JP2009016673A5 - - Google Patents

Description

Component suction position correction method and component transfer device

  The present invention relates to a method for correcting a suction position when a component is sucked and transferred by a movable transfer head from a component supply unit in which electronic components are arranged, and is placed on a placement unit, and the same correction method. The present invention relates to a component transfer apparatus that can be implemented.

  Conventionally, a transfer head (also referred to as a suction head or a head unit) for component transfer supported so as to be movable is used to suck and remove the electronic component from the component supply unit where the electronic component is arranged, and this component is removed at a predetermined distance. 2. Description of the Related Art A component transfer device (for example, a surface mounter) that is placed on a remote placement unit is known.

  For example, Patent Document 1 discloses a surface mounter that sucks a component with a head unit from tape feeders arranged in a large number in a component supply unit, and mounts the component on a substrate fixed at a distant position. This surface mounter calibrates the mounting position by the head unit prior to normal mounting operation.

  The calibration is performed by setting a dummy substrate on which a large number of marks are written in a matrix at a substrate fixing position. Since the details are described in the patent document, briefly describing, the calibration is performed by imaging each mark on the dummy substrate by the imaging means mounted on the head unit, and the detection position and the theoretical value of each mark. An error from the position is obtained in advance. In a normal mounting operation, the mounting position of the component by the head unit is corrected based on the error.

According to this apparatus, even if the head unit support system (for example, each part of the XY table) or the drive system (for example, the ball screw shaft) undergoes non-uniform deformation or deformation that varies depending on the position of the head unit, The error of the mounting position caused by the deformation can be corrected, and the deviation of the actual mounting position from the target mounting position can be suppressed.
JP 2001-244696 A

  However, the apparatus of Patent Document 1 effectively corrects the error at the mounting position, but does not give any special consideration to the head unit suction position shift (drive error) in the component supply unit. For this reason, there has been a problem that a deviation occurs between the control suction position and the actual suction position, resulting in a shift in the mounting position (phase position).

  Further, the suction position imaging means that is driven independently of the transfer head allows the parts to be moved before the transfer head is sucked (while the transfer head is performing a transfer operation on a mounting portion such as a substrate). In the case of capturing an image and recognizing the next suction position in advance, the suction position may be shifted as a result of the recognition position being shifted.

  The present invention has been made in view of the above circumstances, and a suction position of a component that can suppress a shift in the suction position of the transfer head in a component transfer device in which an electronic component is arranged in a component supply unit. It is an object of the present invention to provide a correction method and its component transfer apparatus.

In order to solve the above-described problems, the component suction position correction method of the present invention sucks and removes an electronic component from a component supply unit on which a wafer including a plurality of electronic components is arranged by a transfer head for component transfer. In the component transfer apparatus for mounting the electronic component on a mounting portion separated by a predetermined distance, a correction method for correcting the suction position with respect to the driving error of the transfer head, the wafer of the component supply unit by adsorbing the electronic component prior to normal transfer operation of transferring the above described portion from the majority or plurality of mark positional relationship of the known position to and mutually entire frequency region in which the wafer is placed Is set in the component supply section, and in this state, the transfer head is moved, and the marks are attached to the transfer head and moved together with the head-side imaging means. Image them Each position is detected, and an error between each detected position and the theoretical position of each mark is obtained, and the suction position by the transfer head is determined at the time of component suction during the normal transfer operation. Correction is performed based on the error.

According to another aspect of the present invention, there is provided a component transfer apparatus that sucks and removes an electronic component from a component supply unit on which a wafer including a plurality of electronic components is arranged by using a transfer head for component transfer. Is a component transfer apparatus for mounting a wafer at a predetermined distance, a head-side imaging means attached to the transfer head and moving integrally therewith, and most of the area where the wafer is disposed or in a state where the position is and the mutual positional relationship distributed to all frequency mark marked a known plurality of mark plate is set to the component supply section, the head-side imaging while moving the transfer head Driving the transfer head to selectively execute a preparatory operation for imaging each mark by means and a normal transfer operation for picking up an electronic component from the component supply unit and transferring it to the placement unit. Control means for controlling the device, and Correction data creating means for creating head position correction data for correcting an error between the position of each mark imaged by the head-side imaging means and the theoretical position of each mark in the preparatory operation, and the control The means corrects the suction position by the transfer head based on the head position correction data as control for component suction during the normal transfer operation.

  According to these methods and apparatuses, the error (shift of the coordinate system of the driving device with respect to the reference coordinate system formed by each mark on the mark plate) generated when the transfer head moves in the vicinity of the component supply unit is finely detailed. Can be requested. Therefore, even when non-uniform deformation occurs in the support system (for example, each part of the XY table) of the transfer head and the drive system (for example, the ball screw shaft), or deformation that varies depending on the position of the transfer head occurs. The error can be corrected with high accuracy, and the adsorption position shift can be suppressed.

Also in the component transfer apparatus of the present invention, it is movable independently of the upper Symbol transfer head, comprising a push-up hands stage push up the electronic component to be adsorbed in the component supply unit from below, the head-side imaging means , imaging a site related to the coordinate system of the push-up means after the preparation operation, the correction data generation means, the coordinate system correlation between the placing head and the push-up means have groups Dzu on the imaging data seeking to create a data indicating the correlation, the control means as a control for the normal transfer operation when a component suction, the movement position of the transfer head have groups Dzu to the head position correction data corrected, and further have groups Dzu to the correlation data to correct the movement position of the push-up means, the placing head and the thrust on these corrected position contrast It moves the lower section, so as to control each drive of the placing head and the push-up means so as to suck the electronic component by the placing head while pushing up the electronic component by the push-up means at the component position Also good.

Thus, when taking out the component supply unit or et electronic components, since the push-up means pushes up the part to be attracted, it is possible to transfer head is readily adsorb the component.

Further, in the preparatory operation, the correlation between the coordinate system of the transfer head and the push-up means is obtained in advance, and the coordinate deviation between the two is corrected by the correlation data, so the actual electronic component push-up position and the transfer head The suction position can be matched with high accuracy. That is, a more appropriate adsorption operation can be performed.

