WO2022137363 A1 WO 2022137363A1
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WO
WIPO (PCT)
Prior art keywords
mounting
position recognition
component
substrate
image pickup
Prior art date
Application number
PCT/JP2020/048044
Other languages
French (fr)
Japanese (ja)
Inventor
大介 春日
Original Assignee
ヤマハ発動機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヤマハ発動機株式会社 filed Critical ヤマハ発動機株式会社
Priority to KR1020237020895A priority Critical patent/KR20230110330A/en
Priority to PCT/JP2020/048044 priority patent/WO2022137363A1/en
Priority to JP2022570834A priority patent/JPWO2022137363A1/ja
Priority to CN202080107951.2A priority patent/CN116636321A/en
Priority to DE112020007760.8T priority patent/DE112020007760T5/en
Publication of WO2022137363A1 publication Critical patent/WO2022137363A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/081Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0812Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines the monitoring devices being integrated in the mounting machine, e.g. for monitoring components, leads, component placement
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/081Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0815Controlling of component placement on the substrate during or after manufacturing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • H05K1/0269Marks, test patterns or identification means for visual or optical inspection
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09918Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components

Definitions

  • the present invention relates to a component mounting device and a component mounting method, and more particularly to a component mounting device and a component mounting method for imaging a position recognition mark provided on a board.
  • a mounting head for mounting an electronic component on a printed circuit board and a substrate recognition for imaging an individual board recognition mark (position recognition mark) provided near the mounting position of the electronic component on the printed circuit board.
  • An electronic component mounting device (component mounting device) including a camera is disclosed. This electronic component mounting device is configured to capture an individual substrate recognition mark with a substrate recognition camera and correct the mounting position based on the image pickup result of the individual substrate recognition mark by the substrate recognition camera. Further, this electronic component mounting device is configured to capture the individual substrate recognition marks having predetermined position coordinates when the substrate recognition camera captures the individual substrate recognition marks.
  • the present invention has been made to solve the above-mentioned problems, and one object of the present invention is that the position recognition mark is hidden by the parts mounted on the substrate, so that the mounting position is hidden. It is an object of the present invention to provide a component mounting device and a component mounting method capable of suppressing the failure to mount a component on a substrate without being able to perform correction.
  • the component mounting device includes a mounting head for mounting the component on the substrate, an image pickup unit for capturing a position recognition mark provided on the substrate, and a component mounting operation on the substrate during the mounting operation of the component on the substrate.
  • a control unit that determines the position recognition mark that is not hidden by the mounted components as the image pickup target by the image pickup unit and corrects the mounting position based on the image pickup result of the position recognition mark determined as the image pickup unit by the image pickup unit. , Equipped with.
  • the position recognition mark that is not hidden by the component mounted on the substrate is determined as the image pickup target by the imaging unit.
  • a control unit for correcting the mounting position is provided based on the image pickup result of the position recognition mark determined as the image pickup target by the image pickup unit.
  • the position recognition mark that is not hidden by the component mounted on the board is determined as the image pickup target by the imaging unit, so that the position can be hidden by the component mounted on the board. Since the recognition mark can be arranged, the degree of freedom in arranging the position recognition mark can be increased.
  • the substrate includes a plurality of individual substrates each provided with a position recognition mark
  • the control unit is a non-mounting point during the mounting operation of the component on the substrate. It is configured to control to determine the position recognition mark of the image pickup target from among the position recognition marks corresponding to the individual substrate including the above.
  • the position recognition mark is likely to be hidden by the components mounted on the board (that is, the board including a plurality of individual boards each provided with the position recognition mark) is not mounted. Since the position recognition mark corresponding to the individual board including the points is determined, the mounting position cannot be corrected due to the fact that the position recognition mark is hidden by the component mounted on the board, and the component board cannot be corrected.
  • the image pickup unit captures the position recognition marks that are not hidden by the parts mounted on the board. It can be easily determined as a target.
  • the control unit is not hidden by the components mounted on the board during the retry mounting operation in which the remounting operation is performed to the unmounted point due to an error.
  • the position recognition mark is likely to be hidden by the parts mounted on the board.
  • the position recognition mark is hidden by the parts mounted on the board. It is possible to prevent the component from being unable to be mounted on the substrate because the position cannot be corrected.
  • the control unit controls to determine the position recognition mark that is not hidden by the components mounted on the substrate as the image pickup target by the image pickup unit not only during the retry mounting operation but also during the normal mounting operation. It is configured in. With this configuration, the same position recognition mark recognition operation can be performed both during the normal mounting operation and during the retry mounting operation. Therefore, the positions differ from each other during the normal mounting operation and the retry mounting operation. It is possible to suppress the complexity of the recognition operation of the position recognition mark as compared with the case of performing the recognition operation of the recognition mark.
  • the control unit determines two position recognition marks as imaging targets by the image pickup unit from among a plurality of position recognition marks corresponding to a plurality of unmounted points. Is configured to do. With this configuration, two position recognition marks are determined as the image pickup targets by the image pickup unit from among the plurality of position recognition marks corresponding to the plurality of unmounted points, so that they are hidden by the components mounted on the substrate. It is possible to easily determine the minimum necessary position recognition mark as an image pickup target by the image pickup unit.
  • the control unit is configured to control to determine the two farthest position recognition marks as the image pickup targets by the image pickup unit from the plurality of position recognition marks corresponding to the plurality of unmounted points.
  • the mounting position can be corrected based on the imaging results of the two farthest position recognition marks, so that the unmounted points between the two farthest position recognition marks can be corrected.
  • the mounting position can be corrected by the extrapolation correction that obtains the numerical value inside the data range, which is more accurate than the extrapolation correction, instead of the extrapolation correction that obtains the numerical value outside the data range.
  • the mounting position can be corrected more accurately than in the case where the position recognition mark other than the two farthest position recognition marks is determined as the image pickup target by the imaging unit.
  • the control unit captures a position recognition mark that is not hidden by the components mounted on the board in a designated area set to include a plurality of mounting positions. It is configured to correct the mounting position in the designated area based on the image pickup result by the image pickup unit of the position recognition mark determined as the image pickup target.
  • the position recognition marks of the imaging target can be determined in a relatively narrow range within the designated area, so that it is possible to prevent the position recognition marks that are excessively distant from each other from being determined as the imaging target. be able to.
  • the mounting position can be corrected with high accuracy based on the image pickup result of the position recognition mark relatively close to the mounting position.
  • control unit is configured to control to set a designated area so that the most unmounted points are included during the mounting operation of the component on the board.
  • many unmounted points can be included in the designated area. Therefore, even when the designated area is provided, it is possible to suppress an increase in the number of image pickup operations of the position recognition mark by the image pickup unit. Can be done.
  • the component mounting method according to the second aspect of the present invention is mounted on the board during the step of mounting the component on the board, the step of imaging the position recognition mark provided on the board, and the mounting operation of the component on the board. It is provided with a step of determining a position recognition mark that is not hidden by the components as an image pickup target and correcting the mounting position based on the image pickup result of the position recognition mark determined as the image pickup target.
  • the position recognition mark that is not hidden by the component mounted on the substrate is determined as the image pickup target, and the position recognition mark determined as the image pickup target is imaged. Based on the result, a step for correcting the mounting position is provided.
  • the position recognition mark is hidden by the component mounted on the board, so that the mounting position cannot be corrected and the component is mounted on the board. It is possible to provide a component mounting method capable of suppressing the inability to perform.
  • the board includes a plurality of individual boards provided with position recognition marks
  • the step of correcting the mounting position is during the mounting operation of the component on the board.
  • the position recognition mark is likely to be hidden by the components mounted on the board (that is, the board including a plurality of individual boards each provided with the position recognition mark) is not mounted. Since the position recognition mark corresponding to the individual board including the points is determined, the mounting position cannot be corrected due to the fact that the position recognition mark is hidden by the component mounted on the board, and the component board cannot be corrected.
  • the position recognition mark to be imaged can be easily used as the image pickup target. Can be decided.
  • the mounting position cannot be corrected and the component cannot be mounted on the board. It is possible to provide a component mounting device and a component mounting method that can be suppressed.
  • FIG. 1 It is a schematic diagram which shows the component mounting apparatus by 1st Embodiment.
  • A is a schematic plan view showing a substrate before mounting of parts according to the first embodiment.
  • B is a schematic plan view showing a substrate after mounting the components according to the first embodiment. It is a schematic diagram for demonstrating the local fiducial by 1st Embodiment. It is a schematic diagram for demonstrating the point fiducial by 1st Embodiment. It is a schematic diagram for demonstrating the mounting operation of a component on a substrate including the determination of the position recognition mark by the component mounting apparatus according to the first embodiment.
  • A is a schematic diagram for explaining the determination of the position recognition mark in the normal mounting operation by the component mounting device according to the first embodiment.
  • (B) is a schematic diagram for explaining the determination of the position recognition mark at the time of the retry mounting operation by the component mounting device according to the first embodiment. It is a flowchart for demonstrating the component mounting process by the component mounting apparatus according to 1st Embodiment. It is a flowchart for demonstrating the mark recognition process of FIG. It is a detailed flowchart of the mark recognition process of FIG. 7. It is a schematic diagram for demonstrating the mounting operation of a component on a substrate including the determination of the position recognition mark by the component mounting apparatus according to the second embodiment. It is a schematic diagram for demonstrating the determination of the designated area by the component mounting apparatus by 2nd Embodiment. It is a flowchart for demonstrating the designated area setting process by the component mounting apparatus by 2nd Embodiment. It is a schematic plan view for demonstrating the substrate by the modification of 2nd Embodiment.
  • the component mounting device 100 is a so-called flip-chip bonder in which a component (semiconductor chip) C is taken out from the diced wafer W and mounted on the substrate B.
  • the substrate B is, for example, a printed circuit board and a lead frame.
  • the component mounting device 100 includes a base 1, a conveyor 2, a mounting unit 3, a moving mechanism unit 4, a substrate imaging unit 5, a wafer holding table 6, and an extraction unit 7. It includes a component recognition image pickup unit 8, a fixed image pickup unit 9, a flux supply unit 10, a wafer storage unit 11, and a control unit 12.
  • the substrate imaging unit 5 is an example of the "imaging unit" in the claims.
  • the conveyor 2 is configured to carry the board B into a predetermined mounting work position and carry out the board B from the predetermined mounting work position. Further, the conveyor 2 includes a pair of conveyor rails extending in the X direction and a positioning mechanism (not shown) for positioning the substrate B at a predetermined position. As a result, the conveyor 2 conveys the substrate B in the X direction, and positions and fixes the substrate B at a predetermined mounting work position.
  • the mounting unit 3 is configured to perform the work of mounting the component C of the wafer W on the substrate B. Specifically, the mounting unit 3 is supported by the moving mechanism unit 4 so as to be movable above the conveyor 2 (board B) in the horizontal direction (XY direction).
  • the mounting unit 3 includes a plurality of (10) mounting heads 3a arranged along the X direction.
  • the mounting head 3a has a suction nozzle (not shown) for sucking the component C at the tip thereof.
  • the mounting unit 3 is configured to attract the component C taken out from the wafer W by the taking-out unit 7 by the mounting head 3a and mount it on the substrate B.
  • the moving mechanism unit 4 is configured to move the mounting unit 3.
  • the moving mechanism unit 4 has an X-axis moving mechanism unit 4a for moving the mounting unit 3 in the X direction and a Y-axis moving mechanism unit 4b for moving the X-axis moving mechanism unit 4a in the Y direction.
  • the X-axis movement mechanism unit 4a and the Y-axis movement mechanism unit 4b for example, a linear motion mechanism using a linear motor, a linear motion mechanism using a ball screw axis, or the like can be adopted.
  • the X-axis movement mechanism unit 4a has an X-axis motor (not shown) as a drive source for moving the mounting unit 3 in the X direction.
  • the Y-axis movement mechanism unit 4b has a Y-axis motor (not shown) as a drive source for moving the X-axis movement mechanism unit 4a in the Y direction.
  • the mounting unit 3 is configured to be movable in the horizontal direction (XY direction) above the conveyor 2 (board B) by the X-axis movement mechanism unit 4a and the Y-axis movement mechanism unit 4b of the movement mechanism unit 4.
  • the substrate imaging unit 5 includes a camera and is configured to image a position recognition mark (fiducial mark) F (see FIG. 2) provided on the substrate B prior to mounting the component C on the substrate B. ing.
  • the control unit 12 is configured to correct the mounting position based on the image pickup result of the position recognition mark F by the substrate image pickup unit 5.
  • the substrate imaging unit 5 is provided on a frame common to the mounting unit 3. Therefore, the substrate imaging unit 5, together with the mounting unit 3, is moved above the conveyor 2 (board B) in the horizontal direction (XY direction) by the X-axis moving mechanism unit 4a and the Y-axis moving mechanism unit 4b of the moving mechanism unit 4. It is configured to be movable.
  • the substrate B includes a plurality of individual substrate B1 (40 in FIG. 2A).
  • a pair of position recognition marks F are provided on each of the plurality of individual substrate B1s.
  • each of the plurality of individual piece substrates B1 is configured so that one component C is mounted.
  • the position recognition mark F is provided at a position hidden by the component C mounted on the individual substrate B1 after the component C is mounted on the individual substrate B1. That is, the position recognition mark F is provided at a position overlapping the component C mounted on the individual piece substrate B1 in a plan view.
  • the wafer holding table 6 is configured to support the wafer W drawn out from the wafer accommodating portion 11 by a loading / unloading mechanism (not shown) at a predetermined position.
  • the take-out unit 7 is configured to take out the component C from the wafer W supported by the wafer holding table 6 and deliver it to the mounting unit 3. Further, the take-out unit 7 is configured to be moved in the horizontal direction (XY direction) at a position above the wafer holding table 6 by a predetermined driving means. Further, the take-out unit 7 includes a plurality of wafer heads 7a.
  • the wafer head 7a is configured to be rotatable around the X axis and to be able to move (up and down) in the vertical direction. Further, the wafer head 7a is configured to be capable of adsorbing the component C. That is, the take-out unit 7 sucks and takes out the component C pushed up by the protrusion (not shown) by the wafer head 7a, reverses (flip) the component C, and at a predetermined delivery position, the mounting unit 3 (mounting). It is configured to deliver the component C to the head 3a).
  • the component recognition imaging unit 8 includes a camera and is configured to image the component C to be ejected prior to ejecting the component C from the wafer W. Further, the component recognition imaging unit 8 is provided in a frame common to the extraction unit 7. Further, the component recognition imaging unit 8 is configured to be moved in the horizontal direction (XY direction) at a position above the wafer holding table 6 by a predetermined driving means.
  • the fixed image pickup unit 9 is installed on the base 1 and in the movable area of the mounting unit 3.
  • the fixed imaging unit 9 includes a camera and is configured to image the component C attracted by the mounting head 3a of the mounting unit 3 from below.
  • the flux supply unit 10 is provided for transferring (applying) the flux to the bump electrode of the component C.
  • the flux supply unit 10 is configured to spread and supply the flux thinly on the plate. Then, the bump electrode of the component C adsorbed on the mounting head 3a of the mounting portion 3 is brought into contact with the spread flux. As a result, the flux is transferred to the bump electrode of the component C. The flux is applied to the bump electrode of the component C so that the solder for joining is well wetted.
  • the wafer storage unit 11 is configured to be capable of accommodating a plurality of diced wafers W.
  • the component C of the wafer W is a chip component for mounting a flip chip on which a plurality of bump electrodes are formed.
  • the component C is attached and held on the film-shaped wafer sheet so that the bump electrode forming surface (mounting surface) faces upward.
  • the control unit 12 is configured to comprehensively control the operation of each unit of the component mounting device 100.
  • the control unit 12 includes a conveyor 2, a mounting unit 3, a moving mechanism unit 4, a substrate imaging unit 5, a wafer holding table 6, an extraction unit 7, a component recognition imaging unit 8, a fixed imaging unit 9, and a flux supply unit. It is configured to control the operation of the 10 and the wafer accommodating portion 11.
  • the control unit 12 controls the operation of each unit based on an output signal from a position detection means such as an encoder built in the drive motor of each unit. Further, the control unit 12 has a function of performing image pickup control and image recognition of various image pickup units (board image pickup unit 5, component recognition image pickup unit 8, and fixed image pickup unit 9).
  • the control unit 12 includes a processor including a CPU (central processing unit) and a memory.
  • the position recognition mark F may be set as a local fiducial.
  • the position coordinates of the position recognition mark F are set in the coordinate system from the origin of the substrate B.
  • a common position recognition mark F is set for a plurality of mounting positions of the substrate B.
  • the position recognition mark F is set as a local fiducial by the implementation data and the fiducial data.
  • the implementation data includes information of "No.”, "coordinate X”, “coordinate Y”, and "Fid number”.
  • “No.” represents the mounting number (order) of the component C.
  • the "coordinate X” represents the X coordinate of the mounting position of the substrate B.
  • the “coordinate Y” represents the Y coordinate of the mounting position of the substrate B.
  • the "Fid number” represents a data number in the fiducial data.
  • the X coordinate and the Y coordinate of the mounting position of the component C of 1 are 10 and the Y coordinate is 10. It is shown that the position recognition mark F corresponding to the Fid number 1 is recognized (imaged) when the component C of 1 is mounted.
  • the fiducial data includes information of "Fid number”, “type”, “coordinate X1", “coordinate Y1”, “coordinate X2”, and “coordinate Y2".
  • the "Fid number” represents a data number in the fiducial data.
  • "Type” represents the type of data structure (local or point).
  • the "coordinate X1” represents the X coordinate of the position of the first position recognition mark F.
  • the “coordinate Y1” represents the Y coordinate of the position of the first position recognition mark F.
  • the "coordinate X2” represents the X coordinate of the position of the second position recognition mark F on the substrate B.
  • the "coordinate Y2" represents the Y coordinate of the position of the second position recognition mark F.
  • the "coordinates X1", “coordinates Y1", “coordinates X2”, and “coordinates Y2" are represented by the coordinate system from the origin of the substrate B when the type is local.
  • the data structure of the data of Fid number 1 is local, and the position recognition mark F corresponding to Fid number 1 has an X coordinate of 5 and a Y coordinate of 15. It is represented that two position recognition marks F, F and a position recognition mark F having an X coordinate of 105 and a Y coordinate of 5, are recognized (imaged).
  • the mounting positions of the 10 components C from 1 to 10 are associated with the position recognition mark F of the Fid number 1.
  • the position recognition mark F having an X coordinate of 5 and a Y coordinate of 15 and a position recognition mark F having an X coordinate of 105 and a Y coordinate of 5 for 10 mounting positions.
  • the two position recognition marks F and the position recognition mark F of the above are recognized (imaged) as a common position recognition mark F.
  • the position recognition mark F having the X coordinate of 5 and the Y coordinate of 15, and the position recognition mark F having the X coordinate of 105 and the Y coordinate of 5. Since it is possible to correct 10 mounting positions, if the position recognition mark F is set as a local fiducial, the tact time can be shortened. On the other hand, when the position recognition mark F is set as a local fiducial, when the position recognition mark F is hidden by the component C mounted on the board B, the mounting position cannot be corrected and the board B of the component C cannot be corrected. It may not be possible to attach it to.
  • the position recognition mark F may be set as a point fiducial.
  • the position coordinates of the position recognition mark F are set in a coordinate system (relative coordinate system from the mounting position) with the mounting position as the origin.
  • an individual position recognition mark F is set for each mounting position of the substrate B.
  • the position recognition mark F is set as a point fiducial by the implementation data and the fiducial data, as in the case of the local fiducial.
  • the "type” is set to the point in the fiducial data, and the "coordinates X1", “coordinates Y1", and “coordinates X2" are set.
  • "coordinates Y2" are represented by a coordinate system with the mounting position as the origin.
  • the fiducial data for example, the data structure of the data of Fid number 1 is a point, and the position recognition mark F corresponding to Fid number 1 has an X coordinate of -5 and a Y coordinate of 5. It is shown that two position recognition marks F, that is, the mark F and the position recognition mark F having an X coordinate of 5 and a Y coordinate of -5 are recognized (imaging).
  • the mounting positions of all the components C are associated with the position recognition mark F of Fid number 1.
  • the position recognition mark F for example, No.
  • the recognition mark F is recognized (imaged) as the position recognition mark F.
  • No. At the time of mounting operation of the component C on the substrate B of No. 2, No.
  • each mounting position can be corrected based on the imaging result of the individual position recognition mark F. Therefore, if the position recognition mark F is set as a point fiducial, it is mounted on the substrate B. Since the position recognition mark F is hidden by the component C, the mounting position cannot be corrected and the component C cannot be mounted on the substrate B. On the other hand, when the position recognition mark F is set as a point fiducial, it is necessary to perform the recognition operation (imaging operation) of the position recognition mark F for each mounting position, so that the tact time tends to increase.
  • the component mounting device 100 sets the position recognition mark F as a point fiducial in which the individual position recognition mark F is set for each mounting position of the board B, while setting the position recognition mark F.
  • the position recognition mark F is configured to function as a local fiduciary in which a common position recognition mark F is set for a plurality of mounting positions of the board B. ..
  • the control unit 12 has a position recognition mark that is not hidden by the component C mounted on the board B during the mounting operation of the component C on the board B.
  • F is determined as an image pickup target by the substrate imaging unit 5, and the mounting position is corrected based on the image pickup result of the position recognition mark F determined as the image pickup target by the substrate image pickup unit 5.
  • the control unit 12 sets the position recognition mark F to be imaged from the position recognition marks F corresponding to the individual board B1 including the unmounted points during the mounting operation of the component C on the board B. It is configured to give control to determine.
  • control unit 12 is configured to control for each suction group to determine the position recognition mark F to be imaged from among the position recognition marks F corresponding to the individual substrate B1 including the unmounted points. ing.
  • the position recognition mark F determined as the imaging target is shown by enclosing it in a circle.