  Note that the imaging by the head-side imaging means for obtaining the correlation data may be performed in advance by imaging a fixed object (for example, about 1 to 3 recognition marks) whose positional relationship with the thrusting means is known in advance. An object that moves integrally with the means (for example, a push-up pin) may be picked up at a plurality of dispersed positions within a predetermined range (a wider range is preferable among the push-up ranges) while moving the push-up means. . In this way, it is possible to obtain correlation data in a state in which the drive error of the push-up means (error due to deformation that is not uniform in the support system or drive system of the push-up means or deformation that changes depending on the position of the push-up means) is corrected. it can.

Further, in the component transfer apparatus of the present invention, the component transfer device includes a suction position imaging unit that is independently driven separately from the transfer head and images the electronic component of the component supply unit. While the mark plate is set in the component supply unit, each of the marks is imaged by the suction position imaging means while moving the suction position imaging means, and the correction data creating means is controlled by the suction position imaging means. Component imaging position correction data for correcting an error between the position of each imaged mark and the theoretical position of each mark is created, and in the normal transfer operation, the control means recognizing the component position have groups Dzu the image data and the component imaging position correction data imaged by means and the suction position to the recognized component position by the placing head It may be performed a control for the component suction.

In this way, before the transfer head is picked up (while the transfer head is performing a transfer operation on the mounting portion such as the substrate), the component position imaging means picks up the next electronic component to be picked up. Thus, the next suction position can be recognized in advance. Therefore, transfer efficiency can be increased.

  Further, in the preparatory operation, the component imaging position correction data is created using the mark plate as in the case of the transfer head, and the recognition position of the component (the position recognized as the position for attracting the transfer head) is corrected based thereon. It can be performed. That is, the error (the shift of the coordinate system of the drive device of the suction position imaging means with respect to the reference coordinate system formed by each mark on the mark plate) generated when the suction position imaging means moves in the vicinity of the component supply unit is determined in detail. Even if the support system or drive system of the suction position imaging means is unevenly deformed or changes depending on the position of the suction position imaging means, the error is corrected and recognized with high accuracy. Misalignment can be suppressed.

  As a result, the component recognition position by the suction position imaging means and the suction position by the transfer head can be matched with high accuracy using the mark on the mark plate as an intermediate, and the suction position deviation can be further suppressed.

  In particular, in the case where the push-up means is provided and the correlation data is created, the three members including the push-up position by the push-up means can be matched with high accuracy, and the suction position shift can be further suppressed and more appropriate. An adsorption operation can be performed.

The component transfer apparatus according to another aspect of the present invention, taken out from the component supply unit on which the wafer is disposed which includes a plurality of electronic components, to suck the electronic component by part article transfer for the transfer head of the A component transfer apparatus for mounting an electronic component on a mounting portion separated by a predetermined distance, wherein the suction position imaging means is independently driven separately from the transfer head and images the electronic component of the component supply unit, and state mark parts above the wafer supply portion is positioned distributed in most or all frequency regions arranged and mutual positional relationship is marked with a plurality of known mark plate is set to the component supply unit Thus, a preparatory operation for imaging each mark by the suction position imaging means while moving the suction position imaging means, and a normal transfer for picking up an electronic component from the component supply unit and transferring it to the placement unit The above transfer to selectively execute the operation And a control means for controlling each drive device of the suction position imaging means, and an error between the position of each mark imaged by the suction position imaging means and the theoretical position of each mark in the preparation operation. Correction data creating means for creating component imaging position correction data for performing the image capturing, and the control means in the normal transfer operation, the image data captured by the suction position imaging means and the component imaging position correction data preparative to recognize the part position have group Dzu, the recognized component position and performs control for component suction by the suction position by the transfer head.

According to this apparatus, before the transfer head is picked up (while the transfer head is performing a transfer operation on the mounting portion such as the substrate), the component position image pickup means picks up the next electronic component to be picked up. Thus, the next suction position can be recognized in advance. Therefore, transfer efficiency can be increased.

  Further, in the preparatory operation, the component imaging position correction data can be created using the mark plate, and the recognition position of the component can be corrected based thereon. That is, the error (the shift of the coordinate system of the drive device of the suction position imaging means with respect to the reference coordinate system formed by each mark on the mark plate) generated when the suction position imaging means moves in the vicinity of the component supply unit is determined in detail. Even if non-uniform deformation occurs in the support system or drive system of the suction position imaging means or deformation that changes depending on the position of the transfer head, the error is corrected with high accuracy and the recognition position is shifted. Can be suppressed. As a result, the adsorption position shift can be suppressed.

In the component transfer apparatus of the above another aspect, movable independently of the upper Symbol transfer head, comprising a push-up hands stage push up the electronic component to be adsorbed in the component supply unit from below, the suction position imaging means , imaging a site related to the coordinate system of the push-up means after the preparation operation, the correction data generation means may have groups Dzu on the imaging data coordinate system correlation between the suction position imaging means and said push-up means the seeking to create a data indicating the correlation, the control means as a control for the normal transfer operation when a component suction, the component imaging position correction data based on Dzu have been the suction position imaging means correcting the moving position of, and further have groups Dzu to the correlation data to correct the movement position of the push-up means, said suction position imaging these corrected position contrast Moves the stage and the push-up means, the after imaging at the component location by the suction position imaging means, the suction position to suck the electronic component by the placing head while pushing up the electronic component by the push-up means You may make it control each drive device of an imaging means, the said pushing-up means, and the said transfer head.

In this way, when the electronic component in the wafer state is taken out from the component supply unit, the push-up means pushes up the electronic component to be sucked, so that the transfer head can suck the component easily.

In the preparatory operation, the correlation between the coordinate system of the suction position imaging means and the pushing-up means is obtained in advance, and the coordinate deviation between the two is corrected by the correlation data. The push-up position of the electronic component can be matched with high accuracy. That is, a more appropriate push-up operation can be performed.

  In the imaging by the suction position imaging means for obtaining the correlation data, a fixed object (for example, about 1 to 3 recognition marks) whose positional relation to the push-up means is known in advance may be picked up. An object that moves integrally with the means (for example, a push-up pin) may be picked up at a plurality of dispersed positions within a predetermined range (a wider range is preferable among the push-up ranges) while moving the push-up means. . In this way, it is possible to obtain correlation data in a state in which the drive error of the push-up means (error due to deformation that is not uniform in the support system or drive system of the push-up means or deformation that changes depending on the position of the push-up means) is corrected. it can.

In the component transfer apparatus of the above another aspect, attached to the transfer head, a head-side imaging means for imaging an electronic component of the component supply unit moves integrally with the transfer head, the preparation operation The control means picks up the marks with the head-side image pickup means while moving the transfer head in a state where the mark plate is set in the component supply unit, and the correction data generating means The head position correction data for correcting the error between the position of each mark imaged by the head-side imaging means and the theoretical position of each mark is created, and the component pick-up time during the normal transfer operation is created. As a control for this, the control means may correct the suction position by the transfer head based on the head position correction data.

  In this way, in the preparation operation, the head position correction data can be created using the mark plate as in the case of the suction position imaging means, and the suction position of the component can be corrected based on the head position correction data. That is, it is possible to determine in detail the error that occurs when the transfer head moves in the vicinity of the component supply unit (deviation of the coordinate system of the transfer head drive device with respect to the reference coordinate system formed by each mark on the mark plate). Even if non-uniform deformation occurs in the support system or drive system of the transfer head or deformation that changes depending on the position of the transfer head, the error is corrected with high accuracy and the recognition position deviation is suppressed. be able to.

  As a result, the component recognition position by the suction position imaging means and the suction position by the transfer head can be matched with high accuracy using the mark on the mark plate as an intermediate, and the suction position deviation can be further suppressed.

In particular, in the case where the push-up means is provided and the correlation data is created, the three members including the push-up position by the push-up means can be matched with high accuracy, and the suction position shift can be further suppressed and more appropriate. An adsorption operation can be performed .

In the component transfer apparatus of the above SL one side or the further aspect, the control means, out of the placing head or the suction position imaging device, a driving device towards the imaging at least the respective marks in the orthogonal coordinate system The drive control is performed, and the marks may be arranged on the mark plate in a matrix along the XY axes of the orthogonal coordinate system.

  If it does in this way, each said correction data can be created with a simple XY coordinate system, and control can be facilitated. Further, since the marks are dispersed with high uniformity, the correction accuracy can be made uniform.

  In the component transfer device on the one side surface or the other side surface, the component transfer device is a component mounting device that transports the component supplied from the component supply unit by the transfer head and mounts it on the substrate. Or when the said component transfer apparatus is a component test apparatus which conveys the components supplied from the said component supply part by the said transfer head, and mounts | wears with the test | inspection socket for a test | inspection, it can apply suitably. .

  As described above, according to the present invention, in the component transfer apparatus in which the electronic component is arranged in the component supply unit, it is possible to suppress the displacement of the suction position of the transfer head with high accuracy. As a result, it is possible to effectively prevent the occurrence of a component transfer error due to the suction position shift.

  FIG. 1 is a plan view schematically showing a component mounting apparatus 1 according to an embodiment of the present invention. The component mounting apparatus 1 shown in the figure includes a base 2, a conveyor 3 which is installed on the base 2 and constitutes a transfer line for the substrate P, and chip components 7a, 7a ... (2 A component supply unit 5 in which electronic components arranged in a two-dimensional manner) are arranged, and a transfer head 4 that sucks and conveys the chip component 7a supplied from the component supply unit 5 and mounts it on the substrate P. I have.

  The conveyor 3 is installed on the base 2 so as to extend in the X-axis direction (conveyance direction of the substrate P), conveys the substrate P from the upstream side (−X side), and performs a predetermined mounting work position (not shown). The substrate P is held, and the substrate P is unloaded to the downstream side (+ X side) of the mounting operation position after the mounting operation on the substrate P is completed. The conveyor 3 is provided with an unillustrated clamping mechanism for holding the substrate P at the mounting work position.

  A wafer supply device 6 is installed in the component supply unit 5. In this wafer supply device 6, an assembly of a large number of chip parts 7 a, 7 a... Formed by dicing a wafer 7 made of a disk-shaped silicon wafer into a grid pattern is used as a wafer holding frame (wafer holding means) 8. It is configured to be supplied in a state of being stuck on the held wafer sheet 8a.

  Specifically, the wafer supply device 6 includes a wafer storage elevator 9 that stores the wafer sheet 8a to which the wafer 7 is attached in a state where the wafer sheet 8a is held in the wafer holding frame 8, and a front side of the wafer storage elevator 9. A wafer stage 10 installed on the base 2 located on the (−Y side), and a drawer unit comprising a conveyor 11 and the like for pulling out the wafer holding frame 8 from the wafer storage elevator 9 onto the wafer stage 10. ing.

  The transfer head 4 is supported to be movable in the X-axis direction and the Y-axis direction, and is held above the wafer 7 positioned on the wafer stage 10 of the component supply unit 5 and at the mounting work position. It is configured to be able to move freely over the substrate P.

  That is, on the base 2, a pair of fixed rails 13 extending in the Y-axis direction and a ball screw shaft 15 that is rotationally driven by the first Y-axis servomotor 14 are disposed to support the transfer head 4. A support frame 16 is supported so as to be movable in the Y-axis direction along the fixed rail 13, and a nut portion 17 provided inside the support frame 16 is screwed onto the ball screw shaft 15. Yes. The support frame 16 is provided with a guide member (not shown) extending in the X-axis direction and a ball screw shaft 19 that is rotationally driven by a first X-axis servomotor 18. A nut portion (not shown) provided inside the transfer head 4 is screwed onto the ball screw shaft 19 while being supported so as to be movable in the X-axis direction along the member. Then, when the first Y-axis servomotor 14 is operated and the ball screw shaft 15 is rotationally driven, the support frame 16 moves in the Y-axis direction integrally with the transfer head 4, and the first X-axis servomotor 18. When the ball screw shaft 19 is driven to rotate, the transfer head 4 is configured to move in the X-axis direction with respect to the support frame 16.

  The first X-axis servomotor 18 and the ball screw shaft 19, the first Y-axis servomotor 14 and the ball screw shaft 15 constitute a transfer head drive device that moves the transfer head 4 in the X and Y directions.