  • the control unit 12 mounts the component C mounted on the board B at least during the retry mounting operation (during the second and subsequent mounting operations) in which the remounting operation is performed to the unmounted point due to an error. It is configured to control the position recognition mark F which is not hidden by the substrate image pickup unit 5 to determine the image pickup target. Specifically, the control unit 12 displays the position recognition mark F that is not hidden by the component C mounted on the board B not only during the retry mounting operation but also during the normal mounting operation (during the first mounting operation). It is configured to control the substrate image pickup unit 5 to determine the image pickup target. The control unit 12 is configured to sequentially determine the position recognition mark F, which is not hidden by the component C mounted on the substrate B, as an image pickup target by the substrate image pickup unit 5 during the normal mounting operation and the retry mounting operation. Has been done.
  • the control unit 12 recognizes two positions from the plurality of position recognition marks F corresponding to the plurality of unmounted points. It is configured to control the mark F to be determined as an image pickup target by the substrate image pickup unit 5. Specifically, the control unit 12 controls to determine the two farthest position recognition marks F from the plurality of position recognition marks F corresponding to the plurality of unmounted points as the image pickup target by the substrate image pickup unit 5. It is configured to do. Further, the control unit 12 sets the two farthest position recognition marks F from the plurality of position recognition marks F corresponding to the plurality of unmounted points in the substrate imaging unit 5 during the normal mounting operation and the retry mounting operation. It is configured to perform control to determine the image pickup target by.
  • the component is attached to the 10 mounting positions (individual substrate B1) in the first stage.
  • the mounting operation of C on the substrate B is performed.
  • the two farthest position recognition marks F are out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the first stage where the component C is to be mounted.
  • the position recognition mark F of the image pickup target is imaged by the substrate imaging unit 5.
  • the 10 mounting positions of the first stage are corrected, and the 10 mounting positions of the first stage (individual piece substrate B1) are corrected. ) Is mounted with component C.
  • the component C cannot be mounted at the two mounting positions (the third and seventh mounting positions from the left in the first stage in FIG. 5) due to an error such as a suction error.
  • the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) of the second stage.
  • the operation is performed.
  • the two farthest position recognition marks F are out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the second stage where the component C is to be mounted.
  • the position recognition mark F of the image pickup target is imaged by the substrate imaging unit 5.
  • the 10 mounting positions of the second stage are corrected, and the 10 mounting positions of the second stage (individual piece substrate B1) are corrected. ) Is mounted with component C.
  • the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) of the third stage.
  • the operation is performed.
  • the two farthest position recognition marks F are out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the third stage where the component C is to be mounted.
  • the position recognition mark F of the image pickup target is imaged by the substrate imaging unit 5.
  • the 10 mounting positions of the third stage are corrected, and the 10 mounting positions of the third stage (individual piece substrate B1) are corrected. ) Is mounted with component C.
  • the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) in the fourth stage.
  • the operation is performed.
  • the two farthest position recognition marks F are out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the fourth stage where the component C is to be mounted.
  • the position recognition mark F of the image pickup target is imaged by the substrate imaging unit 5.
  • the 10 mounting positions of the 4th stage are corrected, and the 10 mounting positions of the 4th stage (individual piece substrate B1) are corrected. ) Is mounted with component C.
  • the component C cannot be mounted at one mounting position (the ninth mounting position from the left in the fourth stage in FIG. 5) due to an error such as a suction error.
  • the mounting operation of the component C in the fifth suction group on the substrate B (retry mounting operation)
  • the component C was not mounted due to an error during the mounting operation of the component C in the first suction group on the substrate B.
  • the mounting operation of the component C on the board B is performed at the two mounting positions (individual board B1) of the first stage, which are the third and the seventh from the left.
  • the farthest 2 from the four position recognition marks F corresponding to the two mounting positions (individual piece substrate B1) of the third and seventh from the left in the first stage where the component C is to be mounted.
  • One position recognition mark F is determined as the position recognition mark F of the image pickup target by the substrate imaging unit 5.
  • the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F by the substrate imaging unit 5, the two mounting positions of the first stage from the left, the third and the seventh, are corrected, and the first stage is 3 from the left.
  • the component C is mounted on the second and seventh mounting positions (individual board B1).
  • the mounting operation of the component C of the sixth suction group on the substrate B (retry mounting operation)
  • the component C was not mounted due to an error during the mounting operation of the component C of the fourth suction group on the substrate B.
  • the mounting operation of the component C on the board B is performed at the 9th mounting position (individual piece board B1) from the left in the 4th stage.
  • the two position recognition marks F corresponding to one mounting position (individual piece substrate B1), which is the ninth from the left in the fourth stage where the component C is to be mounted are the positions to be imaged by the substrate imaging unit 5. It is determined as the recognition mark F.
  • the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5.
  • the mounting position (individual substrate B1) is corrected while the 9th mounting position from the left of the 4th stage is corrected.
  • the component C is mounted.
  • the mounting operation may be performed within one adsorption group.
  • 6 corresponding to the three mounting positions of the third and seventh mounting positions from the left of the first stage (individual board B1) and the one mounting position of the ninth from the left of the fourth stage.
  • the two farthest position recognition marks F are determined as the position recognition marks F to be imaged by the substrate imaging unit 5.
  • the retry mounting operation is not performed after all the normal mounting operations are completed, but may be performed in the suction group next to the suction group in which the component C is not mounted due to an error during the normal mounting operation.
  • step S1 the substrate B is carried in.
  • step S2 the adsorption group is determined.
  • step S3 the component C in the suction group is sucked by the suction nozzle of the mounting head 3a.
  • step S4 the component C sucked by the suction nozzle of the mounting head 3a is imaged by the fixed imaging unit 9. Further, in step S4, the state of the component C sucked by the suction nozzle of the mounting head 3a is recognized based on the image pickup result of the component C by the fixed imaging unit 9.
  • step S5 the mark recognition process is performed.
  • the processes of steps S11 to S15 shown in FIG. 8 are performed.
  • step S11 the two farthest unmounted mounting positions (unmounted points) in the adsorption group are extracted (detected).
  • the two farthest unmounted mounting positions (unmounted points) in the adsorption group are extracted (detected).
  • the first and tenth unmounted mounting positions from the left (unmounted points). Unmounted points) are extracted (detected).
  • step S12 of the two farthest position recognition marks F corresponding to the two farthest unmounted mounting positions in the adsorption group, the two farthest position recognition marks F are extracted (detected).
  • the two farthest position recognition marks F out of the four position recognition marks F corresponding to the two unmounted positions of the first and tenth from the left. Is extracted (detected).
  • one unmounted mounting position is used instead of the processes of steps S11 and S12.
  • the process of extracting (detecting) the two position recognition marks F corresponding to the positions may be performed.
  • step S13 the first position recognition mark F is imaged by the substrate imaging unit 5. Further, in step S13, the position recognition mark F is recognized based on the image pickup result of the first position recognition mark F by the substrate imaging unit 5.
  • step S14 the second position recognition mark F is imaged by the substrate imaging unit 5. Further, in step S14, the position recognition mark F is recognized based on the image pickup result of the second position recognition mark F by the substrate imaging unit 5.
  • step S15 the correction amount of the mounting position is acquired based on the recognition results of the two position recognition marks F, and the mounting position is corrected by the acquired correction amount. Then, the mark recognition process is completed, and the process proceeds to step S6 shown in FIG. 7.
  • step S7 it is determined whether or not all the components C have been mounted on the substrate B. If it is determined that the mounting of all the components C on the board B has not been completed, the process proceeds to step S2. Then, the processes of steps S2 to S6 are repeated. As a result, the normal mounting operation and the retry mounting operation are performed. If there is no unimplemented due to an error, the retry mounting operation is not performed. If it is determined that the mounting of all the components C on the substrate B is completed, the process proceeds to step S8.
  • step S8 the substrate B on which the component C is mounted is carried out. Then, the component mounting process is completed.
  • step S21 the mounting head 3a (mounting head 3a holding the component C) in the suction group is extracted (detected).
  • the mounting head 3a mounting head 3a holding the component C
  • the suction group is extracted (detected).
  • ten mounting heads 3a are extracted (detected) as the mounting heads 3a in the suction group.
  • step S22 the coordinates are initialized.
  • the left end registered coordinates are set to + ⁇ and the right end registered coordinates are set to ⁇ , so that the coordinates are initialized.
  • step S23 the head loop processing is started.
  • the processing in the head loop is repeated for the number of mounting heads 3a extracted in step S21. For example, if the number of mounting heads 3a extracted in step S21 is 10, the processing in the head loop is repeated 10 times.
  • step S24 it is determined whether or not the mounting coordinates by the mounting head 3a are smaller than the leftmost registered coordinates. If it is determined that the mounting coordinates by the mounting head 3a are smaller than the leftmost registered coordinates, the process proceeds to step S25.
  • step S25 the leftmost registered coordinates are updated to the compared mounting coordinates, and the process proceeds to step S26.
  • step S24 If it is determined in step S24 that the mounting coordinates by the mounting head 3a are not smaller than the leftmost registered coordinates, the leftmost registered coordinates are not updated and the process proceeds to step S26.
  • step S26 it is determined whether or not the mounting coordinates by the mounting head 3a are larger than the rightmost registered coordinates. If it is determined that the mounting coordinates by the mounting head 3a are larger than the rightmost registered coordinates, the process proceeds to step S27.
  • step S27 the rightmost registered coordinates are updated to the compared mounting coordinates, and the process proceeds to the next loop or step S28.
  • step S26 If it is determined in step S26 that the mounting coordinates by the mounting head 3a are not larger than the rightmost registered coordinates, the rightmost registered coordinates are not updated and the process proceeds to the next loop or step S28.
  • step S21 if the processing in the head loop is not repeated by the number of mounting heads 3a extracted in step S21, the process proceeds to the next loop. If the processing in the head loop is repeated for the number of mounting heads 3a extracted in step S21, the process proceeds to step S28.
  • the leftmost mounting coordinate in the adsorption group is registered in the left end registration coordinate
  • the rightmost mounting coordinate in the adsorption group is registered in the right end registration coordinate.
  • step S28 the position of the position recognition mark F of the left end coordinates corresponding to the left end registered coordinates is acquired.
  • step S29 the position recognition mark F at the left end coordinate is imaged by the substrate imaging unit 5. Further, in step S29, the position recognition mark F is recognized based on the image pickup result of the position recognition mark F at the left end coordinate by the substrate imaging unit 5.
  • step S30 the position of the position recognition mark F of the right end coordinates corresponding to the right end registered coordinates is acquired.
  • the process of step S30 may be performed before the process of step S29.
  • step S31 the position recognition mark F at the right end coordinate is imaged by the substrate imaging unit 5. Further, in step S31, the position recognition mark F is recognized based on the image pickup result of the position recognition mark F of the right end coordinates by the substrate imaging unit 5.
  • step S32 the correction amount of the mounting position is acquired based on the recognition result of the two position recognition marks F of the left end coordinate and the right end coordinate, and the mounting position is corrected by the acquired correction amount. Then, the mark recognition process is completed, and the process proceeds to step S6 shown in FIG. 7. Subsequent processing is as described above.
  • FIG. 9 shows an example in which the position recognition mark F is determined based on the left end registration coordinates and the right end registration coordinates (that is, the distance in the left-right direction), but the upper end registration coordinates and the lower end registration coordinates (that is, the vertical direction) are shown.
  • the position recognition mark F may be determined based on the distance). Further, the position recognition mark F may be determined based on the distance in the diagonal direction.
  • the position recognition mark F not hidden by the component C mounted on the substrate B is determined as an image pickup target by the substrate imaging unit 5.
  • a control unit 12 that corrects the mounting position is provided based on the image pickup result of the substrate image pickup unit 5 of the position recognition mark F determined as the image pickup target.
  • the position recognition mark F which is not hidden by the component C mounted on the substrate B is determined as an image pickup target by the substrate imaging unit 5, so that the component C can be mounted on the substrate B. Since the position recognition mark F can be placed even at a position hidden by the implementation of, the degree of freedom in the placement of the position recognition mark F can be increased.
  • the substrate B includes a plurality of individual substrate B1s each provided with the position recognition mark F
  • the control unit 12 is in the process of mounting the component C on the substrate B.
  • the position recognition mark F corresponding to the individual substrate B1 including the non-mounting point is controlled to determine the position recognition mark F to be imaged.
  • the mounting position is corrected because the position recognition mark F is hidden by the component C mounted on the board B. It is possible to prevent the component C from being unable to be mounted on the substrate B without being able to do so. Further, by determining the position recognition mark F to be imaged from the position recognition marks F corresponding to the individual substrate B1 including the unmounted points, the position recognition marks not hidden by the component C mounted on the board B. F can be easily determined as an image pickup target by the substrate image pickup unit 5.
  • the control unit 12 is at least in a position not hidden by the component C mounted on the board B during the retry mounting operation in which the remounting operation is performed to the unmounted point due to an error. It is configured to control the recognition mark F to be determined as an image pickup target by the substrate imaging unit 5. As a result, the position recognition mark F is hidden by the component C mounted on the board B during the retry mounting operation in which the position recognition mark F is likely to be hidden by the component C mounted on the board B. It is possible to prevent the component C from being unable to be mounted on the substrate B because the mounting position cannot be corrected.
  • the control unit 12 carries the position recognition mark F which is not hidden by the component C mounted on the board B not only during the retry mounting operation but also during the normal mounting operation. It is configured to control the image pickup unit 5 to determine the image pickup target. As a result, the same position recognition mark F can be recognized both during the normal mounting operation and the retry mounting operation. Therefore, the position recognition mark F different from each other during the normal mounting operation and the retry mounting operation can be performed. It is possible to suppress the complicated recognition operation of the position recognition mark F as compared with the case of performing the recognition operation of.
  • the control unit 12 captures two position recognition marks F from the plurality of position recognition marks F corresponding to the plurality of unmounted points by the substrate imaging unit 5. It is configured to perform control to determine as. As a result, from among the plurality of position recognition marks F corresponding to the plurality of unmounted points, the two position recognition marks F are determined as the image pickup targets by the board image pickup unit 5, so that the component C mounted on the board B can be used. The minimum necessary position recognition mark F that is not hidden can be easily determined as an image pickup target by the substrate imaging unit 5.
  • the control unit 12 sets the two farthest position recognition marks F from the plurality of position recognition marks F corresponding to the plurality of unmounted points to the substrate imaging unit 5. It is configured to perform control to determine the image pickup target by.
  • the mounting position can be corrected based on the imaging results of the two farthest position recognition marks F, so that data can be obtained for the unmounted point between the two farthest position recognition marks F.
  • the mounting position can be corrected by the extrapolation correction that obtains the numerical value inside the data range, which is more accurate than the extrapolation correction, instead of the extrapolation correction that obtains the numerical value outside the range of. As a result, the mounting position can be corrected more accurately than in the case where the position recognition mark F other than the two farthest position recognition marks F is determined as the image pickup target by the substrate imaging unit 5.
  • the component mounting device 200 according to the second embodiment of the present invention is different from the component mounting device 100 according to the first embodiment in that it includes a control unit 112.
  • the control unit 112 is mounted on the substrate B in the designated area A set to include a plurality of mounting positions (individual piece substrate B1).
  • the position recognition mark F that is not hidden by the component C is determined as an image pickup target by the substrate imaging unit 5, and is in the designated area A based on the image pickup result of the position recognition mark F determined as the image pickup target by the substrate image pickup unit 5. It is configured to correct the mounting position.
  • the designated area A indicates an area (correction limiting area) that can be corrected by the same position recognition mark F.
  • the size of the designated area A is determined in advance, for example, by the user's designation.
  • the component is attached to the 10 mounting positions (individual piece substrate B1) of the first stage.
  • the mounting operation of C on the substrate B is performed.
  • a designated area A (designated area A on the left side) including 10 mounting positions (individual piece board B1) with the first to fifth mounting positions (individual piece board B1) is set.
  • the designated area A on the left side does not include the five mounting positions (individual board B1) from the left to the sixth to tenth from the left in the first stage where the component C is to be mounted
  • the designated area A on the left side is designated.
  • a designated area A different from the area A is further set. That is, the five mounting positions (individual piece substrate B1) from the left of the first stage where the component C is to be mounted and the second stage from the left where the component C is not yet mounted are six.
  • a designated area A (designated area A on the right side) including 10 mounting positions (individual piece board B1) with the 5th to 10th mounting positions (individual piece board B1) is set.
  • the two farthest position recognition marks F are the substrate imaging unit 5. It is determined as the position recognition mark F of the image pickup target by. Further, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the designated area A on the right side, the two farthest position recognition marks F are the substrate imaging unit 5. It is determined as the position recognition mark F of the image pickup target. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5.
  • the five mounting positions from the left of the first stage in the designated area A on the left side are set. While the correction is performed, the component C is mounted on the five mounting positions (individual piece substrate B1) of the first stage from the left in the designated area A on the left side. Further, based on the imaging results of the two position recognition marks F in the designated area A on the right side by the substrate imaging unit 5, the five mounting positions of the first stage in the designated area A on the right side from the left to the sixth to tenth. While the correction is performed, the component C is mounted on the five mounting positions (individual piece substrate B1) of the first stage from the left in the designated area A on the right side. At this time, the component C is not mounted at the first to tenth mounting positions from the left in the second stage.
  • the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) of the second stage.
  • the operation is performed.
  • the position recognition mark F is recognized (imaging) during the mounting operation of the component C of the first suction group on the substrate B, the position recognition mark F is not recognized (imaging).
  • the substrate image pickup unit 5 acquired during the mounting operation of the component C of the first suction group on the substrate B, the inside of the left designated area A.
  • the 5 mounting positions from the 1st to the 5th from the left in the 2nd stage are corrected, the 5 mounting positions (individual pieces) from the 1st to the 5th from the left in the 2nd stage in the designated area A on the left side are corrected.
  • the component C is mounted on the board B1). Further, based on the imaging results of the two position recognition marks F in the designated area A on the right side acquired by the substrate imaging unit 5 during the mounting operation of the component C of the first suction group on the substrate B, the designated area A on the right side is formed. The 5th mounting position (6th to 10th from the left) in the designated area A on the right side is corrected while the 5th mounting position from the left of the 2nd stage is corrected.
  • the component C is mounted on the board B1).
  • the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) of the third stage.
  • the operation is performed.
  • a designated area A (designated area A on the left side) including 10 mounting positions (individual piece board B1) with the first to fifth mounting positions (individual piece board B1) is set.
  • a designated area A (designated area A on the right side) including 10 mounting positions (individual piece board B1) with the 5th to 10th mounting positions (individual piece board B1) is set.
  • the two farthest position recognition marks F are the substrate imaging unit 5. It is determined as the position recognition mark F of the image pickup target by. Further, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the designated area A on the right side, the two farthest position recognition marks F are the substrate imaging unit 5. It is determined as the position recognition mark F of the image pickup target. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5.
  • the component C is mounted on the five mounting positions (individual piece substrate B1) of the third stage from the left in the designated area A on the right side. At this time, the component C is not mounted at the first to tenth mounting positions from the left in the fourth stage. Further, at this time, it is assumed that the component C cannot be mounted at the two mounting positions (the third and tenth mounting positions from the left in the third stage in FIG. 10) due to an error such as a suction error.
  • the mounting operation normal mounting operation
  • the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) in the fourth stage.
  • the operation is performed.
  • the position recognition mark F is recognized (imaging) during the mounting operation of the component C of the third suction group on the substrate B, the position recognition mark F is not recognized (imaging).
  • the left designated area A While the 5 mounting positions from the left of the 4th stage are corrected, the 5 mounting positions (individual pieces) of the 1st to 5th from the left of the 4th stage in the designated area A on the left side are corrected.
  • the component C is mounted on the board B1). Further, based on the imaging results of the two position recognition marks F in the designated area A on the right side acquired by the substrate imaging unit 5 during the mounting operation of the component C of the third suction group on the substrate B, the designated area A on the right side is formed.
  • the component C is mounted on the board B1). At this time, it is assumed that the component C cannot be mounted at the two mounting positions (the second and eighth mounting positions from the left in the fourth stage in FIG. 10) due to an error such as a suction error.
  • the component C is not mounted due to an error during the mounting operation of the component C in the 3rd and 4th suction groups on the substrate B.
  • the mounting operation of the component C on the board B is performed for the four mounting positions (individual board B1). In this case, the third mounting position from the left (individual piece board B1) in the third stage where the component C is to be mounted and the second mounting position from the left in the fourth stage (individual piece board B1).
  • the designated area A (designated area A on the left side) including the two mounting positions (individual board B1) are set. Further, in the designated area A on the left side, one mounting position (individual piece substrate B1), which is the tenth from the left in the third stage where the component C is to be mounted, and one, which is the eighth from the left in the fourth stage. Since the two mounting positions (individual piece board B1) and the mounting position (individual piece board B1) are not included, a designated area A different from the designated area A on the left side is further set. That is, the tenth mounting position from the left (individual piece board B1) in the third stage where the component C is to be mounted and the eighth mounting position (individual piece board B1) from the left in the fourth stage. A designated area A (designated area A on the right side) including the two mounting positions (individual board B1) is set.
  • the two farthest position recognition marks F are imaged by the substrate image pickup unit 5. It is determined as the position recognition mark F of the target. Further, of the four position recognition marks F corresponding to the two mounting positions (individual piece substrate B1) in the designated area A on the right side, the two farthest position recognition marks F are the imaging targets by the substrate imaging unit 5. It is determined as the position recognition mark F of. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5.
  • the mounting position of the third stage from the left in the designated area A on the left side and one mounting position is the third from the left in the third stage.
  • the component C is mounted at two mounting positions (individual piece board B1), that is, the board B1) and one mounting position (individual piece board B1) that is the second from the left in the fourth stage.
  • the component C is mounted on two mounting positions (individual board B1), one on the board B1) and the eighth mounting position from the left on the fourth stage (individual board B1).
  • the designated area A is set during the mounting operation of the component C on the board B.
  • the method for setting the designated area A is not particularly limited, but for example, as shown in FIG. 11, the control unit 112 includes the largest number of unmounted points during the mounting operation of the component C on the board B. Is configured to control the setting of the designated area A.
  • control unit 112 is configured to perform control to extract (detect) unmounted points in the adsorption group. Then, the control unit 112 is configured to control to detect the position of the designated area A including the largest number of unmounted points by applying the rectangular designated area A to each of the extracted unmounted points. Has been done. Specifically, the control unit 112 arranges the unmounted points in each of the four corners of the designated area A of the rectangle for each of the extracted unmounted points, so that the most unmounted points are obtained. It is configured to control to detect the position of the included designated area A.
  • the rectangular designated area A is applied to the unmounted point of A.
  • the unmounted points in the rectangular designated area A in the state where the unmounted points of A are arranged at each of the four corners of the lower right, lower left, upper right, and upper left of the rectangular designated area A.
  • the number is detected.
  • the unmounted points of A when the unmounted points of A are arranged in the lower right corner of the designated area A of the rectangle, the number of unmounted points in the designated area A of the rectangle is three, which is the maximum.
  • the fitting process of the designated area A of the rectangle is similarly performed for each of the unmounted points B to E. As a result, in the example shown in FIG.
  • step S41 an unmounted mounting position (unmounted point) is extracted (detected) in the adsorption group.
  • step S42 it is determined whether or not there is an unassigned point of the correction group among the extracted unimplemented points. That is, in step S42, it is determined whether or not there is a point in which the designated area A is not set among the extracted unmounted points. If it is determined that there is an unallocated point in the correction group, the process proceeds to step S43.
  • step S43 the designated area A is set so that the most unmounted points are included in the correction group unallocated points. Then, the process proceeds to step S42. After that, the processes of steps S42 and 43 are repeated until there are no correction group unassigned points in the extracted unmounted points.
  • step S42 when it is determined that there is no unallocated point of the correction group, the designated area setting process is terminated.
  • the control unit 112 provides the position recognition mark F which is not hidden by the component C mounted on the board B in the designated area A set to include a plurality of mounting positions. It is configured to be determined as an image pickup target by the substrate image pickup unit 5 and to correct the mounting position in the designated area A based on the image pickup result of the position recognition mark F determined as the image pickup target by the substrate image pickup unit 5. There is. As a result, the position recognition marks F of the imaging target can be determined in a relatively narrow range within the designated area A, so that it is possible to suppress the determination of the position recognition marks F that are excessively distant from each other as the imaging target. Can be done. As a result, the mounting position can be corrected with high accuracy based on the image pickup result of the position recognition mark F relatively close to the mounting position.
  • control unit 112 controls to set the designated area A so that the most unmounted points are included in the mounting operation of the component C on the substrate B. It is configured as follows. As a result, many unmounted points can be included in the designated area A, so that even when the designated area A is provided, it is possible to suppress an increase in the number of imaging operations of the position recognition mark F by the substrate imaging unit 5. be able to.
  • the present invention is not limited to this.
  • the present invention may be applied to a component mounting device other than a flip chip bonder.
  • the present invention may be applied to a component mounting device (so-called surface mounter) for mounting a chip component for surface mounting on a substrate.
  • control for determining the position recognition mark that is not hidden by the components mounted on the substrate as the image pickup target by the imaging unit is performed not only during the retry mounting operation but also during the normal mounting operation.
  • control may be performed to determine the position recognition mark that is not hidden by the components mounted on the substrate as the image pickup target by the image pickup unit only during the retry mounting operation.
  • first and second embodiments an example is shown in which two position recognition marks are determined as imaging targets by the imaging unit from among a plurality of position recognition marks corresponding to a plurality of unmounted points.
  • the invention is not limited to this.
  • one or three or more position recognition marks may be determined as the image pickup target by the imaging unit from among the plurality of position recognition marks corresponding to the plurality of unmounted points.
  • the two farthest position recognition marks are determined as the image pickup target by the image pickup unit from the plurality of position recognition marks corresponding to the plurality of unmounted points.
  • the present invention is not limited to this.
  • the position recognition marks other than the two farthest position recognition marks may be determined as the image pickup target by the imaging unit.
  • the substrate is a substrate including a plurality of individual pieces, but the present invention is not limited to this.
  • the substrate may be a substrate on which a plurality of the same components are repeatedly mounted, such as an LED substrate.
  • the electric circuit pattern of each of the plurality of components provided on the substrate is used as the position recognition mark.
  • the electric circuit pattern as the position recognition mark not hidden by the component mounted on the board is determined as the image pickup target by the imaging unit, and the position recognition determined as the image pickup target is determined. It is possible to correct the mounting position based on the image pickup result by the image pickup unit of the electric circuit pattern as a mark.
  • the electric circuit pattern may be used as a position recognition mark.
  • the shape of the lead frame may be used as a position recognition mark.
  • the substrate B is a lead frame in which a plurality of (three) individual substrate B2s are connected to each other by a connecting portion B21 in which perforated slits are formed and can be divided. ..
  • Each of the plurality of individual substrate B2 includes a plurality of mounting positions.
  • a position recognition mark (electric circuit pattern, etc.) that is not hidden by the components mounted on the board B is generated by the board image pickup unit. It is determined as an image pickup target, and the mounting position in the designated area A1 is corrected based on the image pickup result by the substrate imaging unit of the position recognition mark determined as the image pickup target. That is, the position recognition mark beyond the connecting portion B21 in which the perforated slit is formed is not used for the correction, and the position recognition mark in the designated area A1 not exceeding the connecting portion B21 is used for the correction.
  • control processing has been described using a flow-driven flow in which the control processing is sequentially performed along the processing flow, but the present invention is not limited to this.
  • the control process may be performed by an event-driven type (event-driven type) process in which the process is executed in event units. In this case, it may be completely event-driven, or it may be a combination of event-driven and flow-driven.

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Abstract

This component mounting apparatus (100) comprises: a mounting head (3a) for mounting a component (C) to a substrate (B); an imaging unit (5) for imaging a position recognition mark (F) on the substrate; and a control unit (12) which, during an operation for mounting the component to the substrate, determines a position recognition mark not hidden by the component mounted on the substrate as an object for imaging by the imaging unit, and corrects a mounting position on the basis of a result of imaging by the imaging unit of the position recognition mark determined as the object for imaging.

Description

部品実装装置および部品実装方法Component mounting device and component mounting method
 この発明は、部品実装装置および部品実装方法に関し、特に、基板に設けられた位置認識マークを撮像する部品実装装置および部品実装方法に関する。 The present invention relates to a component mounting device and a component mounting method, and more particularly to a component mounting device and a component mounting method for imaging a position recognition mark provided on a board.
 従来、基板に設けられた位置認識マークを撮像する部品実装装置が知られている。このような装置は、たとえば、特許第4220288号公報に開示されている。 Conventionally, a component mounting device that captures a position recognition mark provided on a substrate is known. Such devices are disclosed, for example, in Japanese Patent No. 4220288.
 上記特許第4220288号公報には、プリント基板に電子部品を実装する装着ヘッドと、プリント基板上の電子部品の装着位置の近傍に設けられた個々基板認識マーク(位置認識マーク)を撮像する基板認識カメラとを備える電子部品装着装置(部品実装装置)が開示されている。この電子部品装着装置は、個々基板認識マークを基板認識カメラにより撮像させるとともに、基板認識カメラによる個々基板認識マークの撮像結果に基づいて、装着位置の補正を行うように構成されている。また、この電子部品装着装置は、基板認識カメラによる個々基板認識マークの撮像の際、予め決められた位置座標の個々基板認識マークを撮像するように構成されている。 In Japanese Patent No. 4220288, a mounting head for mounting an electronic component on a printed circuit board and a substrate recognition for imaging an individual board recognition mark (position recognition mark) provided near the mounting position of the electronic component on the printed circuit board. An electronic component mounting device (component mounting device) including a camera is disclosed. This electronic component mounting device is configured to capture an individual substrate recognition mark with a substrate recognition camera and correct the mounting position based on the image pickup result of the individual substrate recognition mark by the substrate recognition camera. Further, this electronic component mounting device is configured to capture the individual substrate recognition marks having predetermined position coordinates when the substrate recognition camera captures the individual substrate recognition marks.
特許第4220288号公報Japanese Patent No. 4220288
 しかしながら、上記特許第4220288号公報に記載された電子部品装着装置では、プリント基板に装着された電子部品により個々基板認識マークが隠れた場合、プリント基板に装着された電子部品により隠れた個々基板認識マークを撮像してしまうため、基板認識カメラによる撮像結果において個々基板認識マークを認識することができないという不都合がある。この結果、プリント基板に装着された部品により個々基板認識マークが隠れた場合、装着位置の補正が行えずに、電子部品のプリント基板への装着ができなくなるという問題点がある。 However, in the electronic component mounting device described in Japanese Patent No. 4220288, when the individual board recognition mark is hidden by the electronic component mounted on the printed circuit board, the individual board recognition hidden by the electronic component mounted on the printed circuit board is recognized. Since the mark is imaged, there is an inconvenience that the individual board recognition mark cannot be recognized in the image pickup result by the board recognition camera. As a result, when the individual board recognition mark is hidden by the components mounted on the printed circuit board, there is a problem that the mounting position cannot be corrected and the electronic components cannot be mounted on the printed circuit board.
 この発明は、上記のような課題を解決するためになされたものであり、この発明の1つの目的は、基板に実装された部品により位置認識マークが隠れたことに起因して、実装位置の補正が行えずに、部品の基板への実装ができなくなることを抑制することが可能な部品実装装置および部品実装方法を提供することである。 The present invention has been made to solve the above-mentioned problems, and one object of the present invention is that the position recognition mark is hidden by the parts mounted on the substrate, so that the mounting position is hidden. It is an object of the present invention to provide a component mounting device and a component mounting method capable of suppressing the failure to mount a component on a substrate without being able to perform correction.
 この発明の第1の局面による部品実装装置は、基板に部品を実装する実装ヘッドと、基板に設けられた位置認識マークを撮像する撮像部と、部品の基板への実装動作中において、基板に実装された部品により隠れていない位置認識マークを撮像部による撮像対象として決定するとともに、撮像対象として決定された位置認識マークの撮像部による撮像結果に基づいて、実装位置の補正を行う制御部と、を備える。 The component mounting device according to the first aspect of the present invention includes a mounting head for mounting the component on the substrate, an image pickup unit for capturing a position recognition mark provided on the substrate, and a component mounting operation on the substrate during the mounting operation of the component on the substrate. A control unit that determines the position recognition mark that is not hidden by the mounted components as the image pickup target by the image pickup unit and corrects the mounting position based on the image pickup result of the position recognition mark determined as the image pickup unit by the image pickup unit. , Equipped with.
 この発明の第1の局面による部品実装装置では、上記のように、部品の基板への実装動作中において、基板に実装された部品により隠れていない位置認識マークを撮像部による撮像対象として決定するとともに、撮像対象として決定された位置認識マークの撮像部による撮像結果に基づいて、実装位置の補正を行う制御部を設ける。これにより、基板に実装された部品により位置認識マークが隠れたために、位置認識マークが認識できないという現象が発生することを抑制することができる。その結果、基板に実装された部品により位置認識マークが隠れたことに起因して、実装位置の補正が行えずに、部品の基板への実装ができなくなることを抑制することができる。また、部品の基板への実装動作中において、基板に実装された部品により隠れていない位置認識マークを撮像部による撮像対象として決定することにより、部品の基板への実装により隠れる位置にも、位置認識マークを配置することができるので、位置認識マークの配置の自由度を高めることができる。 In the component mounting device according to the first aspect of the present invention, as described above, during the mounting operation of the component on the substrate, the position recognition mark that is not hidden by the component mounted on the substrate is determined as the image pickup target by the imaging unit. At the same time, a control unit for correcting the mounting position is provided based on the image pickup result of the position recognition mark determined as the image pickup target by the image pickup unit. As a result, it is possible to suppress the phenomenon that the position recognition mark cannot be recognized because the position recognition mark is hidden by the components mounted on the board. As a result, it is possible to prevent the component from being unable to be mounted on the board because the mounting position cannot be corrected due to the position recognition mark being hidden by the component mounted on the board. In addition, during the mounting operation of the component on the board, the position recognition mark that is not hidden by the component mounted on the board is determined as the image pickup target by the imaging unit, so that the position can be hidden by the component mounted on the board. Since the recognition mark can be arranged, the degree of freedom in arranging the position recognition mark can be increased.
 上記第1の局面による部品実装装置において、好ましくは、基板は、位置認識マークが各々設けられた複数の個片基板を含み、制御部は、部品の基板への実装動作中において、未実装点を含む個片基板に対応する位置認識マークのうちから、撮像対象の位置認識マークを決定する制御を行うように構成されている。このように構成すれば、基板に実装された部品により位置認識マークが隠れることが発生しやすい基板(すなわち、位置認識マークが各々設けられた複数の個片基板を含む基板)においても、未実装点を含む個片基板に対応する位置認識マークが決定されるので、基板に実装された部品により位置認識マークが隠れたことに起因して、実装位置の補正が行えずに、部品の基板への実装ができなくなることを抑制することができる。また、未実装点を含む個片基板に対応する位置認識マークのうちから、撮像対象の位置認識マークを決定することにより、基板に実装された部品により隠れていない位置認識マークを撮像部による撮像対象として容易に決定することができる。 In the component mounting device according to the first aspect, preferably, the substrate includes a plurality of individual substrates each provided with a position recognition mark, and the control unit is a non-mounting point during the mounting operation of the component on the substrate. It is configured to control to determine the position recognition mark of the image pickup target from among the position recognition marks corresponding to the individual substrate including the above. With this configuration, the position recognition mark is likely to be hidden by the components mounted on the board (that is, the board including a plurality of individual boards each provided with the position recognition mark) is not mounted. Since the position recognition mark corresponding to the individual board including the points is determined, the mounting position cannot be corrected due to the fact that the position recognition mark is hidden by the component mounted on the board, and the component board cannot be corrected. It is possible to suppress the inability to implement. In addition, by determining the position recognition mark to be imaged from the position recognition marks corresponding to the individual boards including the unmounted points, the image pickup unit captures the position recognition marks that are not hidden by the parts mounted on the board. It can be easily determined as a target.
 上記第1の局面による部品実装装置において、好ましくは、制御部は、少なくとも、エラーによる未実装点への再実装動作を行うリトライ実装動作時に、基板に実装された部品により隠れていない位置認識マークを撮像部による撮像対象として決定する制御を行うように構成されている。このように構成すれば、基板に実装された部品により位置認識マークが隠れることが発生しやすいリトライ実装動作時において、基板に実装された部品により位置認識マークが隠れたことに起因して、実装位置の補正が行えずに、部品の基板への実装ができなくなることを抑制することができる。 In the component mounting device according to the first aspect, preferably, the control unit is not hidden by the components mounted on the board during the retry mounting operation in which the remounting operation is performed to the unmounted point due to an error. Is configured to be controlled by the image pickup unit to determine the image pickup target. With this configuration, the position recognition mark is likely to be hidden by the parts mounted on the board. During the retry mounting operation, the position recognition mark is hidden by the parts mounted on the board. It is possible to prevent the component from being unable to be mounted on the substrate because the position cannot be corrected.
 この場合、好ましくは、制御部は、リトライ実装動作時だけでなく、通常実装動作時にも、基板に実装された部品により隠れていない位置認識マークを撮像部による撮像対象として決定する制御を行うように構成されている。このように構成すれば、通常実装動作時とリトライ実装動作時との両方において、同じ位置認識マークの認識動作を行うことができるので、通常実装動作時とリトライ実装動作時とにおいて、互いに異なる位置認識マークの認識動作を行う場合に比べて、位置認識マークの認識動作が複雑化することを抑制することができる。 In this case, preferably, the control unit controls to determine the position recognition mark that is not hidden by the components mounted on the substrate as the image pickup target by the image pickup unit not only during the retry mounting operation but also during the normal mounting operation. It is configured in. With this configuration, the same position recognition mark recognition operation can be performed both during the normal mounting operation and during the retry mounting operation. Therefore, the positions differ from each other during the normal mounting operation and the retry mounting operation. It is possible to suppress the complexity of the recognition operation of the position recognition mark as compared with the case of performing the recognition operation of the recognition mark.
 上記第1の局面による部品実装装置において、好ましくは、制御部は、複数の未実装点に対応する複数の位置認識マークのうちから、2つの位置認識マークを撮像部による撮像対象として決定する制御を行うように構成されている。このように構成すれば、複数の未実装点に対応する複数の位置認識マークのうちから、2つの位置認識マークを撮像部による撮像対象として決定することにより、基板に実装された部品により隠れていない必要最小限の位置認識マークを撮像部による撮像対象として容易に決定することができる。 In the component mounting device according to the first aspect, preferably, the control unit determines two position recognition marks as imaging targets by the image pickup unit from among a plurality of position recognition marks corresponding to a plurality of unmounted points. Is configured to do. With this configuration, two position recognition marks are determined as the image pickup targets by the image pickup unit from among the plurality of position recognition marks corresponding to the plurality of unmounted points, so that they are hidden by the components mounted on the substrate. It is possible to easily determine the minimum necessary position recognition mark as an image pickup target by the image pickup unit.
 この場合、好ましくは、制御部は、複数の未実装点に対応する複数の位置認識マークのうちから、最も離れた2つの位置認識マークを撮像部による撮像対象として決定する制御を行うように構成されている。このように構成すれば、最も離れた2つの位置認識マークの撮像結果に基づいて、実装位置の補正を行うことができるので、最も離れた2つの位置認識マークの間の未実装点に対して、データの範囲の外側で数値を求める外挿補正ではなく、外挿補正よりも精度が高い、データの範囲の内側で数値を求める内挿補正により実装位置の補正を行うことができる。その結果、最も離れた2つの位置認識マーク以外の位置認識マークを撮像部による撮像対象として決定する場合に比べて、実装位置の補正を精度よく行うことができる。 In this case, preferably, the control unit is configured to control to determine the two farthest position recognition marks as the image pickup targets by the image pickup unit from the plurality of position recognition marks corresponding to the plurality of unmounted points. Has been done. With this configuration, the mounting position can be corrected based on the imaging results of the two farthest position recognition marks, so that the unmounted points between the two farthest position recognition marks can be corrected. The mounting position can be corrected by the extrapolation correction that obtains the numerical value inside the data range, which is more accurate than the extrapolation correction, instead of the extrapolation correction that obtains the numerical value outside the data range. As a result, the mounting position can be corrected more accurately than in the case where the position recognition mark other than the two farthest position recognition marks is determined as the image pickup target by the imaging unit.
 上記第1の局面による部品実装装置において、好ましくは、制御部は、複数の実装位置を含むように設定された指定領域内において、基板に実装された部品により隠れていない位置認識マークを撮像部による撮像対象として決定するとともに、撮像対象として決定された位置認識マークの撮像部による撮像結果に基づいて、指定領域内における実装位置の補正を行うように構成されている。このように構成すれば、指定領域内の比較的狭い範囲において、撮像対象の位置認識マークを決定することができるので、過度に離れた位置認識マーク同士が撮像対象として決定されることを抑制することができる。その結果、実装位置に比較的近い位置認識マークの撮像結果に基づいて、実装位置の補正を精度よく行うことができる。 In the component mounting device according to the first aspect, preferably, the control unit captures a position recognition mark that is not hidden by the components mounted on the board in a designated area set to include a plurality of mounting positions. It is configured to correct the mounting position in the designated area based on the image pickup result by the image pickup unit of the position recognition mark determined as the image pickup target. With this configuration, the position recognition marks of the imaging target can be determined in a relatively narrow range within the designated area, so that it is possible to prevent the position recognition marks that are excessively distant from each other from being determined as the imaging target. be able to. As a result, the mounting position can be corrected with high accuracy based on the image pickup result of the position recognition mark relatively close to the mounting position.
 この場合、好ましくは、制御部は、部品の基板への実装動作中において、最も多く未実装点が含まれるように、指定領域を設定する制御を行うように構成されている。このように構成すれば、指定領域内に多くの未実装点を含めることができるので、指定領域を設ける場合にも、撮像部による位置認識マークの撮像動作の回数が増加することを抑制することができる。 In this case, preferably, the control unit is configured to control to set a designated area so that the most unmounted points are included during the mounting operation of the component on the board. With this configuration, many unmounted points can be included in the designated area. Therefore, even when the designated area is provided, it is possible to suppress an increase in the number of image pickup operations of the position recognition mark by the image pickup unit. Can be done.
 この発明の第2の局面による部品実装方法は、基板に部品を実装するステップと、基板に設けられた位置認識マークを撮像するステップと、部品の基板への実装動作中において、基板に実装された部品により隠れていない位置認識マークを撮像対象として決定するとともに、撮像対象として決定された位置認識マークの撮像結果に基づいて、実装位置の補正を行うステップと、を備える。 The component mounting method according to the second aspect of the present invention is mounted on the board during the step of mounting the component on the board, the step of imaging the position recognition mark provided on the board, and the mounting operation of the component on the board. It is provided with a step of determining a position recognition mark that is not hidden by the components as an image pickup target and correcting the mounting position based on the image pickup result of the position recognition mark determined as the image pickup target.
 この発明の第2の局面による部品実装方法では、上記のように、基板に実装された部品により隠れていない位置認識マークを撮像対象として決定するとともに、撮像対象として決定された位置認識マークの撮像結果に基づいて、実装位置の補正を行うステップを設ける。これにより、上記第1の局面による部品実装装置と同様に、基板に実装された部品により位置認識マークが隠れたことに起因して、実装位置の補正が行えずに、部品の基板への実装ができなくなることを抑制することが可能な部品実装方法を提供することができる。 In the component mounting method according to the second aspect of the present invention, as described above, the position recognition mark that is not hidden by the component mounted on the substrate is determined as the image pickup target, and the position recognition mark determined as the image pickup target is imaged. Based on the result, a step for correcting the mounting position is provided. As a result, as in the case of the component mounting device according to the first aspect, the position recognition mark is hidden by the component mounted on the board, so that the mounting position cannot be corrected and the component is mounted on the board. It is possible to provide a component mounting method capable of suppressing the inability to perform.