  As shown in the block diagram of FIG. 3, the first X-axis servo motor 18 and the first Y-axis servo motor 14 are provided with position detection means 18a and 14a each composed of an encoder or the like, and these means 18a and 14a. The theoretical position of the transfer head 4 is recognized based on the detected value.

  As shown in FIG. 1, the transfer head 4 has a plurality of (three in the illustrated example) nozzle units 30 for sucking individual chip components 7a from the wafer 7 on the wafer stage 10. . Each of these nozzle units 30 has a hollow nozzle member (not shown) at the lower end thereof, and from the negative pressure supply means (not shown) such as a vacuum pump to the tip of the nozzle member at the time of component adsorption. A negative pressure is supplied, and the chip component 7a is attracted to the nozzle member by a suction force generated by the negative pressure.

  The nozzle unit 30 is attached to the main body of the transfer head 4 so as to be movable in the vertical direction (Z-axis direction) and rotatable about the nozzle central axis (R-axis). It is configured to be driven in each direction by an axis servo motor and an R axis servo motor.

  The transfer head 4 configured as described above has a substrate recognition camera 31 (head-side imaging means) for recognizing a fiducial mark (not shown) for position recognition attached to the upper surface of the substrate P. It is attached. Specifically, the board recognition camera 31 moves to the upper side of the fiducial mark together with the transfer head 4 at a predetermined timing after the board P is transported to the mounting work position by the conveyor 3 and images it. By doing so, an accurate position of the substrate P is specified.

  On the other hand, a suction position recognition camera 32 (suction position imaging) for imaging each chip component 7a of the wafer 7 positioned on the wafer stage 10 and specifying its accurate position above the component supply unit 5. Means). The suction position recognition camera 32 is supported by the same mechanism as the transfer head 4 so as to be movable in the X and Y axis directions.

  That is, the suction position recognition camera 32 is supported by a support frame 36 that is movable along a pair of guide rails 33 extending along the Y-axis direction via the camera mounting portion 32a. A ball screw shaft 35 that is screwed into a nut portion 37 provided on the shaft is driven to rotate by a second Y-axis servomotor 34 so that the ball screw shaft 35 moves in the Y-axis direction integrally with the support frame 36. . The support frame 36 is provided with a ball screw shaft 39 that is screwed with a nut portion (not shown) provided in the camera mounting portion 32a. The ball screw shaft 39 is a second X-axis servo. The suction position recognition camera 32 is configured to move in the X-axis direction by being rotationally driven by a motor 38.

  The second X-axis servo motor 38, the ball screw shaft 39, the second Y-axis servo motor 34, and the ball screw shaft 35 constitute a suction position recognition camera driving device that moves the suction position recognition camera 32 in the X and Y directions. .

  As shown in the block diagram of FIG. 3, the second X-axis servo motor 38 and the second Y-axis servo motor 34 include position detecting means comprising an encoder or the like, similar to the servo motors 18 and 14 for driving the transfer head. 38a and 34a are provided, respectively, and the theoretical position of the suction position recognition camera 32 is recognized based on the detection values of these means 38a and 34a.

  Further, a push-up unit 40 (push-up means) is provided below the wafer stage 10 in the component supply unit 5 to push up the chip component 7a to be sucked when the component is picked up by the transfer head 4 from below. The push-up unit 40 is supported on the base 2 so as to be movable in the X-axis direction and the Y-axis direction, and is configured to move over a range corresponding to the wafer stage 10 in the component supply unit 5. .

  That is, the push-up unit 40 is attached to a support frame 42 that is movable along a pair of guide rails 41 extending in the Y-axis direction, as indicated by a broken line in FIG. 1 and also in a schematic perspective view of FIG. It is supported so as to be movable in the axial direction. Then, the ball screw shaft 43 that is screwed into a nut portion (not shown) provided inside the support frame 42 is rotationally driven by a third Y-axis servo motor 44, so that the push-up unit 40 is connected to the support frame 42. Moves in the Y-axis direction as a unit. The support frame 42 is provided with a ball screw shaft 45 that is screwed with a nut portion (not shown) provided inside the push-up unit 40. The ball screw shaft 45 is a third X-axis servomotor 46. The push-up unit 40 is configured to move in the X-axis direction by being driven by the rotation.

  The third X-axis servo motor 46, the ball screw shaft 45, the third Y-axis servo motor 44, and the ball screw shaft 43 constitute a push-up unit driving device that moves the push-up unit 40 in the X and Y directions.

  As shown in the block diagram of FIG. 3, the third X-axis servomotor 46 and the third Y-axis servomotor 44 are provided with position detection means 46a and 44a, each of which is an encoder, and these means 46a and 44a. Based on the detected value, the position of the push-up unit 40 in the coordinate system of the push-up unit driving device is obtained.

  The push-up unit 40 includes a push-up pin 47 and a pin lifting / lowering mechanism that moves the push-up pin 47 up and down. At the time of picking up the components by the transfer head 4, the push-up unit 40 is moved to a position corresponding to the transfer head 4 by driving the push-up unit driving device, and the push-up pins 47 are raised by driving the pin lifting mechanism. The chip component 7a is pushed up through 8a.

  Next, the control system of the component mounting apparatus 1 configured as described above will be described with reference to the block diagram of FIG.

  The component mounting apparatus 1 includes a control unit 50 including a CPU, various memories, an HDD, and the like. The control unit 50 includes the servo motors 14, 18, 34, 38, 44, 46, a board recognition camera. 31, the suction position recognition camera 32, and the like are electrically connected to each other, so that the operation of each part is controlled by the control unit 50 in an integrated manner.

  The control unit 50 controls the driving of the servo motors 14, 18, 34, 38, 44, 46, and the position detecting means 14a, 18a, 34a, 38a, 44a, 46a attached to the motors. An axis control unit 52 that receives a detection signal transmitted from the image processing unit 53, an image processing unit 53 that receives imaging data transmitted from the substrate recognition camera 31 and the suction position recognition camera 32 and performs predetermined image processing, and a mounting program It has a storage unit 54 that stores various programs and various data, and a main calculation unit 51 that performs overall control of these units 52 to 54 and executes various calculation processes.

  Such a control unit 50 is mounted in advance to drive the servo motors 14, 18, 34, 38, 44, 46, and to perform imaging operations by the substrate recognition camera 31 and the suction position recognition camera 32. By controlling based on the program, the transfer head 4 performs a series of operations such as suction and transfer of the chip component 7a, and the substrate recognition camera 31 images the substrate P before and during the operation. In addition, the chip position 7a is imaged by the suction position recognition camera 32 and the like.

  The main calculation unit 51 of the control unit 50 moves the transfer head 4 and the push-up unit 40 to the component positions detected based on the imaging by the suction position recognition camera 32 at the time of component suction at the time of mounting. Control means 55 for controlling the suction position recognition camera 32, the transfer head 4, and each drive unit of the push-up unit 40 so as to suck the parts by the transfer head 4 while pushing the parts up by the push-up unit 40, and this control It functionally includes correction data creating means 56 for creating data for correcting the control by means 55. Specifically, the correction data creating unit 56 creates first correction data, second correction data, and correlation data.

  The first correction data (head position correction data) is a data file of correction values for the shift of the coordinate system of the transfer head driving device with respect to the reference coordinate system. The second correction data (component imaging position correction data) is a data file of correction values corresponding to the deviation of the coordinate system of the suction position recognition camera driving device with respect to the reference coordinate system. The correlation data indicates a data file of a correction value for a deviation between the coordinate system of the transfer head drive device and the coordinate system of the push-up unit drive device, that is, the correlation between the coordinate systems of the transfer head 4 and the push-up unit 40. It is data.

  When creating the first and second correction data, the mark plate 60 shown in FIG. 4 is used. The component mounting apparatus 1 can detachably set a mark plate 60 on the wafer stage 10 in place of the wafer holding frame 8. This mark plate 60 is obtained by marking a large number of marks M on a rectangular flat glass plate at predetermined intervals in the X and Y directions (in a matrix). In the present embodiment, (P1, P2... Pn): A mark M with n = 81 is written. The area where the mark M is marked with the mark plate 60 set covers the entire area where the wafer 7 is arranged (part arrangement area indicated by a broken line).

  The mutual positional relationship between the marks M is accurately measured in advance and known. Accordingly, by recognizing the position of the reference point (for example, P1) and the entire inclination and scale deviation of the mark M, the theoretical positions of all the marks M can be known. A coordinate system set based on the theoretical position is a reference coordinate system.

  Next, specific contents of the processing of the control means 55 and the correction data creation means 56 will be described with reference to FIGS.

  FIG. 5 is a schematic flowchart of a process for creating the first and second correction data by the correction data creating means 56. This process is performed as a preparatory operation before component mounting, such as when the operation of the mounting apparatus 1 is started. Further, this process is performed by setting a mark plate 60 in place of the wafer holding frame 8 on the wafer stage 10 as shown in FIG.

  Since the flowchart for creating the first correction data and the flowchart for creating the second correction data are substantially the same, it is common to both in the following description unless otherwise specified.

  When this process is started, the control unit 50 first sets the substrate recognition camera 31 (at the suction position recognition camera 32 in the case of the second correction data) to the target position of the mark M (N = 1) at the P1 position. Move. The mark M is imaged by the substrate recognition camera 31 (or the suction position recognition camera 32), and the position is recognized (step S2).

  Subsequently, the substrate recognition camera 31 (or the suction position recognition camera 32) is moved to the target position of the mark M (N = n) at the position Pn diagonal to the reference position P1, and the position of the mark M is imaged. Recognize (step S3).

  Next, after correcting the inclination and scaling of the coordinate system of the transfer head driving device (the suction position recognition camera driving device in the case of the second correction data) based on the recognition results of the two points, the substrate recognition camera 31 (or suction) is corrected. The position recognition camera 32) is moved to a position of N = 1 (position P1) (step S4), and an image is taken so that the mark M is located at the center of the camera, and recognition is performed (step S5). And the recognition result (coordinate position) is preserve | saved in the memory | storage part 54 (step S9).

  Next, the substrate recognition camera 31 (or the suction position recognition camera 32) is moved to the N + 1 point (next point) after the two-point correction performed in step S4, and thereafter the mark recognition (step S5, S6) is performed. S8) and storing the recognition result (step S9).

  Next, it is determined whether or not recognition has been completed for all points (all of the points P1, P2,... Pn shown in FIG. 4) (step S10), and if not completed, the processing of steps S7 to S9 is performed. repeat.

  When the recognition is completed for all points, a correction value corresponding to the deviation of the transfer head driving device (or the suction position recognition camera driving device) from the coordinate system with respect to the reference coordinate system is calculated from the data stored in the storage unit 54. (Step S11). In this case, at each of the points P1, P2,... Pn, the obtained correction value itself is used as a correction value, and at other parts, the correction value is obtained by interpolation calculation.

  In this manner, by mapping the correction values at a large number of matrix locations in the area covering the entire area of the wafer 7, a data file of first (or second) correction value data is created (step S12).

  FIG. 6 is a schematic flowchart of processing for creating correlation data by the correction data creating means 56. This process is performed as a preparatory operation before component mounting, such as when the operation of the mounting apparatus 1 is started. This process is performed with the wafer holding frame 8 and the mark plate 60 removed from the wafer stage 10.

  The outline of this flowchart corresponds to a plurality of points (Q1, Q2... Qm: P1... Pn of the mark plate 60 set in a matrix, but the interval and number are the same or different. The board recognition camera 31 and the push-up unit 40 are moved to each other, and a specific point of the push-up unit 40 is imaged by the board recognition camera 31 at each point. In this embodiment, the push-up pin 47 is imaged. Based on this imaging, the deviation between the coordinate system of the transfer head driving device and the coordinate system of the push-up unit driving device is examined, and the correlation data is created from the deviation at each point.

  Specifically, the control unit 50 first moves the push-up unit 40 to the vicinity of the minus limit (the end on the minus side in the X direction and the minus side in the Y direction) of the movable range (step S21). Subsequently, the transfer head driving device is controlled so that the substrate recognition camera 31 provided on the transfer head 4 is moved to the position of the push-up pin 47, and this position is taught (step S22). At this position, the board recognition camera 31 captures and recognizes the push-up pin 47 (step S23).