 上記第2の局面による部品実装方法において、好ましくは、基板は、位置認識マークが各々設けられた複数の個片基板を含み実装位置の補正を行うステップは、部品の基板への実装動作中において、未実装点を含む個片基板に対応する位置認識マークのうちから、位置認識マークを撮像対象として決定するステップを含む。このように構成すれば、基板に実装された部品により位置認識マークが隠れることが発生しやすい基板(すなわち、位置認識マークが各々設けられた複数の個片基板を含む基板)においても、未実装点を含む個片基板に対応する位置認識マークが決定されるので、基板に実装された部品により位置認識マークが隠れたことに起因して、実装位置の補正が行えずに、部品の基板への実装ができなくなることを抑制することができる。また、未実装点を含む個片基板に対応する位置認識マークのうちから、撮像対象の位置認識マークを決定することにより、基板に実装された部品により隠れていない位置認識マークを撮像対象として容易に決定することができる。 In the component mounting method according to the second aspect, preferably, the board includes a plurality of individual boards provided with position recognition marks, and the step of correcting the mounting position is during the mounting operation of the component on the board. , Includes a step of determining the position recognition mark as an image pickup target from the position recognition marks corresponding to the individual substrate including the unmounted points. With this configuration, the position recognition mark is likely to be hidden by the components mounted on the board (that is, the board including a plurality of individual boards each provided with the position recognition mark) is not mounted. Since the position recognition mark corresponding to the individual board including the points is determined, the mounting position cannot be corrected due to the fact that the position recognition mark is hidden by the component mounted on the board, and the component board cannot be corrected. It is possible to suppress the inability to implement. Further, by determining the position recognition mark to be imaged from the position recognition marks corresponding to the individual boards including the unmounted points, the position recognition mark not hidden by the parts mounted on the board can be easily used as the image pickup target. Can be decided.
 本発明によれば、上記のように、基板に実装された部品により位置認識マークが隠れたことに起因して、実装位置の補正が行えずに、部品の基板への実装ができなくなることを抑制することが可能な部品実装装置および部品実装方法を提供することができる。 According to the present invention, as described above, because the position recognition mark is hidden by the component mounted on the board, the mounting position cannot be corrected and the component cannot be mounted on the board. It is possible to provide a component mounting device and a component mounting method that can be suppressed.
第1実施形態による部品実装装置を示す模式図である。It is a schematic diagram which shows the component mounting apparatus by 1st Embodiment. (A)は、第1実施形態による部品の実装前の基板を示す模式的な平面図である。(B)は、第1実施形態による部品の実装後の基板を示す模式的な平面図である。(A) is a schematic plan view showing a substrate before mounting of parts according to the first embodiment. (B) is a schematic plan view showing a substrate after mounting the components according to the first embodiment. 第1実施形態によるローカルフィデューシャルを説明するための模式図である。It is a schematic diagram for demonstrating the local fiducial by 1st Embodiment. 第1実施形態によるポイントフィデューシャルを説明するための模式図である。It is a schematic diagram for demonstrating the point fiducial by 1st Embodiment. 第1実施形態による部品実装装置による位置認識マークの決定を含む部品の基板への実装動作を説明するための模式図である。It is a schematic diagram for demonstrating the mounting operation of a component on a substrate including the determination of the position recognition mark by the component mounting apparatus according to the first embodiment. (A)は、第1実施形態による部品実装装置による通常実装動作時における位置認識マークの決定を説明するための模式図である。(B)は、第1実施形態による部品実装装置によるリトライ実装動作時における位置認識マークの決定を説明するための模式図である。(A) is a schematic diagram for explaining the determination of the position recognition mark in the normal mounting operation by the component mounting device according to the first embodiment. (B) is a schematic diagram for explaining the determination of the position recognition mark at the time of the retry mounting operation by the component mounting device according to the first embodiment. 第1実施形態による部品実装装置による部品実装処理を説明するためのフローチャートである。It is a flowchart for demonstrating the component mounting process by the component mounting apparatus according to 1st Embodiment. 図7のマーク認識処理を説明するためのフローチャートである。It is a flowchart for demonstrating the mark recognition process of FIG. 図7のマーク認識処理の詳細なフローチャートである。It is a detailed flowchart of the mark recognition process of FIG. 7. 第2実施形態による部品実装装置による位置認識マークの決定を含む部品の基板への実装動作を説明するための模式図である。It is a schematic diagram for demonstrating the mounting operation of a component on a substrate including the determination of the position recognition mark by the component mounting apparatus according to the second embodiment. 第2実施形態による部品実装装置による指定領域の決定を説明するための模式図である。It is a schematic diagram for demonstrating the determination of the designated area by the component mounting apparatus by 2nd Embodiment. 第2実施形態による部品実装装置による指定領域設定処理を説明するためのフローチャートである。It is a flowchart for demonstrating the designated area setting process by the component mounting apparatus by 2nd Embodiment. 第2実施形態の変形例による基板を説明するための模式的な平面図である。It is a schematic plan view for demonstrating the substrate by the modification of 2nd Embodiment.
 以下、本発明を具体化した実施形態を図面に基づいて説明する。 Hereinafter, embodiments embodying the present invention will be described with reference to the drawings.
[第1実施形態]
(部品実装装置の構成)
 図1を参照して、本発明の実施形態による部品実装装置100の構成について説明する。
[First Embodiment]
(Configuration of component mounting device)
With reference to FIG. 1, the configuration of the component mounting device 100 according to the embodiment of the present invention will be described.
 部品実装装置100は、ダイシングされたウエハWから部品(半導体チップ)Cを取り出して基板Bに実装する、いわゆるフリップチップボンダである。基板Bは、たとえば、プリント基板およびリードフレームなどである。 The component mounting device 100 is a so-called flip-chip bonder in which a component (semiconductor chip) C is taken out from the diced wafer W and mounted on the substrate B. The substrate B is, for example, a printed circuit board and a lead frame.
 図1に示すように、部品実装装置100は、基台1と、コンベア2と、実装部3と、移動機構部4と、基板撮像部5と、ウエハ保持テーブル6と、取出部7と、部品認識撮像部8と、固定撮像部9と、フラックス供給部10と、ウエハ収納部11と、制御部12とを備えている。なお、基板撮像部5は、請求の範囲の「撮像部」の一例である。 As shown in FIG. 1, the component mounting device 100 includes a base 1, a conveyor 2, a mounting unit 3, a moving mechanism unit 4, a substrate imaging unit 5, a wafer holding table 6, and an extraction unit 7. It includes a component recognition image pickup unit 8, a fixed image pickup unit 9, a flux supply unit 10, a wafer storage unit 11, and a control unit 12. The substrate imaging unit 5 is an example of the "imaging unit" in the claims.
 コンベア2は、所定の実装作業位置に基板Bを搬入し、所定の実装作業位置から基板Bを搬出するように構成されている。また、コンベア2は、X方向に延びる一対のコンベアレールと、基板Bを所定位置で位置決めする位置決め機構(図示せず)とを含んでいる。これにより、コンベア2は、基板BをX方向に搬送し、所定の実装作業位置に基板Bを位置決め固定する。 The conveyor 2 is configured to carry the board B into a predetermined mounting work position and carry out the board B from the predetermined mounting work position. Further, the conveyor 2 includes a pair of conveyor rails extending in the X direction and a positioning mechanism (not shown) for positioning the substrate B at a predetermined position. As a result, the conveyor 2 conveys the substrate B in the X direction, and positions and fixes the substrate B at a predetermined mounting work position.
 実装部3は、ウエハWの部品Cを基板Bに実装する作業を行うように構成されている。具体的には、実装部3は、移動機構部4により、コンベア2(基板B)の上方を水平方向(XY方向)に移動可能に支持されている。実装部3は、X方向に沿って配置された複数(10本)の実装ヘッド3aを含んでいる。実装ヘッド3aは、先端に部品Cを吸着するための吸着ノズル(図示せず)を有している。実装部3は、取出部7によりウエハWから取り出される部品Cを実装ヘッド3aにより吸着して基板Bに実装するように構成されている。 The mounting unit 3 is configured to perform the work of mounting the component C of the wafer W on the substrate B. Specifically, the mounting unit 3 is supported by the moving mechanism unit 4 so as to be movable above the conveyor 2 (board B) in the horizontal direction (XY direction). The mounting unit 3 includes a plurality of (10) mounting heads 3a arranged along the X direction. The mounting head 3a has a suction nozzle (not shown) for sucking the component C at the tip thereof. The mounting unit 3 is configured to attract the component C taken out from the wafer W by the taking-out unit 7 by the mounting head 3a and mount it on the substrate B.
 移動機構部4は、実装部3を移動させるように構成されている。具体的には、移動機構部4は、実装部3をX方向に移動させるためのX軸移動機構部4aと、X軸移動機構部4aをY方向に移動させるためのY軸移動機構部4bとを含んでいる。X軸移動機構部4aおよびY軸移動機構部4bとしては、たとえば、リニアモータを用いた直動機構、または、ボールねじ軸を用いた直動機構などを採用することができる。X軸移動機構部4aは、実装部3をX方向に移動させる駆動源としてX軸モータ(図示せず)を有している。Y軸移動機構部4bは、X軸移動機構部4aをY方向に移動させる駆動源としてY軸モータ(図示せず)を有している。実装部3は、移動機構部4のX軸移動機構部4aおよびY軸移動機構部4bにより、コンベア2(基板B)の上方を水平方向(XY方向)に移動可能に構成されている。 The moving mechanism unit 4 is configured to move the mounting unit 3. Specifically, the moving mechanism unit 4 has an X-axis moving mechanism unit 4a for moving the mounting unit 3 in the X direction and a Y-axis moving mechanism unit 4b for moving the X-axis moving mechanism unit 4a in the Y direction. And include. As the X-axis movement mechanism unit 4a and the Y-axis movement mechanism unit 4b, for example, a linear motion mechanism using a linear motor, a linear motion mechanism using a ball screw axis, or the like can be adopted. The X-axis movement mechanism unit 4a has an X-axis motor (not shown) as a drive source for moving the mounting unit 3 in the X direction. The Y-axis movement mechanism unit 4b has a Y-axis motor (not shown) as a drive source for moving the X-axis movement mechanism unit 4a in the Y direction. The mounting unit 3 is configured to be movable in the horizontal direction (XY direction) above the conveyor 2 (board B) by the X-axis movement mechanism unit 4a and the Y-axis movement mechanism unit 4b of the movement mechanism unit 4.
 基板撮像部5は、カメラを含み、基板Bへの部品Cの実装に先立って、基板Bに設けられた位置認識マーク(フィデューシャルマーク)F(図2参照)を撮像するように構成されている。基板撮像部5による位置認識マークFの撮像結果に基づいて、制御部12は、実装位置の補正を行うように構成されている。また、基板撮像部5は、実装部3と共通のフレームに設けられている。このため、基板撮像部5は、実装部3と共に、移動機構部4のX軸移動機構部4aおよびY軸移動機構部4bにより、コンベア2(基板B)の上方を水平方向(XY方向)に移動可能に構成されている。 The substrate imaging unit 5 includes a camera and is configured to image a position recognition mark (fiducial mark) F (see FIG. 2) provided on the substrate B prior to mounting the component C on the substrate B. ing. The control unit 12 is configured to correct the mounting position based on the image pickup result of the position recognition mark F by the substrate image pickup unit 5. Further, the substrate imaging unit 5 is provided on a frame common to the mounting unit 3. Therefore, the substrate imaging unit 5, together with the mounting unit 3, is moved above the conveyor 2 (board B) in the horizontal direction (XY direction) by the X-axis moving mechanism unit 4a and the Y-axis moving mechanism unit 4b of the moving mechanism unit 4. It is configured to be movable.
 図2(A)に示すように、基板Bは、複数(図2(A)では40個)の個片基板B1を含んでいる。複数の個片基板B1の各々には、位置認識マークFが一対ずつ設けられている。また、図2(B)に示すように、複数の個片基板B1の各々は、1つの部品Cが実装されるように構成されている。また、位置認識マークFは、部品Cの個片基板B1への実装後に、個片基板B1に実装された部品Cにより隠れる位置に設けられている。すなわち、位置認識マークFは、平面視において、個片基板B1に実装された部品Cと重なる位置に設けられている。 As shown in FIG. 2A, the substrate B includes a plurality of individual substrate B1 (40 in FIG. 2A). A pair of position recognition marks F are provided on each of the plurality of individual substrate B1s. Further, as shown in FIG. 2B, each of the plurality of individual piece substrates B1 is configured so that one component C is mounted. Further, the position recognition mark F is provided at a position hidden by the component C mounted on the individual substrate B1 after the component C is mounted on the individual substrate B1. That is, the position recognition mark F is provided at a position overlapping the component C mounted on the individual piece substrate B1 in a plan view.
 図1に示すように、ウエハ保持テーブル6は、出し入れ機構(図示せず)によりウエハ収納部11から引き出されたウエハWを所定位置で支持するように構成されている。 As shown in FIG. 1, the wafer holding table 6 is configured to support the wafer W drawn out from the wafer accommodating portion 11 by a loading / unloading mechanism (not shown) at a predetermined position.
 取出部7は、ウエハ保持テーブル6により支持されたウエハWから部品Cを取り出して実装部3に受け渡すように構成されている。また、取出部7は、所定の駆動手段によりウエハ保持テーブル6の上方位置において水平方向(XY方向)に移動されるように構成されている。また、取出部7は、複数のウエハヘッド7aを含んでいる。 The take-out unit 7 is configured to take out the component C from the wafer W supported by the wafer holding table 6 and deliver it to the mounting unit 3. Further, the take-out unit 7 is configured to be moved in the horizontal direction (XY direction) at a position above the wafer holding table 6 by a predetermined driving means. Further, the take-out unit 7 includes a plurality of wafer heads 7a.
 ウエハヘッド7aは、X軸回りに回転が可能で、かつ上下方向への移動(昇降)が可能に構成されている。また、ウエハヘッド7aは、部品Cを吸着することが可能に構成されている。つまり、取出部7は、突上部(図示せず)により突き上げられた部品Cをウエハヘッド7aにより吸着して取り出し、部品Cを反転(フリップ)させ、所定の受け渡し位置において、実装部3(実装ヘッド3a)に部品Cを受け渡すように構成されている。 The wafer head 7a is configured to be rotatable around the X axis and to be able to move (up and down) in the vertical direction. Further, the wafer head 7a is configured to be capable of adsorbing the component C. That is, the take-out unit 7 sucks and takes out the component C pushed up by the protrusion (not shown) by the wafer head 7a, reverses (flip) the component C, and at a predetermined delivery position, the mounting unit 3 (mounting). It is configured to deliver the component C to the head 3a).
 部品認識撮像部8は、カメラを含み、ウエハWからの部品Cの取り出しに先立ち、取り出し対象となる部品Cを撮像するように構成されている。また、部品認識撮像部8は、取出部7と共通のフレームに設けられている。また、部品認識撮像部8は、所定の駆動手段によりウエハ保持テーブル6の上方位置において水平方向(XY方向)に移動されるように構成されている。 The component recognition imaging unit 8 includes a camera and is configured to image the component C to be ejected prior to ejecting the component C from the wafer W. Further, the component recognition imaging unit 8 is provided in a frame common to the extraction unit 7. Further, the component recognition imaging unit 8 is configured to be moved in the horizontal direction (XY direction) at a position above the wafer holding table 6 by a predetermined driving means.
 固定撮像部9は、基台1上であって実装部3の可動領域内に設置されている。固定撮像部9は、カメラを含み、実装部3の実装ヘッド3aにより吸着されている部品Cを下方から撮像するように構成されている。 The fixed image pickup unit 9 is installed on the base 1 and in the movable area of the mounting unit 3. The fixed imaging unit 9 includes a camera and is configured to image the component C attracted by the mounting head 3a of the mounting unit 3 from below.
 フラックス供給部10は、部品Cのバンプ電極にフラックスを転写(塗布)するために設けられている。具体的には、フラックス供給部10は、プレート上にフラックスを薄く伸ばし広げて供給するように構成されている。そして、実装部3の実装ヘッド3aに吸着された部品Cのバンプ電極が伸び広げられたフラックスに接触される。これにより、部品Cのバンプ電極にフラックスが転写される。なお、フラックスは、接合のためのはんだの濡れが良好になるように部品Cのバンプ電極に塗布される。 The flux supply unit 10 is provided for transferring (applying) the flux to the bump electrode of the component C. Specifically, the flux supply unit 10 is configured to spread and supply the flux thinly on the plate. Then, the bump electrode of the component C adsorbed on the mounting head 3a of the mounting portion 3 is brought into contact with the spread flux. As a result, the flux is transferred to the bump electrode of the component C. The flux is applied to the bump electrode of the component C so that the solder for joining is well wetted.
 ウエハ収納部11は、ダイシングされた複数枚のウエハWを収容可能に構成されている。ウエハWの部品Cは、複数のバンプ電極が形成されたフリップチップ実装用のチップ部品である。この場合、部品Cは、バンプ電極形成面(実装面)が上方を向くようにフィルム状のウエハシート上に貼り付けられて保持されている。 The wafer storage unit 11 is configured to be capable of accommodating a plurality of diced wafers W. The component C of the wafer W is a chip component for mounting a flip chip on which a plurality of bump electrodes are formed. In this case, the component C is attached and held on the film-shaped wafer sheet so that the bump electrode forming surface (mounting surface) faces upward.
 制御部12は、部品実装装置100の各部の動作を統括的に制御するように構成されている。具体的には、制御部12は、コンベア2、実装部3、移動機構部4、基板撮像部5、ウエハ保持テーブル6、取出部7、部品認識撮像部8、固定撮像部9、フラックス供給部10、および、ウエハ収納部11などの動作制御を行うように構成されている。制御部12は、上記の各部の駆動モータに内蔵されるエンコーダ等の位置検出手段からの出力信号に基づいて、各部の動作制御を行う。また、制御部12は、各種撮像部(基板撮像部5、部品認識撮像部8、および、固定撮像部9)の撮像制御および画像認識を行う機能を有する。制御部12は、CPU(中央処理ユニット)を含むプロセッサと、メモリとを含んでいる。 The control unit 12 is configured to comprehensively control the operation of each unit of the component mounting device 100. Specifically, the control unit 12 includes a conveyor 2, a mounting unit 3, a moving mechanism unit 4, a substrate imaging unit 5, a wafer holding table 6, an extraction unit 7, a component recognition imaging unit 8, a fixed imaging unit 9, and a flux supply unit. It is configured to control the operation of the 10 and the wafer accommodating portion 11. The control unit 12 controls the operation of each unit based on an output signal from a position detection means such as an encoder built in the drive motor of each unit. Further, the control unit 12 has a function of performing image pickup control and image recognition of various image pickup units (board image pickup unit 5, component recognition image pickup unit 8, and fixed image pickup unit 9). The control unit 12 includes a processor including a CPU (central processing unit) and a memory.
(位置認識マークの構成)
 次に、図3および図4を参照して、位置認識マークFの構成について説明する。
(Composition of position recognition mark)
Next, the configuration of the position recognition mark F will be described with reference to FIGS. 3 and 4.
〈ローカルフィデューシャル〉
 図3に示すように、位置認識マークFは、ローカルフィデューシャルとして設定されている場合がある。位置認識マークFがローカルフィデューシャルとして設定されている場合、位置認識マークFの位置座標は、基板Bの原点からの座標系で設定されている。また、位置認識マークFがローカルフィデューシャルとして設定されている場合、基板Bの複数の実装位置に対して、共通の位置認識マークFが設定されている。位置認識マークFは、実装データおよびフィデューシャルデータにより、ローカルフィデューシャルとして設定されている。
<Local Fiducial>
As shown in FIG. 3, the position recognition mark F may be set as a local fiducial. When the position recognition mark F is set as a local fiducial, the position coordinates of the position recognition mark F are set in the coordinate system from the origin of the substrate B. Further, when the position recognition mark F is set as a local fiducial, a common position recognition mark F is set for a plurality of mounting positions of the substrate B. The position recognition mark F is set as a local fiducial by the implementation data and the fiducial data.
 実装データは、「No.」、「座標X」、「座標Y」、および、「Fid番号」の情報を含んでいる。「No.」は、部品Cの実装の番号(順序)を表している。「座標X」は、基板Bの実装位置のX座標を表している。「座標Y」は、基板Bの実装位置のY座標を表している。「Fid番号」は、フィデューシャルデータにおけるデータの番号を表している。実装データでは、たとえば、No.1の部品Cの実装位置のX座標が10でかつY座標が10であること、および、No.1の部品Cの実装時にFid番号1に対応する位置認識マークFが認識(撮像)されることが表されている。 The implementation data includes information of "No.", "coordinate X", "coordinate Y", and "Fid number". "No." represents the mounting number (order) of the component C. The "coordinate X" represents the X coordinate of the mounting position of the substrate B. The "coordinate Y" represents the Y coordinate of the mounting position of the substrate B. The "Fid number" represents a data number in the fiducial data. In the mounting data, for example, No. The X coordinate and the Y coordinate of the mounting position of the component C of 1 are 10 and the Y coordinate is 10. It is shown that the position recognition mark F corresponding to the Fid number 1 is recognized (imaged) when the component C of 1 is mounted.