  Next, the push-up unit 40 is moved to the vicinity of the plus limit (the X direction plus side end and the Y direction plus side end) of the movable range (step S24), and then the substrate recognition camera 31 is moved by the moving distance of the push-up unit 40. The board is moved (step S25), and the board recognition camera 31 captures and recognizes the push-up pin 47 at this position (step S26).

  Next, the substrate recognition camera 31 is moved to the position of N = 1 (first point) after correcting the inclination and scaling of the coordinate system of the transfer head driving device based on the recognition result of the two points (step S27). Then, the push-up unit 40 is moved to the target position of N = 1 (step S28). At this position, the board recognition camera 31 captures and recognizes the push-up pin 47 (step S29).

  Here, if there is a deviation between the coordinate system of the transfer head drive device and the coordinate system of the push-up unit drive device, the push-up pin 47 is displaced from the center of the substrate recognition camera 31, so that the push-up pin is based on the recognition result. 47 is moved to the center position of the camera (step S30). Then, a difference between the target position and the current position is obtained and stored in the storage unit 54 (step S31).

  The difference between the target position and the current position is that when the driving devices are controlled to move the push-up pin 47 and the board recognition camera 31 to the same point, the push-up pin 47 and the board recognition due to the deviation of both coordinate systems. This corresponds to a positional deviation from the camera 31.

  Next, the board recognition camera 31 is moved to the position of N + 1 (next point) (step S32), and then the push-up unit 40 is moved to the target position of N + 1 (step S33). Imaging and recognition of the push-up pin 47 are performed (step S34). Further, based on the recognition result, the push-up pin 47 is moved to the position of the camera center (step S35). Then, the difference between the target position and the current position is obtained and stored in the storage unit 54 (step S36).

  Next, it is determined whether or not recognition has been completed for all points (Q1, Q2,..., Qm) (step S37), and if not completed, the processing of steps S32 to S36 is repeated.

  When the recognition is completed for all points, a correction value corresponding to the deviation between the coordinate system of the transfer head drive device and the coordinate system of the push-up unit drive device is calculated from the data stored in the storage unit 54 (step S38). In this case, at each of the points Q1, Q2,... Qm, the difference between the target position and the current position is used as a correction value, and at other parts, the correction value is obtained by interpolation calculation.

  In this manner, a correlation data file is created by mapping correction values at a number of locations corresponding to the chip component 7a of the wafer 7 (step S39).

  The above is the calibration performed as the preparation operation of the component mounting apparatus 1. Next, a normal mounting operation (transfer operation) performed based on this calibration will be described.

  FIG. 7 is a flowchart showing processing of the control means 55 in normal actual operation. When this processing is performed, the wafer holding frame 8 that holds the wafer sheet 8a to which the wafer 7 is adhered is set on the wafer stage 10 so that components can be taken out.

  When this process is started, the control unit 50 first performs control to operate the conveyor 3 to carry the substrate P to the mounting work position shown in FIG. 1 (step S51). Next, the substrate recognition camera 31 is moved above the substrate P together with the transfer head 4, and the position recognition fiducial mark attached to the upper surface of the substrate P is imaged by the substrate recognition camera 31. Control for recognizing the position of the substrate P positioned at the mounting work position is executed (step S52).

  Next, the control unit 50 moves the suction position recognition camera 32 above the wafer stage 10 of the component supply unit 5, and among the many chip components 7 a, 7 a... Included in the wafer 7 on the wafer stage 10, Control for recognizing the position of the part to be suctioned is performed by imaging the chip part 7a to be picked up by the picking position recognition camera 32 (step S53).

  When the position of the suction target part is recognized, the control unit 50 obtains a correction value at the position of the suction target part from the first and second correction data created in the flowchart shown in FIG. Then, the transfer head 4 is moved to the position of the suction planned component (step S54). Specifically, the first correction data is such that the suction position corrected by the suction position recognition camera 32 is recognized from the second correction data, and the transfer head 4 (nozzle unit 30 thereof) is positioned at the corrected suction position. The transfer head 4 is moved taking into account (counting back).

  Subsequently, a correction value at the position of the part to be picked up is obtained from the data file of the correlation data created in the flowchart shown in FIG. 6, and the push-up unit 40 is moved to the position of the part to be picked up in consideration of the correction value ( Step S55). Thereby, the transfer head 4 (nozzle unit 30 thereof) and the push-up unit 40 (push-up pin thereof) face each other in a state where the positional deviation is corrected.

  When the transfer head 4 and the push-up unit 40 are moved to the suction position in this way, the control unit 50 lifts the push-up pin 47 of the push-up unit 40 to push up the component, and the nozzle unit 30 of the transfer head 4 is moved up. Control is performed to lower the chip component 7a by the nozzle unit 30 (step S56).

  Next, the control unit 50 moves the transfer head 4 above the mounting location on the substrate P (step S57) and lowers the lower end of the nozzle unit 30 by lowering the nozzle unit 30 of the transfer head 4 or the like. Control for mounting the chip component 7a adsorbed on the substrate onto the substrate P is executed (step S58). The exact position of the mounting location on the substrate P is determined based on the position of the substrate P recognized by the substrate recognition camera 31 in step S52.

  When the mounting operation of the chip component 7a by the transfer head 4 is completed, the control unit 50 determines whether or not all the chip components 7a to be mounted on the substrate P are mounted (step S59). If it is determined that the chip component 7a to be mounted still remains, the process returns to step S53 to repeat the subsequent processing in order to mount the chip component 7a on the substrate P.

  On the other hand, if it is determined as YES in step S59 and it is confirmed that all the chip components 7a to be mounted on the substrate P are mounted, the conveyor 3 is operated to carry the substrate P out of the apparatus ( Step S60).

  As described above, according to the present embodiment, the chip component 7a supplied from the component supply unit 5 is sucked and transferred by the movable transfer head 4 and mounted (placed) on the substrate P separated by a predetermined distance. In the component mounting apparatus 1, the transfer head 4 and the push-up unit 40 are moved to the recognized suction position while the suction position recognition camera 32 that can move independently of the transfer head 4 is efficiently recognized. Adsorption of parts can be performed properly.

  In particular, a correction value data file (first correction data) corresponding to the shift of the coordinate system of the transfer head driving device with respect to the reference coordinate system (mark M) by the processing as the correction data creating means 56 (FIGS. 5 and 6). A data file (second correction data) of a correction value for a deviation of the coordinate system of the suction position recognition camera driving device with respect to the reference coordinate system (mark M), and a coordinate system of the transfer head driving device and driving of the suction position recognition camera A data file (correlation data) of correction values for deviations from the coordinate system of the apparatus is created in advance, and at the time of component suction, the transfer head 4 is moved to the recognized suction position in steps S54 and S55 of FIG. The amount and the movement amount of the push-up unit 40 are corrected by the correction value based on the first and second correction data and the correction value based on the correlation data, respectively. Therefore, even when the coordinate systems of the transfer head drive device, the push-up unit drive device, and the suction position recognition camera drive device are deviated from each other, the transfer head 4 and the push-up unit 40 are correctly connected to the parts to be sucked. The parts are aligned and the parts are pushed up by the push-up pins 47 and the parts are attracted by the transfer head 4 accurately.

  In addition, the specific structure of this invention is not limited to said each embodiment, A various change is possible.

  For example, the mark plate 60 of the above embodiment covers the entire part arrangement region, but does not necessarily need to cover the entire region, and may be the one that covers most, for example, 60% or more. A correction value outside the region may be obtained by extrapolation. However, since interpolation can generally be expected to be more accurate than extrapolation, it is preferable to cover the entire part placement region.

  Further, the number and arrangement of the marks M marked on the mark plate 60, the shape and size of one mark M, and the like may be appropriately set as necessary. Further, for example, a checkered pattern may be written on the mark plate, and the mark M may be formed near the intersection.

  In the above embodiment, the two-step correction using the first correction data and the second correction data is performed in step S54 of FIG. 7, but the correction in which the first correction data and the second correction data are merged in advance. The data (third correction data: correction data corresponding to the displacement of the coordinate system of the transfer head driving device with respect to the coordinate system of the suction position recognition camera driving device) may be converted into a data file and may be corrected in one step.

  The correlation data is data indicating the correlation of the coordinate system between the transfer head 4 and the push-up unit 40. Instead, the data indicating the correlation of the coordinate system between the suction position recognition camera 32 and the push-up unit 40 is used. It is also good. In that case, in the flowchart shown in FIG. 6, the correlation data may be obtained using the suction position recognition camera 32 instead of the substrate recognition camera 31. Even in this case, the mutual drive errors of the substrate recognition camera 31, the suction position recognition camera 32, and the push-up unit 40 are corrected appropriately.

  When obtaining the correlation data, the substrate recognition camera 31 or the suction position recognition camera 32 captures the recognition marks that are fixedly provided in the vicinity of the push-up unit 40 by about 1 to 3 locations so as to obtain simple correlation data. May be. In this case, although the drive error correction accuracy for the push-up unit 40 is slightly lowered, the preparation operation can be easily performed.

  In step S20 and step S25 in FIG. 6, the pin of the push-up unit is moved to the camera center position based on the recognition result. However, it is not always necessary to move the pin, and the moving direction and amount of movement are determined by image processing. You may make it ask.

  In the above embodiment, the wafer 7 is two-dimensionally arranged in the component supply unit. However, the present invention is not limited to this, and the present invention is applicable to other electronic components and one-dimensional or three-dimensional arrangements. be able to. For example, the electronic component may be a tray component arranged on the tray, or may be a component supplied from a tape feeder arranged in a row (one-dimensionally).

  Further, in the above embodiment, the present invention is applied to the component mounting apparatus. However, the present invention is not limited to the component mounting apparatus, and may be any component transfer apparatus that takes out components from the component supply unit and conveys them. It can be widely applied.

  For example, a component supply unit, an inspection unit including an inspection socket or the like provided at a predetermined distance from the component supply unit, and a transfer head for transferring the component sucked from the component supply unit to the inspection unit are provided. It can also be applied to parts testing equipment. Also in this case, a component to be inspected is arranged in the component supply unit. Furthermore, the transfer head is provided with a head-side camera for imaging the inspection unit. Then, the control unit and the correction data creation unit may be provided in the control unit of the component testing apparatus as in the above embodiment.

1 is a plan view schematically showing a component mounting apparatus according to a first embodiment of the present invention. It is a schematic perspective view which shows a transfer head, its drive device, a pushing-up unit, and its drive device. It is a block diagram which shows the control system of the said component mounting apparatus. It is a top view of the state which uses the mark board of the said component mounting apparatus. It is a flowchart which shows the outline of the control for the correction data preparation performed in the said component mounting apparatus. It is a flowchart which shows the outline of the control for the correlation data preparation performed in the said component mounting apparatus. It is a flowchart which shows control of the normal mounting operation performed in the said component mounting apparatus.

DESCRIPTION OF SYMBOLS 1 Component mounting apparatus 4 Transfer head 5 Component supply part 7a Chip component (electronic component)
8 Wafer holding frame (wafer holding means)
31 Substrate recognition camera (head side imaging means)
32 Suction position recognition camera (Suction position imaging means)
40 Push-up unit (push-up means)
55 Control means 56 Correction data creation means 60 Mark plate M (mark) on the mark plate
P substrate

Claims (10)