 フィデューシャルデータは、「Fid番号」、「タイプ」、「座標X1」、「座標Y1」、「座標X2」、「座標Y2」の情報を含んでいる。「Fid番号」は、フィデューシャルデータにおけるデータの番号を表している。「タイプ」は、データ構造のタイプ(ローカルまたはポイント)を表している。「座標X1」は、第1の位置認識マークFの位置のX座標を表している。「座標Y1」は、第1の位置認識マークFの位置のY座標を表している。「座標X2」は、基板Bにおける第2の位置認識マークFの位置のX座標を表している。「座標Y2」は、第2の位置認識マークFの位置のY座標を表している。「座標X1」、「座標Y1」、「座標X2」、および、「座標Y2」は、タイプがローカルである場合、基板Bの原点からの座標系により表されている。フィデューシャルデータでは、たとえば、Fid番号1のデータのデータ構造がローカルであること、および、Fid番号1に対応する位置認識マークFとして、X座標が5でかつY座標が15の位置認識マークFと、X座標が105でかつY座標が5の位置認識マークFとの2つの位置認識マークFが認識(撮像)されることが表されている。 The fiducial data includes information of "Fid number", "type", "coordinate X1", "coordinate Y1", "coordinate X2", and "coordinate Y2". The "Fid number" represents a data number in the fiducial data. "Type" represents the type of data structure (local or point). The "coordinate X1" represents the X coordinate of the position of the first position recognition mark F. The "coordinate Y1" represents the Y coordinate of the position of the first position recognition mark F. The "coordinate X2" represents the X coordinate of the position of the second position recognition mark F on the substrate B. The "coordinate Y2" represents the Y coordinate of the position of the second position recognition mark F. The "coordinates X1", "coordinates Y1", "coordinates X2", and "coordinates Y2" are represented by the coordinate system from the origin of the substrate B when the type is local. In the fiducial data, for example, the data structure of the data of Fid number 1 is local, and the position recognition mark F corresponding to Fid number 1 has an X coordinate of 5 and a Y coordinate of 15. It is represented that two position recognition marks F, F and a position recognition mark F having an X coordinate of 105 and a Y coordinate of 5, are recognized (imaged).
 図3に示す例では、No.1~10の10個の部品Cの実装位置が、Fid番号1の位置認識マークFに対応付けられている。この場合、部品Cの基板Bへの実装動作時には、10個の実装位置に対して、X座標が5でかつY座標が15の位置認識マークFと、X座標が105でかつY座標が5の位置認識マークFとの2つの位置認識マークFが、共通の位置認識マークFとして認識(撮像)される。これにより、X座標が5でかつY座標が15の位置認識マークFと、X座標が105でかつY座標が5の位置認識マークFとの2つの位置認識マークFの撮像結果に基づいて、10個の実装位置の補正を行うことができるので、位置認識マークFがローカルフィデューシャルとして設定されていれば、タクトタイムの短縮を図ることができる。一方、位置認識マークFがローカルフィデューシャルとして設定されている場合、基板Bに実装された部品Cにより位置認識マークFが隠れた場合、実装位置の補正が行えずに、部品Cの基板Bへの装着ができなくなる場合がある。 In the example shown in FIG. 3, No. The mounting positions of the 10 components C from 1 to 10 are associated with the position recognition mark F of the Fid number 1. In this case, during the mounting operation of the component C on the substrate B, the position recognition mark F having an X coordinate of 5 and a Y coordinate of 15 and a position recognition mark F having an X coordinate of 105 and a Y coordinate of 5 for 10 mounting positions. The two position recognition marks F and the position recognition mark F of the above are recognized (imaged) as a common position recognition mark F. As a result, based on the imaging results of the two position recognition marks F, that is, the position recognition mark F having the X coordinate of 5 and the Y coordinate of 15, and the position recognition mark F having the X coordinate of 105 and the Y coordinate of 5. Since it is possible to correct 10 mounting positions, if the position recognition mark F is set as a local fiducial, the tact time can be shortened. On the other hand, when the position recognition mark F is set as a local fiducial, when the position recognition mark F is hidden by the component C mounted on the board B, the mounting position cannot be corrected and the board B of the component C cannot be corrected. It may not be possible to attach it to.
〈ポイントフィデューシャル〉
 図4に示すように、位置認識マークFは、ポイントフィデューシャルとして設定されている場合がある。位置認識マークFがポイントフィデューシャルとして設定されている場合、位置認識マークFの位置座標は、実装位置を原点とする座標系(実装位置からの相対座標系)で設定されている。また、位置認識マークFがポイントフィデューシャルとして設定されている場合、基板Bの各実装位置に対して、個別の位置認識マークFが設定されている。位置認識マークFは、ローカルフィデューシャルと同様に、実装データおよびフィデューシャルデータにより、ポイントフィデューシャルとして設定されている。
<Point Fiducial>
As shown in FIG. 4, the position recognition mark F may be set as a point fiducial. When the position recognition mark F is set as a point fiducial, the position coordinates of the position recognition mark F are set in a coordinate system (relative coordinate system from the mounting position) with the mounting position as the origin. Further, when the position recognition mark F is set as a point fiducial, an individual position recognition mark F is set for each mounting position of the substrate B. The position recognition mark F is set as a point fiducial by the implementation data and the fiducial data, as in the case of the local fiducial.
 なお、位置認識マークFがポイントフィデューシャルとして設定されている場合、フィデューシャルデータにおいて、「タイプ」がポイントに設定されているとともに、「座標X1」、「座標Y1」、「座標X2」、および、「座標Y2」が、実装位置を原点とする座標系により表されている。フィデューシャルデータでは、たとえば、Fid番号1のデータのデータ構造がポイントであること、および、Fid番号1に対応する位置認識マークFとして、X座標が-5でかつY座標が5の位置認識マークFと、X座標が5でかつY座標が-5の位置認識マークFとの2つの位置認識マークFが認識(撮像)されることが表されている。 When the position recognition mark F is set as a point fiducial, the "type" is set to the point in the fiducial data, and the "coordinates X1", "coordinates Y1", and "coordinates X2" are set. , And "coordinates Y2" are represented by a coordinate system with the mounting position as the origin. In the fiducial data, for example, the data structure of the data of Fid number 1 is a point, and the position recognition mark F corresponding to Fid number 1 has an X coordinate of -5 and a Y coordinate of 5. It is shown that two position recognition marks F, that is, the mark F and the position recognition mark F having an X coordinate of 5 and a Y coordinate of -5 are recognized (imaging).
 図4に示す例では、全ての部品Cの実装位置が、Fid番号1の位置認識マークFに対応付けられている。この場合、たとえば、No.1の部品Cの基板Bへの実装動作時には、No.1の部品Cの実装位置に対して、X座標が-5でかつY座標が5の位置認識マークFと、X座標が5でかつY座標が-5の位置認識マークFとの2つの位置認識マークFが、位置認識マークFとして認識(撮像)される。同様に、No.2の部品Cの基板Bへの実装動作時には、No.2の部品Cの実装位置に対して、X座標が-5でかつY座標が5の位置認識マークFと、X座標が5でかつY座標が-5の位置認識マークFとの2つの位置認識マークFが、位置認識マークFとして認識(撮像)される。No.3以後の部品Cの基板Bへの実装動作においても、同様である。 In the example shown in FIG. 4, the mounting positions of all the components C are associated with the position recognition mark F of Fid number 1. In this case, for example, No. At the time of mounting operation of component C on the substrate B of No. 1, No. Two positions, a position recognition mark F having an X coordinate of -5 and a Y coordinate of 5, and a position recognition mark F having an X coordinate of 5 and a Y coordinate of -5, with respect to the mounting position of the component C of 1. The recognition mark F is recognized (imaged) as the position recognition mark F. Similarly, No. At the time of mounting operation of the component C on the substrate B of No. 2, No. Two positions, a position recognition mark F having an X coordinate of -5 and a Y coordinate of 5, and a position recognition mark F having an X coordinate of 5 and a Y coordinate of -5, with respect to the mounting position of the component C of 2. The recognition mark F is recognized (imaged) as the position recognition mark F. No. The same applies to the mounting operation of the component C after 3 on the substrate B.
 これにより、個別の位置認識マークFの撮像結果に基づいて、各実装位置の補正を行うことができるので、位置認識マークFがポイントフィデューシャルとして設定されていれば、基板Bに実装された部品Cにより位置認識マークFが隠れたために、実装位置の補正が行えずに、部品Cの基板Bへの装着ができなくなるということがない。一方、位置認識マークFがポイントフィデューシャルとして設定されている場合、実装位置ごとに位置認識マークFの認識動作(撮像動作)を行う必要があるため、タクトタイムが増加しやすい。 As a result, each mounting position can be corrected based on the imaging result of the individual position recognition mark F. Therefore, if the position recognition mark F is set as a point fiducial, it is mounted on the substrate B. Since the position recognition mark F is hidden by the component C, the mounting position cannot be corrected and the component C cannot be mounted on the substrate B. On the other hand, when the position recognition mark F is set as a point fiducial, it is necessary to perform the recognition operation (imaging operation) of the position recognition mark F for each mounting position, so that the tact time tends to increase.
(実装動作の構成)
 そこで、第1実施形態では、部品実装装置100は、基板Bの各実装位置に対して、個別の位置認識マークFが設定されるポイントフィデューシャルとして位置認識マークFを設定しておきつつ、部品Cの基板Bへの実装動作時には、基板Bの複数の実装位置に対して、共通の位置認識マークFが設定されるローカルフィデューシャルとして位置認識マークFを機能させるように構成されている。
(Implementation operation configuration)
Therefore, in the first embodiment, the component mounting device 100 sets the position recognition mark F as a point fiducial in which the individual position recognition mark F is set for each mounting position of the board B, while setting the position recognition mark F. During the mounting operation of the component C on the board B, the position recognition mark F is configured to function as a local fiduciary in which a common position recognition mark F is set for a plurality of mounting positions of the board B. ..
 具体的には、第1実施形態では、図5に示すように、制御部12は、部品Cの基板Bへの実装動作中において、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として決定するとともに、撮像対象として決定された位置認識マークFの基板撮像部5による撮像結果に基づいて、実装位置の補正を行うように構成されている。具体的には、制御部12は、部品Cの基板Bへの実装動作中において、未実装点を含む個片基板B1に対応する位置認識マークFのうちから、撮像対象の位置認識マークFを決定する制御を行うように構成されている。また、制御部12は、1吸着グループごとに、未実装点を含む個片基板B1に対応する位置認識マークFのうちから、撮像対象の位置認識マークFを決定する制御を行うように構成されている。なお、図5では、理解の容易化のために、撮像対象として決定された位置認識マークFを円により囲って示している。 Specifically, in the first embodiment, as shown in FIG. 5, the control unit 12 has a position recognition mark that is not hidden by the component C mounted on the board B during the mounting operation of the component C on the board B. F is determined as an image pickup target by the substrate imaging unit 5, and the mounting position is corrected based on the image pickup result of the position recognition mark F determined as the image pickup target by the substrate image pickup unit 5. Specifically, the control unit 12 sets the position recognition mark F to be imaged from the position recognition marks F corresponding to the individual board B1 including the unmounted points during the mounting operation of the component C on the board B. It is configured to give control to determine. Further, the control unit 12 is configured to control for each suction group to determine the position recognition mark F to be imaged from among the position recognition marks F corresponding to the individual substrate B1 including the unmounted points. ing. In FIG. 5, for ease of understanding, the position recognition mark F determined as the imaging target is shown by enclosing it in a circle.
 また、第1実施形態では、制御部12は、少なくとも、エラーによる未実装点への再実装動作を行うリトライ実装動作時(2回目以後の実装動作時)に、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として決定する制御を行うように構成されている。具体的には、制御部12は、リトライ実装動作時だけでなく、通常実装動作時(1回目の実装動作時)にも、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として決定する制御を行うように構成されている。制御部12は、通常実装動作時およびリトライ実装動作時において、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として順次決定する制御を行うように構成されている。 Further, in the first embodiment, the control unit 12 mounts the component C mounted on the board B at least during the retry mounting operation (during the second and subsequent mounting operations) in which the remounting operation is performed to the unmounted point due to an error. It is configured to control the position recognition mark F which is not hidden by the substrate image pickup unit 5 to determine the image pickup target. Specifically, the control unit 12 displays the position recognition mark F that is not hidden by the component C mounted on the board B not only during the retry mounting operation but also during the normal mounting operation (during the first mounting operation). It is configured to control the substrate image pickup unit 5 to determine the image pickup target. The control unit 12 is configured to sequentially determine the position recognition mark F, which is not hidden by the component C mounted on the substrate B, as an image pickup target by the substrate image pickup unit 5 during the normal mounting operation and the retry mounting operation. Has been done.
 また、本実施形態では、図5および図6(A)(B)に示すように、制御部12は、複数の未実装点に対応する複数の位置認識マークFのうちから、2つの位置認識マークFを基板撮像部5による撮像対象として決定する制御を行うように構成されている。具体的には、制御部12は、複数の未実装点に対応する複数の位置認識マークFのうちから、最も離れた2つの位置認識マークFを基板撮像部5による撮像対象として決定する制御を行うように構成されている。また、制御部12は、通常実装動作時およびリトライ実装動作時において、複数の未実装点に対応する複数の位置認識マークFのうちから、最も離れた2つの位置認識マークFを基板撮像部5による撮像対象として決定する制御を行うように構成されている。 Further, in the present embodiment, as shown in FIGS. 5 and 6A and 6B, the control unit 12 recognizes two positions from the plurality of position recognition marks F corresponding to the plurality of unmounted points. It is configured to control the mark F to be determined as an image pickup target by the substrate image pickup unit 5. Specifically, the control unit 12 controls to determine the two farthest position recognition marks F from the plurality of position recognition marks F corresponding to the plurality of unmounted points as the image pickup target by the substrate image pickup unit 5. It is configured to do. Further, the control unit 12 sets the two farthest position recognition marks F from the plurality of position recognition marks F corresponding to the plurality of unmounted points in the substrate imaging unit 5 during the normal mounting operation and the retry mounting operation. It is configured to perform control to determine the image pickup target by.
 ここで、図5を参照して、本実施形態の部品実装装置100による部品Cの基板Bへの実装動作の具体的な例について説明する。 Here, with reference to FIG. 5, a specific example of the mounting operation of the component C on the substrate B by the component mounting device 100 of the present embodiment will be described.
 図5に示す例では、まず、1吸着グループ目の部品Cの基板Bへの実装動作(通常実装動作)として、1段目の10個の実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、これから部品Cの実装が行われる1段目の10個の実装位置(個片基板B1)に対応する20個の位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。そして、撮像対象として決定された位置認識マークFが基板撮像部5により撮像される。そして、基板撮像部5による2つの位置認識マークFの撮像結果に基づいて、1段目の10個の実装位置の補正が行われつつ、1段目の10個の実装位置(個片基板B1)へ部品Cが実装される。なお、この際、吸着エラーなどのエラーにより2つの実装位置(図5において1段目の左から3番目および7番目の2つの実装位置)へ部品Cが実装できなかったとする。 In the example shown in FIG. 5, first, as a mounting operation (normal mounting operation) of the component C in the first suction group on the substrate B, the component is attached to the 10 mounting positions (individual substrate B1) in the first stage. The mounting operation of C on the substrate B is performed. In this case, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the first stage where the component C is to be mounted, the two farthest position recognition marks F are. , It is determined as the position recognition mark F of the image pickup target by the substrate image pickup unit 5. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F by the substrate imaging unit 5, the 10 mounting positions of the first stage are corrected, and the 10 mounting positions of the first stage (individual piece substrate B1) are corrected. ) Is mounted with component C. At this time, it is assumed that the component C cannot be mounted at the two mounting positions (the third and seventh mounting positions from the left in the first stage in FIG. 5) due to an error such as a suction error.
 そして、2吸着グループ目の部品Cの基板Bへの実装動作(通常実装動作)として、2段目の10個の実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、これから部品Cの実装が行われる2段目の10個の実装位置(個片基板B1)に対応する20個の位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。そして、撮像対象として決定された位置認識マークFが基板撮像部5により撮像される。そして、基板撮像部5による2つの位置認識マークFの撮像結果に基づいて、2段目の10個の実装位置の補正が行われつつ、2段目の10個の実装位置(個片基板B1)へ部品Cが実装される。 Then, as a mounting operation (normal mounting operation) of the component C of the second suction group on the substrate B, the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) of the second stage. The operation is performed. In this case, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the second stage where the component C is to be mounted, the two farthest position recognition marks F are. , It is determined as the position recognition mark F of the image pickup target by the substrate image pickup unit 5. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F by the substrate imaging unit 5, the 10 mounting positions of the second stage are corrected, and the 10 mounting positions of the second stage (individual piece substrate B1) are corrected. ) Is mounted with component C.
 そして、3吸着グループ目の部品Cの基板Bへの実装動作(通常実装動作)として、3段目の10個の実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、これから部品Cの実装が行われる3段目の10個の実装位置(個片基板B1)に対応する20個の位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。そして、撮像対象として決定された位置認識マークFが基板撮像部5により撮像される。そして、基板撮像部5による2つの位置認識マークFの撮像結果に基づいて、3段目の10個の実装位置の補正が行われつつ、3段目の10個の実装位置(個片基板B1)へ部品Cが実装される。 Then, as a mounting operation (normal mounting operation) of the component C of the third suction group on the substrate B, the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) of the third stage. The operation is performed. In this case, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the third stage where the component C is to be mounted, the two farthest position recognition marks F are. , It is determined as the position recognition mark F of the image pickup target by the substrate image pickup unit 5. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F by the substrate imaging unit 5, the 10 mounting positions of the third stage are corrected, and the 10 mounting positions of the third stage (individual piece substrate B1) are corrected. ) Is mounted with component C.
 そして、4吸着グループ目の部品Cの基板Bへの実装動作(通常実装動作)として、4段目の10個の実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、これから部品Cの実装が行われる4段目の10個の実装位置(個片基板B1)に対応する20個の位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。そして、撮像対象として決定された位置認識マークFが基板撮像部5により撮像される。そして、基板撮像部5による2つの位置認識マークFの撮像結果に基づいて、4段目の10個の実装位置の補正が行われつつ、4段目の10個の実装位置(個片基板B1)へ部品Cが実装される。なお、この際、吸着エラーなどのエラーにより1つの実装位置(図5において4段目の左から9番目の実装位置)へ部品Cが実装できなかったとする。 Then, as the mounting operation (normal mounting operation) of the component C in the fourth suction group on the substrate B, the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) in the fourth stage. The operation is performed. In this case, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the fourth stage where the component C is to be mounted, the two farthest position recognition marks F are. , It is determined as the position recognition mark F of the image pickup target by the substrate image pickup unit 5. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F by the substrate imaging unit 5, the 10 mounting positions of the 4th stage are corrected, and the 10 mounting positions of the 4th stage (individual piece substrate B1) are corrected. ) Is mounted with component C. At this time, it is assumed that the component C cannot be mounted at one mounting position (the ninth mounting position from the left in the fourth stage in FIG. 5) due to an error such as a suction error.
 そして、5吸着グループ目の部品Cの基板Bへの実装動作(リトライ実装動作)として、1吸着グループ目の部品Cの基板Bへの実装動作時にエラーにより部品Cの実装が行われなかった、1段目の左から3番目および7番目の2つの実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、これから部品Cの実装が行われる1段目の左から3番目および7番目の2つの実装位置(個片基板B1)に対応する4つの位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。そして、撮像対象として決定された位置認識マークFが基板撮像部5により撮像される。そして、基板撮像部5による2つの位置認識マークFの撮像結果に基づいて、1段目の左から3番目および7番目の2つの実装位置の補正が行われつつ、1段目の左から3番目および7番目の2つの実装位置(個片基板B1)へ部品Cが実装される。 Then, as the mounting operation of the component C in the fifth suction group on the substrate B (retry mounting operation), the component C was not mounted due to an error during the mounting operation of the component C in the first suction group on the substrate B. The mounting operation of the component C on the board B is performed at the two mounting positions (individual board B1) of the first stage, which are the third and the seventh from the left. In this case, the farthest 2 from the four position recognition marks F corresponding to the two mounting positions (individual piece substrate B1) of the third and seventh from the left in the first stage where the component C is to be mounted. One position recognition mark F is determined as the position recognition mark F of the image pickup target by the substrate imaging unit 5. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F by the substrate imaging unit 5, the two mounting positions of the first stage from the left, the third and the seventh, are corrected, and the first stage is 3 from the left. The component C is mounted on the second and seventh mounting positions (individual board B1).
 そして、6吸着グループ目の部品Cの基板Bへの実装動作(リトライ実装動作)として、4吸着グループ目の部品Cの基板Bへの実装動作時にエラーにより部品Cの実装が行われなかった、4段目の左から9番目の1つの実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、これから部品Cの実装が行われる4段目の左から9番目の1つの実装位置(個片基板B1)に対応する2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。そして、撮像対象として決定された位置認識マークFが基板撮像部5により撮像される。そして、基板撮像部5による2つの位置認識マークFの撮像結果に基づいて、4段目の左から9番目の1つの実装位置の補正が行われつつ、の実装位置(個片基板B1)へ部品Cが実装される。 Then, as the mounting operation of the component C of the sixth suction group on the substrate B (retry mounting operation), the component C was not mounted due to an error during the mounting operation of the component C of the fourth suction group on the substrate B. The mounting operation of the component C on the board B is performed at the 9th mounting position (individual piece board B1) from the left in the 4th stage. In this case, the two position recognition marks F corresponding to one mounting position (individual piece substrate B1), which is the ninth from the left in the fourth stage where the component C is to be mounted, are the positions to be imaged by the substrate imaging unit 5. It is determined as the recognition mark F. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F by the substrate imaging unit 5, the mounting position (individual substrate B1) is corrected while the 9th mounting position from the left of the 4th stage is corrected. The component C is mounted.
 なお、1段目の左から3番目および7番目の2つの実装位置(個片基板B1)と、4段目の左から9番目の1つの実装位置とに対する、部品Cの基板Bへのリトライ実装動作は、1つの吸着グループ内で行われてもよい。この場合、1段目の左から3番目および7番目の2つの実装位置(個片基板B1)と、4段目の左から9番目の1つの実装位置との3つの実装位置に対応する6つの位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定されることになる。 It should be noted that the retry to the substrate B of the component C with respect to the two mounting positions (individual piece substrate B1) of the third and seventh from the left of the first stage and the one mounting position of the ninth from the left of the fourth stage. The mounting operation may be performed within one adsorption group. In this case, 6 corresponding to the three mounting positions of the third and seventh mounting positions from the left of the first stage (individual board B1) and the one mounting position of the ninth from the left of the fourth stage. Of the two position recognition marks F, the two farthest position recognition marks F are determined as the position recognition marks F to be imaged by the substrate imaging unit 5.
 また、リトライ実装動作は、全ての通常実装動作の完了後に行われるのではなく、通常実装動作時にエラーにより部品Cの実装が行われなかった吸着グループの次の吸着グループで実施されてもよい。 Further, the retry mounting operation is not performed after all the normal mounting operations are completed, but may be performed in the suction group next to the suction group in which the component C is not mounted due to an error during the normal mounting operation.
(部品実装処理)
 次に、図7を参照して、第1実施形態の部品実装装置100による部品実装処理をフローチャートに基づいて説明する。なお、フローチャートの各処理は、制御部12により行われる。
(Parts mounting process)
Next, with reference to FIG. 7, the component mounting process by the component mounting device 100 of the first embodiment will be described with reference to the flowchart. Each process of the flowchart is performed by the control unit 12.
 図7に示すように、まず、ステップS1において、基板Bが搬入される。 As shown in FIG. 7, first, in step S1, the substrate B is carried in.
 そして、ステップS2において、吸着グループが決定される。 Then, in step S2, the adsorption group is determined.
 そして、ステップS3において、吸着グループ内の部品Cが実装ヘッド3aの吸着ノズルに吸着される。 Then, in step S3, the component C in the suction group is sucked by the suction nozzle of the mounting head 3a.
 そして、ステップS4において、実装ヘッド3aの吸着ノズルに吸着された部品Cが固定撮像部9により撮像される。また、ステップS4において、固定撮像部9による部品Cの撮像結果に基づいて、実装ヘッド3aの吸着ノズルに吸着された部品Cの状態が認識される。 Then, in step S4, the component C sucked by the suction nozzle of the mounting head 3a is imaged by the fixed imaging unit 9. Further, in step S4, the state of the component C sucked by the suction nozzle of the mounting head 3a is recognized based on the image pickup result of the component C by the fixed imaging unit 9.
 そして、ステップS5において、マーク認識処理が行われる。マーク認識処理では、図8に示すステップS11~S15の処理が行われる。 Then, in step S5, the mark recognition process is performed. In the mark recognition process, the processes of steps S11 to S15 shown in FIG. 8 are performed.
 具体的には、図8に示すように、ステップS11において、吸着グループ内で最も離れた2つの未実装の実装位置(未実装点)が抽出(検出)される。たとえば、図5に示す1吸着グループ目の例では、1段目の10個の未実装の実装位置(未実装点)のうち、左から1番目および10番目の2つの未実装の実装位置(未実装点)が抽出(検出)される。 Specifically, as shown in FIG. 8, in step S11, the two farthest unmounted mounting positions (unmounted points) in the adsorption group are extracted (detected). For example, in the example of the first adsorption group shown in FIG. 5, of the 10 unmounted mounting positions (unmounted points) in the first stage, the first and tenth unmounted mounting positions from the left (unmounted points). Unmounted points) are extracted (detected).
 そして、ステップS12において、吸着グループ内で最も離れた2つの未実装の実装位置に対応する位置認識マークFのうち、最も離れた2つの位置認識マークFが抽出(検出)される。たとえば、図5に示す1吸着グループ目の例では、左から1番目および10番目の2つの未実装の実装位置に対応する4つの位置認識マークFのうち、最も離れた2つの位置認識マークFが抽出(検出)される。 Then, in step S12, of the two farthest position recognition marks F corresponding to the two farthest unmounted mounting positions in the adsorption group, the two farthest position recognition marks F are extracted (detected). For example, in the example of the first adsorption group shown in FIG. 5, the two farthest position recognition marks F out of the four position recognition marks F corresponding to the two unmounted positions of the first and tenth from the left. Is extracted (detected).
 なお、図5に示す6吸着グループ目の例のように、吸着グループ内に未実装の実装位置が1つしかない場合には、ステップS11およびS12の処理に代えて、1つの未実装の実装位置に対応する2つの位置認識マークFを抽出(検出)する処理が行われればよい。 When there is only one unmounted mounting position in the suction group as in the example of the sixth suction group shown in FIG. 5, one unmounted mounting position is used instead of the processes of steps S11 and S12. The process of extracting (detecting) the two position recognition marks F corresponding to the positions may be performed.
 そして、ステップS13において、1つ目の位置認識マークFが基板撮像部5により撮像される。また、ステップS13では、基板撮像部5による1つ目の位置認識マークFの撮像結果に基づいて、位置認識マークFが認識される。 Then, in step S13, the first position recognition mark F is imaged by the substrate imaging unit 5. Further, in step S13, the position recognition mark F is recognized based on the image pickup result of the first position recognition mark F by the substrate imaging unit 5.
 そして、ステップS14において、2つ目の位置認識マークFが基板撮像部5により撮像される。また、ステップS14では、基板撮像部5による2つ目の位置認識マークFの撮像結果に基づいて、位置認識マークFが認識される。 Then, in step S14, the second position recognition mark F is imaged by the substrate imaging unit 5. Further, in step S14, the position recognition mark F is recognized based on the image pickup result of the second position recognition mark F by the substrate imaging unit 5.
 そして、ステップS15において、2つの位置認識マークFの認識結果に基づいて、実装位置の補正量が取得されるとともに、取得された補正量による実装位置の補正が行われる。そして、マーク認識処理が終了されて、図7に示すステップS6に進む。 Then, in step S15, the correction amount of the mounting position is acquired based on the recognition results of the two position recognition marks F, and the mounting position is corrected by the acquired correction amount. Then, the mark recognition process is completed, and the process proceeds to step S6 shown in FIG. 7.
 そして、図7に示すように、ステップS7において、全ての部品Cの基板Bへの実装が完了したか否かが判断される。全ての部品Cの基板Bへの実装が完了していないと判断された場合には、ステップS2に進む。そして、ステップS2~S6の処理が繰り返される。これにより、通常実装動作およびリトライ実装動作が行われる。なお、エラーによる未実装が無い場合には、リトライ実装動作は行われない。また、全ての部品Cの基板Bへの実装が完了したと判断された場合には、ステップS8に進む。 Then, as shown in FIG. 7, in step S7, it is determined whether or not all the components C have been mounted on the substrate B. If it is determined that the mounting of all the components C on the board B has not been completed, the process proceeds to step S2. Then, the processes of steps S2 to S6 are repeated. As a result, the normal mounting operation and the retry mounting operation are performed. If there is no unimplemented due to an error, the retry mounting operation is not performed. If it is determined that the mounting of all the components C on the substrate B is completed, the process proceeds to step S8.
 そして、ステップS8において、部品Cが実装された基板Bが搬出される。そして、部品実装処理が終了される。 Then, in step S8, the substrate B on which the component C is mounted is carried out. Then, the component mounting process is completed.
(マーク認識処理)
 次に、図9を参照して、図7のステップS5のマーク認識処理の詳細なフローチャートを説明する。なお、フローチャートの各処理は、制御部12により行われる。
(Mark recognition processing)
Next, with reference to FIG. 9, a detailed flowchart of the mark recognition process in step S5 of FIG. 7 will be described. Each process of the flowchart is performed by the control unit 12.
 図9に示すように、まず、ステップS21において、吸着グループ内の実装ヘッド3a(部品Cを保持する実装ヘッド3a)が抽出(検出)される。たとえば、図5に示す1吸着グループ目の例では、吸着グループ内の実装ヘッド3aとして、10本の実装ヘッド3aが抽出(検出)される。 As shown in FIG. 9, first, in step S21, the mounting head 3a (mounting head 3a holding the component C) in the suction group is extracted (detected). For example, in the example of the first suction group shown in FIG. 5, ten mounting heads 3a are extracted (detected) as the mounting heads 3a in the suction group.
 そして、ステップS22において、座標初期化が行われる。ステップS22では、左端登録座標が+∞に設定されるとともに、右端登録座標が-∞に設定されることにより、座標初期化が行われる。 Then, in step S22, the coordinates are initialized. In step S22, the left end registered coordinates are set to + ∞ and the right end registered coordinates are set to −∞, so that the coordinates are initialized.
 そして、ステップS23において、ヘッドループ処理が開始される。ヘッドループ処理では、ヘッドループ内の処理が、ステップS21において抽出された実装ヘッド3aの本数分だけ繰り返される。たとえば、ステップS21において抽出された実装ヘッド3aが10本であれば、ヘッドループ内の処理が、10回繰り返される。 Then, in step S23, the head loop processing is started. In the head loop processing, the processing in the head loop is repeated for the number of mounting heads 3a extracted in step S21. For example, if the number of mounting heads 3a extracted in step S21 is 10, the processing in the head loop is repeated 10 times.
 ヘッドループ処理では、まず、ステップS24において、左端登録座標よりも実装ヘッド3aによる実装座標が小さいか否かが判断される。左端登録座標よりも実装ヘッド3aによる実装座標が小さいと判断された場合、ステップS25に進む。 In the head loop processing, first, in step S24, it is determined whether or not the mounting coordinates by the mounting head 3a are smaller than the leftmost registered coordinates. If it is determined that the mounting coordinates by the mounting head 3a are smaller than the leftmost registered coordinates, the process proceeds to step S25.
 そして、ステップS25において、左端登録座標が比較した実装座標に更新されて、ステップS26に進む。 Then, in step S25, the leftmost registered coordinates are updated to the compared mounting coordinates, and the process proceeds to step S26.
 また、ステップS24において、左端登録座標よりも実装ヘッド3aによる実装座標が小さくないと判断された場合、左端登録座標が更新されずに、ステップS26に進む。 If it is determined in step S24 that the mounting coordinates by the mounting head 3a are not smaller than the leftmost registered coordinates, the leftmost registered coordinates are not updated and the process proceeds to step S26.
 そして、ステップS26において、右端登録座標よりも実装ヘッド3aによる実装座標が大きいか否かが判断される。右端登録座標よりも実装ヘッド3aによる実装座標が大きいと判断された場合、ステップS27に進む。 Then, in step S26, it is determined whether or not the mounting coordinates by the mounting head 3a are larger than the rightmost registered coordinates. If it is determined that the mounting coordinates by the mounting head 3a are larger than the rightmost registered coordinates, the process proceeds to step S27.
 そして、ステップS27において、右端登録座標が比較した実装座標に更新されて、次のループまたはステップS28に進む。 Then, in step S27, the rightmost registered coordinates are updated to the compared mounting coordinates, and the process proceeds to the next loop or step S28.
 また、ステップS26において、右端登録座標よりも実装ヘッド3aによる実装座標が大きくないと判断された場合、右端登録座標が更新されずに、次のループまたはステップS28に進む。 If it is determined in step S26 that the mounting coordinates by the mounting head 3a are not larger than the rightmost registered coordinates, the rightmost registered coordinates are not updated and the process proceeds to the next loop or step S28.
 具体的には、ヘッドループ内の処理が、ステップS21において抽出された実装ヘッド3aの本数分だけ繰り返されていない場合には、次のループに進む。また、ヘッドループ内の処理が、ステップS21において抽出された実装ヘッド3aの本数分だけ繰り返された場合には、ステップS28に進む。 Specifically, if the processing in the head loop is not repeated by the number of mounting heads 3a extracted in step S21, the process proceeds to the next loop. If the processing in the head loop is repeated for the number of mounting heads 3a extracted in step S21, the process proceeds to step S28.
 ヘッドループ内の処理が繰り返されることにより、最終的に、左端登録座標に吸着グループ内で最も左端の実装座標が登録されるとともに、右端登録座標に吸着グループ内で最も右端の実装座標が登録される。 By repeating the processing in the head loop, finally, the leftmost mounting coordinate in the adsorption group is registered in the left end registration coordinate, and the rightmost mounting coordinate in the adsorption group is registered in the right end registration coordinate. The coordinates.
 そして、ステップS28において、左端登録座標に対応する左端座標の位置認識マークFの位置が取得される。 Then, in step S28, the position of the position recognition mark F of the left end coordinates corresponding to the left end registered coordinates is acquired.
 そして、ステップS29において、左端座標の位置認識マークFが基板撮像部5により撮像される。また、ステップS29では、基板撮像部5による左端座標の位置認識マークFの撮像結果に基づいて、位置認識マークFが認識される。 Then, in step S29, the position recognition mark F at the left end coordinate is imaged by the substrate imaging unit 5. Further, in step S29, the position recognition mark F is recognized based on the image pickup result of the position recognition mark F at the left end coordinate by the substrate imaging unit 5.
 そして、ステップS30において、右端登録座標に対応する右端座標の位置認識マークFの位置が取得される。なお、ステップS30の処理は、ステップS29の処理の前に行われていてもよい。 Then, in step S30, the position of the position recognition mark F of the right end coordinates corresponding to the right end registered coordinates is acquired. The process of step S30 may be performed before the process of step S29.
 そして、ステップS31において、右端座標の位置認識マークFが基板撮像部5により撮像される。また、ステップS31では、基板撮像部5による右端座標の位置認識マークFの撮像結果に基づいて、位置認識マークFが認識される。 Then, in step S31, the position recognition mark F at the right end coordinate is imaged by the substrate imaging unit 5. Further, in step S31, the position recognition mark F is recognized based on the image pickup result of the position recognition mark F of the right end coordinates by the substrate imaging unit 5.
 そして、ステップS32において、左端座標および右端座標の2つの位置認識マークFの認識結果に基づいて、実装位置の補正量が取得されるとともに、取得された補正量による実装位置の補正が行われる。そして、マーク認識処理が終了されて、図7に示すステップS6に進む。その後の処理は、上記の通りである。 Then, in step S32, the correction amount of the mounting position is acquired based on the recognition result of the two position recognition marks F of the left end coordinate and the right end coordinate, and the mounting position is corrected by the acquired correction amount. Then, the mark recognition process is completed, and the process proceeds to step S6 shown in FIG. 7. Subsequent processing is as described above.
 なお、図9では、左端登録座標および右端登録座標(すなわち、左右方向の距離)に基づいて、位置認識マークFを決定する例を示したが、上端登録座標および下端登録座標(すなわち、上下方向の距離)に基づいて、位置認識マークFを決定してもよい。また、斜め方向の距離に基づいて、位置認識マークFを決定してもよい。 Note that FIG. 9 shows an example in which the position recognition mark F is determined based on the left end registration coordinates and the right end registration coordinates (that is, the distance in the left-right direction), but the upper end registration coordinates and the lower end registration coordinates (that is, the vertical direction) are shown. The position recognition mark F may be determined based on the distance). Further, the position recognition mark F may be determined based on the distance in the diagonal direction.
(第1実施形態の効果)
 第1実施形態では、以下のような効果を得ることができる。
(Effect of the first embodiment)
In the first embodiment, the following effects can be obtained.
 第1実施形態では、上記のように、部品Cの基板Bへの実装動作中において、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として決定するとともに、撮像対象として決定された位置認識マークFの基板撮像部5による撮像結果に基づいて、実装位置の補正を行う制御部12を設ける。これにより、基板Bに実装された部品Cにより位置認識マークFが隠れたために、位置認識マークFが認識できないという現象が発生することを抑制することができる。その結果、基板Bに実装された部品Cにより位置認識マークFが隠れたことに起因して、実装位置の補正が行えずに、部品Cの基板Bへの実装ができなくなることを抑制することができる。また、部品Cの基板Bへの実装動作中において、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として決定することにより、部品Cの基板Bへの実装により隠れる位置にも、位置認識マークFを配置することができるので、位置認識マークFの配置の自由度を高めることができる。 In the first embodiment, as described above, during the mounting operation of the component C on the substrate B, the position recognition mark F not hidden by the component C mounted on the substrate B is determined as an image pickup target by the substrate imaging unit 5. At the same time, a control unit 12 that corrects the mounting position is provided based on the image pickup result of the substrate image pickup unit 5 of the position recognition mark F determined as the image pickup target. As a result, it is possible to suppress the phenomenon that the position recognition mark F cannot be recognized because the position recognition mark F is hidden by the component C mounted on the substrate B. As a result, it is possible to prevent the component C from being unable to be mounted on the board B because the mounting position cannot be corrected due to the position recognition mark F being hidden by the component C mounted on the board B. Can be done. Further, during the mounting operation of the component C on the substrate B, the position recognition mark F which is not hidden by the component C mounted on the substrate B is determined as an image pickup target by the substrate imaging unit 5, so that the component C can be mounted on the substrate B. Since the position recognition mark F can be placed even at a position hidden by the implementation of, the degree of freedom in the placement of the position recognition mark F can be increased.
 また、第1実施形態では、上記のように、基板Bは、位置認識マークFが各々設けられた複数の個片基板B1を含み、制御部12は、部品Cの基板Bへの実装動作中において、未実装点を含む個片基板B1に対応する位置認識マークFのうちから、撮像対象の位置認識マークFを決定する制御を行うように構成されている。これにより、基板Bに実装された部品Cにより位置認識マークFが隠れることが発生しやすい基板B(すなわち、位置認識マークFが各々設けられた複数の個片基板B1を含む基板B)においても、未実装点を含む個片基板B1に対応する位置認識マークFが決定されるので、基板Bに実装された部品Cにより位置認識マークFが隠れたことに起因して、実装位置の補正が行えずに、部品Cの基板Bへの実装ができなくなることを抑制することができる。また、未実装点を含む個片基板B1に対応する位置認識マークFのうちから、撮像対象の位置認識マークFを決定することにより、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として容易に決定することができる。 Further, in the first embodiment, as described above, the substrate B includes a plurality of individual substrate B1s each provided with the position recognition mark F, and the control unit 12 is in the process of mounting the component C on the substrate B. In the above, the position recognition mark F corresponding to the individual substrate B1 including the non-mounting point is controlled to determine the position recognition mark F to be imaged. As a result, even in the substrate B in which the position recognition mark F is likely to be hidden by the component C mounted on the substrate B (that is, the substrate B including a plurality of individual substrate B1 each provided with the position recognition mark F). Since the position recognition mark F corresponding to the individual board B1 including the unmounted points is determined, the mounting position is corrected because the position recognition mark F is hidden by the component C mounted on the board B. It is possible to prevent the component C from being unable to be mounted on the substrate B without being able to do so. Further, by determining the position recognition mark F to be imaged from the position recognition marks F corresponding to the individual substrate B1 including the unmounted points, the position recognition marks not hidden by the component C mounted on the board B. F can be easily determined as an image pickup target by the substrate image pickup unit 5.
 また、第1実施形態では、上記のように、制御部12は、少なくとも、エラーによる未実装点への再実装動作を行うリトライ実装動作時に、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として決定する制御を行うように構成されている。これにより、基板Bに実装された部品Cにより位置認識マークFが隠れることが発生しやすいリトライ実装動作時において、基板Bに実装された部品Cにより位置認識マークFが隠れたことに起因して、実装位置の補正が行えずに、部品Cの基板Bへの実装ができなくなることを抑制することができる。 Further, in the first embodiment, as described above, the control unit 12 is at least in a position not hidden by the component C mounted on the board B during the retry mounting operation in which the remounting operation is performed to the unmounted point due to an error. It is configured to control the recognition mark F to be determined as an image pickup target by the substrate imaging unit 5. As a result, the position recognition mark F is hidden by the component C mounted on the board B during the retry mounting operation in which the position recognition mark F is likely to be hidden by the component C mounted on the board B. It is possible to prevent the component C from being unable to be mounted on the substrate B because the mounting position cannot be corrected.
 また、第1実施形態では、上記のように、制御部12は、リトライ実装動作時だけでなく、通常実装動作時にも、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として決定する制御を行うように構成されている。これにより、通常実装動作時とリトライ実装動作時との両方において、同じ位置認識マークFの認識動作を行うことができるので、通常実装動作時とリトライ実装動作時とにおいて、互いに異なる位置認識マークFの認識動作を行う場合に比べて、位置認識マークFの認識動作が複雑化することを抑制することができる。 Further, in the first embodiment, as described above, the control unit 12 carries the position recognition mark F which is not hidden by the component C mounted on the board B not only during the retry mounting operation but also during the normal mounting operation. It is configured to control the image pickup unit 5 to determine the image pickup target. As a result, the same position recognition mark F can be recognized both during the normal mounting operation and the retry mounting operation. Therefore, the position recognition mark F different from each other during the normal mounting operation and the retry mounting operation can be performed. It is possible to suppress the complicated recognition operation of the position recognition mark F as compared with the case of performing the recognition operation of.
 また、第1実施形態では、上記のように、制御部12は、複数の未実装点に対応する複数の位置認識マークFのうちから、2つの位置認識マークFを基板撮像部5による撮像対象として決定する制御を行うように構成されている。これにより、複数の未実装点に対応する複数の位置認識マークFのうちから、2つの位置認識マークFを基板撮像部5による撮像対象として決定することにより、基板Bに実装された部品Cにより隠れていない必要最小限の位置認識マークFを基板撮像部5による撮像対象として容易に決定することができる。 Further, in the first embodiment, as described above, the control unit 12 captures two position recognition marks F from the plurality of position recognition marks F corresponding to the plurality of unmounted points by the substrate imaging unit 5. It is configured to perform control to determine as. As a result, from among the plurality of position recognition marks F corresponding to the plurality of unmounted points, the two position recognition marks F are determined as the image pickup targets by the board image pickup unit 5, so that the component C mounted on the board B can be used. The minimum necessary position recognition mark F that is not hidden can be easily determined as an image pickup target by the substrate imaging unit 5.
 また、第1実施形態では、上記のように、制御部12は、複数の未実装点に対応する複数の位置認識マークFのうちから、最も離れた2つの位置認識マークFを基板撮像部5による撮像対象として決定する制御を行うように構成されている。これにより、最も離れた2つの位置認識マークFの撮像結果に基づいて、実装位置の補正を行うことができるので、最も離れた2つの位置認識マークFの間の未実装点に対して、データの範囲の外側で数値を求める外挿補正ではなく、外挿補正よりも精度が高い、データの範囲の内側で数値を求める内挿補正により実装位置の補正を行うことができる。その結果、最も離れた2つの位置認識マークF以外の位置認識マークFを基板撮像部5による撮像対象として決定する場合に比べて、実装位置の補正を精度よく行うことができる。 Further, in the first embodiment, as described above, the control unit 12 sets the two farthest position recognition marks F from the plurality of position recognition marks F corresponding to the plurality of unmounted points to the substrate imaging unit 5. It is configured to perform control to determine the image pickup target by. As a result, the mounting position can be corrected based on the imaging results of the two farthest position recognition marks F, so that data can be obtained for the unmounted point between the two farthest position recognition marks F. The mounting position can be corrected by the extrapolation correction that obtains the numerical value inside the data range, which is more accurate than the extrapolation correction, instead of the extrapolation correction that obtains the numerical value outside the range of. As a result, the mounting position can be corrected more accurately than in the case where the position recognition mark F other than the two farthest position recognition marks F is determined as the image pickup target by the substrate imaging unit 5.