From the component supply unit on which the wafer is disposed which includes a plurality of electronic components, taken out and suck the electronic component by the component transfer for the transfer head of the component transfer for placing the electronic component at a predetermined distance apart mounting portion In the mounting apparatus, a correction method for correcting the suction position with respect to the driving error of the transfer head,
Prior to normal transfer operation of transferring the above described portion to suck the electronic component from the wafer of the component supply unit, and a position of mutual located in most or all frequency regions in which the wafer is placed Set a mark plate with a plurality of known marks on the component supply unit,
In this state, while moving the transfer head, the respective marks are picked up by the head-side imaging means attached to the transfer head and moved integrally therewith, and their respective positions are detected. Find the error between the detection position and the theoretical position of each mark above,
A component suction position correction method, wherein the suction position of the transfer head is corrected based on the error at the time of component suction during the normal transfer operation. A component transfer unit that picks up and removes an electronic component from a component supply unit on which a wafer including a plurality of electronic components is arranged by a transfer head for component transfer, and places the electronic component on a mounting unit that is separated by a predetermined distance. Mounting device,
Head-side imaging means attached to the transfer head and moving integrally therewith,
In a state in which most or located distributed to all frequency and the positional relationship between the mark plate marked the known plurality of marks are set in the component supply section of the area in which the wafer is placed, the transfer A preparatory operation for imaging each mark by the head-side imaging means while moving the mounting head and a normal transfer operation for picking up an electronic component from the component supply unit and transferring it to the placement unit are selectively performed. Control means for controlling the driving device of the transfer head to be executed,
Correction data creation means for creating head position correction data for correcting an error between the position of each mark imaged by the head side imaging means in the preparation operation and the theoretical position of each mark;
The component transfer apparatus according to claim 1, wherein the control means corrects the suction position of the transfer head based on the head position correction data as control for picking up the component during the normal transfer operation. In the component transfer apparatus according to claim 2 ,
Movable independently of the upper Symbol transfer head, comprising a push-up hands stage push up the electronic component to be adsorbed in the component supply unit from below,
The head side imaging means images the part related to the coordinate system of the push-up means after the preparation operation,
The correction data generation means may have groups Dzu on the imaging data seeking correlation between the coordinate system of the placing head and the push-up means, to create a data indicating the correlation,
It said control means as a control for the normal transfer operation when a component suction, to correct the moving position of the transfer head have groups Dzu to the head position correction data, and further the correlation contrast to correct the movement position of the push-up means have groups Dzu relationship data, moves the these corrected the placing head and the push-up means at a position, while pushing up the electronic component by the push-up means at the component position A component transfer apparatus, wherein the transfer head and each drive unit of the push-up means are controlled so as to attract the electronic component by the transfer head. In the component transfer apparatus according to claim 2 or 3,
Independently driven separately from the transfer head, comprising a suction position imaging means for imaging the electronic component of the component supply unit,
In the preparatory operation, the control means images the marks with the suction position imaging means while moving the suction position imaging means in a state where the mark plate is set in the component supply unit, and performs the correction. The data creation means creates component imaging position correction data for correcting an error between the position of each mark imaged by the suction position imaging means and the theoretical position of each mark,
In the normal transfer operation, the control means recognizes the part position have groups Dzu the image data and the component imaging position correction data picked up by the suction position imaging unit, the transfer of the recognized component position A component transfer apparatus characterized in that a suction position by a mounting head is set and control for component suction is performed. From the component supply unit on which the wafer is disposed which includes a plurality of electronic components, taken out and suck the electronic components by parts products transfer for transfer head places the electronic component to a predetermined distance apart mounting portion parts A transfer device,
A suction position imaging means that is independently driven separately from the transfer head and images the electronic components of the component supply unit;
The component supply portion of the mark plate most or located distributed to all frequency and mutual positional relationship is marked with a plurality of known marks of area in which the wafer is placed is set in the component supply unit In this state, while moving the suction position imaging means, a preparatory operation for imaging each mark by the suction position imaging means, and a normal transfer for picking up electronic components from the component supply section and transferring them to the placement section. Control means for controlling each drive device of the transfer head and the suction position imaging means to selectively execute a loading operation;
Correction data creation means for creating component imaging position correction data for correcting an error between the position of each mark imaged by the suction position imaging means and the theoretical position of each mark in the preparation operation,
Said control means, in the normal transfer operation, recognizes the component position have groups Dzu the image data and the component imaging position correction data picked up by the suction position imaging unit, the transfer of the recognized component position component transfer device and the suction position by the mounting head and performs control for component suction. In the component transfer apparatus of Claim 5 ,
Movable independently of the upper Symbol transfer head, comprising a push-up hands stage push up the electronic component to be adsorbed in the component supply unit from below,
The suction position imaging means images the part related to the coordinate system of the push-up means after the preparation operation,
The correction data generation means may have groups Dzu on the imaging data seeking correlation between the coordinate system of the suction position imaging means and the push-up means, to create a data indicating the correlation,
Said control means as a control for the normal transfer operation when a component suction, and have groups Dzu in the component imaging position correction data to correct the moving position of the suction position imaging means, and further contrast to correct the movement position of the push-up means have groups Dzu to the correlation data, moves the these corrected the suction position imaging means and the push-up means in a position, by the suction position imaging means at that part position After the imaging, the suction position imaging means, the lifting means, and each driving device of the transfer head are controlled so that the electronic components are sucked by the transfer head while the electronic parts are pushed up by the push-up means. A component transfer device. In the component transfer apparatus according to claim 5 or 6,
A head-side imaging unit that is attached to the transfer head and moves integrally with the transfer head to image the electronic component of the component supply unit;
In the preparatory operation, the control means images the marks with the head-side imaging means while moving the transfer head in a state where the mark plate is set in the component supply unit, and the correction data. The creation means creates head position correction data for correcting an error between the position of each mark imaged by the head side imaging means and the theoretical position of each mark,
As a control for component suction during the normal transfer operation, the control means corrects the suction position by the transfer head based on the head position correction data. In component placing apparatus according to any one of claims 4-7,
The control means drives and controls at least a drive device that images each of the transfer head or the suction position imaging means in an orthogonal coordinate system,
Each said mark is arrange | positioned on the said mark board in the matrix form along the XY axis | shaft of the said orthogonal coordinate system, The components transfer apparatus characterized by the above-mentioned . In component placing apparatus according to any one of claims 2-8,
The component transfer device, component transfer device, wherein the component mounting apparatus der Rukoto be mounted on board the component supplied from the component supply unit is conveyed by the placing head. In component placing apparatus according to any one of claims 2-8,
The component transfer device, wherein the component transfer device is a component test device that transports the component supplied from the component supply unit by the transfer head and mounts the component on an inspection socket for inspection .