[第2実施形態]
 次に、図1および図10~図12を参照して、第2実施形態について説明する。この第2実施形態では、上記第1実施形態の構成に加えて、さらに指定領域内で撮像対象の位置認識マークを設定する例について説明する。なお、上記第1実施形態と同一の構成については、図中において同じ符号を付して図示し、その説明を省略する。
[Second Embodiment]
Next, the second embodiment will be described with reference to FIGS. 1 and 10 to 12. In this second embodiment, in addition to the configuration of the first embodiment, an example of setting a position recognition mark of an image pickup target within a designated area will be described. The same configuration as that of the first embodiment is shown with the same reference numerals in the drawings, and the description thereof will be omitted.
(部品実装装置の構成)
 本発明の第2実施形態による部品実装装置200は、図1に示すように、制御部112を備える点で、上記第1実施形態による部品実装装置100と相違する。
(Configuration of component mounting device)
As shown in FIG. 1, the component mounting device 200 according to the second embodiment of the present invention is different from the component mounting device 100 according to the first embodiment in that it includes a control unit 112.
 ここで、第2実施形態では、図10に示すように、制御部112は、複数の実装位置(個片基板B1)を含むように設定された指定領域A内において、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として決定するとともに、撮像対象として決定された位置認識マークFの基板撮像部5による撮像結果に基づいて、指定領域A内における実装位置の補正を行うように構成されている。指定領域Aは、同じ位置認識マークFにより補正できる領域(補正制限領域)を示している。指定領域Aは、たとえばユーザの指定により、予めサイズが決定されている。 Here, in the second embodiment, as shown in FIG. 10, the control unit 112 is mounted on the substrate B in the designated area A set to include a plurality of mounting positions (individual piece substrate B1). The position recognition mark F that is not hidden by the component C is determined as an image pickup target by the substrate imaging unit 5, and is in the designated area A based on the image pickup result of the position recognition mark F determined as the image pickup target by the substrate image pickup unit 5. It is configured to correct the mounting position. The designated area A indicates an area (correction limiting area) that can be corrected by the same position recognition mark F. The size of the designated area A is determined in advance, for example, by the user's designation.
 ここで、図10を参照して、本実施形態の部品実装装置200による部品Cの基板Bへの実装動作の具体的な例について説明する。 Here, with reference to FIG. 10, a specific example of the mounting operation of the component C on the substrate B by the component mounting device 200 of the present embodiment will be described.
 図10に示す例では、まず、1吸着グループ目の部品Cの基板Bへの実装動作(通常実装動作)として、1段目の10個の実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、これから部品Cの実装が行われる1段目の左から1番目~5番目の5つの実装位置(個片基板B1)と、まだ部品Cの実装が行われない2段目の左から1番目~5番目の5つの実装位置(個片基板B1)との10個の実装位置(個片基板B1)を含む指定領域A(左側の指定領域A)が設定される。また、左側の指定領域Aには、これから部品Cの実装が行われる1段目の左から6番目~10番目の5つの実装位置(個片基板B1)が含まれていないため、左側の指定領域Aとは別の指定領域Aがさらに設定される。すなわち、これから部品Cの実装が行われる1段目の左から6番目~10番目の5つの実装位置(個片基板B1)と、まだ部品Cの実装が行われない2段目の左から6番目~10番目の5つの実装位置(個片基板B1)との10個の実装位置(個片基板B1)を含む指定領域A(右側の指定領域A)が設定される。 In the example shown in FIG. 10, first, as a mounting operation (normal mounting operation) of the component C of the first suction group on the substrate B, the component is attached to the 10 mounting positions (individual piece substrate B1) of the first stage. The mounting operation of C on the substrate B is performed. In this case, from the 5 mounting positions (individual piece substrate B1) from the left of the 1st stage where the component C is to be mounted, and from the left of the 2nd stage where the component C is not yet mounted. A designated area A (designated area A on the left side) including 10 mounting positions (individual piece board B1) with the first to fifth mounting positions (individual piece board B1) is set. Further, since the designated area A on the left side does not include the five mounting positions (individual board B1) from the left to the sixth to tenth from the left in the first stage where the component C is to be mounted, the designated area A on the left side is designated. A designated area A different from the area A is further set. That is, the five mounting positions (individual piece substrate B1) from the left of the first stage where the component C is to be mounted and the second stage from the left where the component C is not yet mounted are six. A designated area A (designated area A on the right side) including 10 mounting positions (individual piece board B1) with the 5th to 10th mounting positions (individual piece board B1) is set.
 この場合、左側の指定領域A内の10個の実装位置(個片基板B1)に対応する20個の位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。また、右側の指定領域A内の10個の実装位置(個片基板B1)に対応する20個の位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。そして、撮像対象として決定された位置認識マークFが基板撮像部5により撮像される。そして、基板撮像部5による左側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、左側の指定領域A内の1段目の左から1番目~5番目の5つの実装位置の補正が行われつつ、左側の指定領域A内の1段目の左から1番目~5番目の5つの実装位置(個片基板B1)へ部品Cが実装される。また、基板撮像部5による右側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、右側の指定領域A内の1段目の左から6番目~10番目の5つの実装位置の補正が行われつつ、右側の指定領域A内の1段目の左から6番目~10番目の5つの実装位置(個片基板B1)へ部品Cが実装される。なお、この際、2段目の左から1番目~10番目の実装位置への部品Cの実装は行われない。 In this case, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the designated area A on the left side, the two farthest position recognition marks F are the substrate imaging unit 5. It is determined as the position recognition mark F of the image pickup target by. Further, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the designated area A on the right side, the two farthest position recognition marks F are the substrate imaging unit 5. It is determined as the position recognition mark F of the image pickup target. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F in the designated area A on the left side by the substrate imaging unit 5, the five mounting positions from the left of the first stage in the designated area A on the left side are set. While the correction is performed, the component C is mounted on the five mounting positions (individual piece substrate B1) of the first stage from the left in the designated area A on the left side. Further, based on the imaging results of the two position recognition marks F in the designated area A on the right side by the substrate imaging unit 5, the five mounting positions of the first stage in the designated area A on the right side from the left to the sixth to tenth. While the correction is performed, the component C is mounted on the five mounting positions (individual piece substrate B1) of the first stage from the left in the designated area A on the right side. At this time, the component C is not mounted at the first to tenth mounting positions from the left in the second stage.
 そして、2吸着グループ目の部品Cの基板Bへの実装動作(通常実装動作)として、2段目の10個の実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、1吸着グループ目の部品Cの基板Bへの実装動作時に、位置認識マークFの認識(撮像)を行っているため、位置認識マークFの認識(撮像)は行われない。また、1吸着グループ目の部品Cの基板Bへの実装動作時に取得した基板撮像部5による左側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、左側の指定領域A内の2段目の左から1番目~5番目の5つの実装位置の補正が行われつつ、左側の指定領域A内の2段目の左から1番目~5番目の5つの実装位置(個片基板B1)へ部品Cが実装される。また、1吸着グループ目の部品Cの基板Bへの実装動作時に取得した基板撮像部5による右側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、右側の指定領域A内の2段目の左から6番目~10番目の5つの実装位置の補正が行われつつ、右側の指定領域A内の2段目の左から6番目~10番目の5つの実装位置(個片基板B1)へ部品Cが実装される。 Then, as a mounting operation (normal mounting operation) of the component C of the second suction group on the substrate B, the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) of the second stage. The operation is performed. In this case, since the position recognition mark F is recognized (imaging) during the mounting operation of the component C of the first suction group on the substrate B, the position recognition mark F is not recognized (imaging). Further, based on the image pickup results of the two position recognition marks F in the left designated area A by the substrate image pickup unit 5 acquired during the mounting operation of the component C of the first suction group on the substrate B, the inside of the left designated area A. While the 5 mounting positions from the 1st to the 5th from the left in the 2nd stage are corrected, the 5 mounting positions (individual pieces) from the 1st to the 5th from the left in the 2nd stage in the designated area A on the left side are corrected. The component C is mounted on the board B1). Further, based on the imaging results of the two position recognition marks F in the designated area A on the right side acquired by the substrate imaging unit 5 during the mounting operation of the component C of the first suction group on the substrate B, the designated area A on the right side is formed. The 5th mounting position (6th to 10th from the left) in the designated area A on the right side is corrected while the 5th mounting position from the left of the 2nd stage is corrected. The component C is mounted on the board B1).
 そして、3吸着グループ目の部品Cの基板Bへの実装動作(通常実装動作)として、3段目の10個の実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、これから部品Cの実装が行われる3段目の左から1番目~5番目の5つの実装位置(個片基板B1)と、まだ部品Cの実装が行われない4段目の左から1番目~5番目の5つの実装位置(個片基板B1)との10個の実装位置(個片基板B1)を含む指定領域A(左側の指定領域A)が設定される。また、これから部品Cの実装が行われる3段目の左から6番目~10番目の5つの実装位置(個片基板B1)と、まだ部品Cの実装が行われない4段目の左から6番目~10番目の5つの実装位置(個片基板B1)との10個の実装位置(個片基板B1)を含む指定領域A(右側の指定領域A)が設定される。 Then, as a mounting operation (normal mounting operation) of the component C of the third suction group on the substrate B, the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) of the third stage. The operation is performed. In this case, from the 5 mounting positions (individual board B1) from the left of the 3rd stage where the component C is to be mounted, and from the left of the 4th stage where the component C is not yet mounted. A designated area A (designated area A on the left side) including 10 mounting positions (individual piece board B1) with the first to fifth mounting positions (individual piece board B1) is set. In addition, the 5 mounting positions (individual piece board B1) from the left of the 3rd stage where the component C will be mounted and the 6th from the left of the 4th stage where the component C is not yet mounted. A designated area A (designated area A on the right side) including 10 mounting positions (individual piece board B1) with the 5th to 10th mounting positions (individual piece board B1) is set.
 この場合、左側の指定領域A内の10個の実装位置(個片基板B1)に対応する20個の位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。また、右側の指定領域A内の10個の実装位置(個片基板B1)に対応する20個の位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。そして、撮像対象として決定された位置認識マークFが基板撮像部5により撮像される。そして、基板撮像部5による左側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、左側の指定領域A内の3段目の左から1番目~5番目の5つの実装位置の補正が行われつつ、左側の指定領域A内の3段目の左から1番目~5番目の5つの実装位置(個片基板B1)へ部品Cが実装される。また、基板撮像部5による右側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、右側の指定領域A内の3段目の左から6番目~10番目の5つの実装位置の補正が行われつつ、右側の指定領域A内の3段目の左から6番目~10番目の5つの実装位置(個片基板B1)へ部品Cが実装される。なお、この際、4段目の左から1番目~10番目の実装位置への部品Cの実装は行われない。また、この際、吸着エラーなどのエラーにより2つの実装位置(図10において3段目の左から3番目および10番目の2つの実装位置)へ部品Cが実装できなかったとする。 In this case, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the designated area A on the left side, the two farthest position recognition marks F are the substrate imaging unit 5. It is determined as the position recognition mark F of the image pickup target by. Further, out of the 20 position recognition marks F corresponding to the 10 mounting positions (individual piece substrate B1) in the designated area A on the right side, the two farthest position recognition marks F are the substrate imaging unit 5. It is determined as the position recognition mark F of the image pickup target. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F in the designated area A on the left side by the substrate imaging unit 5, the five mounting positions of the first to fifth from the left in the third stage in the designated area A on the left side. While the correction is performed, the component C is mounted at the five mounting positions (individual piece substrate B1) of the third stage from the left in the designated area A on the left side. Further, based on the imaging results of the two position recognition marks F in the designated area A on the right side by the substrate imaging unit 5, the five mounting positions of the third stage from the left in the designated area A on the right side are the sixth to tenth. While the correction is performed, the component C is mounted on the five mounting positions (individual piece substrate B1) of the third stage from the left in the designated area A on the right side. At this time, the component C is not mounted at the first to tenth mounting positions from the left in the fourth stage. Further, at this time, it is assumed that the component C cannot be mounted at the two mounting positions (the third and tenth mounting positions from the left in the third stage in FIG. 10) due to an error such as a suction error.
 そして、4吸着グループ目の部品Cの基板Bへの実装動作(通常実装動作)として、4段目の10個の実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、3吸着グループ目の部品Cの基板Bへの実装動作時に、位置認識マークFの認識(撮像)を行っているため、位置認識マークFの認識(撮像)は行われない。また、3吸着グループ目の部品Cの基板Bへの実装動作時に取得した基板撮像部5による左側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、左側の指定領域A内の4段目の左から1番目~5番目の5つの実装位置の補正が行われつつ、左側の指定領域A内の4段目の左から1番目~5番目の5つの実装位置(個片基板B1)へ部品Cが実装される。また、3吸着グループ目の部品Cの基板Bへの実装動作時に取得した基板撮像部5による右側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、右側の指定領域A内の4段目の左から6番目~10番目の5つの実装位置の補正が行われつつ、右側の指定領域A内の4段目の左から6番目~10番目の5つの実装位置(個片基板B1)へ部品Cが実装される。なお、この際、吸着エラーなどのエラーにより2つの実装位置(図10において4段目の左から2番目および8番目の2つの実装位置)へ部品Cが実装できなかったとする。 Then, as the mounting operation (normal mounting operation) of the component C in the fourth suction group on the substrate B, the component C is mounted on the substrate B with respect to the 10 mounting positions (individual piece substrate B1) in the fourth stage. The operation is performed. In this case, since the position recognition mark F is recognized (imaging) during the mounting operation of the component C of the third suction group on the substrate B, the position recognition mark F is not recognized (imaging). Further, based on the imaging results of the two position recognition marks F in the left designated area A by the substrate imaging unit 5 acquired during the mounting operation of the component C of the third suction group on the substrate B, the left designated area A While the 5 mounting positions from the left of the 4th stage are corrected, the 5 mounting positions (individual pieces) of the 1st to 5th from the left of the 4th stage in the designated area A on the left side are corrected. The component C is mounted on the board B1). Further, based on the imaging results of the two position recognition marks F in the designated area A on the right side acquired by the substrate imaging unit 5 during the mounting operation of the component C of the third suction group on the substrate B, the designated area A on the right side is formed. While the 6th to 10th mounting positions from the left of the 4th stage are corrected, the 5th mounting position (individual piece) of the 6th to 10th from the left of the 4th stage in the designated area A on the right side. The component C is mounted on the board B1). At this time, it is assumed that the component C cannot be mounted at the two mounting positions (the second and eighth mounting positions from the left in the fourth stage in FIG. 10) due to an error such as a suction error.
 そして、5吸着グループ目の部品Cの基板Bへの実装動作(リトライ実装動作)として、3および4吸着グループ目の部品Cの基板Bへの実装動作時にエラーにより部品Cの実装が行われなかった、3段目の左から3番目および10番目の2つの実装位置(個片基板B1)と、4段目の左から2番目および8番目の2つの実装位置(個片基板B1)との4つの実装位置(個片基板B1)に対して、部品Cの基板Bへの実装動作が行われる。この場合、これから部品Cの実装が行われる3段目の左から3番目の1つの実装位置(個片基板B1)と、4段目の左から2番目の1つの実装位置(個片基板B1)との2つの実装位置(個片基板B1)を含む指定領域A(左側の指定領域A)が設定される。また、左側の指定領域Aには、これから部品Cの実装が行われる3段目の左から10番目の1つの実装位置(個片基板B1)と、4段目の左から8番目の1つの実装位置(個片基板B1)との2つの実装位置(個片基板B1)が含まれていないため、左側の指定領域Aとは別の指定領域Aがさらに設定される。すなわち、これから部品Cの実装が行われる3段目の左から10番目の1つの実装位置(個片基板B1)と、4段目の左から8番目の1つの実装位置(個片基板B1)との2つの実装位置(個片基板B1)を含む指定領域A(右側の指定領域A)が設定される。 Then, as the mounting operation of the component C in the 5th suction group on the substrate B (retry mounting operation), the component C is not mounted due to an error during the mounting operation of the component C in the 3rd and 4th suction groups on the substrate B. The third and tenth mounting positions from the left in the third stage (individual piece substrate B1) and the second and eighth mounting positions from the left in the fourth stage (individual piece substrate B1). The mounting operation of the component C on the board B is performed for the four mounting positions (individual board B1). In this case, the third mounting position from the left (individual piece board B1) in the third stage where the component C is to be mounted and the second mounting position from the left in the fourth stage (individual piece board B1). ) And the designated area A (designated area A on the left side) including the two mounting positions (individual board B1) are set. Further, in the designated area A on the left side, one mounting position (individual piece substrate B1), which is the tenth from the left in the third stage where the component C is to be mounted, and one, which is the eighth from the left in the fourth stage. Since the two mounting positions (individual piece board B1) and the mounting position (individual piece board B1) are not included, a designated area A different from the designated area A on the left side is further set. That is, the tenth mounting position from the left (individual piece board B1) in the third stage where the component C is to be mounted and the eighth mounting position (individual piece board B1) from the left in the fourth stage. A designated area A (designated area A on the right side) including the two mounting positions (individual board B1) is set.
 この場合、左側の指定領域A内の2つの実装位置(個片基板B1)に対応する4つの位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。また、右側の指定領域A内の2つの実装位置(個片基板B1)に対応する4つの位置認識マークFのうちから、最も離れた2つの位置認識マークFが、基板撮像部5による撮像対象の位置認識マークFとして決定される。そして、撮像対象として決定された位置認識マークFが基板撮像部5により撮像される。そして、基板撮像部5による左側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、左側の指定領域A内の、3段目の左から3番目の1つの実装位置と、4段目の左から2番目の1つの実装位置との2つの実装位置の補正が行われつつ、左側の指定領域A内の、3段目の左から3番目の1つの実装位置(個片基板B1)と、4段目の左から2番目の1つの実装位置(個片基板B1)との2つの実装位置(個片基板B1)へ部品Cが実装される。また、基板撮像部5による右側の指定領域A内の2つの位置認識マークFの撮像結果に基づいて、右側の指定領域A内の、3段目の左から10番目の1つの実装位置と、4段目の左から8番目の1つの実装位置との2つの実装位置の補正が行われつつ、右側の指定領域A内の、3段目の左から10番目の1つの実装位置(個片基板B1)と、4段目の左から8番目の1つの実装位置(個片基板B1)との2つの実装位置(個片基板B1)へ部品Cが実装される。 In this case, of the four position recognition marks F corresponding to the two mounting positions (individual piece substrate B1) in the designated area A on the left side, the two farthest position recognition marks F are imaged by the substrate image pickup unit 5. It is determined as the position recognition mark F of the target. Further, of the four position recognition marks F corresponding to the two mounting positions (individual piece substrate B1) in the designated area A on the right side, the two farthest position recognition marks F are the imaging targets by the substrate imaging unit 5. It is determined as the position recognition mark F of. Then, the position recognition mark F determined as the image pickup target is imaged by the substrate imaging unit 5. Then, based on the imaging results of the two position recognition marks F in the designated area A on the left side by the substrate imaging unit 5, the mounting position of the third stage from the left in the designated area A on the left side and one mounting position. While the two mounting positions are corrected with the second mounting position from the left in the fourth stage, the third mounting position (individual piece) in the designated area A on the left side is the third from the left in the third stage. The component C is mounted at two mounting positions (individual piece board B1), that is, the board B1) and one mounting position (individual piece board B1) that is the second from the left in the fourth stage. Further, based on the image pickup results of the two position recognition marks F in the designated area A on the right side by the substrate imaging unit 5, the mounting position of the third stage, the tenth from the left, in the designated area A on the right side, and While the two mounting positions are corrected with the 8th mounting position from the left in the 4th stage, the 10th mounting position from the left in the 3rd stage (individual piece) in the designated area A on the right side. The component C is mounted on two mounting positions (individual board B1), one on the board B1) and the eighth mounting position from the left on the fourth stage (individual board B1).
 指定領域Aは、部品Cの基板Bへの実装動作中において、設定されている。指定領域Aの設定方法については、特に限られないが、たとえば、図11に示すように、制御部112は、部品Cの基板Bへの実装動作中において、最も多く未実装点が含まれるように、指定領域Aを設定する制御を行うように構成されている。 The designated area A is set during the mounting operation of the component C on the board B. The method for setting the designated area A is not particularly limited, but for example, as shown in FIG. 11, the control unit 112 includes the largest number of unmounted points during the mounting operation of the component C on the board B. Is configured to control the setting of the designated area A.
 具体的には、まず、制御部112は、吸着グループ内で未実装点を抽出(検出)する制御を行うように構成されている。そして、制御部112は、抽出した未実装点の各々に対して、矩形の指定領域Aを当てはめることにより、最も多く未実装点が含まれる指定領域Aの位置を検出する制御を行うように構成されている。具体的には、制御部112は、矩形の指定領域Aの4角の各々に未実装点を配置することを、抽出した未実装点の各々に対して行うことにより、最も多く未実装点が含まれる指定領域Aの位置を検出する制御を行うように構成されている。 Specifically, first, the control unit 112 is configured to perform control to extract (detect) unmounted points in the adsorption group. Then, the control unit 112 is configured to control to detect the position of the designated area A including the largest number of unmounted points by applying the rectangular designated area A to each of the extracted unmounted points. Has been done. Specifically, the control unit 112 arranges the unmounted points in each of the four corners of the designated area A of the rectangle for each of the extracted unmounted points, so that the most unmounted points are obtained. It is configured to control to detect the position of the included designated area A.
 図11に示す例では、A~Eの5つの未実装点が抽出されている。この場合、まず、Aの未実装点に対して、矩形の指定領域Aが当てはめられる。具体的には、Aの未実装点が矩形の指定領域Aの右下、左下、右上および左上の4つの角の各々に配置された状態での、矩形の指定領域A内の未実装点の数が検出される。Aの未実装点については、Aの未実装点が矩形の指定領域Aの右下の角に配置された場合、矩形の指定領域A内の未実装点の数が3つで最大となる。そして、矩形の指定領域Aの当てはめ処理が、B~Eの未実装点の各々に対しても同様に行われる。この結果、図11に示す例では、Eの未実装点が矩形の指定領域Aの右上の角に配置された場合、矩形の指定領域A内の未実装点の数が4つ(B~Eの4つ)で最大となる。このため、Eの未実装点が矩形の指定領域Aの右上の角に配置された指定領域Aの位置が、最も多く未実装点が含まれる指定領域Aの位置として検出されて設定される。なお、Aの未実装点については、別の指定領域Aが設定される。 In the example shown in FIG. 11, five unmounted points A to E are extracted. In this case, first, the rectangular designated area A is applied to the unmounted point of A. Specifically, the unmounted points in the rectangular designated area A in the state where the unmounted points of A are arranged at each of the four corners of the lower right, lower left, upper right, and upper left of the rectangular designated area A. The number is detected. Regarding the unmounted points of A, when the unmounted points of A are arranged in the lower right corner of the designated area A of the rectangle, the number of unmounted points in the designated area A of the rectangle is three, which is the maximum. Then, the fitting process of the designated area A of the rectangle is similarly performed for each of the unmounted points B to E. As a result, in the example shown in FIG. 11, when the unmounted points of E are arranged in the upper right corner of the rectangular designated area A, the number of unmounted points in the rectangular designated area A is four (B to E). 4) is the maximum. Therefore, the position of the designated area A in which the unmounted points of E are arranged in the upper right corner of the rectangular designated area A is detected and set as the position of the designated area A including the most unmounted points. In addition, another designated area A is set for the unmounted point of A.
(指定領域設定処理)
 次に、図12を参照して、第2実施形態の部品実装装置200による指定領域設定処理をフローチャートに基づいて説明する。なお、フローチャートの各処理は、制御部112により行われる。
(Specified area setting process)
Next, with reference to FIG. 12, the designated area setting process by the component mounting apparatus 200 of the second embodiment will be described with reference to the flowchart. Each process of the flowchart is performed by the control unit 112.
 図12に示すように、まず、ステップS41において、吸着グループ内で未実装の実装位置(未実装点)が抽出(検出)される。 As shown in FIG. 12, first, in step S41, an unmounted mounting position (unmounted point) is extracted (detected) in the adsorption group.
 そして、ステップS42において、抽出した未実装点中に、補正グループの未割付点があるか否かが判断される。すなわち、ステップS42では、抽出した未実装点中に、指定領域Aが設定されていない点があるか否かが判断される。補正グループの未割付点があると判断された場合、ステップS43に進む。 Then, in step S42, it is determined whether or not there is an unassigned point of the correction group among the extracted unimplemented points. That is, in step S42, it is determined whether or not there is a point in which the designated area A is not set among the extracted unmounted points. If it is determined that there is an unallocated point in the correction group, the process proceeds to step S43.
 そして、ステップS43において、補正グループ未割付点で、最も多く未実装点が含まれるように指定領域Aが設定される。そして、ステップS42に進む。その後、抽出した未実装点中に、補正グループ未割付点がなくなるまで、ステップS42および43の処理が繰り返される。 Then, in step S43, the designated area A is set so that the most unmounted points are included in the correction group unallocated points. Then, the process proceeds to step S42. After that, the processes of steps S42 and 43 are repeated until there are no correction group unassigned points in the extracted unmounted points.
 そして、ステップS42において、補正グループの未割付点がないと判断された場合、指定領域設定処理が終了される。 Then, in step S42, when it is determined that there is no unallocated point of the correction group, the designated area setting process is terminated.
 なお、第2実施形態のその他の構成は、上記第1実施形態と同様である。 The other configurations of the second embodiment are the same as those of the first embodiment.
(第2実施形態の効果)
 第2実施形態では、以下のような効果を得ることができる。
(Effect of the second embodiment)
In the second embodiment, the following effects can be obtained.
 第2実施形態では、上記のように、制御部112は、複数の実装位置を含むように設定された指定領域A内において、基板Bに実装された部品Cにより隠れていない位置認識マークFを基板撮像部5による撮像対象として決定するとともに、撮像対象として決定された位置認識マークFの基板撮像部5による撮像結果に基づいて、指定領域A内における実装位置の補正を行うように構成されている。これにより、指定領域A内の比較的狭い範囲において、撮像対象の位置認識マークFを決定することができるので、過度に離れた位置認識マークF同士が撮像対象として決定されることを抑制することができる。その結果、実装位置に比較的近い位置認識マークFの撮像結果に基づいて、実装位置の補正を精度よく行うことができる。 In the second embodiment, as described above, the control unit 112 provides the position recognition mark F which is not hidden by the component C mounted on the board B in the designated area A set to include a plurality of mounting positions. It is configured to be determined as an image pickup target by the substrate image pickup unit 5 and to correct the mounting position in the designated area A based on the image pickup result of the position recognition mark F determined as the image pickup target by the substrate image pickup unit 5. There is. As a result, the position recognition marks F of the imaging target can be determined in a relatively narrow range within the designated area A, so that it is possible to suppress the determination of the position recognition marks F that are excessively distant from each other as the imaging target. Can be done. As a result, the mounting position can be corrected with high accuracy based on the image pickup result of the position recognition mark F relatively close to the mounting position.
 また、第2実施形態では、上記のように、制御部112は、部品Cの基板Bへの実装動作中において、最も多く未実装点が含まれるように、指定領域Aを設定する制御を行うように構成されている。これにより、指定領域A内に多くの未実装点を含めることができるので、指定領域Aを設ける場合にも、基板撮像部5による位置認識マークFの撮像動作の回数が増加することを抑制することができる。 Further, in the second embodiment, as described above, the control unit 112 controls to set the designated area A so that the most unmounted points are included in the mounting operation of the component C on the substrate B. It is configured as follows. As a result, many unmounted points can be included in the designated area A, so that even when the designated area A is provided, it is possible to suppress an increase in the number of imaging operations of the position recognition mark F by the substrate imaging unit 5. be able to.
 なお、第2実施形態のその他の効果は、上記第1実施形態と同様である。 The other effects of the second embodiment are the same as those of the first embodiment.
(変形例)
 なお、今回開示された実施形態は、すべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した実施形態の説明ではなく請求の範囲によって示され、さらに請求の範囲と均等の意味および範囲内でのすべての変更(変形例)が含まれる。
(Modification example)
It should be noted that the embodiments disclosed this time are exemplary in all respects and are not considered to be restrictive. The scope of the present invention is shown by the scope of claims rather than the description of the above-described embodiment, and further includes all modifications (modifications) within the meaning and scope equivalent to the scope of claims.
 たとえば、上記第1および第2実施形態では、いわゆるフリップチップボンダである部品実装装置に本発明が適用される例を示したが、本発明はこれに限られない。本発明はフリップチップボンダ以外の部品実装装置に適用されてもよい。たとえば、本発明は、表面実装用のチップ部品を基板に実装する部品実装装置(いわゆる、表面実装機)に適用されてもよい。 For example, in the first and second embodiments described above, an example in which the present invention is applied to a component mounting device which is a so-called flip chip bonder is shown, but the present invention is not limited to this. The present invention may be applied to a component mounting device other than a flip chip bonder. For example, the present invention may be applied to a component mounting device (so-called surface mounter) for mounting a chip component for surface mounting on a substrate.
 また、上記第1および第2実施形態では、複数の個片基板の各々に1つの部品が実装される例を示したが、本発明はこれに限られない。本発明では、複数の個片基板の各々に複数の部品が実装されてもよい。 Further, in the first and second embodiments described above, an example in which one component is mounted on each of a plurality of individual substrate is shown, but the present invention is not limited to this. In the present invention, a plurality of components may be mounted on each of the plurality of individual substrates.
 また、上記第1および第2実施形態では、リトライ実装動作時だけでなく、通常実装動作時にも、基板に実装された部品により隠れていない位置認識マークを撮像部による撮像対象として決定する制御を行う例を示したが、本発明はこれに限られない。本発明では、リトライ実装動作時のみにおいて、基板に実装された部品により隠れていない位置認識マークを撮像部による撮像対象として決定する制御を行ってもよい。 Further, in the first and second embodiments, the control for determining the position recognition mark that is not hidden by the components mounted on the substrate as the image pickup target by the imaging unit is performed not only during the retry mounting operation but also during the normal mounting operation. Although an example is shown, the present invention is not limited to this. In the present invention, control may be performed to determine the position recognition mark that is not hidden by the components mounted on the substrate as the image pickup target by the image pickup unit only during the retry mounting operation.
 また、上記第1および第2実施形態では、複数の未実装点に対応する複数の位置認識マークのうちから、2つの位置認識マークを撮像部による撮像対象として決定する例を示したが、本発明はこれに限られない。本発明では、複数の未実装点に対応する複数の位置認識マークのうちから、1つまたは3つ以上の位置認識マークを撮像部による撮像対象として決定してもよい。 Further, in the first and second embodiments, an example is shown in which two position recognition marks are determined as imaging targets by the imaging unit from among a plurality of position recognition marks corresponding to a plurality of unmounted points. The invention is not limited to this. In the present invention, one or three or more position recognition marks may be determined as the image pickup target by the imaging unit from among the plurality of position recognition marks corresponding to the plurality of unmounted points.
 また、上記第1および第2実施形態では、複数の未実装点に対応する複数の位置認識マークのうちから、最も離れた2つの位置認識マークを撮像部による撮像対象として決定する例を示したが、本発明はこれに限られない。本発明では、複数の未実装点に対応する複数の位置認識マークのうちから、最も離れた2つの位置認識マーク以外の位置認識マークを撮像部による撮像対象として決定してもよい。 Further, in the first and second embodiments, an example is shown in which the two farthest position recognition marks are determined as the image pickup target by the image pickup unit from the plurality of position recognition marks corresponding to the plurality of unmounted points. However, the present invention is not limited to this. In the present invention, among the plurality of position recognition marks corresponding to the plurality of unmounted points, the position recognition marks other than the two farthest position recognition marks may be determined as the image pickup target by the imaging unit.
 また、上記第1および第2実施形態では、基板が、複数の個片基板を含む基板である例を示したが、本発明はこれに限られない。本発明では、基板が、LED基板のような、複数の同じ部品を繰り返し実装する基板であってもよい。この場合、基板に設けられた、複数の部品の各々の電気回路パターンを、位置認識マークとして用いることが可能である。この場合、部品の基板への実装動作中において、基板に実装された部品により隠れていない位置認識マークとしての電気回路パターンを撮像部による撮像対象として決定するとともに、撮像対象として決定された位置認識マークとしての電気回路パターンの撮像部による撮像結果に基づいて、実装位置の補正を行うことが可能である。 Further, in the first and second embodiments described above, an example is shown in which the substrate is a substrate including a plurality of individual pieces, but the present invention is not limited to this. In the present invention, the substrate may be a substrate on which a plurality of the same components are repeatedly mounted, such as an LED substrate. In this case, it is possible to use the electric circuit pattern of each of the plurality of components provided on the substrate as the position recognition mark. In this case, during the mounting operation of the component on the board, the electric circuit pattern as the position recognition mark not hidden by the component mounted on the board is determined as the image pickup target by the imaging unit, and the position recognition determined as the image pickup target is determined. It is possible to correct the mounting position based on the image pickup result by the image pickup unit of the electric circuit pattern as a mark.
 また、基板が、複数の個片基板を含む基板である場合にも、電気回路パターンを、位置認識マークとして用いてもよい。また、基板がリードフレームである場合に、リードフレームの形状を、位置認識マークとして用いてもよい。 Further, even when the substrate is a substrate including a plurality of individual pieces, the electric circuit pattern may be used as a position recognition mark. Further, when the substrate is a lead frame, the shape of the lead frame may be used as a position recognition mark.
 また、上記第2実施形態では、指定領域により、同じ位置認識マークにより補正できる領域を制限する例を示したが、本発明はこれに限られない。本発明では、たとえば、基板が連結部を介して複数連結されている場合、連結部を超えた位置認識マークを補正に用いないという制限を設けてもよい。たとえば、図13に示す変形例では、基板Bは、複数(3つ)の個片基板B2が互いにミシン目状のスリットが形成され分断可能な連結部B21にて連結されているリードフレームである。複数の個片基板B2の各々は、複数の実装位置を含んでいる。この場合、個片基板B2の複数の実装位置を含むように設定された指定領域A1内において、基板Bに実装された部品により隠れていない位置認識マーク(電気回路パターンなど)を基板撮像部による撮像対象として決定するとともに、撮像対象として決定された位置認識マークの基板撮像部による撮像結果に基づいて、指定領域A1内における実装位置の補正を行う。すなわち、ミシン目状のスリットが形成された連結部B21を超えた位置認識マークを補正に用いずに、この連結部B21を超えない指定領域A1内の位置認識マークを補正に用いる。 Further, in the above-mentioned second embodiment, an example is shown in which the area that can be corrected by the same position recognition mark is limited by the designated area, but the present invention is not limited to this. In the present invention, for example, when a plurality of substrates are connected via a connecting portion, a restriction may be provided that the position recognition mark beyond the connecting portion is not used for correction. For example, in the modified example shown in FIG. 13, the substrate B is a lead frame in which a plurality of (three) individual substrate B2s are connected to each other by a connecting portion B21 in which perforated slits are formed and can be divided. .. Each of the plurality of individual substrate B2 includes a plurality of mounting positions. In this case, in the designated area A1 set to include a plurality of mounting positions of the individual board B2, a position recognition mark (electric circuit pattern, etc.) that is not hidden by the components mounted on the board B is generated by the board image pickup unit. It is determined as an image pickup target, and the mounting position in the designated area A1 is corrected based on the image pickup result by the substrate imaging unit of the position recognition mark determined as the image pickup target. That is, the position recognition mark beyond the connecting portion B21 in which the perforated slit is formed is not used for the correction, and the position recognition mark in the designated area A1 not exceeding the connecting portion B21 is used for the correction.
 また、上記実施形態では、説明の便宜上、制御処理を処理フローに沿って順番に処理を行うフロー駆動型のフローを用いて説明したが、本発明はこれに限られない。本発明では、制御処理を、イベント単位で処理を実行するイベント駆動型(イベントドリブン型)の処理により行ってもよい。この場合、完全なイベント駆動型で行ってもよいし、イベント駆動およびフロー駆動を組み合わせて行ってもよい。 Further, in the above embodiment, for convenience of explanation, the control processing has been described using a flow-driven flow in which the control processing is sequentially performed along the processing flow, but the present invention is not limited to this. In the present invention, the control process may be performed by an event-driven type (event-driven type) process in which the process is executed in event units. In this case, it may be completely event-driven, or it may be a combination of event-driven and flow-driven.
 3a 実装ヘッド
 5 基板撮像部(撮像部)
 12、112 制御部
 100、200 部品実装装置
 A、A1 指定領域
 B 基板
 B1、B2 個片基板
 C 部品
 F 位置認識マーク
3a Mounting head 5 Substrate imaging unit (imaging unit)
12, 112 Control unit 100, 200 Parts mounting device A, A1 Designated area B Board B1, B2 Single board C Parts F Position recognition mark

Claims (10)

  1.  基板に部品を実装する実装ヘッドと、
     前記基板に設けられた位置認識マークを撮像する撮像部と、
     前記部品の前記基板への実装動作中において、前記基板に実装された前記部品により隠れていない前記位置認識マークを前記撮像部による撮像対象として決定するとともに、前記撮像対象として決定された前記位置認識マークの前記撮像部による撮像結果に基づいて、実装位置の補正を行う制御部と、を備える、部品実装装置。
    A mounting head that mounts components on the board,
    An image pickup unit that captures a position recognition mark provided on the substrate, and an image pickup unit.
    During the mounting operation of the component on the substrate, the position recognition mark not hidden by the component mounted on the substrate is determined as an image pickup target by the image pickup unit, and the position recognition determined as the image pickup target is determined. A component mounting device including a control unit that corrects a mounting position based on an image pickup result of the mark by the image pickup unit.
  2.  前記基板は、前記位置認識マークが各々設けられた複数の個片基板を含み、
     前記制御部は、前記部品の前記基板への実装動作中において、未実装点を含む前記個片基板に対応する前記位置認識マークのうちから、前記撮像対象の前記位置認識マークを決定する制御を行うように構成されている、請求項1に記載の部品実装装置。
    The substrate includes a plurality of individual substrates each provided with the position recognition mark.
    The control unit controls to determine the position recognition mark of the image pickup target from the position recognition marks corresponding to the individual board including the unmounted points during the mounting operation of the component on the board. The component mounting device according to claim 1, which is configured to perform the above.
  3.  前記制御部は、少なくとも、エラーによる未実装点への再実装動作を行うリトライ実装動作時に、前記基板に実装された前記部品により隠れていない前記位置認識マークを前記撮像部による前記撮像対象として決定する制御を行うように構成されている、請求項1または2に記載の部品実装装置。 The control unit determines at least the position recognition mark that is not hidden by the component mounted on the board as the image pickup target by the image pickup unit during the retry mounting operation of remounting to an unmounted point due to an error. The component mounting device according to claim 1 or 2, which is configured to perform control.
  4.  前記制御部は、前記リトライ実装動作時だけでなく、通常実装動作時にも、前記基板に実装された前記部品により隠れていない前記位置認識マークを前記撮像部による前記撮像対象として決定する制御を行うように構成されている、請求項3に記載の部品実装装置。 The control unit controls not only during the retry mounting operation but also during the normal mounting operation to determine the position recognition mark that is not hidden by the component mounted on the substrate as the image pickup target by the image pickup unit. The component mounting device according to claim 3, which is configured as described above.
  5.  前記制御部は、複数の未実装点に対応する複数の前記位置認識マークのうちから、2つの前記位置認識マークを前記撮像部による前記撮像対象として決定する制御を行うように構成されている、請求項1~4のいずれか1項に記載の部品実装装置。 The control unit is configured to perform control to determine two of the position recognition marks as the image pickup target by the image pickup unit from among the plurality of position recognition marks corresponding to the plurality of unmounted points. The component mounting device according to any one of claims 1 to 4.
  6.  前記制御部は、前記複数の未実装点に対応する複数の前記位置認識マークのうちから、最も離れた2つの前記位置認識マークを前記撮像部による前記撮像対象として決定する制御を行うように構成されている、請求項5に記載の部品実装装置。 The control unit is configured to perform control to determine the two farthest position recognition marks as the image pickup target by the image pickup unit from among the plurality of position recognition marks corresponding to the plurality of unmounted points. The component mounting device according to claim 5.
  7.  前記制御部は、複数の前記実装位置を含むように設定された指定領域内において、前記基板に実装された前記部品により隠れていない前記位置認識マークを前記撮像部による前記撮像対象として決定するとともに、前記撮像対象として決定された前記位置認識マークの前記撮像部による撮像結果に基づいて、前記指定領域内における前記実装位置の補正を行うように構成されている、請求項1~6のいずれか1項に記載の部品実装装置。 The control unit determines the position recognition mark that is not hidden by the component mounted on the substrate as the image pickup target by the image pickup unit within the designated area set to include the plurality of mounting positions. 1. The component mounting device according to item 1.
  8.  前記制御部は、前記部品の前記基板への実装動作中において、最も多く未実装点が含まれるように、前記指定領域を設定する制御を行うように構成されている、請求項7に記載の部品実装装置。 The seventh aspect of claim 7, wherein the control unit is configured to control setting the designated area so that the most unmounted points are included in the mounting operation of the component on the board. Component mounting device.
  9.  基板に部品を実装するステップと、
     前記基板に設けられた位置認識マークを撮像するステップと、
     前記部品の前記基板への実装動作中において、前記基板に実装された前記部品により隠れていない前記位置認識マークを撮像対象として決定するとともに、前記撮像対象として決定された前記位置認識マークの撮像結果に基づいて、実装位置の補正を行うステップと、を備える、部品実装方法。
    Steps to mount components on the board,
    The step of imaging the position recognition mark provided on the substrate and
    During the mounting operation of the component on the substrate, the position recognition mark not hidden by the component mounted on the substrate is determined as an imaging target, and the imaging result of the position recognition mark determined as the imaging target is determined. A component mounting method comprising a step of correcting the mounting position based on.
  10.  前記基板は、前記位置認識マークが各々設けられた複数の個片基板を含み、
     前記実装位置の補正を行うステップは、前記部品の前記基板への実装動作中において、未実装点を含む前記個片基板に対応する前記位置認識マークのうちから、前記位置認識マークを前記撮像対象として決定するステップを含む、請求項9に記載の部品実装方法。
    The substrate includes a plurality of individual substrates each provided with the position recognition mark.
    In the step of correcting the mounting position, during the mounting operation of the component on the board, the position recognition mark is captured by the image pickup target from the position recognition marks corresponding to the individual board including the unmounted points. 9. The component mounting method according to claim 9, which comprises a step of determining as.
PCT/JP2020/048044 2020-12-22 2020-12-22 Component mounting apparatus and component mounting method WO2022137363A1 (en)

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JPH04340799A (en) * 1991-05-17 1992-11-27 Mitsubishi Electric Corp Printed board and position corrector thereof
JP2004071625A (en) * 2002-08-01 2004-03-04 Matsushita Electric Ind Co Ltd Device and method for recognizing part mounting mark
JP2009170516A (en) * 2008-01-11 2009-07-30 Yamaha Motor Co Ltd Surface mounting machine, and electronic component mounting method
JP2011029254A (en) * 2009-07-22 2011-02-10 Panasonic Corp Electronic component mounting method
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